JP2504561B2 - Shape measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a measuring device for measuring the waviness of a concave hemispherical surface or a concave arc surface formed on an object to be measured.

B. Conventional Technology For example, a concave semi-circular surface is formed on the outer periphery of the inner race of the bearing. The waviness and shape of the concave semicircular arc surface is measured by, for example, applying a probe of a three-dimensional measuring machine to a plurality of measurement points on the concave arc surface and measuring the positions.

Alternatively, a method of cutting an object to be measured and measuring it with a roundness measuring instrument or a method of performing shape measurement by enlarging a concave arc surface or a concave hemisphere as it is is known.

C. Problem to be Solved by the Invention In the method using the three-dimensional measuring machine, it is necessary to apply the tracing stylus along the normal direction of the concave arc surface or the concave hemispherical surface. , The probe cannot be applied in the normal direction at all measurement points. Therefore, there is a problem that an accurate measurement value cannot be obtained at a position where the three-dimensional measuring device is out of contact with the normal direction, and the three-dimensional measuring machine is large and expensive.

In addition, the roundness measurement method is a destructive measurement in which a measurement target is cut, and it is impossible to inspect all of them. Further, in the method of enlarging the shape as it is, there is a limitation in the enlarging rate, and it is not possible to accurately measure precision processed products such as bearings.

A technical problem of the present invention is to measure the finishing accuracy of a concave arc surface or a concave hemispherical surface with high accuracy without destroying an object to be measured and with a simple mechanism at a low cost.

D. Means for Solving the Problems Referring to FIG. 1 and FIG. 2 showing an embodiment, the present invention has a sensor body and a probe 12a which is projected from the sensor body by a spring, A first sensor 12 for detecting the displacement of the probe 12a in the protruding direction by the spring, and an arm for rotatably holding the first sensor 12 about a first shaft 13 orthogonal to the protruding direction by the spring. A portion 11 and an arm holding portion 6 that holds the arm portion 11 rotatably around a second shaft 10 that is set to be orthogonal to a first surface (horizontal plane) including the first shaft 13. A position adjusting mechanism 201 for adjusting the position of the arm holding portion 6 within a second surface (vertical surface) including the second shaft 10, and a rotational angular displacement of the first sensor 12 about the first shaft 13. The second sensor 17 for detecting the position and the position adjustment amount of the arm holding part 6 by the position adjusting mechanism 201 are detected. The third sensor 5, 9 and the first indicator 20 for displaying the displacement detected by the first sensor 12, and one of the two coordinate axes orthogonal to each other are detected by the first sensor 12. The displacement of the measured surface is recorded in a graph format in which the other coordinate axis indicates the displacement detected by the second sensor 17 and the third sensor 5, 9 detects the undulation of the surface to be measured. The above technical problem is solved by a shape measuring device including a second display 22 for displaying a value.

E. Action In a state where the probe 12a of the first sensor 12 is brought into contact with the surface to be measured, the arm portion 11 is rotated around the arm holding portion 6 about the second shaft 10. By referring to the display on the first display 20 during this time, the protruding direction of the tracing stylus 12a, in other words, the displacement detection direction by the first sensor 12 is oriented in the direction normal to the surface to be measured. Next, the first sensor 12 is rotated around the first shaft 13 while the probe 12a of the first sensor 12 is kept in contact with the surface to be measured. At this time, the position of the arm holding portion 6 is adjusted by the position adjusting mechanism 201 while referring to the display on the first display 20, so that the first shaft 13 is substantially aligned with the center of curvature of the measured surface.

Then, the first sensor 12 is rotated around the first shaft 13, and the displacement detected by each of the first sensor 12 and the second sensor 17 is applied to the recorder 21. The recorder 21 records the waviness of the surface to be measured in a predetermined graph format. The displacement detected by the first sensor 12 is represented on one coordinate axis (Y axis in FIG. 5) of the recorded graph, and the other coordinate axis (FIG. 5).
The X-axis represents the displacement detected by the second sensor 17.

It should be noted that, in the above-mentioned items D and E for explaining the configuration of the present invention, the drawings of the embodiments are used to make the present invention easy to understand, but the present invention is not limited to the embodiments.

F. Embodiment One embodiment of the present invention will be described with reference to FIGS.

1 (a) to 1 (c) show a shape measuring apparatus according to the present invention. In FIGS. 1 (a) and (b), 1 is a horizontal bed, and a groove 1a is formed in the longitudinal direction at the center of the upper surface thereof.
The base 3 of the vertical bed 2 is slidably fitted in the groove 1a. On the rear surface of the horizontal bed 1, an adjusting screw 4 which is screwed with the base 3 and adjusts the vertical bed 2 in the front-back direction along the groove 1a is attached, and in the rear of the upper surface of the horizontal bed 1, the front-back movement of the vertical bed 2 is performed. A sensor 5 for measuring the distance is provided. Further, a stepped reference surface 1b is formed on the front surface of the horizontal bed 1, and a mounting hole 1c for connecting a measuring object (not shown) and the main measuring device is formed.

A groove 2a is formed in the vertical direction on the vertical bed 2, and the groove 2a is formed.
The base portion 7 of the slider 6 is slidably fitted to the.
On the upper surface of the vertical bed 2, a slider 6 is screwed onto the base portion 7
Adjustment screw 8 for adjusting the position of
A sensor 9 for measuring the vertical movement distance of the slider 6 is provided above the vertical bed 2.

The slider 6 is formed in a U-shape, and an arm 11 is rotatably attached to the slider 6 in a horizontal plane by a shaft 10. A sensor 12 for measuring a concave spherical surface or the like is attached to a tip of the arm 11 for vertical surface inspection. It is mounted on a shaft 13 so as to be rotatable in the plane.
The rotation angle of the arm portion 11 is fixed by a fixing screw 14. In this way, the sensor 12 can be horizontally and vertically adjusted by the position adjusting mechanism 201 including the adjusting screws 4 and 8.

As shown in FIG. 1 (c), one end of the shaft 13 has an arm portion 11
Is projected from the side of the, and the pulley 15 is fixed to the tip thereof, and rotates with the operation of the sensor 12. On the other hand, the arm part
A rotary potentiometer 17 is provided on the side surface of 11 via an L-shaped bracket 16, and a belt 19 is stretched between a pulley 18 attached to the potentiometer 17 and a pulley 15 of a shaft 13.

In the sensors 5, 9, 12 described above, each probe is expandable by the spring in the sensors 5, 9, 12, and the sensor 12 outputs the dimensional displacement of the measurement surface as an electric signal.
Outputs the horizontal position of the vertical bed 2 and the vertical height position of the arm portion 11 as a deviation from a predetermined reference position. Further, the sensor 17 outputs the rotational angle displacement of the sensor 12 as an electric signal.

The output electric signal of the sensor 12 is input to the Y-axis of the XY recorder 21 via the analog display 20 shown in FIG. 2, and the output electric signal of the potentiometer 17 is the XY recorder.
Input to 21 X-axis. The output electric signals of the sensors 5 and 9 are
The sensor output is input to the digital display 22 and the sensor output is selectively displayed by the switching operation.

Next, using such a measuring device, the rolling surface 1 formed on the outer race 100 of the slewing wheel as shown in FIG.
The procedure for measuring the shape and waviness of 01 will be explained.

FIG. 3 (b) shows the cross-sectional shape of the rolling surface 101. The surface to be measured is composed of a lower half arc surface SL centering on C ₁ and an upper half arc surface SU centering on C _2. The radius of each spherical surface SL, SU is r ₁ , r ₂ , and the distance between the center points C ₁ , C ₂ is l.

Before using this measuring device, use a block gauge, etc. so that the dimension from the center of the rotating shaft 13 of the sensor 12 to the tip of the tracing stylus 12a becomes equal to the radial dimension of the designed surface to be measured. 12a is contracted, and the display value of the analog display 20 at that time is reset to zero. Since this measuring device needs to maintain a predetermined positional relationship with the measurement object,
As shown in FIG. 4, a bracket is attached to the reference surface 1b of the horizontal bed 1.
31 is screwed with a bolt (not shown), and the bracket 31 is screwed with the bolt 32 to the object to be measured. Next, the spherical measurement operation is performed.

The probe 12a of the sensor 12 is moved in the direction of the measurement surface by the adjusting screw 4 of the horizontal bed 1, and the probe 12a is brought near the concave arc surface a shown in FIG. To instruct. Next, the fixing screw 14 of the shaft 10 is loosened and the arm 11 is rotated in a horizontal plane, so that the distance between the probe 12a and the measurement surface becomes the shortest, that is, the analog display.
The arm portion 11 is fixed with the fixing screw 14 at an angular position where 20 shows the smallest value. By such an operation, the axis of the tracing stylus 12a is directed toward the rotation center of the outer race 100, which is the measurement target. In other words, the axis of the tracing stylus 12a is made to coincide with the normal line direction of the measurement surface.

Next, the sensor 12 is rotated in a vertical plane, and while the analog display 20 is being monitored, the output value of the sensor 12 becomes the same value at the three points a, b, and c shown in FIG. 3 (b). As described above, the horizontal position of the sensor 12 and the vertical (height) position of the sensor 12 are adjusted by the adjusting screws 4 and 8 for positioning. At this time, the values indicated by the sensors 5 and 9 are set to the lower half arc surface.
In order to use it as the reference value for the center point C ₁ of SL, the measured values of each sensor are sequentially displayed on the digital display 22, and each is reset to 0. With the above, the calibration work before the measurement is completed, and then the measurement work is started.

When the sensor 12 is rotated in a vertical plane including a, b, and c along the measurement surface, the probe 12a of the sensor 12 expands and contracts according to the shape of the measurement surface and is input to the analog display 20 as an electric signal. It is also input to the Y-axis input terminal of the X / Y recorder 21. On the other hand, when the sensor 12 is rotated in the vertical plane, the potentiometer 17 rotates via the pulley 15, the belt 19 and the pulley 18, and an electric signal corresponding to the rotation angle of the sensor 12 is output. The output of this potentiometer 17 is XY
It is input to the X-axis input terminal of the recorder 21, and the XY recorder
21 draws a graph as shown in FIG. 5 according to the shape of the measurement surface based on these input electric signals. Here, the X axis represents the moving distance of the tracing stylus 12a moving on the measurement surface, and the Y axis represents the displacement in the normal direction of the tracing stylus 12a on the measurement surface, that is, the undulation.

In this way, the waviness of the lower half of the measurement surface is measured, and then the waviness of the upper half is measured.

The sensor 12 is rotated counterclockwise (FIG. 1) in the vertical plane so that the tracing stylus 12a of the sensor 12 faces the upper half arc surface SU side. Then, adjust the position of the sensor 12 with the adjusting screw 8 as shown in FIG. 3 (b).
It is lowered by the length of l shown in. The values indicated by the sensors 5 and 9 at this time indicate the center point of the upper half arc surface SU in the design.

While the sensor 12 is rotated in a vertical plane and the analog display 20 is monitored, the output value of the sensor 12 should be the same at the three points of D, E, and F shown in FIG. 3 (b). Adjust the horizontal position of sensor 12 and the height position of sensor 12 by adjusting screws 4,
Adjust with 8 and fix. At this time, the values indicated by the sensors 5 and 9 indicate the amount of error with respect to the design reference dimension of the center point C ₂ of the upper half arc surface SL. After that, the waviness of the arc surface is measured in the same manner as the measurement operation on the measurement points A, B, and C.

By the above operation, the waviness of the rolling surfaces SU and SL can be measured. Further, the deviation of the centers of curvature of the rolling surfaces SU, SL can be measured from the final output values of the sensors 5, 9.

In this embodiment, the case where the rolling surface formed on the outer race of the slewing wheel is measured has been described, but the measuring object and the measuring surface are not limited to this.

G. Effect of the Invention As described above, according to the present invention, since the measurement can be performed while the stylus is placed in the normal direction of the concave spherical surface or the like, the measured value is accurate. In addition, the measurement surface can be measured without destroying the measurement object, and since it can be designed as a dedicated machine, it is much simpler and more compact than a three-dimensional measuring machine, resulting in an inexpensive device.

[Brief description of drawings]

FIG. 1 (a) is a front view of a measuring device according to the present invention, (b).
Is also a side view thereof, (c) is a top view, FIG. 2 is a block diagram showing connections of a sensor, a display and a recorder, FIG. 3 (a) is a partial perspective view of a measurement object, and (b) is FIG. 5 is an enlarged cross-sectional view of the measurement surface, FIG.
The figure is a graph showing the measurement results. 1: Horizontal bed, 2: Vertical bed 3: Base part, 5: Sensor 6: Slider, 9: Sensor 11: Arm part, 12: Sensor 12a: Measuring element, 13: Axis 17: Potentiometer 20: Analog display 21: X・ Y recorder 22: Digital display 201: Position adjustment mechanism

Claims (1)

(57) [Claims] 1. A first sensor having a sensor main body and a measuring element projected from the sensor main body by a spring, and detecting the displacement of the measuring element in the protruding direction by the spring; and a first sensor orthogonal to the protruding direction by the spring. An arm portion that rotatably holds the first sensor about a first axis, and a second axis that is set so as to be orthogonal to a first surface that includes the first axis. An arm holding part that holds the arm part rotatably; a position adjusting mechanism that adjusts the position of the arm holding part within a second plane including the second shaft; and the first sensor of the first sensor. A second sensor for detecting a rotational angular displacement about the axis of the, a third sensor for detecting a position adjustment amount of the arm holding portion by the position adjusting mechanism, and a displacement detected by the first sensor. First indicator to display, mutually orthogonal Of the two coordinate axes, one of the coordinate axes represents the displacement detected by the first sensor and the other coordinate axis represents the displacement detected by the second sensor. A shape measuring device comprising: a recorder for recording and a second indicator for displaying a value detected by the third sensor.