JPH0480601A - Measuring device for quartz jig - Google Patents

Abstract

PURPOSE:To enable three-dimensional measurement of wafer-mounting groove etc. in addition to roundness, cylindricality, parallelism etc. of a quartz jig to be made accurately and easily by constituting it so that three-dimensional measurement items can be measured while a measuring probe is properly allowed to contact a specified part of the quartz jig by combining rotation of a rotary lathe properly. CONSTITUTION:After a surface of a flange 31 of a reactor core tube 30 is firstly installed nearly concentrically on a rotary lathe 5 by utilizing an annular ring 21 of the rotary lathe 5, centering between a flange 31 and the rotary lathe 5 is performed by rotating the rotary lathe 5 while allowing a tip of a dial guage (measuring probe) 8a to abut on the side wall surface of the flange 31. Then, by rotating the reactor core tube 30 while dial guages 8b and 8c are made to abut on the central wall surface and an upper wall surface of the reactor core tube 30, the cylindricality and slant can be measured. In addition, it is possible to check verticalness etc. by allowing the gauges 8b and 8c to be slid along a fixed post 6 while they are made to abut on the wall surface of the reactor core tube 30 as needed.

Description

Detailed Description of the Invention "Industrial Application Field J The present invention relates to a measuring device for a quartz jig used in a semiconductor heat treatment process, and particularly relates to a vertical reactor core tube (inner tube, outer tube), vertical type In addition to the roundness, perpendicularity, cylindricity, parallelism, etc. of quartz jigs used for vertical heat treatment processes such as boats, heat-insulating cylinders, and boat supports, we also measure three-dimensional measurement items such as grooves for wafer mounting. The present invention relates to a quartz jig measuring device that allows simple and accurate measurements.

``Prior art'' Semiconductor heat treatment processes have been known that perform various heat treatments such as oxidation, diffusion, and vapor phase growth on the surface area of semiconductor wafers. In recent years, there has been a shift from the conventional horizontal processing method to a vertical processing method in which various heat treatments are performed with furnace tubes, boats, etc. installed vertically. Automation is rapidly progressing in vertical processing processes, and correspondingly, strict dimensional accuracy is required for quartz jigs such as core tubes, boats, and boat supports used in these processes.

The shapes of these quartz jigs are all three-dimensional, more specifically approximately cylindrical or bell-shaped to match the shape of the wafer or bell-shaped reactor core tube, and furthermore, projected approximately cylindrical shapes with disks on both the top and bottom sides. Because of this, it is necessary to measure using a three-dimensional measuring machine.

However, known three-dimensional measuring machines are not limited to the above-mentioned approximately cylindrical shape, but are configured to be able to measure rectangular, polygonal, and other various shapes;
- A surface plate that can be moved in the Y-axis direction (horizontal plane) and a surface plate that can be moved in the Y-Z axis direction (vertical plane), and a probe or other measuring element can be attached to the tip, and if necessary, the measuring element can be
After the object to be measured is installed on the surface plate, the surface plate and the spindle are moved in the X, -Y, Y-Z directions based on computer control. The device is configured to allow original measurements.

However, since such measuring machines perform three-dimensional measurements centering on coordinate movement (linear movement), they not only require extremely complicated operations when measuring arcuate parts or curved parts, but also In order to enable computer control, the device is constructed so that the spindle and surface plate can be electrically driven. However, this configuration leads to an increase in the size of the device itself and a complicated configuration, which inevitably leads to The cost is extremely high.

However, since the above-mentioned equipment includes computer control, it requires a specialized engineer to operate it, and since the results are calculated by computer analysis, measurement and analysis on site are not possible. It was quite difficult.

For this reason, conventionally, at the site side, a fixed surface plate and a hide gauge are used to place and fix the object to be measured on the surface plate, and then measurements are taken while sliding the hide gauge on the surface plate.
In addition to measuring roundness, cylindricity, parallelism, etc. with this measurement method, it is basically impossible to measure three-dimensional grooves for wafer mounting, and it is also difficult to measure perpendicularity, parallelism, etc. Since measurements are made by sliding the hide gauge on a surface plate in accordance with the external shape of the object being measured, only experienced workers on site can perform measurements, and highly skilled measurement skills are required.

``Technical Problems to be Solved by the Invention In view of the drawbacks of the prior art, the present invention has a simple device configuration that improves the roundness, cylindricity, parallelism, etc. of quartz jigs mainly used in vertical heat treatment processes. The object of the present invention is to provide a measuring device for a quartz jig that can easily and accurately measure three-dimensional grooves, etc. for wafer mounting without requiring any skill.

``Technical Means for Solving the Problems J'' As shown in FIG. 1, the device configuration of the present invention has the following features: The base may have wheels attached to the bottom to make it portable, and the rotating surface plate may be separate from the rotating part, and the rotating part may be fixed to the base so that only the rotating surface plate can be removed. It may be possible to configure.

(2) A plurality of fixed columns are provided vertically from the base so as to surround the surface plate, and are arranged symmetrically with respect to the center of the surface plate.

Note that the number of fixed columns is not limited to four as in this embodiment, but may be three, for example, as long as they are in symmetrical positions.

■It has a gauge head that is slidably attached to a selected column or a plurality of supports via a support.Such a gauge head is not limited to, for example, a dial gauge;
For example, the tip of the probe has a probe capable of contacting the object to be measured, the amount of displacement of the probe is converted into the amount of rotation using a gear system, and the amount of rotation is electrically detected using a photocoupler or the like. A signal type probe that can detect the amount of displacement of the probe based on the detection signal may be used.

``Function J'' The present invention provides that the quartz jig used in the vertical processing process is approximately cylindrical or bell-shaped in accordance with the shape of the wafer or bell-shaped reactor core tube, and furthermore, it has a projected approximately cylindrical shape with disks on both the upper and lower sides. More specifically, attention is paid to the fact that the shape on the vertical projection plane is a circle or an arc.

That is, by installing the quartz jig almost concentrically on the rotating surface plate, even if the rotating surface plate is rotated, any part of the quartz jig will follow this and rotate concentrically with the rotating surface plate. Therefore, if the measuring element is not brought into contact with a predetermined portion of the quartz jig while the quartz jig is rotating or fixed, the roundness, cylindricity, and parallelism of the quartz jig of the object to be measured may be affected. In addition to accuracy, wafer mounting allows three-dimensional measurement of grooves, etc., to be performed simply and easily.

In addition, since the rotating surface plate is used as a horizontal reference and the fixed support is used as a vertical reference, the rotating surface plate is rotated while the measuring head is in contact with the reference surface of the quartz jig installed on the rotating surface plate. In some cases, the rotating surface plate and the object to be measured (quartz jig)
It is also easy to detect the concentricity between the quartz jig and the quartz jig.

In addition, the present invention can measure three-dimensional measurement items simply by manually rotating the rotary surface plate at a desired angle or by fixing it, so no skill is required and the system is safe and compact. easily achieved.

In particular, in the present invention, concentric rotating wheels are carved on the upper surface of the rotating surface plate, so that the quartz jig can be easily installed concentrically.
In addition, by attaching an angle scale on the rotating surface plate or an angle sensor that detects the rotation angle of the rotating surface plate at an arbitrary location, three-dimensional measurement can be performed in combination with the rotation angle, further increasing the measurable items and improving accuracy. It also improves.

"Embodiments" Hereinafter, embodiments of the present invention will be described in detail by way of example based on the drawings. However, unless otherwise specified, the dimensions, materials, shapes, and relative positions of the components described in this example are not intended to limit the scope of this invention, but are merely illustrative examples. Not too much.

FIGS. 1 and 2 show a quartz jig measuring apparatus according to an embodiment of the present invention, in which a furnace core tube is being measured.

In the figure, 1 is a rectangular frame with wheels attached to each corner of the bottom.
A square base 2 is installed on the square frame 1, and the base 2 is fixed with screws 11. At this time, the base 2 and the square frame 1
It is preferable to interpose a spacer (not shown) or the like in between to maintain horizontality, and a bearing member 3 is fixed to the center of the base 2 via a screw 12.

In the bearing, a step-like through hole 13 is bored in the center of the member 3, and a rotary table 4, which will be described later, is installed at a predetermined portion of the through hole 13.
A thrust bearing 16 is fitted into a bearing 15 for rotatably positioning and holding the main shaft 14 on a vertical line.

The rotating table 4 has a circular rotating plate 17 attached to the upper end of a main shaft 14 that can be supported in the through hole 13, and a rotating surface plate 5 (described later) can be placed concentrically on the upper surface of the rotating plate 17. Raise the attachment 18.

The rotary surface plate 5 has a circular recess 19 in the center of its bottom surface into which the attachment 18 can fit, and its upper surface has a predetermined flatness.

As a result, the rotary surface plate 5 is integrated with the rotary table 4 into the main shaft 14.
The bearing is held by the member 3 via the member 3, and since the axis of the main shaft 14, which is vertically supported by the member 3, and the center line of the rotating surface plate 5 are aligned, the bearing is held by the member 3. By applying a rotational force to , the surface plate 5 rotates along a horizontal plane about the center line of the surface plate.

Incidentally, a plurality of concentric annular rings 21 are provided on the upper surface of the rotating surface plate 5.
An angle scale 22 is engraved to facilitate installation of a quartz jig and angle detection measurement, which will be described later.

On the other hand, fixed columns 6 are vertically provided at each corner of the upper surface of the base 2 so as to surround the rotary surface plate 5.

In this case, it is preferable that the pillars 6 be arranged at symmetrical positions spaced the same distance apart in the radial direction with respect to the center of the rotating surface plate 5, and a square link is provided at the upper end of the fixed pillar 6. A frame 7 is attached, and the link frame 7 prevents the fixed column 6 from swinging and maintains verticality.

Then, a dial gauge 8 is slidably attached to a selected one or more of the fixed columns 6 via a support 9.
is installed.

The support jig 9 includes a cylindrical portion 91 that is slidable on the support column 6;
A fixed handle 92 that can be fixed to any part of the support column 6 via the cylindrical portion 91, and a bar 94 with a rack 93 carved therein.
and a rotary handle 95 that moves the bar 94 forward and backward through a gear (not shown) that meshes with the rack 93, and allows the dial gauge 8 attached to the tip of the bar 94 to move forward and backward and slide along the fixed support 6. Configure.

Next, the inspection procedure in the measuring device having such a configuration will be explained step by step with reference to the case of a furnace tube.

First, using the annular ring 21 of the rotating surface plate 5, the flange 31 surface of the furnace tube 30 is installed almost concentrically on the rotating surface plate 5, and then the tip of the - dial gauge 8a is placed on the flange 31.
Centering between the flange 31 and the rotating surface plate 5 is performed by rotating the rotating surface plate 5 while making it contact with the side wall surface.

Next, the cylindricity and inclination of the core tube can be measured by rotating the core tube with the dial gauges 8b and 8c in contact with the center wall surface and the upper wall surface of the core tube 30. It is also possible to check the verticality etc. by sliding the 8b and 8c along the fixed support 6 while abutting against the wall surface of the core V30.

That is, the above measurement is possible because the fixed support 6 is connected to the rotating surface plate 5.
This is because the rotating surface plate 5 is configured to be able to rotate along a horizontal plane.

Fig. 3 shows another example of the measurement procedure for a vertical boat with three pillars 6, in which the displacement of the proof 10a in contact with the quartz jig is displayed digitally and a signal type that can be taken out as an electrical detection signal. A probe is used as the probe IO, and the detection signal thereof can be outputted to a printer 26 via an arithmetic circuit 25. Further, a support jig is also used which allows the measuring element 10 to be moved only along the fixed column 6. Further, a rotation angle detection sensor 27 is attached to the bottom of the main shaft 4, and the angle signal thereof is also input to the arithmetic circuit.

Next, to explain the inspection procedure, first, using the annular ring 21 of the rotary surface plate 5, the bottom plate 41 of the boat 40 is placed almost concentrically on the rotary surface plate 5, and then the − measuring head is placed in the same way as above. Centering between the bottom plate 41 and the rotating surface plate 5 is performed by rotating the rotary surface plate 5 while bringing the tip of the rotary surface plate (not shown) into contact with the wall surface of the bottom plate.

Next, the verticality of the support rod 42, etc. is checked by sliding the gauge head 10a along the fixed support 6 with the gauge head 10a in contact with the support rod 42 of the boat. By rotating the rotary surface plate 5 by a predetermined angle using the angle sensor with the support rods fixed, positional errors are checked for installation between the support rods, and finally, the measuring head 10c is attached to the upper plate 43. The flatness and parallelism of the upper plate can be measured by rotating the rotating surface plate 5 while in contact with the upper plate.

For example, as shown in FIG. 4, in a vertical boat having four support rods, the boat 40 is installed almost concentrically on the rotating surface plate 5, and after centering is performed in the above method, the wafers for testing are removed. 45 in the groove 44, each wafer is attached by rotating the rotary surface plate 5 by a predetermined angle using the angle sensor 27 while contacting the probe 10d with each wafer in turn. For groove spacing and installation, it is possible to measure groove angles, etc.

``Effects'' As described above, according to the present invention, in addition to the roundness, cylindricity, parallelism, etc. of the quartz jig mainly used for vertical heat treatment processes, the wafer mounting can be performed in three dimensions such as grooves with a simple equipment configuration. It has various outstanding effects such as 1, which allows accurate and easy measurement without requiring any skill.

[Brief explanation of the drawing]

1 and 2 are a front sectional view and an exploded perspective view showing a state in which a furnace core tube is being measured using a quartz jig measuring device according to an embodiment of the present invention. FIGS. 3 and 4 are perspective views of quartz jig measuring apparatuses according to other embodiments of the present invention, each showing a state in which a vertical boat is being measured.

Claims (1)

[Scope of Claims] 1) A rotating surface plate arranged on a base in a measuring device for a quartz jig having at least a circular or arcuate vertical projection shape and rotatable along at least a horizontal plane; a plurality of fixed columns standing perpendicularly above the base so as to surround the surrounding area, and the positions thereof are set symmetrically with respect to the center of the surface plate; and a support on the selected one or more columns; After placing the quartz jig approximately concentrically on the rotating surface plate, the rotation of the rotating surface plate is appropriately combined to move the measuring point onto the quartz jig. A measuring device for a quartz jig, characterized in that it is configured to be able to measure three-dimensional measurement items while making timely contact with a predetermined part of the tool.2) A concentric rotating ring or an angle scale is carved on the upper surface of the rotating surface plate. 3) A measuring device for a quartz jig according to claim 1), further comprising an angle sensor for detecting a rotation angle of the rotary surface plate.