JP5652631B2 - Method of calculating the amount of misalignment in a roundness measuring device - Google Patents

Method of calculating the amount of misalignment in a roundness measuring device Download PDF

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JP5652631B2
JP5652631B2 JP2014028148A JP2014028148A JP5652631B2 JP 5652631 B2 JP5652631 B2 JP 5652631B2 JP 2014028148 A JP2014028148 A JP 2014028148A JP 2014028148 A JP2014028148 A JP 2014028148A JP 5652631 B2 JP5652631 B2 JP 5652631B2
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陵 高梨
陵 高梨
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Tokyo Seimitsu Co Ltd
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本発明は、真円度測定装置における心ずれ量算出方法に係り、特に、真円度測定装置の検出器の測定子を測定物に当接させる検出点と測定物の母線とのずれを示す心ずれ量を算出して心ずれ量の補正をする機能を備えた真円度測定装置における心ずれ量算出方法に関するものである。   The present invention relates to a method of calculating the amount of misalignment in a roundness measuring apparatus, and in particular, shows a deviation between a detection point where a measuring element of a detector of a roundness measuring apparatus is brought into contact with a measured object and a bus bar of the measured object. The present invention relates to a method of calculating the amount of misalignment in a roundness measuring apparatus having a function of calculating the amount of misalignment and correcting the amount of misalignment.

従来より、円筒物などの円形の物体の真円度を測定する真円度測定装置(真円度測定機)が知られている。この真円度測定装置は、例えば、円筒物などの円形の断面を有する測定物(ワーク)を回転可能な載置台の上に載置して、ワークの表面に先端子(測定子)を接触させ、ワークの回転に伴う先端子の変位を測定して検出することにより円形断面の外形形状を測定する。   Conventionally, a roundness measuring device (roundness measuring machine) that measures the roundness of a circular object such as a cylindrical object is known. This roundness measuring device, for example, places a measurement object (workpiece) having a circular cross section such as a cylindrical object on a rotatable mounting table, and contacts a tip (measurement element) on the surface of the work The outer shape of the circular cross section is measured by measuring and detecting the displacement of the tip terminal accompanying the rotation of the workpiece.

例えば、特許文献1には、真円度測定機において、円柱状ワークに対して第1の検出器の接触子を水平に、かつ直径方向に案内する水平腕と、この腕の先端に設けられて第1の検出器の接触子を直径の位置の2点に向かって接触可能とした第1の検出器の支持枠と、水平腕の水平移動量を検出する径読取りの第2の検出器とから構成される真円度測定機の直径測定装置が記載されている。この装置は、まずマスターピースを回転台の上にセットし、第1の検出器の接触子をマスターピースの右側面に当て、第2の検出器の読みを求め、次いで接触子をマスターピースの左側面に当てて、第2の検出器の読みを求め、これら第2の検出器の2つの読みからマスタの既知寸法によりこの装置の誤差値を算出しておく。そして、マスタの代わりにワークをセットし、同様にして直径寸法を測定して、誤差補正を行っている。   For example, in Patent Document 1, in a roundness measuring machine, a horizontal arm that guides a contact of a first detector horizontally and diametrically with respect to a cylindrical workpiece, and a tip of the arm are provided. A first detector support frame that enables the contact of the first detector to contact two points in the diameter position, and a second detector of diameter reading that detects the horizontal movement amount of the horizontal arm. A diameter measuring device of a roundness measuring machine composed of: This device first sets the master piece on the turntable, places the contact of the first detector on the right side of the master piece, obtains the reading of the second detector, and then places the contact on the left side of the master piece. Then, the reading of the second detector is obtained, and the error value of this apparatus is calculated from the two readings of the second detector according to the known dimensions of the master. Then, a workpiece is set instead of the master, and the diameter dimension is measured in the same manner to perform error correction.

また、特許文献2には、真円度測定機の原点情報取得及び測定物の表面形状を測定する検出器の校正を行う真円度測定機用基準治具であって、この基準治具は、回転テーブル上のXYテーブルの上面に取り外し可能に載置され、段付きの円板状に形成されたた台座と、台座の上段部にプローブ(検出器)の感度校正を可能とする校正マスタが設けられ、校正マスタの上方に、その最下面、最上面のX軸方向及び右側面、左側面のZ軸方向の測定が可能なように配置された原点ボール(基準球)を備え、プローブの各姿勢におけるプローブに設けられたスタイラス(センサ)の位置ずれを求めて補正値とするものが記載されている。これは、真円度測定機用基準治具を測定物回転機構の上に載せ、真円度測定機の検出器のセンサを基準球に接触させることで真円度測定機の原点情報を得るとともに、検出器のセンサを校正マスタに関与させることで検出器の感度校正を行うようにしたものである。   Patent Document 2 discloses a reference jig for a roundness measuring machine that performs origin calibration of a roundness measuring machine and calibrates a detector that measures the surface shape of a measurement object. A pedestal that is detachably mounted on the upper surface of the XY table on the rotary table, and a calibration master that enables calibration of the sensitivity of the probe (detector) on the upper stage of the pedestal. Provided with an origin ball (reference sphere) disposed above the calibration master so that measurement can be performed in the X-axis direction and the right-side surface of the lowermost surface, the right-side surface, and the Z-axis direction of the left-side surface. Are described in which a positional deviation of a stylus (sensor) provided on the probe in each posture is obtained as a correction value. This is to obtain the origin information of the roundness measuring machine by placing the reference jig for the roundness measuring machine on the measured object rotating mechanism and bringing the sensor of the roundness measuring machine's detector into contact with the reference sphere. At the same time, the sensitivity of the detector is calibrated by involving the sensor of the detector in the calibration master.

特開平1−259211号公報JP-A-1-259211 特許第4163545号公報Japanese Patent No. 4163545

しかしながら、真円度測定装置のテーブル上に測定物を設置して検出器の測定子を測定物に当接させて検出を行う際、測定物の母線と測定子を測定物に当接させる検出点とを一致させることが非常に難しく、従来基準となる測定物の直径値と異なる直径値の測定物については、正確な直径値を測定することができないという問題があった。   However, when the measurement object is placed on the table of the roundness measuring device and the detection element of the detector is brought into contact with the measurement object, detection is performed so that the bus bar of the measurement object and the measurement element are in contact with the measurement object. It is very difficult to match the points, and there is a problem in that an accurate diameter value cannot be measured for a measurement object having a diameter value different from the diameter value of the measurement object that has been the standard.

本発明はこのような問題に鑑みて成されたものであり、測定物の母線と検出点とのずれ量である心ずれ量を算出して補正することにより、基準となる測定物の直径値とは異なる直径値を有する測定物であっても正確な直径値を算出することのできる真円度測定装置における心ずれ量算出方法を提供することを目的とする。   The present invention has been made in view of such problems, and calculates and corrects the amount of misalignment, which is the amount of deviation between the bus of the measurement object and the detection point, thereby correcting the diameter value of the measurement object serving as a reference. It is an object of the present invention to provide a method for calculating the amount of misalignment in a roundness measuring apparatus capable of calculating an accurate diameter value even for a measurement object having a diameter value different from that of a circle.

前記目的を達成するために、本発明の真円度測定装置における心ずれ量算出方法は、測定物の中心と回転の中心を一致させて測定物を検出器に対して相対的に回転させるようにして測定物の真円度を測定する真円度装置における心ずれ量算出方法であって、前記検出器を前記測定物に対して所定の方向に直線的に移動させる手段を備え、前記検出器の先端球を、直径値既知の直径値を有する1つの基準測定物に対し、前記基準測定物の中心を通り前記検出器が水平に直線移動する方向に平行な直線である母線と平行に移動して前記基準測定物の対向する2つの検出点でそれぞれ前記基準測定物に接触させて測定を行い、前記基準測定物について測定差を検出する工程と、前記測定差に基づいて、前記基準測定物の母線と前記検出点とのずれ量である心ずれ量を算出する心ずれ量算出工程と、を備えたことを特徴とする。   In order to achieve the above object, the method of calculating the amount of misalignment in the roundness measuring device according to the present invention causes the measured object to rotate relative to the detector by matching the center of the measured object with the center of rotation. A method of calculating the amount of misalignment in a roundness device for measuring the roundness of a measured object, comprising: means for linearly moving the detector in a predetermined direction with respect to the measured object; The tip sphere of the instrument is parallel to a generatrix that is a straight line parallel to the direction in which the detector horizontally moves through the center of the reference measurement object with respect to one reference measurement object having a known diameter value. Moving and measuring the reference measurement object by measuring the reference measurement object at two detection points facing each other and detecting the measurement difference with respect to the reference measurement object. Deviation between the bus of the measured object and the detection point A misalignment amount calculating step of calculating a certain misalignment amount, characterized by comprising a.

これにより、測定物の母線と検出点とのずれ量である心ずれ量を算出して補正することにより、基準となる測定物の直径値とは異なる直径値を有する測定物であっても正確な直径値を算出することが可能となる。   As a result, by calculating and correcting the amount of misalignment, which is the amount of deviation between the bus of the measurement object and the detection point, even a measurement object having a diameter value different from the diameter value of the reference measurement object can be accurately obtained. It is possible to calculate a correct diameter value.

また、一つの実施態様として、前記心ずれ量算出工程は、前記各測定差に基づいて、前記心ずれ量とともに前記検出器の先端球の直径値を算出することを特徴とすることが好ましい。   In one embodiment, it is preferable that the misalignment amount calculating step calculates a diameter value of a tip sphere of the detector together with the misalignment amount based on each measurement difference.

これにより、検出器の先端球の直径値を算出することができるので、先端球が磨耗により劣化している場合でも、その正確な直径値を得ることができるので、測定制度をより向上させることができる。   As a result, the diameter value of the tip sphere of the detector can be calculated, so even if the tip sphere is deteriorated due to wear, the accurate diameter value can be obtained, so the measurement system can be further improved. Can do.

以上説明したように、本発明によれば、測定物の母線と検出点とのずれ量である心ずれ量を算出して補正することにより、基準となる測定物の直径値とは異なる直径値を有する測定物であっても正確な直径値を算出することが可能となる。   As described above, according to the present invention, a diameter value different from the diameter value of the reference measurement object is obtained by calculating and correcting the amount of misalignment, which is the deviation amount between the bus of the measurement object and the detection point. It is possible to calculate an accurate diameter value even in the case of a measurement object having a diameter.

本発明の一実施形態に係る真円度測定装置の外観を示す斜視図である。It is a perspective view which shows the external appearance of the roundness measuring apparatus which concerns on one Embodiment of this invention. 図1の真円度測定装置の構成を示すブロック図である。It is a block diagram which shows the structure of the roundness measuring apparatus of FIG. 検出器回転形真円度測定装置の測定機本体の外観を示す斜視図である。It is a perspective view which shows the external appearance of the measuring machine main body of a detector rotation type roundness measuring apparatus. 真円度測定装置で測定物の測定を行う際心ずれのない理想的な場合を示す平面図である。It is a top view which shows the ideal case without misalignment when measuring a measurement object with a roundness measuring device. 真円度測定装置で測定物の測定を行う際心ずれがある場合を示す平面図である。It is a top view which shows the case where there exists a center shift | offset | difference when measuring a measurement object with a roundness measuring apparatus. 既知の直径を有する基準測定物を母線からずれた位置で対向する左右2点で測定して心ずれ量を求める様子を示す平面図である。It is a top view which shows a mode that the reference | standard measured object which has a known diameter is measured by two right and left points which oppose in the position which shifted | deviated from the bus-line, and calculates | requires the amount of misalignment. 算出した心ずれ量Yを用いて、測定した直径値を補正する方法を示す平面図である。It is a top view which shows the method of correct | amending the measured diameter value using the calculated amount of misalignment Y. FIG. 既知の異なる直径値を有する2つの基準測定物を母線からずれた位置で対向する左右2点で測定して心ずれ量及び先端球の直径値を算出する方法を示す平面図である。It is a top view which shows the method of measuring two reference | standard measurement objects which have a known different diameter value in two right and left points which oppose in the position which shifted | deviated from the bus line, and calculates the amount of eccentricity and the diameter value of a tip sphere.

以下、添付図面を参照して、本発明に係る真円度測定装置における心ずれ量算出方法について詳細に説明する。   Hereinafter, a method for calculating the amount of misalignment in a roundness measuring apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

図1は、本発明で用いられる真円度測定装置の外観を示す斜視図である。   FIG. 1 is a perspective view showing an appearance of a roundness measuring apparatus used in the present invention.

この真円度測定装置は、測定機本体と演算処理装置とから構成されており、図1には、真円度測定装置10の測定機本体11を示す。   This roundness measuring apparatus is composed of a measuring machine main body and an arithmetic processing unit. FIG. 1 shows a measuring machine main body 11 of a roundness measuring apparatus 10.

測定機本体11は、ベース(基台)14上に測定物(ここでは図示省略)を載置する載物台(XY/傾斜テーブル)12が設けられている。載物台(XY/傾斜テーブル)12は、X方向微動つまみ22及びY方向微動つまみ24を備えている。X方向微動つまみ22及びY方向微動つまみ24はそれぞれ載物台移動軸に連結しており、これらの微動つまみ22、24によって載物台12をX方向及びY方向に微動送りすることができ、載物台12の水平位置を微調整することができるようになっている。   The measuring machine main body 11 is provided with a mounting table (XY / tilting table) 12 on which a measuring object (not shown here) is mounted on a base (base) 14. The mounting table (XY / tilting table) 12 includes an X direction fine movement knob 22 and a Y direction fine movement knob 24. The X direction fine movement knob 22 and the Y direction fine movement knob 24 are respectively connected to the mounting table moving shaft, and the fine movement knobs 22 and 24 can finely feed the mounting table 12 in the X direction and the Y direction. The horizontal position of the stage 12 can be finely adjusted.

また、載物台12には、X方向傾斜つまみ25及びY方向傾斜つまみ23が設けられておりX方向及びY方向に傾斜調整がされるようになっている。   Further, the stage 12 is provided with an X-direction tilt knob 25 and a Y-direction tilt knob 23 so that the tilt can be adjusted in the X direction and the Y direction.

また、載物台12の下部には回転機構15が設けられている。回転機構15は、載物台12を回転駆動することにより載物台12の上に載置された測定物を回転させるものである。   A rotation mechanism 15 is provided at the lower part of the stage 12. The rotating mechanism 15 rotates the workpiece placed on the stage 12 by rotating the stage 12.

またベース14上には上方に略垂直に延びるコラム(支柱)27が立設されており、コラム27にはスライダ28が上下動可能に装着されている。スライダ28には水平アーム(径方向移動軸)29が水平方向に駆動可能に装着されている。   Further, a column (support) 27 extending vertically upward is provided on the base 14, and a slider 28 is mounted on the column 27 so as to be movable up and down. A horizontal arm (radial movement axis) 29 is mounted on the slider 28 so as to be driven in the horizontal direction.

水平アーム29の先端には、検出器30が設けられ、検出器30は測定子31を備えている。真円度測定装置10は、この測定子31を載物台12上に載置された測定物に接触させて測定物を測定し、測定で得られる検出信号を検出器30を介して演算処理装置に送り演算処理装置で処理するようになっている。なお、水平アーム29の先端には心ずれ調整機構32が設置されている。   A detector 30 is provided at the tip of the horizontal arm 29, and the detector 30 includes a probe 31. The roundness measuring apparatus 10 measures the measured object by bringing the measuring element 31 into contact with the measured object placed on the mounting table 12, and calculates a detection signal obtained by the measurement via the detector 30. The data is sent to the apparatus and processed by an arithmetic processing unit. A center misalignment adjusting mechanism 32 is provided at the tip of the horizontal arm 29.

図2に、真円度測定装置10の構成を表すブロック図を示す。   FIG. 2 is a block diagram showing the configuration of the roundness measuring apparatus 10.

図2に示すように、真円度測定装置10は、測定機本体11と演算処理装置13で構成される。測定機本体11については、図1の説明と重複する点もあるが再度説明することとする。   As shown in FIG. 2, the roundness measuring device 10 includes a measuring machine main body 11 and an arithmetic processing device 13. The measuring machine main body 11 will be described again although there are some points that overlap the description of FIG.

測定機本体11は、ベース14上に回転機構15によって回転する載物台12が設けられている。載物台12には、水平方向の微調整及び垂直方向に対する傾斜調整を行うための、X方向微動つまみ22、Y方向微動つまみ24及びX方向傾斜つまみ25、Y方向傾斜つまみ23が設けられている。   The measuring machine main body 11 is provided with a mounting table 12 that is rotated by a rotating mechanism 15 on a base 14. The mounting table 12 is provided with an X-direction fine adjustment knob 22, a Y-direction fine adjustment knob 24, an X-direction inclination knob 25, and a Y-direction inclination knob 23 for fine adjustment in the horizontal direction and inclination adjustment in the vertical direction. Yes.

載物台12は、軸受16、エンコーダ18、モータ20等を備えた回転機構15によって回転される。載物台12は、軸受16を介してモータ20によって回転可能に支持されている。モータ20の回転軸にはエンコーダ18が取り付けられ、回転角が高精度に読み込まれるようになっている。軸受16は、例えば、超高精度の静圧エアーベアリングが用いられ、載物台12は非常に高い回転精度(例えば、0.005μm)で回転される。   The stage 12 is rotated by a rotation mechanism 15 including a bearing 16, an encoder 18, a motor 20, and the like. The stage 12 is rotatably supported by a motor 20 via a bearing 16. An encoder 18 is attached to the rotation shaft of the motor 20, and the rotation angle is read with high accuracy. For example, an ultra-high precision static pressure air bearing is used as the bearing 16, and the mounting table 12 is rotated with very high rotational accuracy (for example, 0.005 μm).

またベース14上に立設されたコラム(支柱)27にはスライダ28が上下動可能に装着され、スライダ28には水平アーム(径方向移動軸)29が水平方向に駆動可能に装着されている。そして、水平アーム29の先端には、検出器30が設けられ、検出器30には測定子31が設置されている。また、検出器30には差動変圧器を用いた電気マイクロメータが使用されており、測定物26に接触する測定子31の変位量を検出するようになっている。   Further, a slider 28 is mounted on a column (post) 27 erected on the base 14 so as to be movable up and down, and a horizontal arm (radial movement axis) 29 is mounted on the slider 28 so as to be driven in the horizontal direction. . A detector 30 is provided at the tip of the horizontal arm 29, and a probe 31 is installed on the detector 30. In addition, an electric micrometer using a differential transformer is used for the detector 30 to detect the amount of displacement of the probe 31 that contacts the measurement object 26.

測定時には、測定物26を載物台12上に載せ、測定子31を測定物に接触させて測定を行う。測定で得られる検出信号は、検出器30を介して演算処理装置13に送られる。   At the time of measurement, the measurement object 26 is placed on the mounting table 12, and the measuring element 31 is brought into contact with the measurement object to perform measurement. A detection signal obtained by the measurement is sent to the arithmetic processing unit 13 via the detector 30.

演算処理装置13は、増幅器33、A/D変換器34、演算/処理手段36及びこれらの制御を行うためにメモリに記憶されたプログラム38からなり、さらに処理結果を表示する表示手段を備えている。   The arithmetic processing unit 13 includes an amplifier 33, an A / D converter 34, an arithmetic / processing unit 36, and a program 38 stored in a memory for controlling these, and further includes a display unit for displaying the processing result. Yes.

測定子31を測定物26に接触させて得られた検出信号は検出器30を介して演算処理装置13に送られる。演算処理装置13では、まず増幅器33で増幅された後、A/D変換器34によってデジタル信号に変換されて、演算/処理手段36に入力される。   A detection signal obtained by bringing the probe 31 into contact with the measurement object 26 is sent to the arithmetic processing unit 13 via the detector 30. In the arithmetic processing unit 13, the signal is first amplified by the amplifier 33, converted into a digital signal by the A / D converter 34, and input to the arithmetic / processing means 36.

この真円度測定装置10で測定物26の真円度等を測定する場合には、測定物26を載物台12上に載置した後、最初に載物台12の回転中心と測定物26の中心との偏心補正と、載物台12の回転軸に対する測定物26の傾斜補正を行う。これにより、載物台12の回転中心と測定物26の中心とは一致しているものとする。   When the roundness of the measuring object 26 is measured by the roundness measuring apparatus 10, after the measuring object 26 is placed on the mounting table 12, first, the center of rotation of the mounting table 12 and the measuring object are measured. The eccentricity correction with respect to the center of the object 26 and the inclination correction of the measurement object 26 with respect to the rotation axis of the mounting table 12 are performed. As a result, it is assumed that the center of rotation of the stage 12 and the center of the measurement object 26 coincide with each other.

次に、検出器30の測定子31を測定物26の側面に接触させた状態で、載物台12がモータ20によって1回転され、測定物26の側面1周分のデータがアナログ電圧値として採取される。アナログ電圧値として得られた検出信号は、上述したように増幅器33で増幅され、A/D変換器34でデジタル信号に変換されて、演算/処理手段36に入力される。演算/処理手段36は、エンコーダ18から入力される回転角度データと、検出器30で検出された変位データとから測定物26の真円度を演算し、演算結果を表示手段40に表示する。   Next, in a state where the probe 31 of the detector 30 is in contact with the side surface of the measurement object 26, the mounting table 12 is rotated once by the motor 20, and the data for one round of the side surface of the measurement object 26 is converted into an analog voltage value. Collected. The detection signal obtained as an analog voltage value is amplified by the amplifier 33 as described above, converted into a digital signal by the A / D converter 34, and input to the arithmetic / processing means 36. The calculation / processing unit 36 calculates the roundness of the measurement object 26 from the rotation angle data input from the encoder 18 and the displacement data detected by the detector 30, and displays the calculation result on the display unit 40.

なお、以上説明してきた真円度測定装置10は、測定物26を載せた載物台12が回転し、測定子31は前後方向(水平アーム29の移動方向)及び上下方向(スライダ28の移動方向)に移動するだけで、測定子31は回転しない、載物台回転形の真円度測定装置であったが、本発明は、このような載物台回転形真円度測定装置に限定されるものではない。載物台は回転せず、測定子が前後方向及び上下方向に移動するとともに、測定子が測定物の回りを回転して測定する、検出器回転形の真円度測定装置にも適用可能である。   In the roundness measuring apparatus 10 described above, the stage 12 on which the measurement object 26 is placed rotates, and the measuring element 31 moves in the front-rear direction (movement direction of the horizontal arm 29) and in the vertical direction (movement of the slider 28). In this case, the measuring element 31 does not rotate and moves in the direction), and the roundness measuring device of the mounting table rotation type is used. However, the present invention is limited to such a mounting table rotation type roundness measuring device. Is not to be done. It can also be applied to a roundness measuring device with a rotating detector, where the stage does not rotate, the probe moves in the front-rear and up-down directions, and the probe rotates around the workpiece. is there.

図3は、検出器回転形真円度測定装置の測定機本体の外観を示す斜視図である。   FIG. 3 is a perspective view showing an appearance of a measuring machine main body of the detector rotation type roundness measuring apparatus.

図3に示すように、この真円度測定装置100の測定機本体111は、ベース114上に測定物を載せる載物台112が設けられている。載物台112は、X方向微動つまみ122及びY方向微動つまみ124を有している。なお、ここでは省略したが、前の例と同様にX方向傾斜つまみ及びY方向傾斜つまみを備えていてもよい。   As shown in FIG. 3, the measuring machine main body 111 of the roundness measuring apparatus 100 is provided with a mounting table 112 on which a measuring object is placed on a base 114. The stage 112 has an X direction fine movement knob 122 and a Y direction fine movement knob 124. Although omitted here, an X-direction tilt knob and a Y-direction tilt knob may be provided as in the previous example.

またベース114上には上方に略垂直に延びるコラム(支柱)127が立設されており、コラム127にはスライダ128が上下動可能に装着されている。スライダ128は、コラム127に設けられた送り装置150によって上下に移動されるようになっている。またスライダ128の下側には水平アーム(径方向移動軸)129が取り付けられており、水平アーム129には検出器130及び測定子131が設置されている。   On the base 114, a column (post) 127 extending substantially vertically upward is erected, and a slider 128 is mounted on the column 127 so as to be movable up and down. The slider 128 is moved up and down by a feeding device 150 provided in the column 127. A horizontal arm (radial movement axis) 129 is attached to the lower side of the slider 128, and a detector 130 and a measuring element 131 are installed on the horizontal arm 129.

真円度測定装置100は、測定子131を載物台112上に載置された測定物に接触させながら、測定子131を測定物の回りに回転させて測定物を測定する。測定で得られる検出信号は、検出器130を介して図示を省略した演算処理装置に送られ、演算処理装置で処理されるようになっている。なお、水平アーム129と検出器130との間には心ずれ調整機構132が設置されている。   The roundness measuring apparatus 100 measures the measurement object by rotating the measurement element 131 around the measurement object while bringing the measurement element 131 into contact with the measurement object placed on the mounting table 112. A detection signal obtained by the measurement is sent to an arithmetic processing device (not shown) via the detector 130 and processed by the arithmetic processing device. A misalignment adjusting mechanism 132 is installed between the horizontal arm 129 and the detector 130.

以下、本実施形態の真円度測定装置10(あるいは100)による心ずれ量の算出とこれを用いた心ずれ量補正方法について説明する。   Hereinafter, calculation of the amount of misalignment by the roundness measuring apparatus 10 (or 100) of the present embodiment and a method of correcting the amount of misalignment using this will be described.

真円度測定時には、図4に示すように、測定子31の先端球31aを載物台12(ここでは図示省略)上に載せた測定物26に接触させる。   At the time of roundness measurement, as shown in FIG. 4, the tip sphere 31a of the probe 31 is brought into contact with the measuring object 26 placed on the mounting table 12 (not shown here).

そして、載物台回転形の真円度測定装置10の場合には、図4に矢印Aで示すように載物台12を回転することによって測定物26を回転する。また、検出器回転形の真円度測定装置100の場合には、図4に矢印Bで示すように測定子31(先端球31a)を測定物26の外周に沿って回転させる。なお、測定物26の中心と載物台12の回転中心とは一致しているものと仮定する。また、ここで測定物26の中心とは、測定物26の外周を形成する図形(正確に言うと、先端球31aを接触させて測定する点(検出点)を含み載物台12の表面に平行な断面の外周の図形)の最小二乗円の中心であるとする。   Then, in the case of the mounting table rotation type roundness measuring apparatus 10, the measuring object 26 is rotated by rotating the mounting table 12 as indicated by an arrow A in FIG. 4. Further, in the case of the detector rotation type roundness measuring apparatus 100, as shown by an arrow B in FIG. 4, the probe 31 (tip sphere 31a) is rotated along the outer periphery of the measurement object 26. It is assumed that the center of the measurement object 26 and the center of rotation of the mounting table 12 coincide with each other. Here, the center of the measuring object 26 refers to a figure forming the outer periphery of the measuring object 26 (more precisely, a point (detection point) measured by bringing the tip sphere 31a into contact with the surface of the mounting table 12). Suppose that it is the center of the least square circle of the outer periphery of the parallel section.

このとき、いずれの場合も測定子31の先端球31aが測定物26と接触しているようにする。例えば、載物台回転形の真円度測定装置10の場合には、図4に矢印Dで示すように、先端球31aを測定物26の外表面に常に押し当てながら、測定物26を矢印A方向に回転する。このとき、測定物26が真円でなく、測定物26の回転につれて半径が変化すると、先端球31aは回転中心側に寄って行ったりあるいは離れたり、矢印D方向内でその位置が変化する。   At this time, the tip sphere 31a of the probe 31 is in contact with the measurement object 26 in any case. For example, in the case of the mounting table rotation type roundness measuring apparatus 10, as shown by an arrow D in FIG. 4, while the tip sphere 31 a is always pressed against the outer surface of the measured object 26, the measured object 26 is moved to the arrow. Rotate in direction A. At this time, if the measured object 26 is not a perfect circle and the radius changes as the measured object 26 rotates, the tip sphere 31a moves toward or away from the center of rotation, and its position changes in the direction of arrow D.

この先端球31aの位置の変化を検出器30を介して検出し、演算処理装置13で処理することにより測定物26の真円度が検出される。   The change in the position of the tip sphere 31a is detected via the detector 30 and processed by the arithmetic processing unit 13, whereby the roundness of the measurement object 26 is detected.

図4に示すように、測定子31の先端球31aを、矢印Dが示す検出方向に移動して測定物26と接触させて測定を行う検出点Pが、測定物26の中心を通る母線Mと一致している場合には、正確に測定物26の真円度を測定することができる。   As shown in FIG. 4, a detection point P at which measurement is performed by moving the tip sphere 31 a of the probe 31 in the detection direction indicated by the arrow D and making contact with the measurement object 26 is a bus M passing through the center of the measurement object 26. , The roundness of the measurement object 26 can be accurately measured.

しかし、実際の測定においては、測定子31の先端球31aの測定物26に対する検出点Pが測定物26の母線Mと一致しているとは限らない。   However, in actual measurement, the detection point P of the tip sphere 31 a of the probe 31 with respect to the measurement object 26 does not always coincide with the bus M of the measurement object 26.

装置によっては、例えば図5に示すように、測定子31の先端球31aが測定物26と接触する検出点Qが、測定物26の母線Mと一致しない場合がある。この場合には、測定物26の母線Mと一致する検出点Pと、実際の測定での検出点Qとにおける、先端球31aの検出方向Dに関する先端球31aの中心間の距離εだけ測定誤差が生じる。   Depending on the apparatus, for example, as shown in FIG. 5, the detection point Q at which the tip sphere 31 a of the probe 31 contacts the measurement object 26 may not coincide with the bus M of the measurement object 26. In this case, the measurement error is the distance ε between the centers of the tip spheres 31a in the detection direction D of the tip sphere 31a at the detection point P that coincides with the bus M of the measurement object 26 and the detection point Q in the actual measurement. Occurs.

また、検出点Pと検出点Qにおける、検出方向Dと垂直な方向に関する先端球31aの中心間の距離Yが、このときの検出点Qの母線Mからのずれを表しており、この値Yが心ずれ量である。   Further, the distance Y between the centers of the tip spheres 31a in the detection point P and the detection point Q in the direction perpendicular to the detection direction D represents the deviation of the detection point Q from the bus M, and this value Y Is the amount of misalignment.

次にこの心ずれ量Yを求める方法について説明する。   Next, a method for obtaining the misalignment amount Y will be described.

以下述べる方法は、直径値が既知の基準測定物の測定子31の検出方向に対向する2点を測定し、その測定誤差から心ずれ量を算出して、補正を行うようにするものである。   In the method described below, two points opposite to the detection direction of the probe 31 of the reference measurement object having a known diameter value are measured, the amount of misalignment is calculated from the measurement error, and correction is performed. .

図6に示すように、既知の直径値の基準測定物26−1に対して、図に矢印Dで示す検出方向と平行な方向に、右側及び左側からそれぞれ真円度測定装置10の測定子31の先端球31aを接触させて測定する。   As shown in FIG. 6, with respect to a reference measurement object 26-1 having a known diameter value, a measuring element of the roundness measuring device 10 from the right side and the left side in a direction parallel to the detection direction indicated by the arrow D in the figure. Measurement is performed by bringing 31 tip balls 31a into contact with each other.

また、基準測定物26−1の直径値をD0、先端球31aの直径をdとする。   The diameter value of the reference measurement object 26-1 is D0, and the diameter of the tip sphere 31a is d.

ここで、測定子31の先端球31aが、心ずれがなく、基準測定物26−1と正しく接触したと仮定した場合の右側検出点をP1、左側検出点をP2とする。すなわち検出点P1及び検出点P2は基準測定物26−1の母線Mと一致しているとする。また、このときの右側検出点をP1における検出値をR1、左側検出点をP2における検出値をR2とする。ここで、図より検出値R1と検出値R2の差R1−R2は、基準測定物26−1の直径値D0、と先端球31aの直径dとの和となる。   Here, it is assumed that the right detection point is P1 and the left detection point is P2 when it is assumed that the tip sphere 31a of the probe 31 has no misalignment and is correctly in contact with the reference measurement object 26-1. That is, it is assumed that the detection point P1 and the detection point P2 coincide with the bus M of the reference measurement object 26-1. In this case, the detection value at the right side detection point at P1 is R1, and the detection point at the left detection point at P2 is R2. Here, from the figure, the difference R1-R2 between the detection value R1 and the detection value R2 is the sum of the diameter value D0 of the reference measurement object 26-1 and the diameter d of the tip sphere 31a.

すなわち、R1−R2=D0+dである。   That is, R1-R2 = D0 + d.

次に、測定子31の先端球31aが、心ずれしている場合、すなわち測定子31と基準測定物26−1とが図の基準測定物26−1の母線Mと直交する方向に相対的に移動しているとする。このとき、基準測定物26−1に対して、図に矢印Dで示す検出方向と平行な方向に、右側及び左側からそれぞれ真円度測定装置10の測定子31の先端球31aを接触させて測定する。   Next, when the tip sphere 31a of the measuring element 31 is misaligned, that is, the measuring element 31 and the reference measuring object 26-1 are relatively relative to each other in a direction orthogonal to the generatrix M of the reference measuring object 26-1. Suppose you have moved to. At this time, the tip sphere 31a of the probe 31 of the roundness measuring device 10 is brought into contact with the reference measurement object 26-1 from the right side and the left side in a direction parallel to the detection direction indicated by the arrow D in the drawing. taking measurement.

このとき、基準測定物26−1に対して右側から先端球31aが接触する右側検出点をQ1とし、そのときの検出値をR1’とする。また、基準測定物26−1に対して左側から先端球31aが接触する左側検出点をQ2とし、そのときの検出値をR2’とする。   At this time, the right detection point where the tip sphere 31a contacts the reference measured object 26-1 from the right side is Q1, and the detection value at that time is R1 '. Further, the left detection point where the tip sphere 31a contacts the reference measured object 26-1 from the left is Q2, and the detection value at that time is R2 '.

すると、測定子31と基準測定物26−1とを母線Mと直交する方向にずれている距離である心ずれ量をYとすると、基準測定物26−1の右側及び左側を測定して得られる測定値(R1’−R2’)は、次の式(1)で表される。   Then, when the amount of misalignment, which is the distance by which the probe 31 and the reference measurement object 26-1 are displaced in the direction orthogonal to the bus M, is Y, the right and left sides of the reference measurement object 26-1 are measured. The measured value (R1′-R2 ′) obtained is represented by the following formula (1).

R1’−R2’=2√[{(D0/2)+(d/2)}2 − Y2] …(1)
ただし、ここで√[*]は、*の平方根を表す。
R1′−R2 ′ = 2√ [{(D0 / 2) + (d / 2)} 2−Y2] (1)
Here, √ [*] represents the square root of *.

従って、R1’−R2’を測定すれば、D0及びdは既知であるので、上記式(1)を解けば心ずれ量Yは、次の式(2)のように求めることができる。   Therefore, if R1'-R2 'is measured, D0 and d are already known. Therefore, if the above equation (1) is solved, the misalignment amount Y can be obtained as the following equation (2).

Y=√[{(D0/2)+(d/2)}2 −(R1’−R2’)2/4]…(2)
次に、測定した直径の値等を、算出した心ずれ量Yを用いて補正する方法について説明する。
Y = √ [{(D0 / 2) + (d / 2)} 2- (R1′−R2 ′) 2/4] (2)
Next, a method of correcting the measured diameter value and the like using the calculated misalignment amount Y will be described.

図7において、測定物の外径を測定する場合(先端球31aが円形測定物の外形の円C1に外接する場合)、及び測定物の内径を測定する場合(先端球31aが円筒測定物の内側の円C2に内接する場合)について説明する。   In FIG. 7, when measuring the outer diameter of the measurement object (when the tip sphere 31a circumscribes the outer circle C1 of the circular measurement object) and when measuring the inner diameter of the measurement object (the tip sphere 31a is the cylindrical measurement object). The case of inscribed in the inner circle C2 will be described.

すなわち、図7において、先端球31aは、円C1に外接するとともに円C2に内接するとする。また、先端球31aが、円C1の直径に関して対向する位置E及びFに位置する場合に、各位置における先端球31aの中心間の距離をδとする。また、円C1の直径をD1とし、先端球31aの直径をdとする。   That is, in FIG. 7, the tip sphere 31a circumscribes the circle C1 and inscribes the circle C2. Further, when the tip sphere 31a is located at positions E and F facing each other with respect to the diameter of the circle C1, the distance between the centers of the tip spheres 31a at each position is represented by δ. The diameter of the circle C1 is D1, and the diameter of the tip sphere 31a is d.

このとき、円C1に対して位置Eで右側から先端球31aを接触させて測定するとともに、円C1に関して母線Mと平行な方向で位置Eと対向する位置Gで円C1に対して左側から先端球31aを接触させて測定する。   At this time, the tip sphere 31a is contacted from the right side at the position E with respect to the circle C1, and the tip is viewed from the left side with respect to the circle C1 at the position G facing the position E in the direction parallel to the generatrix M with respect to the circle C1. Measurement is performed by bringing the ball 31a into contact.

位置Eにおいて円C1に右側から先端球31aを接触させて測定した検出値をR1”とし、位置Gにおいて円C1に左側から先端球31aを接触させて測定した検出値をR2”とする。   A detection value measured by bringing the tip sphere 31a into contact with the circle C1 from the right side at the position E is R1 ″, and a detection value measured by bringing the tip sphere 31a from the left side into contact with the circle C1 at the position G is R2 ″.

すると、位置Eにおける先端球31aの母線Mからの距離である心ずれ量Yは、前述したようにして求めることができる。   Then, the misalignment amount Y, which is the distance from the generatrix M of the tip sphere 31a at the position E, can be obtained as described above.

前述した2つの位置E及びFにおける先端球31aの中心間の距離δは、図からわかるように、この心ずれ量Yを用いて、次の式(3)で表すことができる。   As can be seen from the figure, the distance δ between the centers of the tip spheres 31a at the two positions E and F described above can be expressed by the following equation (3) using this amount of misalignment Y.

δ = √[(R1”−R2”)2+(2Y)2] …(3)
従って、測定直径(R1”−R2”)を心ずれ量Yで補正することにより、先端球31aを外接させて測定する円C1の直径D1は、次の式(4)で求めることができる。
δ = √ [(R1 ″ −R2 ″) 2+ (2Y) 2] (3)
Therefore, by correcting the measured diameter (R1 ″ −R2 ″) with the amount of misalignment Y, the diameter D1 of the circle C1 measured by circumscribing the tip sphere 31a can be obtained by the following equation (4).

D1 = √[(R1”−R2”)2+(2Y)2]−d …(4)
また、同様に、先端球31aを内接させて測定する円C2の直径D2は、次の式(5)で求めることができる。
D1 = √ [(R1 ″ −R2 ″) 2+ (2Y) 2] −d (4)
Similarly, the diameter D2 of the circle C2 measured with the tip sphere 31a inscribed can be obtained by the following equation (5).

D2 = √[(R1”−R2”)2+(2Y)2]+d …(5)
このように、本実施形態によれば、直径値が既知の基準測定物をその母線Mに平行な方向で対向する左右2つの位置から測定することにより、心ずれ量Yを算出することができる。また、任意の測定物を測定して得られた直径値を、この算出した心ずれ量Yを用いて補正することにより任意の測定物の真の直径値を算出することができる。
D2 = √ [(R1 ″ −R2 ″) 2+ (2Y) 2] + d (5)
As described above, according to the present embodiment, the amount of misalignment Y can be calculated by measuring a reference measurement object having a known diameter value from two left and right positions facing each other in a direction parallel to the generatrix M. . In addition, the true diameter value of an arbitrary measured object can be calculated by correcting the diameter value obtained by measuring the arbitrary measured object by using the calculated misalignment amount Y.

また、本発明によれば、図8に示すように、直径値が既知の2つの基準測定物、円C3及び円C4を測定することにより、心ずれ量Yを算出するとともに、先端球31aの直径値を算出することができる。   Further, according to the present invention, as shown in FIG. 8, by measuring two reference measurement objects having known diameter values, a circle C3 and a circle C4, the amount of misalignment Y is calculated, and the tip sphere 31a A diameter value can be calculated.

これによれば、先端球31aが摩耗してその直径値が当初の値とは異なっている場合でも、摩耗した先端球31aの真の直径値を求めることができる。   According to this, even when the tip sphere 31a is worn and its diameter value is different from the initial value, the true diameter value of the worn tip sphere 31a can be obtained.

図8において、円C3の直径値をD3とし、円C4の直径値をD4とするとともに、先端球31aの直径値をdとする。   In FIG. 8, the diameter value of the circle C3 is D3, the diameter value of the circle C4 is D4, and the diameter value of the tip sphere 31a is d.

このとき上の例と同様に、心ずれがない場合に円C3を左右2方向から測定したときの測定直径値R3−R4は、次の式(6)のようになる。   At this time, similarly to the above example, when there is no misalignment, the measured diameter value R3-R4 when the circle C3 is measured from the left and right directions is expressed by the following equation (6).

R3−R4=D3+d …(6)
また同様に心ずれがない場合に円C4を左右2方向から測定したときの測定直径値R5−R6は、次の式(7)のようになる。
R3-R4 = D3 + d (6)
Similarly, when there is no misalignment, the measured diameter value R5-R6 when the circle C4 is measured from the left and right directions is expressed by the following equation (7).

R5−R6=D4+d …(7)
また、心ずれ(心ずれ量Y)がある場合に円C3を左右2方向から測定したときの測定直径値R3’−R4’は、次の式(8)のようになる。
R5-R6 = D4 + d (7)
Further, when there is a misalignment (center misalignment amount Y), a measured diameter value R3′-R4 ′ when the circle C3 is measured from the left and right directions is expressed by the following equation (8).

R3’−R4’ = 2√[{(D3/2)+(d/2)}2−Y2] …(8)
同様に、心ずれが(心ずれ量Y)ある場合に円C4を左右2方向から測定したときの測定直径値R5’−R6’は、次の式(9)のようになる。
R3′−R4 ′ = 2√ [{(D3 / 2) + (d / 2)} 2-Y2] (8)
Similarly, the measured diameter value R5′-R6 ′ when the circle C4 is measured from the left and right directions when there is a misalignment (center misalignment amount Y) is expressed by the following equation (9).

R5’−R6’ = 2√[{(D4/2)+(d/2)}2−Y2] …(9)
従って、直径値D3及びD4がそれぞれ既知の2つの円C3及びC4を測定することにより、測定直径値R3’−R4’及びR5’−R6’を得れば、上記2つの式(8)及び(9)から、心ずれ量Y及び先端球31aの直径値dを算出することができる。
R5′−R6 ′ = 2√ [{(D4 / 2) + (d / 2)} 2-Y2] (9)
Therefore, if the measured diameter values R3′-R4 ′ and R5′-R6 ′ are obtained by measuring the two circles C3 and C4 whose diameter values D3 and D4 are known, respectively, the two equations (8) and From (9), the amount of misalignment Y and the diameter value d of the tip sphere 31a can be calculated.

以上説明したように、本実施形態によれば、測定物の母線と検出点とのずれ量である心ずれ量を算出して補正することにより、基準となる測定物の直径値とは異なる直径値を有する測定物であっても正確な直径値を算出することができる。   As described above, according to the present embodiment, a diameter different from the diameter value of the reference measurement object is obtained by calculating and correcting the misalignment amount that is the deviation amount between the bus of the measurement object and the detection point. Even for a measured object having a value, an accurate diameter value can be calculated.

以上、本発明の真円度測定装置における心ずれ量算出方法について詳細に説明したが、本発明は、以上の例には限定されず、本発明の要旨を逸脱しない範囲において、各種の改良や変形を行ってもよいのはもちろんである。   As described above, the method of calculating the amount of misalignment in the roundness measuring device of the present invention has been described in detail, but the present invention is not limited to the above examples, and various improvements and modifications can be made without departing from the scope of the present invention. Of course, deformation may be performed.

10…(載物台回転形)真円度測定装置、11…測定機本体、12…載物台(XY/傾斜テーブル)、13…演算処理装置、14…ベース(基台)、15…回転機構、16…軸受、18…エンコーダ、20…モータ、22…X方向微動つまみ、23…Y方向傾斜つまみ、24…Y方向微動つまみ、25…X方向傾斜つまみ、26…測定物、27…コラム(支柱)、28…スライダ、29…水平アーム(径方向移動軸)、30…検出器、31…測定子、31a…先端球、32…心ずれ調整機構、33…増幅器、34…A/D変換器、36…演算/処理手段、38…プログラム、40…表示手段、100…(検出器回転形)真円度測定装置   DESCRIPTION OF SYMBOLS 10 ... (mounting table rotation type) Roundness measuring device, 11 ... Measuring machine main body, 12 ... Mounting table (XY / tilting table), 13 ... Arithmetic processing device, 14 ... Base (base), 15 ... Rotation Mechanism: 16 ... Bearing, 18 ... Encoder, 20 ... Motor, 22 ... X direction fine adjustment knob, 23 ... Y direction fine adjustment knob, 24 ... Y direction fine adjustment knob, 25 ... X direction fine adjustment knob, 26 ... Measurement object, 27 ... Column (Posts), 28 ... slider, 29 ... horizontal arm (radial movement axis), 30 ... detector, 31 ... measuring element, 31a ... tip ball, 32 ... decentering adjustment mechanism, 33 ... amplifier, 34 ... A / D Converter, 36 ... arithmetic / processing means, 38 ... program, 40 ... display means, 100 ... (detector rotation type) roundness measuring device

Claims (1)

測定物の中心と回転の中心を一致させて測定物を検出器に対して相対的に回転させるようにして測定物の真円度を測定する真円度装置における心ずれ量算出方法であって、
前記検出器を前記測定物に対して所定の方向に直線的に移動させる手段を備え、
前記検出器の先端球を、直径値既知の直径値を有する1つの基準測定物に対し、前記基準測定物の中心を通り前記検出器が水平に直線移動する方向に平行な直線である母線と平行に移動して前記基準測定物の対向する2つの検出点でそれぞれ前記基準測定物に接触させて測定を行い、前記基準測定物について測定差を検出する工程と、
前記測定差に基づいて、前記基準測定物の母線と前記検出点とのずれ量である心ずれ量を算出する心ずれ量算出工程と、
を備えたことを特徴とする真円度測定装置における心ずれ量算出方法。
A method of calculating the amount of misalignment in a roundness device that measures the roundness of a measured object by rotating the measured object relative to a detector while aligning the center of the measured object with the center of rotation. ,
Means for linearly moving the detector in a predetermined direction with respect to the measurement object;
A bus tip that is a straight line parallel to a direction in which the detector horizontally moves linearly through the center of the reference measurement object with respect to one reference measurement object having a diameter value with a known diameter value. A step of moving in parallel and making contact with the reference measurement object at two detection points opposed to the reference measurement object, and measuring a difference in the reference measurement object; and
A misalignment amount calculating step of calculating a misalignment amount, which is a shift amount between the bus of the reference measurement object and the detection point, based on the measurement difference;
A method of calculating the amount of misalignment in a roundness measuring apparatus comprising:
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