JPH06201302A - Dimension measuring device - Google Patents

Abstract

PURPOSE:To measure bore diameters and shaft diameters in a wide range in a short time with high precision by arranging four measuring pieces on a concentric circle around the shaft center of a device main body at equal spaces, holding them so as to be free in movement in a radial direction of the concentric circle, and measuring movement amount in the radial direction. CONSTITUTION:Four fixed blocks 40 are arranged on a concentric circle around the shaft center of a device main body 10 of a connection means 30, the upper end portions of one pair of plate springs 42A, 42B are fixed to both ends thereof, and moving blocks 44 are fixed to the lower end portions. When the rods 47 of cylinders 46 are elongated, protruded pieces 44A are moved inward in radial directions by the energizing force of coil-like springs 48B, and the blocks 44 are moved inward. On the contrary, when the rods 47 are shrunken, the blocks 44 are moved outward. Measuring pieces 36 are linked with these movements via adjusting plates 52 so that the tip pieces 60 are moved by arms 58. The tip pieces 60 are inserted into the hole of an object to be measured 26, and are moved in radial directions so that the movement amounts thereof are detected by detectors 38 via rods 38A.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a size measuring device,
In particular, it relates to a dimension measuring device for measuring dimensions such as an inner diameter of a hole formed in an object to be measured and an outer diameter of a shaft.

[0002]

2. Description of the Related Art Conventionally, the following two methods are generally known for measuring the inner diameter of a hole or the outer diameter of a shaft formed in an object to be measured. The first method is to move the touch probe of the three-dimensional coordinate measuring machine in the X, Y, and Z axis directions,
Measure three or more points on the inner circumference of the hole and the outer circumference of the shaft. Therefore, when the touch probe measures three or more points such as the inner circumference of the hole and the outer circumference of the shaft, the inner diameter of the hole and the outer diameter of the shaft are measured.

In the second method, the inner diameter measuring head or the outer diameter measuring head is inserted into the inner circumference of the hole or the outer circumference of the shaft through an insertion guide to measure the inner circumference of the hole or the outer circumference of the shaft. As a specific example of this method, Japanese Patent Publication No. 58-24722
There is a gazette.

[0004]

However, the first method has a problem that it is difficult to measure in a short time because three or more points are individually measured. Further, since the second method uses the insertion guide, the measuring range of the inner diameter of the hole of the object to be measured and the outer diameter of the shaft is limited. Therefore, for example, when measuring a hole diameter or a shaft diameter that exceeds the measurement range, play occurs between the insertion guide and the inner circumference of the hole or the outer circumference of the shaft, and the measurement point shifts due to the play, which makes high-precision measurement difficult.
Therefore, the second method has a problem that it is difficult to measure a wide range of hole diameters and shaft diameters with high accuracy.

The present invention has been made in view of the above circumstances, and provides a dimension measuring apparatus capable of measuring in a short time and highly accurately measuring a wide range of hole diameters and shaft diameters. The purpose is to

[0006]

In order to achieve the above-mentioned object, the present invention is arranged at equal intervals on a concentric circle centered on the axis of the dimension measuring apparatus body and the dimension measuring apparatus body, Four gauges movably arranged in the radial direction of the concentric circle in the main body of the dimension measuring device, moving means for moving the four gauges in the radial direction of the concentric circle, and the four gauges. Based on the detector for detecting the radial movement amount of the child and the radial movement amount of the four measuring elements detected by the detector, measurement processing of the hole diameter of the object to be measured, the shaft outer diameter, and the like is performed. And a measurement processing unit for performing the measurement.

In the present invention, in order to achieve the above-mentioned object, the four probes are connected to the dimension measuring device main body through means capable of adjusting the positions of the four probes. It is characterized by

[0008]

According to the present invention, four probes are arranged at equal intervals on a concentric circle centered on the axis of the dimension measuring device main body, and are supported movably in the radial direction of the concentric circle. The moving means moves the four probes in the radial direction of a concentric circle centered on the axis of the dimension measuring device body. Further, the amount of radial movement of the four probes is detected by the detector. The measurement processing means performs measurement processing of the hole diameter of the object to be measured, the outer diameter of the shaft, and the like based on the radial movement amounts of the four probes detected by the detector.

As described above, the dimension measuring device is moved by the moving means.
Each probe can be moved in the radial direction of a concentric circle centered on the axis of the dimension measuring device body. Therefore, the inner circumference of the hole diameter of the object to be measured and the outer diameter of the shaft can be measured at four locations at the same time, and even when the hole diameter dimension of the object to be measured or the outer diameter dimension of the shaft is greatly changed, it can be used. it can.

Further, according to the present invention, the four probes are 4
It is connected to the main body of the dimension measuring device through means for adjusting the positions of the individual gauges, and this adjusting means adjusts the relative positional relationship of the four gauges. Therefore, highly accurate measurement is possible without depending on the measurement accuracy of the three-dimensional coordinate measuring machine provided with the dimension measuring device.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A dimension measuring apparatus according to the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a perspective view of an in-line measuring machine 11 in which a dimension measuring device 10 according to the present invention is used. As shown in the figure, the in-line measuring machine 11 includes a three-dimensional drive mechanism 12, and the three-dimensional drive mechanism 12 has a movable post 14 supported along a side portion of a mount 16 so as to be movable in the X-axis direction. . Carrier 1 for moving post 14
6 is movably supported in the Z-axis direction, and the carrier 1
An arm 18 is supported by 6 so as to be movable in the Y-axis direction. The dimension measuring device 10 is attached to the tip of the arm 18.
Is provided. Therefore, the dimension measuring device 10 is X,
It is moved in the three axis directions of the Y and Z axes.

The rotary table 2 is mounted on the mount 16.
0, a carry-in roller 22 and a carry-out roller 24 are provided. The work 26 is conveyed to the rotary table 20 via the carry-in roller 22, and after the measurement is completed, it is carried out of the rotary table 20 by the carry-out roller 24. And work 2
When 6 is disposed on the rotary table 20, the hole diameter and the shaft outer diameter formed in the work 26 are measured by the dimension measuring device 10.

FIG. 2 shows a front view of the dimension measuring device 10, and FIG. 3 shows a view taken along the line AA of FIG. The dimension measuring device 10 includes a connecting means 30, a moving means 32,
The adjusting means 34, the probe 36, the detector 38, and the measurement processing means 39 are provided. The connecting means 30 has four fixed blocks 40, and the fixed blocks 40, 40 ... Are arranged at intervals of 90 ° on a concentric circle centered on the axis of the base 41. Upper ends of a pair of leaf springs 42A and 42B are fixed to both ends of the fixed block 40. The lower ends of the pair of leaf springs 42A and 42B are fixed to the moving block 44. A pair of leaf springs 42A, 42B
Are arranged to face each other, and the leaf springs 42A, 42A
The plane of B extends in a direction orthogonal to the radial direction of a concentric circle centered on the axis of the base 41.

The connecting means 30 is connected to the moving means 32. The moving means 32 has four cylinders 46, and the cylinders 46, 46 ... Are attached to four fixed plates 41A, respectively. Fixed plate 41A,
41A ... is 9 on a concentric circle centered on the axis of the base 41.
It is arranged at a position facing the leaf springs 42B, 42B ... At an interval of 0 °.

The leaf springs 42A and 42B have an opening hole 42C formed at the center thereof. Leaf springs 42A, 42B
The rod 47 of the cylinder 46 is inserted into the opening hole 42C of the cylinder. Further, the rod 47 has flanges 47A, 4A
7B is formed, and the opening holes 42C of 42A and 42B are formed.
The inner diameter of is larger than the outer diameter of the flanges 47A and 47B.

The rod 47 of the cylinder 46 has a protrusion 44A on the rod 47.
Is inserted, and the protruding piece 44A is fixed to the moving block 44. A coil-shaped spring 48A is arranged between the protruding piece 44A and the flange 47A, and a coil-shaped spring 48B is arranged between the protruding piece 44A and the flange 47B. Therefore, when the rod 47 of the cylinder 46 extends,
The projecting piece 44A moves inward in the radial direction by the biasing force of the coiled spring 48B, so that the moving block 44 moves inward in the radial direction. When the rod 47 of the cylinder 46 contracts, the projecting piece 44A moves outward in the radial direction by the biasing force of the coiled spring 48A, so that the moving block 44 moves outward in the radial direction. As a result, the tip terminal 60 described later can be moved inward and outward in the radial direction.

The moving block 44 of the connecting means 30 is provided with adjusting means 34. The adjusting means 34 has a leaf spring 50, and the upper end portion of the leaf spring 50 is fixed to the lower end portion of the moving block 44. The lower end of the leaf spring 50 is fixed to the upper end of the adjusting plate 52. The plane of the leaf spring 50 is arranged so as to extend in the radial direction of the concentric circle. Bolts 54A and 54B are screwed to the adjusting plates 52 on both sides of the leaf spring 50.
The upper end of 54B is in contact with the lower end of the moving block 44.

A probe 36 is fixed to the adjusting plate 52 of the adjusting means 34. That is, the probe 36 is the arm 5
8 and the upper end of the arm 58 has an adjusting plate 5
It is fixed at 2. The front terminal 6 is provided at the lower end of the arm 58.
0 is provided. Accordingly, the tip terminal 60 is connected to the adjustment plate 52 via the arm 58. Therefore, when the upper end of the bolt 54A of the adjusting means 34 is lowered and the upper end of the bolt 54B is raised, the right end of the adjusting plate 52 is lowered and the left end thereof is raised about the leaf spring 50. The tip terminal 60 moves to the left.

The tip of the detector 38 is in contact with the adjusting plate 52 of the adjusting means 34. That is, the four detectors 38 are attached to the lower ends of the fixed plates 41A, 41A ..., And the detectors 38, 38. And
Since the rod 38A of the detector 38 is stretchably supported and is urged in the extending direction, the tip of the rod 38A is kept in contact with the adjustment plate 52. Therefore, the detector 38 can detect the movement amount of the front terminal 60 when the front terminal 60 moves inward and outward in the radial direction. A Moire scale or the like is used for the detector 38.

The four detectors 38 are electrically connected to the measurement processing means 39. The measurement processing means 39 uses the movement amount of the front terminal 60 detected by the four detectors 38 to determine 4
The core misalignment check of the individual tip terminals 60 and the hole diameter and the shaft outer diameter of the work 26 are calculated. Furthermore, the measurement processing means 3
9 is the calculation of the distance between the cores of the holes of the work 26, the length measurement,
And measurement processing such as step measurement.

The operation of the dimension measuring apparatus according to the present invention configured as described above will be described. First, based on FIGS. 4 to 7, four tip terminals 60A, 60B, 60C, 6
A method for checking 0D misalignment will be described. First, the misalignment of the tip terminals 60A and 60C is checked.
In this case, the rod 47 of the cylinder 46 is extended and the tip terminal 60 is moved inward in the radial direction by the biasing force of the coiled spring 48B. Next, the dimension measuring device 10 of the in-line measuring machine 11 is moved in the three axis directions of the X, Y, and Z axes to insert the dimension measuring device 10 into the master ring 66. After the insertion is completed, the rod 47 of the cylinder 46 is contracted, and the tip terminals 60A, 60B, 60 are urged by the urging force of the coiled spring 48A.
Move C and 60D outward in the radial direction. This gives 4
The individual tip terminals 60A, 60B, 60C, 60D contact the inner circumference of the master ring 66.

In this state, the axis 10 of the dimension measuring device 10
A (the axis 10A is controlled by movement of the in-line measuring machine in the X, Y, and Z axis directions) is moved in the positive direction of the Y axis (see FIG. 4). At this time, the four detectors 38 detect the amount of radial movement of the front terminals 60A, 60B, 60C, and 60D, respectively. Then, the value of X ₁ is _{X 1 = (X MAX -k)} ( where, k: numerical value determined by the working standard) is measured DX ₁ when a. Next, the axis 10A of the dimension measuring device 10 is moved in the negative direction of the Y axis (see FIG. 5).
reference). Then, measure the DX ₂ when the value of X ₂ becomes _{X 2 = (X MAX -k)} . Then DX _1- D
When X ₂ is calculated and | DX ₁ −DX ₂ | ≦ Δk (Δk = allowable value), it is determined that the misalignment of the lead terminals 60A and 60C is within the allowable tolerance.

On the other hand, when | DX ₁ -DX ₂ |> Δk, it is determined that the misalignment of the leading terminals 60A and 60C exceeds the allowable tolerance. Then, the bolts 54A and 54B of the adjusting means 34 are operated to adjust the misalignment of the tip terminals 60A and 60C. As a result, the checking of the misalignment of the leading terminals 60A and 60C is completed.

If the probe alignment is OK, the amount of movement in the y direction
Master by returning to the midpoint (a + a ') / 2 position
If the X-axis center of the ring is aligned with the X-axis center of the dimension measuring device,
Be done. Next, check the misalignment of the tip terminals 60B and 60D.
Do In this case, the axis 10A of the dimension measuring device 10
It moves in the positive direction of the X axis (see FIG. 6). And Y ₁
Value of Y₁= (Y_MAX-K) when DY₁To measure. Next, the dimension measuring device
The axis 10A of the apparatus 10 is moved in the negative direction of the X axis (see FIG. 7).
reference). And Y₂Value of Y₂= (Y_MAX-K) when DY₂To measure. Then DY₁-D
Y₂Is calculated and then | DY₁-DY₂When | ≦ Δk, the misalignment of the lead terminals 60B and 60D is within the allowable tolerance.
It is determined that

On the other hand, when │DY ₁ -DY ₂ │> Δk, it is determined that the misalignment of the tip terminals 60B and 60D exceeds the allowable tolerance. Then, the bolts 54A and 54B of the adjusting means 34 are operated to adjust the misalignment of the tip terminals 60B and 60D. This completes the checking of the misalignment of the leading terminals 60B and 60D.

In the case where the probe center misalignment is OK, the Y-axis center of the master ring and the Y-axis center of the dimension measuring device are aligned by returning to the position of the midpoint (b + b ') / 2 of the X-direction movement amount, and the master ring is moved. It means that the center of and the center of dimensional measurement match. Mastering is completed by presetting the master ring data in the measuring device in this state.

Next, the case where the inner diameter of the hole 26A of the work 26 is measured by the dimension measuring device 10 will be described with reference to FIG. First, the rod 47 of the cylinder 46 is extended, and the tip terminal 60 is moved inward in the radial direction by the biasing force of the coiled spring 48B. Next, the dimension measuring device 10 of the in-line measuring machine 11 is moved in the three axis directions of the X, Y, and Z axes,
The dimension measuring device 10 is inserted into the hole 26A of the work 26. After the insertion is completed, the rod 47 of the cylinder 46 is contracted, and the tip terminals 60A, 6A and 6A are pressed by the biasing force of the coiled spring 48A.
Move 0B, 60C, 60D radially outward. As a result, the four tip terminals 60A, 60B, 60C, 60D
Contacts the inner circumference of the hole 26A of the work 26 (see FIG. 8).

At this time, the four detectors 38 detect the amount of radial movement of the front terminals 60A, 60B, 60C and 60D, respectively. Based on the detection results of the four detectors 38,
X ₃ , X ₄ , Y ₃ , and Y ₄ shown in FIG. 8 are obtained. Based on the obtained X ₃ , X ₄ , Y ₃ , and Y ₄ , the positional deviation ΔX in the X direction and the positional deviation ΔY in the Y direction are calculated by the following formula (1),
Calculated from (2).

ΔX = (X ₃ −X ₄ ) / 2 (1) ΔY = (Y ₃ −Y ₄ ) / 2 (2) Therefore, the workpiece diameter φD _{X in} the X direction and the workpiece in the Y direction. The diameter φD _Y is calculated from the following equations (3) and (4). φD _X = √ ((X ₃ −d / 2 + ΔX) ² + (ΔY) ² ) × 2 + d (3) φD _Y = √ ((Y ₃ −d / 2 + ΔY) ² + (ΔX) ² ) × 2 + d (4) In FIG. 8, the case of measuring the inner diameter of the hole 26A formed in the work 26 has been described. However, as shown in FIGS. 9 and 10, the outside of the shaft 26B formed in the work 26 is illustrated. The diameter can be measured. In this case, the rod 47 of the cylinder 46 is contracted, and the tip terminals 60A, 60B, 60C, 60D are moved radially outward by the biasing force of the coiled spring 48A. Next, the dimension measuring device 10 of the in-line measuring machine 11 is moved in the three axial directions of the X, Y, and Z axes to fit the dimension measuring device 10 onto the shaft 26B of the work 26.
Next, the rod 47 of the cylinder 46 is extended and the tip terminals 60A, 60B, 60 are urged by the urging force of the coiled spring 48B.
Move C and 60D inward in the radial direction. This gives 4
Work piece 2 with individual tip terminals 60A, 60B, 60C, 60D
6 contacts the outer circumference of the shaft 26B (see FIGS. 9 and 10). Thereafter, the shaft 2 of the work 26 is processed in the same process as in FIG.
An outer diameter of 6B is measured.

Since the dimension measuring device 10 can obtain the positional deviation ΔX in the X direction and the positional deviation ΔY in the Y direction as shown in the equations (1) and (2), a plurality of workpieces 26 can be obtained. When the holes, shafts, etc. are formed, the distance between the cores can be measured. Further, the dimension measuring device 10 can perform length measurement and step measurement as shown in FIGS. 11 and 12.

In the above embodiment, a pair of leaf springs 42A, 42A
Although the tip terminal 60 is supported on the base 41 of the dimension measuring device 10 using B, the present invention is not limited to this, and the ball slide capable of moving the tip terminal 60 in the radial direction of the concentric circle centered on the axis of the dimension measuring device body. A mechanism or the like may be used.

[0032]

As described above, according to the dimension measuring apparatus of the present invention, the four measuring elements are moved by the moving means in the radial direction of the concentric circle centered on the axis of the dimension measuring apparatus main body. You can Therefore, the inner diameter of the hole diameter of the object to be measured and the outer diameter of the shaft can be simultaneously measured at four locations.
It can be used even when the hole diameter dimension of the object to be measured and the outer diameter dimension of the shaft are largely changed.

Further, according to the present invention, the four probes are 4
It is connected to the elastic member via a means capable of adjusting the positions of the individual probes, and the adjusting means adjusts the relative positional relationship of the four probes. Therefore, highly accurate measurement is possible without depending on the measurement accuracy of the three-dimensional coordinate measuring machine provided with the dimension measuring device. This enables short-time measurement, and
It is possible to measure a wide range of hole diameters and shaft diameters with high accuracy.

[Brief description of drawings]

FIG. 1 is a perspective view of an in-line measuring machine in which a dimension measuring device according to the present invention is used.

FIG. 2 is an enlarged view of a main part of a dimension measuring device according to the present invention.

FIG. 3 is a view taken along the line AA of FIG.

FIG. 4 is a diagram illustrating a method for checking misalignment of a probe of a dimension measuring device according to the present invention.

FIG. 5 is a diagram illustrating a method for checking misalignment of a probe of a dimension measuring device according to the present invention.

FIG. 6 is a diagram illustrating a method for checking misalignment of a probe of the dimension measuring device according to the present invention.

FIG. 7 is a diagram illustrating a method for checking misalignment of a probe of a dimension measuring device according to the present invention.

FIG. 8 is a diagram illustrating a case where the hole diameter of a work is measured by the dimension measuring device according to the present invention.

FIG. 9 is a diagram illustrating a case where the shaft diameter of a work is measured by the dimension measuring device according to the present invention.

FIG. 10 is a diagram illustrating a case where the shaft diameter of a work is measured by the dimension measuring device according to the present invention.

FIG. 11 is a diagram illustrating a case where length measurement is performed by the dimension measuring device according to the present invention.

FIG. 12 is a diagram illustrating a case where step measurement is performed by the dimension measuring apparatus according to the present invention.

[Explanation of symbols]

 10 ... Dimension measuring device 10A ... Shaft center 11 ... In-line measuring machine (three-dimensional coordinate measuring machine) 26 ... Object to be measured 32 ... Moving means 34 ... Adjusting means 36 ... Measuring element 38 ... Detector 39 ... Measurement processing means 41 ... Base (Dimension measuring device main body) 42A, 42B ... Leaf spring (elastic member)

Claims (3)

[Claims] 1. A dimension measuring apparatus main body, and the dimension measuring apparatus main body are arranged at equal intervals on a concentric circle centered on an axis of the main body, and are arranged on the dimension measuring apparatus main body so as to be movable in a radial direction of the concentric circle. The four probes provided, a moving means for moving the four probes in the radial direction of the concentric circle, a detector for detecting the amount of radial movement of the four probes, and the detection Measuring means for measuring the hole diameter of the object to be measured, the outer diameter of the shaft, and the like based on the radial movements of the four probes detected by the measuring instrument. apparatus. 2. The dimension measuring apparatus according to claim 1, wherein the four measuring elements are connected to the dimension measuring apparatus main body through means capable of adjusting the positions of the four measuring elements. . 3. The dimension measuring apparatus according to claim 1, wherein the dimension measuring apparatus is attached to a three-dimensional coordinate measuring machine that is movable in X, Y, and Z axis directions.