CN114877840A - Electrical triggering type soft measuring head calibration device and calibration method - Google Patents

Electrical triggering type soft measuring head calibration device and calibration method Download PDF

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Publication number
CN114877840A
CN114877840A CN202210630754.XA CN202210630754A CN114877840A CN 114877840 A CN114877840 A CN 114877840A CN 202210630754 A CN202210630754 A CN 202210630754A CN 114877840 A CN114877840 A CN 114877840A
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measuring head
test
trigger type
displacement
probe
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CN114877840B (en
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卢红
代家舜
刘琪
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Wuhan University of Technology WUT
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Wuhan University of Technology WUT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042Calibration or calibration artifacts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045Correction of measurements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047Accessories, e.g. for positioning, for tool-setting, for measuring probes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

Abstract

The invention relates to an electric trigger type soft measuring head calibration device and a calibration method, wherein the device comprises a fixing component, a simulation test component and two displacement sensors, the electric trigger type soft measuring head to be measured is fixed through the fixing component, the electric trigger type soft measuring head is tested by using the test simulation component, the movement of an object to be measured is simulated through a pushing part, two test positions which move together with the pushing part are arranged on the pushing part, the displacement of the two test positions is detected through the displacement sensors, and the calibration of the electric trigger type soft measuring head can be completed by calculating the test results of the two displacement sensors. Compared with the prior art, the test positions can reflect the rotation condition of the pushing part, and the two test positions are respectively arranged on the two sides of the probe to maximally eliminate the error generated by the rotation of the pushing part, so that the influence of Abbe error on the calibration result is maximally eliminated, and the calibration result is more accurate.

Description

Electrical triggering type soft measuring head calibration device and calibration method
Technical Field
The invention relates to the technical field of precision measurement, in particular to an electric trigger type soft measuring head calibration device and a calibration method.
Background
The high-efficiency and high-precision machining technology gradually becomes an important factor for judging the technical level of the national modern industry, an in-situ measurement system is established, and the realization of the integration of digital design, machining and measurement is an effective way for improving the manufacturing precision and efficiency of complex precision parts. Compared with a non-contact measurement method, the contact measurement method has the advantages of high precision, strong stability, strong adaptability to measurement environment and the like, and at present, the contact measurement technology is widely applied to in-situ measurement systems.
The electrical triggering type soft measuring head is a common contact type measuring device, and in the process from the moment that a measuring ball touches the surface of a measured workpiece to the moment that a sensor generates an electric signal, a certain relative displacement exists between the measuring head and the measured workpiece, so that the generated measuring error is called as a pre-stroke error, and the most main error source of the electrical triggering type soft measuring head is the pre-stroke amount under different triggering angles. Therefore, the method for calibrating and testing the pre-stroke amount of the electric trigger type soft measuring head under each trigger angle and determining the in-situ measurement error compensation method of the electric trigger type soft measuring head have important significance for improving the measurement precision and the measurement result reliability of the electric trigger type soft measuring head.
Many studies have been made by many scholars on the calibration of an electrically triggered flexible probe, for example: in 2019, Chenvianqi et al designed a calibration system based on a three-dimensional micro-macro mobile platform and a force transducer, simulated the triggering deformation process of a contact measuring head, and developed researches on the triggering force and the actual deformation of measuring heads of different types. In 2021, Yangling et al designed a contact probe structure size optimization scheme, and established a contact probe calibration model by using a coordinate transformation theory and a least square method principle and performed a calibration experiment. However, the influence of abbe error generated during calibration on the calibration result is not considered in the existing research.
Disclosure of Invention
In view of this, it is necessary to provide an electrical triggering type calibration apparatus and a calibration method for a flexible probe, so as to solve the problem that the influence of abbe error is not considered in the conventional calibration method.
In order to achieve the technical purpose, the invention adopts the following technical scheme:
in a first aspect, the present invention provides an electrical trigger type soft measuring head calibration apparatus, configured to calibrate an electrical trigger type soft measuring head, where the electrical trigger type soft measuring head includes a probe and a measuring ball, and the measuring ball is installed at a tail end of the probe, and includes:
the fixing component is connected with and fixes the electric trigger type soft measuring head;
the test simulation assembly is connected with the fixed assembly and comprises a movable pushing part, the pushing part is abutted against the test ball, two test positions are formed on the pushing part, and the two test positions are respectively positioned on two sides of the probe;
and the two displacement sensors are connected to the fixed assembly and are respectively used for detecting the displacement of the two test positions.
Furthermore, the test simulation assembly comprises an inclined block type micrometer, an inclined block of the inclined block type micrometer is the pushing portion, an inclined surface of an inclined block in the inclined block type micrometer abuts against the measuring ball, and the two test positions are located on the inclined surface of the inclined block in the inclined block type micrometer.
Further, displacement sensor is contact sensor, displacement sensor's sense terminal butt push portion, push portion promotes the moving direction perpendicular to when surveying the ball the extending direction of probe, displacement sensor's detection direction with push portion promotes the moving direction when surveying the ball is the same.
Furthermore, a connecting line of the two test bits is perpendicular to the extending direction of the probe, and distances from the two test bits to the probe are the same.
Further, fixed subassembly includes sticking department and rotating part, the sticking department connect in the soft gauge head of electricity trigger formula, the rotating part connect in the sticking department is used for the drive the sticking department drives the soft gauge head of electricity trigger formula is rotatory, the axis of rotation of rotating part with the axis coincidence of probe.
Furthermore, the fixed component further comprises two magnetic gauge stands, and the two magnetic gauge stands are respectively connected with the two displacement sensors.
Further, fixed subassembly still includes the workstation, test simulation subassembly the rotating part with the magnetism gauge stand all connect in on the workstation.
In a second aspect, the present invention further provides an electrical trigger type soft measurement head calibration method, where any one of the above electrical trigger type soft measurement head calibration apparatuses is used, including:
step one, using the pushing part to push the test ball, acquiring the displacement of two test positions on the pushing part, and resetting the pushing part;
step two, repeating the step one for a plurality of times to obtain a group of displacement;
step three, adjusting the pose of the electric trigger type soft measuring head, and repeatedly performing the step two to obtain a plurality of groups of displacement quantities;
fourthly, obtaining calibration parameters according to the multiple groups of displacement;
and fifthly, calibrating the electric trigger type soft measuring head according to the calibration parameters.
Further, the adjustment the position appearance of the soft gauge head of electricity trigger formula includes:
and rotating the electric trigger type soft measuring head along the axis of the probe until the electric trigger type soft measuring head reaches a set position.
Further, the displacement is displacement of the test position along the movement direction of the pushing part, and the calibration parameters include a pre-stroke amount, a trigger stability parameter and an overall stability parameter.
The invention provides an electric trigger type soft measuring head calibration device and a calibration method, wherein a fixed component is used for fixing an electric trigger type soft measuring head to be measured, a test simulation component is used for testing the electric trigger type soft measuring head, the movement of an object to be measured is simulated through a pushing part, two test positions which move together with the pushing part are arranged on the pushing part, the displacement of the two test positions is detected through a displacement sensor, and the calibration of the electric trigger type soft measuring head can be completed by calculating the test results of the two displacement sensors. Compared with the prior art, the test positions can reflect the rotation condition of the pushing part, and the two test positions are respectively arranged on the two sides of the probe to maximally eliminate the error generated by the rotation of the pushing part, so that the influence of Abbe error on the calibration result is maximally eliminated, and the calibration result is more accurate.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of an electrical trigger type soft measurement head calibration apparatus provided in the present invention;
fig. 2 is a flowchart of a method of calibrating an electrically triggered flexible probe according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of the electrical trigger type flexible probe calibration apparatus provided in the present invention during the detection.
Detailed Description
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate preferred embodiments of the invention and together with the description, serve to explain the principles of the invention and not to limit the scope of the invention.
In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the invention. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
A trigger probe is a device for detecting the movement of a machine tool or some other object, which operates on the principle of: the inside of the measuring head is provided with a closed active circuit which is connected with a special trigger mechanism, and as long as the trigger mechanism generates trigger action, the state of the circuit is changed and acousto-optic signals are sent out to indicate the working state of the measuring head. The trigger mechanism generates the only condition of the trigger action that the probe of the measuring head generates tiny swing or moves towards the inside of the measuring head, when the measuring head is connected to a main shaft of a machine tool and moves along with the main shaft, as long as a measuring ball on the measuring needle contacts with the surface of a workpiece (any solid material) in any direction, the measuring needle generates tiny swing or movement, and the measuring head can immediately generate an acousto-optic signal to indicate the working state of the measuring head.
In the process from the moment that the measuring ball touches the surface of the workpiece to be measured to the moment that the sensor generates an electric signal, the measuring head and the workpiece to be measured have certain relative displacement, the measuring error generated by the relative displacement is called as a pre-stroke error, and the most main error source of the electric trigger type soft measuring head is the pre-stroke amount under different trigger angles. Therefore, the pre-stroke amount of the electric trigger type soft measuring head under each trigger angle is subjected to calibration test, and the error compensation method for the in-situ measurement of the electric trigger type soft measuring head is determined.
However, the existing calibration method does not consider the influence of the abbe error, so that the calibration result is not accurate enough, the abbe error means that the axis of the measuring instrument and the axis of the workpiece to be measured are required to be on the same straight line, otherwise, an error is generated, and the error is called the abbe error. In the calibration process of the electrical trigger type soft measuring head, because the component for triggering the electrical trigger type soft measuring head cannot be guaranteed to move only in a straight line, the component usually rotates slightly, and the generation of abbe errors is inevitable in the calibration process.
In the invention, the Abbe error is eliminated by adopting the following modes:
the invention provides an electric trigger type soft measuring head calibration device and a calibration method, which are respectively explained below.
Referring to fig. 1, an embodiment of the present invention discloses an electrical trigger type soft measurement head calibration apparatus, which is used for calibrating an electrical trigger type soft measurement head 100, where the electrical trigger type soft measurement head 100 includes a probe 101 and a ball 102, and the ball 102 is mounted at a tail end of the probe 101. The electric trigger type soft measuring head calibration device comprises a fixed component 1, a test simulation component 2 and a displacement sensor 3. Wherein fixed subassembly 1 connects and fixes electricity trigger formula soft gauge head 100, test simulation subassembly 2 connect in fixed subassembly 1, test simulation subassembly 2 includes mobilizable promotion portion 21, promotion portion 21 butt survey ball 102, be formed with two test positions on the promotion portion 21, two the test position is located respectively the both sides of probe 101. The quantity of displacement sensor 3 is two, two displacement sensor 3 all connect in fixed subassembly 1 is used for detecting two respectively the displacement of test position.
The invention provides an electric trigger type soft measuring head calibration device and a calibration method, wherein a fixed component 1 is used for fixing an electric trigger type soft measuring head 100 to be measured, a test simulation component 2 is used for testing the electric trigger type soft measuring head 100, the movement of an object to be measured is simulated through a pushing part 21, two test positions moving together with the pushing part 21 are arranged on the pushing part 21, the displacement of the two test positions is detected through a displacement sensor 3, and the calibration of the electric trigger type soft measuring head 100 can be completed by calculating the test result of the two displacement sensors 3. Compared with the prior art, the test positions in the invention can reflect the rotation condition of the pushing part 21, and the two test positions are respectively arranged at the two sides of the probe 101 to maximally eliminate the error generated by the rotation of the pushing part 21, so that the influence of Abbe error on the calibration result is maximally eliminated, and the calibration result is more accurate.
As a preferred embodiment, the fixing assembly 1 in the electrical trigger type flexible probe calibration device in this embodiment includes a locking portion 11 and a rotating portion 12, where the locking portion 11 is connected to the electrical trigger type flexible probe 100, the rotating portion 12 is connected to the locking portion 11 and is configured to drive the locking portion 11 to drive the electrical trigger type flexible probe 100 to rotate, and a rotation axis of the rotating portion 12 coincides with an axis of the probe 101. The locking portion 11 is used to fix the electrical trigger type flexible probe 100, and the rotating portion 12 is used to adjust the pose of the electrical trigger type flexible probe 100 for overall detection. In the embodiment, the locking part 11 is a tool holder, and the rotating part 12 is an R-axis rotating platform, but other parts capable of achieving the above-mentioned functions may be used instead.
Further, the fixing assembly 1 in this embodiment further includes two magnetic gauge stands 13, and the two magnetic gauge stands 13 are respectively connected to the two displacement sensors 3. The magnetic gauge stand 13, also called a universal gauge stand, is the most used in the machine manufacturing industry, widely applied to various machine tools, is one of essential detection tools, and is also applied to various scientific researches. Other parts may be used to fix the displacement sensor 3 depending on the type of the displacement sensor 3.
In this embodiment, the fixing assembly 1 further includes a workbench 14, and the test simulation assembly 2, the rotating portion 12 and the magnetic meter base 13 are all connected to the workbench 14 to play a role in bearing other parts.
As a preferred embodiment, the test simulation module 2 in this embodiment includes an inclined block type micrometer, an inclined block of the inclined block type micrometer is the pushing portion 21, an inclined surface of an inclined block in the inclined block type micrometer abuts against the ball 102, and both of the test positions are located on the inclined surface of the inclined block in the inclined block type micrometer. The inclined block type micrometer can simulate tiny movement, namely when a handle of the inclined block type micrometer is rotated, an inclined block in the inclined block type micrometer can move along the x-axis direction in the figure 1, and the measuring ball 102 can move along the y-axis direction in the figure 1 due to the inclined surface contacted with the measuring ball 102, so that the large displacement of the inclined block along the y-axis direction can be converted into small displacement along the x-axis direction through the inclined proportion of the surface of the inclined block, and accurate control is realized.
The test sites are located on the surface of the tilted block contacting the ball 102, and two tiny areas, which can be regarded as point locations, located on both sides of the probe 101 move together with the pushing portion 21, when the pushing portion 21 rotates slightly, the displacement of the two test sites will reflect the rotation of the pushing portion 21 and the abbe error between the two test sites and the probe 101. In practice, the test site may be at another position on the pushing portion 21, and only needs to be able to move along with the pushing portion 21 and to be able to detect the displacement by the displacement sensor 3.
As a preferred embodiment, a connection line of the two test bits in this embodiment is perpendicular to an extending direction of the probe 101, and distances from the two test bits to the probe 101 are the same. Because the work piece of using the sloping block micrometer to simulate motion is selected to this embodiment, it mainly can take place to rotate in the yoz plane in fig. 1, so adopt above-mentioned design can make things convenient for subsequent calculation, in the computational process of eliminating the error more simple and convenient. In practice, the specific positions of the two test positions can be adjusted according to the direction of the deflection error of the pushing part 21.
In a preferred embodiment, the displacement sensor 3 in this embodiment is a contact sensor, the detection end of the displacement sensor 3 abuts against the pushing portion 21, the moving direction of the pushing portion 21 when pushing the ball 102 is perpendicular to the extending direction of the probe 101, and the detection direction of the displacement sensor 3 is the same as the moving direction of the pushing portion 21 when pushing the ball 102. Similarly, the detection direction of the displacement sensor 3 in the present embodiment can facilitate subsequent calculation.
With reference to fig. 2, the present invention further provides an electrical trigger type soft probe calibration method, where the method uses the electrical trigger type soft probe calibration apparatus in the foregoing embodiment, and the method includes:
s201, pushing the test ball 102 by using the pushing part 21, obtaining the displacement of two test positions on the pushing part 21, and resetting the pushing part 21;
s202, repeating the step S201 for a plurality of times to obtain a group of displacement;
s203, adjusting the pose of the electric trigger type soft measuring head 100, and repeating the step S202 to obtain a plurality of groups of displacement;
s204, obtaining calibration parameters according to the multiple groups of displacement;
and S205, calibrating the electrical trigger type flexible measuring head 100 according to the calibration parameters.
The technical effect achieved by the method can be seen from the above examples, which will not be described herein too much.
Referring to fig. 3, as a preferred embodiment, in steps S201 to S203 of this embodiment, a coordinate system is established with the center of the sphere 102 as a calibration reference origin, the extending direction of the probe 101 as an x-axis, and the detecting direction of the displacement sensor 3 as a y-axis, and the center of the sphere 102, i.e. the coordinate of the calibration reference origin, is O p (O px ,O py ,O pz ) Let the sphere radius of the measuring sphere 102 be r p The coordinates of the contact point of the ball 102 and the inclinometer are as follows:
Figure BDA0003679533580000091
in the formula O Tx 、O Ty 、O Tz The coordinates of the contact point of the ball 102 and the inclinometer are on the x, y and z axes, respectively.
Taking the measuring points of the two displacement sensors 3 as the starting points of the measuring range, the coordinates of the contact points of the displacement sensors 3 and the inclined block are respectively as follows:
Figure BDA0003679533580000092
in the formula A Sx 、A Sy 、A Sz Coordinates of a contact point of one displacement sensor 3 and the inclined block on x, y and z axes are respectively, and delta z is the distance between a measuring point of the displacement sensor 3 and the center of the measuring ball 102 along the z axis direction;
Figure BDA0003679533580000093
in the formula B Sx 、B Sy 、B Sz Coordinates of a contact point of the other displacement sensor 3 and the oblique block on x, y and z axes respectively;
the differential screw of the inclined block type micrometer is adjusted to enable the inclined block to move along the direction of the x axis, meanwhile, the inclined block generates an offset delta y in the direction of the y axis, and meanwhile, the inclined block also rotates around the x axis to generate an Abbe error, and the rotation angle is alpha. At this time, the readings of the two displacement sensors 3 are the displacement of the expected test bit, which can be respectively expressed as:
Figure BDA0003679533580000094
in the formula
Figure BDA0003679533580000095
Respectively, the readings of two displacement sensors 3Specifically, when the drum reading of the R-axis rotation platform is j, the reading at the time of performing step S202 repeatedly for the ith time, and Δ ztan α is the difference between the test bit and the swash block in relation to the abbe arm length.
Specifically, in step S201 and step S202, the inclined block type micrometer needs to be reset after each test, and the next test is ready to be performed until n times of repetition are completed.
In step S203, the specific means for adjusting the pose is to rotate the electrical trigger type flexible probe 100 along the axis of the probe 101, that is, operate the R-axis rotating platform to rotate the electrical trigger type flexible probe 100 until the electrical trigger type flexible probe 100 reaches the set position, record the drum reading of the R-axis rotating platform at the set position as j, and then start to execute step S202, and after the execution is completed, continue to adjust the electrical trigger type flexible probe 100 to the next set position. This step may be accomplished when the electrically triggered flexible test head 100 is rotated 360 °, where j may be a plurality of discrete points within 360 ° and the total number is m.
Further, in a preferred embodiment, the calibration parameters obtained in step S204 include the amount of pre-stroke μ j Trigger stability parameter delta j And an overall stability parameter δ, specifically expressed as:
Figure BDA0003679533580000101
Figure BDA0003679533580000102
wherein the pre-stroke amount mu j Represents the mean value of the bias vectors of the test ball 102 under the same test angle j, and triggers the stability parameter delta j The stability of the electrically triggered flexible probe 100 at the trigger angle j is shown, and the overall stability parameter δ shows the overall problem capability of the electrically triggered flexible probe 100.
After the three parameters are obtained, step S205 may be executed to calibrate the electrical trigger type flexible measuring head 100, where a specific calibration method is the prior art, and a description thereof is not provided in the present invention. It should be noted that in the above steps, the calibration parameters are obtained through the readings of the two displacement sensors 3, the readings of the two displacement sensors 3 include abbe error information, and the combination of the readings of the two displacement sensors 3 can maximally eliminate the influence of the abbe error on the measured data, so that the finally obtained calibration parameters are most accurate.
In a preferred embodiment, before step S201 is executed, a test is triggered on the model of the whole electrical trigger type soft measuring head calibration apparatus to detect whether the model can normally operate.
A specific set of experimental data obtained by the present method is given below:
the readings of the two displacement sensors 3 when j is 0 ° and n is 6:
Figure BDA0003679533580000111
the readings of the two displacement sensors 3 when j is 120 °, n is 6:
Figure BDA0003679533580000112
the readings of two displacement sensors 3 when j is 240 ° and n is 6:
Figure BDA0003679533580000113
and obtaining calibration parameters according to the data:
Figure BDA0003679533580000114
the invention provides an electric trigger type soft measuring head calibration device and a calibration method, wherein a fixed component 1 is used for fixing an electric trigger type soft measuring head 100 to be measured, a test simulation component 2 is used for testing the electric trigger type soft measuring head 100, the movement of an object to be measured is simulated through a pushing part 21, two test positions moving together with the pushing part 21 are arranged on the pushing part 21, the displacement of the two test positions is detected through a displacement sensor 3, and the calibration of the electric trigger type soft measuring head 100 can be completed by calculating the test result of the two displacement sensors 3. Compared with the prior art, the test positions in the invention can reflect the rotation condition of the pushing part 21, and the two test positions are respectively arranged at the two sides of the probe 101 to maximally eliminate the error generated by the rotation of the pushing part 21, so that the influence of Abbe error on the calibration result is maximally eliminated, and the calibration result is more accurate.
The embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same or similar parts among the embodiments are referred to each other.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.

Claims (10)

1. The utility model provides a soft gauge head calibration device of electricity trigger formula for mark the soft gauge head of electricity trigger formula, the soft gauge head of electricity trigger formula includes the probe and surveys the ball, survey the ball install in the probe is terminal, its characterized in that includes:
the fixing component is connected with and fixes the electric trigger type soft measuring head;
the test simulation assembly is connected with the fixed assembly and comprises a movable pushing part, the pushing part is abutted against the test ball, two test positions are formed on the pushing part, and the two test positions are respectively positioned on two sides of the probe;
and the two displacement sensors are connected to the fixed assembly and are respectively used for detecting the displacement of the two test positions.
2. The apparatus according to claim 1, wherein the test simulation module comprises a block-type micrometer, an inclined block of the block-type micrometer is the pushing portion, an inclined surface of an inclined block of the block-type micrometer abuts against the ball, and both of the test positions are located on the inclined surface of the inclined block of the block-type micrometer.
3. The apparatus according to claim 2, wherein the displacement sensor is a contact sensor, a detection end of the displacement sensor abuts against the pushing portion, a moving direction of the pushing portion when pushing the measuring ball is perpendicular to an extending direction of the probe, and a detection direction of the displacement sensor is the same as a moving direction of the pushing portion when pushing the measuring ball.
4. The apparatus according to claim 3, wherein a line connecting the two test sites is perpendicular to an extending direction of the probe, and distances from the two test sites to the probe are the same.
5. The device for calibrating an electrical trigger type soft measuring head according to claim 3, wherein the fixing component comprises a locking portion and a rotating portion, the locking portion is connected to the electrical trigger type soft measuring head, the rotating portion is connected to the locking portion and used for driving the locking portion to drive the electrical trigger type soft measuring head to rotate, and a rotation axis of the rotating portion coincides with an axis of the probe.
6. The apparatus according to claim 5, wherein the fixing assembly further includes two magnetic gauge stands, and the two magnetic gauge stands are respectively connected to the two displacement sensors.
7. The apparatus according to claim 6, wherein the fixing assembly further comprises a worktable, and the test simulation assembly, the rotating portion and the magnetic gauge stand are all connected to the worktable.
8. An electrical trigger type flexible measuring head calibration method using the electrical trigger type flexible measuring head calibration device according to any one of claims 1 to 7, comprising:
step one, using the pushing part to push the test ball, acquiring the displacement of two test positions on the pushing part, and resetting the pushing part;
step two, repeating the step one for a plurality of times to obtain a group of displacement;
step three, adjusting the pose of the electric trigger type soft measuring head, and repeatedly performing the step two to obtain a plurality of groups of displacement quantities;
fourthly, obtaining calibration parameters according to the multiple groups of displacement;
and fifthly, calibrating the electric trigger type soft measuring head according to the calibration parameters.
9. The method for calibrating an electrical trigger type flexible probe according to claim 8, wherein the adjusting the pose of the electrical trigger type flexible probe comprises:
and rotating the electric trigger type soft measuring head along the axis of the probe until the electric trigger type soft measuring head reaches a set position.
10. The method for calibrating an electrically triggered flexible probe according to claim 8, wherein the displacement is a displacement of the test site along a moving direction of the pushing part, and the calibration parameters include a pre-stroke amount, a trigger stability parameter and an overall stability parameter.
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