CN114877840B - Electric triggering type soft measuring head calibration device and calibration method - Google Patents
Electric triggering type soft measuring head calibration device and calibration method Download PDFInfo
- Publication number
- CN114877840B CN114877840B CN202210630754.XA CN202210630754A CN114877840B CN 114877840 B CN114877840 B CN 114877840B CN 202210630754 A CN202210630754 A CN 202210630754A CN 114877840 B CN114877840 B CN 114877840B
- Authority
- CN
- China
- Prior art keywords
- measuring head
- probe
- test
- type soft
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention relates to an electric trigger type soft measuring head calibration device and a calibration method, wherein the device comprises a fixing component, a simulation test component and two displacement sensors, wherein the electric trigger type soft measuring head to be measured is fixed through the fixing component, the electric trigger type soft measuring head is tested by using the test simulation component, the motion of a measured object is simulated through a pushing part, two test positions which move together with the pushing part are arranged on the pushing part, the displacement of the two test positions is detected through the displacement sensors, and the calibration of the electric trigger type soft measuring head can be completed by calculating the test results of the two displacement sensors. Compared with the prior art, the test bit can reflect the rotation condition of the pushing part, and the two test bits are respectively arranged on two sides of the probe to maximally eliminate errors generated by rotation of the pushing part, so that the influence of Abbe errors on a calibration result is maximally eliminated, and the calibration result is more accurate.
Description
Technical Field
The invention relates to the technical field of precision measurement, in particular to an electric trigger type soft measuring head calibration device and a calibration method.
Background
The high-efficiency and high-precision machining technology is gradually an important factor for judging the state of modern industrial technology, an in-situ measurement system is established, and the integration of digital design, machining and measurement is an effective way for improving the manufacturing precision and efficiency of complex precise parts. Compared with a non-contact measurement method, the contact measurement has the advantages of high precision, high stability, high adaptability to measurement environment and the like, and at present, the contact measurement technology is widely applied to an in-situ measurement system.
The electric triggering type soft measuring head is a common contact type measurement together, and in the process from the moment that a measuring ball touches the surface of a measured workpiece to the moment that an electric signal is generated by a sensor, the measuring head and the measured workpiece have certain relative displacement, so that the generated measurement error is called as a 'pre-stroke error', and the most main error source of the electric triggering type soft measuring head is the pre-stroke amount under different triggering angles. Therefore, the calibration test is carried out on the pre-stroke quantity of the electric trigger type soft measuring head under each trigger angle, and the on-site measurement error compensation method of the electric trigger type soft measuring head is determined, so that the method has important significance in improving the measurement accuracy and the reliability of the measurement result.
Many students now have made many studies on calibration of electrically triggered soft probes, such as: in 2019, chen Weiqi et al designed a calibration system based on a three-dimensional micro macro mobile platform and a force transducer, simulated the trigger deformation process of a contact measuring head, and developed researches on the trigger force and the actual deformation of measuring heads of different types. 2021, yang Yanling et al designed a structural dimension optimization scheme for a contact probe, built a contact probe calibration model by using a coordinate transformation theory and a least square method theory, and performed a calibration experiment. However, the influence of abbe errors generated in the calibration process on the calibration result is not considered in the prior study.
Disclosure of Invention
In view of the foregoing, it is necessary to provide an electric triggering type soft probe calibration device and a calibration method for solving the problem that the existing calibration method does not consider the influence of abbe error.
In order to achieve the technical purpose, the invention adopts the following technical scheme:
in a first aspect, the present invention provides an electrically triggered soft probe calibration device, configured to calibrate an electrically triggered soft probe, where the electrically triggered soft probe includes a probe and a measurement ball, and the measurement ball is installed at an end of the probe, and includes:
the fixing component is connected with and fixes the electric triggering type soft measuring head;
the test simulation assembly is connected to the fixed assembly and comprises a movable pushing part, the pushing part is abutted against the test ball, two test positions are formed on the pushing part, and the two test positions are respectively located on two sides of the probe;
and the two displacement sensors are connected to the fixed assembly and are respectively used for detecting the displacement of the two test positions.
Further, the test simulation assembly comprises a sloping block micrometer, a sloping block of the sloping block micrometer is the pushing part, the inclined surface of the sloping block in the sloping block micrometer is abutted against the measuring ball, and the two test positions are all positioned on the inclined surface of the sloping block in the sloping block micrometer.
Further, the displacement sensor is a contact sensor, the detection end of the displacement sensor abuts against the pushing portion, the moving direction of the pushing portion when pushing the ball is perpendicular to the extending direction of the probe, and the detecting direction of the displacement sensor is the same as the moving direction of the pushing portion when pushing the ball.
Further, the connection line of the two test sites is perpendicular to the extending direction of the probe, and the distances from the two test sites to the probe are the same.
Further, the fixed component comprises a locking part and a rotating part, wherein the locking part is connected with the electric trigger type soft measuring head, the rotating part is connected with the locking part and is used for driving the locking part to drive the electric trigger type soft measuring head to rotate, and the rotation axis of the rotating part is coincident with the axis of the probe.
Further, the fixing assembly further comprises two magnetic gauge stands, and the two magnetic gauge stands are respectively connected with the two displacement sensors.
Further, the fixed assembly further comprises a workbench, and the test simulation assembly, the rotating part and the magnetic gauge stand are all connected to the workbench.
In a second aspect, the present invention further provides an electrical triggering type soft probe calibration method, using any one of the above electrical triggering type soft probe calibration devices, including:
step one, pushing the ball to be tested by using the pushing part, acquiring displacement amounts of two test positions on the pushing part, and resetting the pushing part;
step two, repeating the step one for a plurality of times to obtain a group of displacement;
step three, adjusting the pose of the electric triggering type soft measuring head, and repeating the step two to obtain a plurality of groups of displacement amounts;
step four, obtaining calibration parameters according to a plurality of groups of displacement quantities;
and fifthly, calibrating the electric triggering type soft measuring head according to the calibration parameters.
Further, the adjusting the pose of the electrically triggered soft gauge head includes:
and rotating the electric triggering type soft measuring head along the axis of the probe until the electric triggering type soft measuring head reaches a set position.
Further, the displacement is the displacement of the test bit along the movement direction of the pushing part, and the calibration parameters comprise a pre-stroke amount, a trigger stability parameter and an overall stability parameter.
The invention provides an electric triggering type soft measuring head calibration device and a calibration method, wherein an electric triggering type soft measuring head to be measured is fixed through a fixing component, a test simulation component is used for testing the electric triggering type soft measuring head, the motion of a measured object is simulated through a pushing part, two test positions which move together with the pushing part are arranged on the pushing part, displacement of the two test positions is detected through a displacement sensor, and the calibration of the electric triggering type soft measuring head can be completed by calculating the test results of the two displacement sensors. Compared with the prior art, the test bit can reflect the rotation condition of the pushing part, and the two test bits are respectively arranged on two sides of the probe to maximally eliminate errors generated by rotation of the pushing part, so that the influence of Abbe errors on a calibration result is maximally eliminated, and the calibration result is more accurate.
Drawings
FIG. 1 is a schematic diagram of an embodiment of an electrically triggered soft probe calibration device according to the present invention;
FIG. 2 is a flow chart of an embodiment of a calibration method for an electrically triggered soft probe according to the present invention;
fig. 3 is a schematic structural diagram of the calibration device for the electric triggering type soft measuring head in the detection process.
Detailed Description
Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form a part hereof, and together with the description serve to explain the principles of the invention, and are not intended to limit the scope of the invention.
In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the invention. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.
A trigger gauge head is a device for detecting the movement of a machine tool or some other article, the working principle of which is roughly: the active circuit is connected with a special trigger mechanism, and the trigger mechanism can cause the state change of the circuit and send out an acousto-optic signal to indicate the working state of the measuring head as long as the trigger mechanism generates trigger action. The only condition of the trigger mechanism for generating trigger action is that the probe of the probe generates tiny swing or moves towards the inside of the probe, when the probe is connected to the main shaft of the machine tool and moves along with the main shaft, the probe generates tiny swing or moves as long as the ball on the probe contacts with the surface of a workpiece (any solid material) in any direction, and the probe can generate an acousto-optic signal immediately to indicate the working state of the probe.
In the process from the moment that the measuring ball touches the surface of the measured workpiece to the moment that the sensor generates an electric signal, the measuring head and the measured workpiece have certain relative displacement, and the measurement error generated by the relative displacement is called as a pre-stroke error, and the main error source of the electric triggering type soft measuring head is the pre-stroke amount under different triggering angles. Therefore, calibration test is carried out on the pre-stroke quantity of the electric trigger type soft measuring head under each trigger angle, and an in-situ measurement error compensation method of the electric trigger type soft measuring head is determined.
However, the existing calibration method does not consider the influence of Abbe error, so that the calibration result is not accurate enough, the Abbe error means that the axis of the measuring instrument and the axis of the workpiece to be measured are on the same straight line, otherwise, an error is generated, and the error is called Abbe error. In the calibration process of the electrically triggered soft measuring head, the component for triggering the electrically triggered soft measuring head cannot be guaranteed to perform linear motion only, and usually can rotate slightly, so that Abbe errors are inevitably generated in the calibration process.
The Abbe error is eliminated by adopting the following modes:
the invention provides an electric triggering type soft measuring head calibration device and a calibration method, which are respectively described below.
Referring to fig. 1, in one embodiment of the present invention, an electrically triggered soft probe calibration device is disclosed for calibrating an electrically triggered soft probe 100, where the electrically triggered soft probe 100 includes a probe 101 and a ball 102, and the ball 102 is mounted at the end of the probe 101. The electric triggering type soft measuring head calibration device comprises a fixed component 1, a test simulation component 2 and a displacement sensor 3. The fixing assembly 1 is connected and fixes the electrically triggered soft measuring head 100, the test simulation assembly 2 is connected to the fixing assembly 1, the test simulation assembly 2 comprises a movable pushing portion 21, the pushing portion 21 abuts against the measuring ball 102, two test positions are formed on the pushing portion 21, and the two test positions are located on two sides of the probe 101 respectively. The number of the displacement sensors 3 is two, and the two displacement sensors 3 are connected to the fixed assembly 1 and are respectively used for detecting the displacement of the two test positions.
The invention provides an electric triggering type soft measuring head calibration device and a calibration method, wherein an electric triggering type soft measuring head 100 to be measured is fixed through a fixing component 1, the electric triggering type soft measuring head 100 is tested through a test simulation component 2, the motion of an object to be measured is simulated through a pushing part 21, two test positions which move together with the pushing part 21 are arranged on the pushing part 21, displacement of the two test positions is detected through a displacement sensor 3, and the calibration of the electric triggering type soft measuring head 100 can be completed by calculating the test results of the two displacement sensors 3. Compared with the prior art, the test bit in the invention can reflect the rotation condition of the pushing part 21, and the two test bits are respectively arranged at two sides of the probe 101 to maximally eliminate the error generated by the rotation of the pushing part 21, so that the influence of Abbe error on the calibration result is maximally eliminated, and the calibration result is more accurate.
As a preferred embodiment, the fixing assembly 1 in the electrical trigger type soft probe calibration device in this embodiment includes a locking portion 11 and a rotating portion 12, the locking portion 11 is connected to the electrical trigger type soft probe 100, the rotating portion 12 is connected to the locking portion 11, and is used for driving the locking portion 11 to drive the electrical trigger type soft probe 100 to rotate, and a rotation axis of the rotating portion 12 coincides with an axis of the probe 101. The locking part 11 is used for fixing the electrically triggered soft probe 100, and the rotating part 12 is used for adjusting the pose of the electrically triggered soft probe 100 so as to perform comprehensive detection. In this embodiment, the locking portion 11 is a locking blade holder, the rotating portion 12 is an R-axis rotating platform, and in practice, other components capable of achieving the above-mentioned functions may be used instead.
Further, the fixing assembly 1 in this embodiment further includes two magnetic gauges 13, and the two magnetic gauges 13 are respectively connected to the two displacement sensors 3. The magnetic gauge stand 13, also called universal gauge stand, is the most widely used in machine manufacturing industry, is widely applicable to various machine tools, is one of the indispensable detection tools, and is also applied to various scientific researches. Other components may be used to fix the displacement sensor 3 depending on the type of the displacement sensor 3.
The fixing assembly 1 in this embodiment further includes a workbench 14, and the test simulation assembly 2, the rotating portion 12, and the magnetic gauge stand 13 are all connected to the workbench 14, so as to perform the function of bearing other parts.
As a preferred embodiment, the test simulation module 2 in this embodiment includes a bevel block micrometer, wherein a bevel block of the bevel block micrometer is the pushing portion 21, an inclined surface of the bevel block in the bevel block micrometer abuts against the ball 102, and both the test positions are located on the inclined surface of the bevel block in the bevel block micrometer. The oblique block micrometer can simulate tiny movement, namely when the handle of the oblique block micrometer is rotated, the oblique block in the oblique block micrometer can move along the x-axis direction in fig. 1, and the surface of the oblique block micrometer, which is contacted with the measuring ball 102, is inclined, so that the measuring ball 102 can move along the y-axis direction in fig. 1, and the large displacement of the oblique block along the y-axis direction can be converted into the small displacement along the x-axis direction through the inclination proportion of the surface of the oblique block, so that accurate control is realized.
The test sites are located on the surface of the inclined block, which is contacted with the ball 102, and two micro areas which are located on two sides of the probe 101 and can be regarded as point positions move along with the pushing part 21, when the pushing part 21 rotates slightly, the displacement of the two test sites reflects the rotation condition of the pushing part 21 and abbe error between the two test sites and the probe 101. In practice, the test site may be another position on the pushing portion 21, and only needs to be able to move along with the pushing portion 21, and the displacement sensor 3 may be able to detect the displacement.
As a preferred embodiment, the connection line of the two test sites in this embodiment is perpendicular to the extending direction of the probe 101, and the distances between the two test sites and the probe 101 are the same. Because the inclined block type micrometer is selected as the workpiece for simulating the motion in the embodiment, the workpiece mainly rotates in the yoz plane in fig. 1, the subsequent calculation can be facilitated by adopting the design mode, and the calculation process for eliminating the error is simpler and more convenient. In practice, the specific setting positions of the two test sites can be adjusted according to the direction in which the pushing portion 21 generates the deflection error.
As a preferred embodiment, the displacement sensor 3 in this embodiment is a contact sensor, the detection end of the displacement sensor 3 abuts against the pushing portion 21, the moving direction of the pushing portion 21 when pushing the ball 102 is perpendicular to the extending direction of the probe 101, and the detecting direction of the displacement sensor 3 is the same as the moving direction of the pushing portion 21 when pushing the ball 102. Likewise, the detection direction of the displacement sensor 3 in this embodiment can also facilitate subsequent calculation.
Referring to fig. 2, the present invention further provides an electrical triggering type soft probe calibration method, which uses the electrical triggering type soft probe calibration device in the above embodiment, including:
s201, pushing the ball 102 by using the pushing part 21, obtaining displacement amounts of two test positions on the pushing part 21, and resetting the pushing part 21;
s202, repeating the step S201 for a plurality of times to obtain a group of displacement amounts;
s203, adjusting the pose of the electric triggering type soft measuring head 100, and repeating the step S202 to obtain a plurality of groups of displacement amounts;
s204, obtaining calibration parameters according to a plurality of groups of displacement quantities;
s205, calibrating the electric triggering type soft measuring head 100 according to the calibration parameters.
The technical effects achieved by this method can be seen in the above embodiments, and will not be described here too much.
Referring to fig. 3, in steps S201 to S203 in the present embodiment, the center of the sphere 102 is used as the calibration reference origin, the extending direction of the probe 101 is used as the x-axis, the detecting direction of the displacement sensor 3 is used as the y-axis, and the coordinate system is established, and the center of the sphere 102, i.e. the coordinate of the calibration reference origin, is O p (O px ,O py ,O pz ) Let the sphere radius of the measuring sphere 102 be r p The coordinates of the contact point of the sphere 102 and the proof mass micrometer are:
o in Tx 、O Ty 、O Tz The coordinates of the contact points of the sphere 102 and the proof mass micrometer in the x, y, and z axes, respectively.
The measurement points of the two displacement sensors 3 are used as the starting points of the measuring range, and the coordinates of the contact points of the displacement sensors 3 and the inclined blocks are respectively as follows:
in which A Sx 、A Sy 、A Sz The coordinates of the contact point of the displacement sensor 3 and the inclined block on the x, y and z axes are respectively shown, and deltaz is the distance between the measuring point of the displacement sensor 3 and the center of the measuring ball 102 along the z axis direction;
in B of Sx 、B Sy 、B Sz Coordinates of the contact point of the other displacement sensor 3 and the sloping block on x, y and z axes respectively;
the differential screw of the inclined block type micrometer is adjusted to enable the inclined block to move along the direction of the x axis, meanwhile, the inclined block generates an offset delta y along the direction of the y axis, and meanwhile, the inclined block rotates around the x axis to generate Abbe errors, and the rotation angle is alpha. The readings of the two displacement sensors 3 at this time are the expected displacement of the test bit, which can be expressed as:
in the middle of
The readings of the two displacement sensors 3 are respectively, specifically, when the drum reading of the R-axis rotating platform is j, the reading when the step S202 is repeatedly executed for the ith time, and Δztan α is the difference between the test position and the bevel block and is related to the abbe arm length.
Specifically, in step S201 and step S202, the inclined block micrometer needs to be reset after each test, and the next test is ready to be performed until n repetitions are completed.
In step S203, the specific means for adjusting the pose is to rotate the electrically triggered soft probe 100 along the axis of the probe 101, that is, operate the R-axis rotating platform to rotate the electrically triggered soft probe 100 until the electrically triggered soft probe 100 reaches the set position, record the drum reading number of the R-axis rotating platform at the set position as j, and then start to execute step S202, and after the execution is completed, continue to adjust the electrically triggered soft probe 100 to the next set position. This step is accomplished when the electrically triggered soft probe 100 is rotated 360 °, where j may be a number of discrete points within 360 ° and the total number is m.
Further, in a preferred embodimentIn an embodiment, the calibration parameters obtained in step S204 include a pre-stroke amount μ j Trigger stability parameter delta j And an overall stability parameter δ, specifically expressed as:
wherein the amount of pre-stroke mu j Mean value of bias vector of ball 102 under the same test angle j, triggering stability parameter delta j The overall stability parameter δ represents the overall problem capability of the electrically triggered soft probe 100, indicating the stability capability of the electrically triggered soft probe 100 at the trigger angle j.
After the three parameters are obtained, step S205 may be executed to calibrate the electric triggering type soft probe 100, and the specific calibration method is the prior art, which is not described in the present invention. It should be noted that, in the above steps, the calibration parameters are obtained through the readings of the two displacement sensors 3, and the readings of the two displacement sensors 3 include the abbe error information, so that the combination of the readings of the two displacement sensors 3 can maximally eliminate the influence of the abbe error on the measurement data, so that the finally obtained calibration parameters are most accurate.
In a preferred embodiment, before step S201 is performed, a trigger test is performed on the entire electric trigger type soft probe calibration device model to detect whether it can operate normally.
A specific set of experimental data obtained by the present method is given below:
readings of the two displacement sensors 3 when j=0°, n=6:
readings of the two displacement sensors 3 when j=120°, n=6:
readings of the two displacement sensors 3 when j=240°, n=6:
calibration parameters obtained according to the data:
the invention provides an electric triggering type soft measuring head calibration device and a calibration method, wherein an electric triggering type soft measuring head 100 to be measured is fixed through a fixing component 1, the electric triggering type soft measuring head 100 is tested through a test simulation component 2, the motion of an object to be measured is simulated through a pushing part 21, two test positions which move together with the pushing part 21 are arranged on the pushing part 21, displacement of the two test positions is detected through a displacement sensor 3, and the calibration of the electric triggering type soft measuring head 100 can be completed by calculating the test results of the two displacement sensors 3. Compared with the prior art, the test bit in the invention can reflect the rotation condition of the pushing part 21, and the two test bits are respectively arranged at two sides of the probe 101 to maximally eliminate the error generated by the rotation of the pushing part 21, so that the influence of Abbe error on the calibration result is maximally eliminated, and the calibration result is more accurate.
In this specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, so that the same or similar parts between the embodiments are referred to each other.
The present invention is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention.
Claims (7)
1. An electric trigger type soft measuring head calibration device is used for calibrating an electric trigger type soft measuring head, the electric trigger type soft measuring head comprises a probe and a measuring ball, and the measuring ball is arranged at the tail end of the probe and is characterized by comprising:
the fixing component is connected with and fixes the electric triggering type soft measuring head;
the test simulation assembly is connected to the fixed assembly and comprises a movable pushing part, the pushing part is abutted against the test ball, two test positions are formed on the pushing part, and the two test positions are respectively located on two sides of the probe; the test simulation assembly comprises a sloping block micrometer, wherein a sloping block of the sloping block micrometer is the pushing part, the inclined surface of the sloping block in the sloping block micrometer is abutted against the measuring ball, two test positions are positioned on the inclined surface of the sloping block in the sloping block micrometer, the connecting line of the two test positions is perpendicular to the extending direction of the probe, and the distances from the two test positions to the probe are the same;
the two displacement sensors are connected to the fixing assembly and are respectively used for detecting the displacement of the two test positions, the displacement sensors are contact type sensors, the detection ends of the displacement sensors are abutted to the pushing portions, the moving direction of the pushing portions when pushing the ball to be tested is perpendicular to the extending direction of the probe, and the detecting direction of the displacement sensors is the same as the moving direction of the pushing portions when pushing the ball to be tested.
2. The device for calibrating an electrically triggered soft measuring head according to claim 1, wherein the fixing assembly comprises a locking part and a rotating part, the locking part is connected to the electrically triggered soft measuring head, the rotating part is connected to the locking part, the locking part is driven to rotate the electrically triggered soft measuring head, and the rotation axis of the rotating part is coincident with the axis of the probe.
3. The device of claim 2, wherein the fixing assembly further comprises two magnetic gauges, and the two magnetic gauges are respectively connected to the two displacement sensors.
4. An electrically triggered soft gauge head calibration apparatus as claimed in claim 3, wherein the fixed assembly further comprises a table to which the test simulation assembly, the rotatable portion and the magnetic gauge stand are all connected.
5. An electric triggering type soft measuring head calibrating method, which uses the electric triggering type soft measuring head calibrating device according to any one of claims 1-4, and is characterized by comprising the following steps:
step one, pushing the ball to be tested by using the pushing part, acquiring displacement amounts of two test positions on the pushing part, and resetting the pushing part;
step two, repeating the step one for a plurality of times to obtain a group of displacement;
step three, adjusting the pose of the electric triggering type soft measuring head, and repeating the step two to obtain a plurality of groups of displacement amounts;
step four, obtaining calibration parameters according to a plurality of groups of displacement quantities;
and fifthly, calibrating the electric triggering type soft measuring head according to the calibration parameters.
6. The method for calibrating an electrically triggered soft probe according to claim 5, wherein said adjusting the pose of the electrically triggered soft probe comprises:
and rotating the electric triggering type soft measuring head along the axis of the probe until the electric triggering type soft measuring head reaches a set position.
7. The method according to claim 6, wherein the displacement is a displacement of the test site along a movement direction of the pushing portion, and the calibration parameters include a pre-stroke amount, a trigger stability parameter, and an overall stability parameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210630754.XA CN114877840B (en) | 2022-06-06 | 2022-06-06 | Electric triggering type soft measuring head calibration device and calibration method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210630754.XA CN114877840B (en) | 2022-06-06 | 2022-06-06 | Electric triggering type soft measuring head calibration device and calibration method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114877840A CN114877840A (en) | 2022-08-09 |
| CN114877840B true CN114877840B (en) | 2023-07-14 |
Family
ID=82679354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210630754.XA Active CN114877840B (en) | 2022-06-06 | 2022-06-06 | Electric triggering type soft measuring head calibration device and calibration method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114877840B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103659467A (en) * | 2013-11-15 | 2014-03-26 | 西安理工大学 | Method for calibrating axial prestroke of touch-type measuring head |
| CN109253710A (en) * | 2018-10-12 | 2019-01-22 | 太原理工大学 | A kind of REVO gauge head A axis error of zero scaling method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI267622B (en) * | 2005-12-28 | 2006-12-01 | Ind Tech Res Inst | Measuring system with zero Abbe error and method thereof |
| CN106771979B (en) * | 2016-12-30 | 2019-07-02 | 南京协辰电子科技有限公司 | A kind of calibration method of double probe flying probe devices |
| CN107655410B (en) * | 2017-10-31 | 2023-08-22 | 合肥工业大学 | Abbe principle-based precise measurement teaching instrument |
| CN111397555A (en) * | 2020-04-14 | 2020-07-10 | 中国计量科学研究院 | Parameter error measuring method and system of trigger type measuring head |
| CN112846936A (en) * | 2020-12-31 | 2021-05-28 | 广州铁路职业技术学院（广州铁路机械学校） | Method for calibrating accuracy of trigger type measuring head in on-machine detection |
-
2022
- 2022-06-06 CN CN202210630754.XA patent/CN114877840B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103659467A (en) * | 2013-11-15 | 2014-03-26 | 西安理工大学 | Method for calibrating axial prestroke of touch-type measuring head |
| CN109253710A (en) * | 2018-10-12 | 2019-01-22 | 太原理工大学 | A kind of REVO gauge head A axis error of zero scaling method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114877840A (en) | 2022-08-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109655023B (en) | System for determining the state of a tool positioning machine | |
| US7079969B2 (en) | Dynamic artefact comparison | |
| JP3005681B1 (en) | CMM calibration gauge and CMM calibration method | |
| CN110948522B (en) | Industrial robot space pose measuring mechanism and measuring method based on stay wire rotation sensor | |
| US7885777B2 (en) | Probe calibration | |
| US7131207B2 (en) | Workpiece inspection method | |
| US20040244464A1 (en) | Calibration of a probe | |
| JP2016048262A (en) | Calibration method and apparatus | |
| JPH02284216A (en) | Analog probe correcting method and instrument for the same | |
| US20080028626A1 (en) | Use Of Surface Measurement Probes | |
| US5649368A (en) | Method for calibrating a coordinate measuring apparatus having two pivot axes | |
| JPH06213653A (en) | Measurement for workpiece using surface contact measuring probe | |
| JP2020046301A (en) | Measuring error evaluation method and program of machine tool | |
| CN112344895B (en) | Method for establishing and calibrating multi-parameter model of articulated arm coordinate measuring machine | |
| CN114234877A (en) | Displacement sensor vector calibration method for R-test instrument | |
| CN113733102A (en) | Error calibration device and method for industrial robot | |
| CN114877840B (en) | Electric triggering type soft measuring head calibration device and calibration method | |
| CN101166953B (en) | Probe calibration | |
| Oh | Robot accuracy evaluation using a ball-bar link system | |
| JP2008524576A (en) | Sequential multi-probe method for straightness measurement of straight rulers | |
| JPH02504427A (en) | Test bar for positioning device | |
| Ouyang et al. | Ball array calibration on a coordinate measuring machine using a gage block | |
| Yagüe et al. | Development and calibration of self-centring probes for assessing geometrical errors of machines | |
| CN110030963B (en) | REVO measuring head probe length calibration method | |
| CN115077458B (en) | Lever ball type universal precision measuring method for rotary part section bending eccentric |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |