CN112247670A - Single-shaft measuring type measuring head and measuring method thereof - Google Patents
Single-shaft measuring type measuring head and measuring method thereof Download PDFInfo
- Publication number
- CN112247670A CN112247670A CN202011100372.3A CN202011100372A CN112247670A CN 112247670 A CN112247670 A CN 112247670A CN 202011100372 A CN202011100372 A CN 202011100372A CN 112247670 A CN112247670 A CN 112247670A
- Authority
- CN
- China
- Prior art keywords
- measuring
- rod
- machine tool
- sensor
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000005259 measurement Methods 0.000 claims abstract description 63
- 230000007246 mechanism Effects 0.000 claims abstract description 33
- 230000003068 static effect Effects 0.000 claims abstract description 17
- 239000000523 sample Substances 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 5
- 238000005516 engineering process Methods 0.000 abstract description 10
- 238000009434 installation Methods 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 14
- 238000012545 processing Methods 0.000 description 6
- 230000009467 reduction Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000011324 bead Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 241001139947 Mida Species 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000013441 quality evaluation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a single-axis measuring type measuring head and a method thereof, wherein the single-axis measuring head comprises a shell, a sensor, a measuring rod, a deflection measuring mechanism and a laser line indicating device; the upper end of the shell is provided with an installation handle; the sensor and the deflection measuring mechanism are positioned in the shell, the upper end of the measuring rod is positioned in the shell, the lower end of the measuring rod extends downwards to the outside of the shell and is provided with a measuring ball which is contacted with a workpiece, and the upper end of the measuring rod is connected with a movable grid of the sensor through the deflection measuring mechanism and drives the movable grid of the sensor to synchronously swing left and right relative to a static grid of the sensor; the laser line indicating device is fixed on the shell, the direction of the laser line emitted downwards is consistent with the measuring deflection direction of the measuring rod, and the laser line indicating device is used for correcting the measuring direction when the shell is installed on the machine tool and indicating the measuring direction when measuring. The invention limits the deflection measurement of the original measuring rod in two-dimensional and three-dimensional directions to the measurement of unidirectional deviation relative to the central position of the machine tool spindle, and ensures the measurement precision by the laser guide technology, thereby meeting the requirement.
Description
Technical Field
The invention relates to the technical field of advanced measurement and detection, in particular to a single-axis measurement type measuring head and a measurement method thereof.
Background
At present, two technologies are mainly adopted in the measuring technology of machine tool processing production, one is off-line measurement, for example, a general measuring tool or a three-coordinate measuring machine is used for measuring a processed part; the traditional manual measurement and off-line measurement have the problems of long time consumption, secondary positioning and the like, can not effectively combine processing and detection, and can not meet the increasing detection requirement. On-machine detection refers to integrating a measuring head and a special software module on a numerical control machine tool to realize functions of automatic positioning, quality evaluation and the like of a workpiece. The measuring mode can greatly save the processing auxiliary time, reduce the rejection rate of workpieces and has important significance for enterprise production.
The machine tool measuring head is a key component of the whole on-machine detection system, and the precision of the machine tool measuring head greatly influences the precision of the whole measurement system. Internationally, represented by Renishaw corporation, united kingdom, which showed the first version of machine tool probes on the hannover european machine tool exhibition in 1977, produced profound effects. The company applies for a patent name of 'contact sensing probe' in China, and the patent application numbers are as follows: CN 86105617. China, manufactured by Sanfeng corporation of Japan, also filed a patent entitled "contact Signal Probe", wherein the national patent application number is CN 85107033. Related products are also known from other metering companies, such as the MIDA series of probes from Marpos corporation, Italy, and related enterprises such as m & h corporation, Blum corporation, Germany. In China, Harbin pioneer electromechanical Limited company applies for a patent for the measuring head of the company, the patent name is 'trigger type three-dimensional measuring head', and the application number is 201020044796.8; "a numerical control machine tool detects gauge head and detecting system on machine" of china science and technology university, its patent application number is 201110303424.1.
For a machine tool measuring head, the main function is to accurately judge the contact time of a measuring needle and the surface of a workpiece to be measured and inform a numerical control machine tool to latch the coordinate of a main shaft at the moment in time. Through the analysis to current lathe contact gauge head product, its theory of operation is as follows: the inside of the measuring head is provided with a closed active circuit which is connected with a trigger mechanism, and as long as the trigger mechanism generates trigger action, the state of the circuit can be changed and signals can be sent out to indicate the working state of the measuring head; the trigger mechanism generates the only condition of the trigger action that the measuring needle of the measuring head generates tiny swing or moves towards the inside of the measuring head, when the measuring head is connected on the main shaft of the machine tool and moves along with the main shaft, as long as the measuring head on the measuring needle contacts with the surface of a workpiece in any direction, the measuring needle generates tiny swing or movement, the trigger can be formed, and the trigger signal is a switch signal.
In the actual use process, there is certain drawback in this kind of trigger formula gauge head. Firstly, the measurement efficiency is not high, in the process of on-machine detection, when a trigger signal is sent from the top end of a measuring head and transmitted to a numerical control system, the numerical control system takes the trigger signal as a higher-priority interrupt to be processed, the time from the scanning of the numerical control system to the control of the complete stop motion of a machine tool spindle is assumed to be t, the spindle feeding speed of the machine tool is assumed to be v, and the motion stroke L of the machine tool is equal to v x t. L is also the error that needs to be compensated for in the post-processing. For the current trigger type measuring head, in order to ensure the precision, the safety stroke reserved in the middle of the current trigger type measuring head is often smaller, and when L reaches a certain value, the measuring head can be damaged by collision. Therefore, the feeding speed of the current trigger type measuring head used in the machine detection is often lower in the measuring process. The measurement efficiency is seriously affected. Second, measurement errors are difficult to compensate. The pre-stroke error of the contact measuring head is inevitable, the error is the displacement from the contact of the measuring ball to the surface of a workpiece to the time when the measuring head sends a trigger signal, and can also be expressed as the sum of the pre-tightening force of the existing spring and the elastic deformation of each part of the measuring head of the measuring rod, and the error is irregular due to different materials and different structures. It is currently common to calibrate them using standard ball experiments. This error can only be reduced but not eliminated.
In the conventional touch signal probe technique, the touch devices are mounted at three points on the touch probe supporting portion, so that the measurement depends on the direction of the axis, and therefore, stable measurement cannot be performed in all directions, and such directional errors cannot be corrected in the prior art. Unlike the contact probes described above, there are known probes which make it possible to electrically measure the angular position or displacement of the contact probe using a differential transformer. Of course, such a differential transformer type gauge head does not have good detection sensitivity. In particular its detection sensitivity is directional to the movement of the contact probe.
Through the above description, can know, to the lathe gauge head, there are two kinds of measurement types, one kind is the trigger formula gauge head, all this kind of type is used to market mainstream at present, its main function is accurate judgement stylus and workpiece surface contact moment to be measured, and inform the digit control machine tool in time to latch main shaft coordinate this moment, need numerical control system's support, there are defects such as measurement efficiency is not high and measuring error is difficult to compensate, simultaneously because need the support of lathe numerical control system and integration, incompatible to different operating systems, make the one-tenth portion high, be difficult to popularize and use. The other is a measuring probe, which electrically measures the angular position or displacement of the contact probe by a sensing measurement technology so as to obtain the deflection angular quantity or displacement distance quantity of the contact probe, can be separated from a machine tool operating system to independently complete measurement, and has the defects of lacking an electric probe capable of omni-directional detection and having high resolution and high precision, and a sensing method and technology.
Disclosure of Invention
In summary, to solve the deficiencies of the prior art, the present invention provides a single-axis measurement probe and a measurement method thereof, which uses a measurement probe technology to get rid of the dependence of a trigger probe on a numerical control system, thereby reducing the cost obstacles for popularization and use, and avoiding the inherent technical defects of the trigger probe. As shown in fig. 7 and 8, when the measuring ball measuring contact is located on the center line of the machine tool spindle, the time mark is set as the zero position, and the deviation distance from the center line of the machine tool spindle is measured by the angle value of the sensor of the measuring ball on the measuring rod when the measuring ball measures the contact point, so that the actual distance data from the measuring contact point to the center line of the machine tool spindle is obtained. And then, combining a test use scene, converting machine tool machining correction parameters, such as machine tool shafting clearance deviation values or cutter radial deviation values, workpiece positioning position information and other parameters related to machine tool control and correction, wherein the parameters can be corrected at a program end before machining, so that the machined part can meet the requirements.
The technical scheme for solving the technical problems is as follows: a single-shaft measuring type measuring head comprises a shell, a sensor, a deflection measuring mechanism, a measuring rod and a laser line indicating device; the shell is arranged on the machine tool; the sensor is positioned in the shell, and the deflection measuring mechanism is positioned in the shell and corresponds to the position below the sensor; the upper end of the measuring rod is positioned in the shell, the lower end of the measuring rod extends downwards to the outside of the shell and is provided with a measuring ball which is contacted with a workpiece, and the upper end of the measuring rod is connected with the movable grid of the sensor through the deflection measuring mechanism and drives the movable grid of the sensor to synchronously swing left and right relative to the static grid of the sensor so as to realize measurement; the laser line indicating device is fixed on the shell, the direction of the laser line emitted downwards is consistent with the deflection measuring direction of the measuring rod, and the laser line indicating device is used for correcting the measuring direction when the shell is installed on a machine tool and indicating the measuring direction when measuring.
The invention has the beneficial effects that: the method adopts a dimension reduction processing mode, limits the deflection measurement of the original measuring rod in two-dimensional and three-dimensional directions to the measurement of unidirectional deviation relative to the central position of the machine tool spindle, and ensures the measurement precision by using a laser guide technology. In the measuring process, the laser can also be used for indicating the advancing measuring direction of the machine tool spindle, and the phenomenon that the advancing direction of the machine tool spindle is inconsistent with the deflection direction of the measuring rod to cause firing pins is prevented.
On the basis of the technical scheme, the invention can be further improved as follows:
further, the deflection measuring mechanism comprises a reset sleeve, a reset spring, a swing rod and a reset cylinder; the reset sleeve is fixed in the shell and corresponds to the position below the sensor, and the reset spring is positioned at the top in the reset sleeve; the swing rod is arranged in the reset sleeve towards the left side and the right side of the shell in a swinging mode, the upper end of the swing rod freely penetrates through the reset spring and then extends out of the upper portion of the reset sleeve, finally, a movable grid of the sensor is fixedly connected, and the lower end of the swing rod is fixedly connected with the upper end of the measuring rod after extending out of the lower portion of the reset sleeve; the middle part of pendulum rod is equipped with a circular bead structure, reset barrel suit is in outside the pendulum rod and correspond circular bead structure with between the reset spring, and reset spring's upper and lower both ends support respectively reset cover top inner wall with the upper end of a reset barrel, and then make the lower extreme of a reset barrel press in circular bead structure's up end is in order to guarantee reset spring is in when measuring staff skew left or right is measured all provides the restoring force.
Furthermore, the deflection measuring mechanism also comprises a rotary cylinder and two bearings; the front end and the rear end of the rotary cylinder are respectively extended out of the front side and the rear side of the swing rod; the inner rings of the two bearings are respectively fixed on the front end and the rear end of the rotary cylinder, and the outer rings of the two bearings are respectively fixed at corresponding positions on the inner wall of the front side or the rear side of the reset sleeve.
The beneficial effect of adopting the further technical scheme is as follows: the bidirectional measurement of the left pendulum or the right pendulum is considered; effectively reduce the hysteresis error of swing to reduce the friction, improve sensitivity, eliminate gyration clearance, improve measurement accuracy and reliability.
The mounting handle is fixed on the top of the shell and used for connecting a main shaft of a machine tool, and the axis line of the mounting handle passes through the center of the rotary cylinder.
Further, the system also comprises a wireless transmitter; the wireless transmitter is installed in the shell and electrically connected with the sensor, the measurement data of the sensor are wirelessly transmitted to an external terminal display unit, and the terminal display unit runs corresponding application programs and processes and displays the measurement data as required.
The measuring method of the single-shaft measuring type measuring head comprises the following steps:
the sensor is an absolute angle sensor, and an absolute angle position value A corresponding to the measuring contact of the measuring ball when the measuring contact is positioned on the central line of the machine tool spindle is calibrated to a zero reference value, and the relative zero deflection angle of the center of the measuring ball is alpha; during measurement, the offset L of a measuring contact and the center of a machine tool spindle is calculated according to the relative zero offset angle alpha of the sphere center of the measuring ball and the position of a spherical measuring point of the measuring ball according to the trigonometric function relationship through the swing radius H and the zero reference value A of the measuring ball.
Further, calibrating the swing radius H of the measuring ball by the following method:
the measuring ball of the measuring rod is contacted with the corresponding position of the reference block under the driving of the feeding of the machine tool, the measuring rod deflects leftwards or rightwards along the direction of the laser line emitted by the laser line indicating device, after the measuring rod deflects, the movable grid of the sensor is driven by the deflection measuring mechanism to synchronously swing relative to the static grid so as to measure the deflection angle as alpha, the advancing path S relative to the main shaft of the machine tool is read out by the machine tool measuring system, and finally the swinging radius H of the measuring ball is calibrated by the alpha and the S according to the following formula: h ═ S/α ×/pi.
Further, calibrating a zero reference value when a measuring contact of the measuring ball is positioned on the central line of the machine tool spindle by the following method:
under the driving of the feeding of the machine tool, a measuring ball of the measuring rod is firstly contacted with one side of a calibration point, so that the measuring rod deflects leftwards or rightwards along the direction of a laser line emitted by the laser line indicating device, and after the measuring rod deflects, the deflection measuring mechanism drives a movable grid of the sensor to synchronously swing relative to a static grid and outputs the absolute value of the deflection angle to be A; then the main shaft of the machine tool is controlled to rotate, then the measuring ball of the measuring rod is driven to contact the other side of the calibration point, the measuring rod is enabled to deflect leftwards or rightwards along the direction of the laser line emitted by the laser line indicating device, and after the measuring rod deflects, the movable grid of the sensor is driven by the deflection measuring mechanism to be opposite to the static grid of the sensorStep swinging and outputting the absolute value of the angle of deflection as A1'; according to A1And A1Calculating a zero reference value A when a measuring contact of the measuring ball is positioned on the central line of the main shaft of the machine tool0：A0＝(A1+A1′)/2。
Further, the deflection angle alpha of the sphere center of the measuring ball relative to the zero reference is calculated according to the following formula0：
α0ASIN (d/2/H), d is the diameter of the sphere.
Further, H, A is passed in the following manner during the measurement0And alpha0And calculating the offset L between the measuring contact and the center of the machine tool spindle according to the trigonometric function relation of the spherical contact position of the measuring ball:
the measuring rod is driven by the machine tool to contact a workpiece, and deflects leftwards or rightwards along the direction of a laser line emitted by the laser line indicating device, and then the measuring rod drives the movable grating of the sensor to synchronously swing relative to the static grating through the deflection measuring mechanism and outputs the absolute value of the deflection angle of A3(ii) a According to A3And A0Calculating the angle offset alpha between the measuring contact and the center of the machine tool spindle as A3-A0Finally by H, α and α0Calculating the offset between the measuring contact and the center of the machine tool spindle: l ═ H ═ (SIN (α + α)0)-sinα0)。
The measuring method has the beneficial effects that: in the existing measurement, the sphere center of a measuring sphere is generally taken as a reference, and because more deviation values between a measuring contact and the center of a main shaft are required in the measurement, the operation of detecting the radius of the measuring sphere is required, so that the radius precision error and the measuring precision error of a sensor are introduced. According to the measuring method, the spherical surface/measuring contact of the measuring ball is used as a reference calibration zero point for calculation and measurement, the influence of the radius precision of the measuring ball and the precision of the sensor is reduced, and the measuring precision is improved.
Drawings
FIG. 1 is a block diagram of the present invention in a free state;
FIG. 2 is a block diagram of the present invention in the zero position;
FIG. 3 is a schematic view of the measurement when the swing direction of the measuring bar is not parallel to the direction of the x-axis or the y-axis in the machine tool measuring system;
FIG. 4 is a front view of the yaw measuring mechanism;
FIG. 5 is a side view of the yaw measurement mechanism;
FIG. 6 is a schematic view of a spindle calibration;
FIG. 7 is a schematic illustration of a calibrated zero;
FIG. 8 is a schematic view of measurement during left deflection of the measuring bar;
fig. 9 is a schematic view of measurement when the measuring bar swings right.
In the drawings, the components represented by the respective reference numerals are listed below:
1. the device comprises a shell, 2, a measuring rod, 3, a laser line indicating device, 4, a measuring ball, 5, a movable grid, 6, a static grid, 7, a laser line, 8, a reset sleeve, 9, a reset spring, 10, a swing rod, 11, a reset cylinder, 12, a bearing, 13, a mounting handle, 14, a calibration point, 15 and a workpiece.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
As shown in fig. 1 and 2, a single-axis measuring head includes a housing 1, a sensor, a measuring rod 2, and a laser line indicating device 3. The housing 1 is mounted on a spindle of a machine tool or other parts of the machine tool, and specifically comprises the following components: the measuring head further comprises a mounting handle 13, and the mounting handle 13 is vertically and upwards fixed at the top of the shell 1 and used for connecting a main shaft of a machine tool or other parts of the machine tool. The sensor is arranged in the shell 1, and the deflection measuring mechanism is arranged in the shell 1 and corresponds to the position below the sensor. The upper end of the measuring rod 2 is positioned in the shell 1, the lower end of the measuring rod extends downwards to the outside of the shell 1 and is provided with a measuring ball 4 which is in contact with a workpiece, and the upper end of the measuring rod 2 is connected with a movable grid 5 of the sensor through a deflection measuring mechanism and drives the movable grid 5 of the sensor to synchronously swing left and right relative to a static grid 6 of the sensor so as to realize measurement. The laser line indicator 3 is fixed to the housing 1 facing the sameThe direction of the downward-emitted laser line 7 is consistent with the measuring deflection direction of the measuring rod 2, and the downward-emitted laser line is used for correcting the measuring direction when the shell 1 is installed on a machine tool and indicating the measuring direction during measurement. The direction of the yaw of the measuring staff 2 is indicated by a laser line 7 to be parallel to the direction of the x-axis or y-axis in the machine tool measuring system during the mounting of the housing 1 on the machine tool spindle. The laser line indicating device 3 is arranged on the shell 1, and the laser line 7 emitted by the laser line indicating device 3 is ensured to be parallel to the deflection direction of the measuring rod 2 before the product leaves factory, so that when the measuring head is arranged on the main shaft of the machine tool, the swinging direction of the measuring rod 2 can be ensured to be parallel to the direction of the x axis or the y axis in the machine tool measuring system as long as the laser line 7 emitted by the laser line indicating device 3 is ensured to be parallel to the direction of the x axis or the y axis in the machine tool measuring system. As shown in fig. 3, if the swing direction of the spindle 2 makes an angle θ with the direction of the x-axis or the y-axis in the machine tool measuring system, the actual distance L is L0Cos θ, wherein L0In order to measure the detection distance of the measuring rod 2, the invention adopts a dimension reduction processing mode through the mode, limits the deflection measurement of the original measuring rod in two-dimensional and three-dimensional directions to the measurement of unidirectional deviation relative to the central position of a machine tool spindle, namely limits the swinging direction of the measuring rod 2 to be parallel to the direction of an x axis or a y axis in a machine tool measuring system, and ensures the swinging direction to be parallel to the direction of the x axis or the y axis in the machine tool measuring system by using a laser guide technology, so that the actual distance L is the detection distance L0Thereby ensuring that the measurement precision meets the requirement. The measuring head further comprises a wireless transmitter 14, wherein the wireless transmitter 14 is installed in the shell 1 and electrically connected with the sensor, and transmits the measurement data of the sensor to an external terminal display unit, and the terminal display unit runs corresponding application programs and processes and displays the measurement data according to requirements.
Preferably, as shown in fig. 4 and 5, the deflection measuring mechanism comprises a return sleeve 8, a return spring 9, a swing rod 10 and a return cylinder 11. The reset sleeve 8 is fixed in the shell 1 and corresponds to the position below the sensor, and the reset spring 9 is arranged at the top in the reset sleeve 8. The swing rod 10 is installed in the reset sleeve 8 towards the left side and the right side of the shell 1 in a swinging mode, the upper end of the swing rod 10 freely penetrates through the inside of the reset spring 9 and then extends out of the upper portion of the reset sleeve 8, finally the swing rod is fixedly connected with the moving grid 5 of the sensor, and the lower end of the swing rod 10 is fixedly connected with the upper end of the measuring rod 2 after extending out of the lower portion of the reset sleeve 8. The middle part of pendulum rod 10 is equipped with a shoulder structure, a reset cylinder 11 suit is in outside the pendulum rod 10 and correspond the shoulder structure with between the reset spring 9, and reset spring 9's upper and lower both ends support respectively reset cover 8 top inner walls with the upper end of a reset cylinder 11, reset spring 9 is compression state promptly, and then make under reset spring 9's effect reset cylinder 11's lower extreme pressure is in the shoulder is structural, guarantees reset spring 9 is in the measuring staff 2 all provides the restoring force when the beat is measured to the left or right. The yaw measuring mechanism further comprises a rotating cylinder and two bearings 12. The front end and the rear end of the rotary cylinder are horizontally fixed in the middle of the swing rod 10, the front end and the rear end of the rotary cylinder respectively extend out of the front side and the rear side of the swing rod 10, and an axial lead extension line of the mounting handle 13 passes through the center of the rotary cylinder. The inner rings of the two bearings 12 are respectively fixed on the front end and the rear end of the rotary cylinder, and the outer rings of the two bearings are respectively fixed at corresponding positions on the inner wall of the front side or the rear side of the reset sleeve 8. The swing support of the measuring rod 2 is a structure that a bearing 12 is added with a rotating cylinder, the hysteresis error of swing can be effectively reduced, friction is reduced, sensitivity is improved, and the reset spring 9 arranged axially can still maintain reset force when not measuring while realizing the function of left and right deflection of the measuring rod 2, a rotating gap is eliminated, and measuring accuracy and reliability are improved.
The measuring method of the measuring head comprises the following steps:
the sensor is an absolute angle sensor, and the absolute angle position value A corresponding to the measuring contact of the measuring ball 4 when the measuring contact is positioned on the central line of the main shaft of the machine tool0The reference value of the zero position is marked, and the deviation angle of the sphere center of the test sphere 4 relative to the zero position is alpha0. During measurement, the swing radius H and the zero reference value A of the measuring ball 4 are passed0A deflection angle alpha of zero relative to the center of the ball 4 of the measuring ball0And calculating the offset L of the measuring contact and the center of the machine tool spindle according to the spherical measuring point position of the measuring ball 4 and a trigonometric function relationship. In particular asThe following:
the swing radius H of the test ball 4 is calibrated by: as shown in fig. 6, under the driving of the feeding of the machine tool, the measuring ball 4 of the measuring rod 2 is brought into contact with the corresponding position of the reference block, and the measuring rod 2 is deflected leftwards or rightwards along the direction of the laser line 7 emitted by the laser line indicating device 3, after the measuring rod 2 is deflected, the deflection measuring mechanism drives the moving grid 5 of the sensor to synchronously swing relative to the static grid 6 so as to measure the deflection angle as alpha1Reading out the travel distance S relative to the main shaft of the machine tool by a machine tool measuring system, and finally passing through alpha1And S calibrating the swing radius H of the test ball 4 according to the following formula: h ═ S/alpha1*180/π。
Calibrating a zero reference value when a measuring contact of the measuring ball 4 is positioned on the central line of the main shaft of the machine tool by the following method: as shown in fig. 7, under the driving of the feeding of the machine tool, the measuring ball 4 of the measuring rod 2 first contacts one side of the calibration point 14 (the calibration point 14 is located on the reference block/the standard block), so that the measuring rod 2 deflects leftwards or rightwards along the direction of the laser line 7 emitted by the laser line indicating device 3, and after the measuring rod 2 deflects, the deflection measuring mechanism drives the moving grid 5 of the sensor to synchronously swing relative to the static grid 6 and outputs the absolute value of the deflection angle as a1Or A2. Then the main shaft of the machine tool is controlled to rotate 180 degrees, then the measuring ball 4 of the measuring rod 2 is driven to contact the other side of the calibration point 14, the measuring rod 2 is enabled to deflect leftwards or rightwards along the direction of the laser line 7 emitted by the laser line indicating device 3, after the measuring rod 2 deflects, the movable grid 5 of the sensor is driven to synchronously swing relative to the static grid 6 through the deflection measuring mechanism, and the absolute value of the angle of deflection is output to be A1' or A2′. According to A1And A1' or A2And A2′Calculating a zero reference value A when the measuring contact of the measuring ball 4 is positioned on the central line of the machine tool spindle0：A0＝(A1+A1')/2. Calculating the deflection angle alpha of the center of the sphere of the measuring ball 4 relative to a zero reference according to the following formula0：
α0ASIN (d/2/H), d is the diameter of the sphere 4. In the prior art, the ball 4 is usedThe center of the sphere is used as a reference, and since a deviation value between the spherical surface and the center of the main shaft is sometimes used in the measurement, an operation for detecting the radius of the measurement sphere 4 is required, thereby introducing a radius accuracy error. The invention takes the sphere/measuring contact of the measuring ball 4 as a reference calibration zero point to carry out calculation measurement, thereby reducing the influence of the radius of the measuring ball 4 and further improving the measurement precision.
When measured, the measured value is passed through H, A in the following manner0And alpha0And calculating the offset L between the measuring contact and the center of the machine tool spindle according to the trigonometric function relation of the spherical contact position of the measuring ball 4: as shown in fig. 8 and 9, under the driving of the feeding of the machine tool, the measuring ball 4 of the measuring rod 2 contacts the workpiece 15, and the measuring rod 2 deflects leftwards or rightwards along the direction of the laser line 7 emitted by the laser line indicating device 3, after the measuring rod 2 deflects, the deflection measuring mechanism drives the movable grid 5 of the sensor to synchronously swing relative to the static grid 6 and outputs the absolute value of the deflection angle as a3(ii) a According to A3And A0Calculating the angle offset alpha between the measuring contact and the center of the machine tool spindle as A3-A0Finally by H, α and α0Calculating the offset between the measuring contact and the center of the machine tool spindle: l ═ H ═ (SIN (α + α)0)-sinα0) And (4) finishing. When the measuring range is small (for example, the swing included angle of the diameter d of the measuring ball 4 is less than +/-one half of the diameter), the influence of the diameter deviation of the measuring ball 4 and the deviation of the rotation center of the measuring rod 2 and the central line of the main shaft on the measuring precision is small, and the size can be economically controlled to be less than 0.1 mu m. Thereby avoiding the principle error influence of the lever-type instrument which adopts the arc length approximate calculation. The measuring range is greatly increased compared with a lever instrument, and can reach +/-3.0 mm under micron-sized precision.
For the original defects of the measuring type measuring head, such as the problem of insufficient measuring resolution, a sensor with high resolution is found, and the problem is solved by adopting the technology with the patent application number of 201810365459. Aiming at the characteristic that the detection sensitivity of the measuring probe has directivity to the movement of the contact probe, the invention adopts a dimension reduction processing mode to limit the measurement of the original two-dimensional and three-dimensional directions to one-directional measurement and ensures the measurement precision by a laser guide technology, thereby meeting the requirement. For the influence of the reduction of the use range caused by dimension reduction, a new use mode of the measuring head is developed for substitution, and the method specifically comprises the following steps:
(1) the function of an edge finder (centering rod) is realized, the original point position of a workpiece coordinate system is set by an operator, and is usually determined by tool setting after the workpiece is clamped, and the original point position reflects the distance position relation between the workpiece and the zero point of a machine tool. The measurement result reflects the position difference between the measurement surface and the center of the main shaft of the machine tool, and if the difference is zero when the measured surface is collinear with the center of the main shaft, the machine tool coordinate value of the measurement direction is the coordinate value of the working coordinate and the machine tool zero point of the direction; and setting the position value to zero to calibrate the origin of the shafting working coordinate system. And reading the difference value of the coordinate values corresponding to the central lines of the two measuring surfaces and the main shaft during measurement, and obtaining the position data in the measuring surface by taking half of the difference value. The measuring head has a data measuring function, and the coordinate position moving data of the machine tool is combined, so that the coordinate of the machine tool does not need to be strictly guaranteed to move to a target position in the measuring process, and only the overshoot or undershoot difference value is subtracted from or added to the acquired data, and the actual measuring operation is more convenient.
(2) The radial offset value of the cutter is measured, because the cutter is often provided with an edge groove in the radial direction and the cutter back-off phenomenon exists in the cutting process, the value is difficult to obtain by using a common measuring method, the radial offset value cannot be accurately set in a machining program, and the machining precision of a final part is seriously influenced. The measuring head can accurately acquire the radial offset parameter of the cutter by adopting the following measuring method, trial cutting is carried out after the part to be processed is offset according to the nominal radius offset, then the measuring head is called according to the radial zero offset to measure the cutting surface, the measuring result is the error value of the nominal offset, and the error is subtracted from the nominal radius offset, so that the more accurate radial offset parameter of the cutter can be acquired.
(3) Absolute and relative deviation detection functions, the measuring head can be directly used for measuring the deviation of straightness, parallelism and repeated positions (points); the actual size measurement can also be carried out by combining standard gauge blocks or machine tool coordinate parameters.
(4) The measuring head can expand the measuring range of the measuring head on the whole plane by combining a rotary control system of a machine tool main shaft or a rotary control system added to the measuring head and linking the measuring direction with the rotary control system, and is more favorable for the online measurement of actual parts.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A single-shaft measuring type measuring head is characterized by comprising a shell (1), a sensor, a deflection measuring mechanism, a measuring rod (2) and a laser line indicating device (3); the shell (1) is arranged on a machine tool; the sensor is positioned in the shell (1), and the deflection measuring mechanism is positioned in the shell (1) and corresponds to a position below the sensor; the upper end of the measuring rod (2) is positioned in the shell (1), the lower end of the measuring rod extends downwards to the outside of the shell (1) and is provided with a measuring ball (4) which is contacted with a workpiece, the upper end of the measuring rod (2) is connected with a movable grid (5) of the sensor through the deflection measuring mechanism, and the movable grid (5) of the sensor is driven to synchronously swing left and right relative to a static grid (6) of the sensor so as to realize measurement; the laser line indicating device (3) is fixed on the shell (1), the direction of the laser line (7) emitted downwards is consistent with the measuring deflection direction of the measuring rod (2), and the laser line indicating device is used for correcting the measuring direction when the shell (1) is installed on a machine tool and indicating the measuring direction when measuring.
2. The single-axis measuring probe according to claim 1, wherein the deflection measuring mechanism comprises a return sleeve (8), a return spring (9), a swing rod (10) and a return cylinder (11); the reset sleeve (8) is fixed in the shell (1) and corresponds to the position below the sensor, and the reset spring (9) is positioned at the top in the reset sleeve (8); the swing rod (10) is arranged in the reset sleeve (8) towards the left side and the right side of the shell (1) in a swinging mode, the upper end of the swing rod (10) freely penetrates through the reset spring (9) and then extends out of the upper portion of the reset sleeve (8), finally, the swing rod is fixedly connected with a movable grid (5) of the sensor, and the lower end of the swing rod (10) is fixedly connected with the upper end of the measuring rod (2) after extending out of the lower portion of the reset sleeve (8); the middle part of pendulum rod (10) is equipped with a shoulder structure, a reset cylinder (11) suit is in outside pendulum rod (10) and correspond shoulder structure with between reset spring (9), and reset spring (9) the upper and lower both ends support respectively reset cover (8) top inner wall with the upper end of a reset cylinder (11), and then make the lower extreme of a reset cylinder (11) press in the up end of shoulder structure is in order to guarantee reset spring (9) are in measuring staff (2) all provide the restoring force when deviating from the pendulum to the left or right.
3. Single-axis measuring head according to claim 2, characterized in that said runout measuring means further comprise a rotating cylinder and two bearings (12); the front end and the rear end of the rotary cylinder are horizontally fixed in the middle of the swing rod (10), and the front end and the rear end of the rotary cylinder respectively extend out of the front side and the rear side of the swing rod (10); the inner rings of the two bearings (12) are respectively fixed on the front end and the rear end of the rotary cylinder, and the outer rings of the two bearings are respectively fixed at corresponding positions on the inner wall of the front side or the rear side of the reset sleeve (8).
4. A single-axis measuring probe according to claim 3, characterized by further comprising a mounting shank (13) fixed to the top of the housing (1) and adapted to be connected to a spindle of a machine tool, and the axis of the mounting shank (13) extends through the center of the column of revolution.
5. Single-axis measuring probe according to claims 1 to 4, characterized in that it further comprises a wireless transmitter (14); the wireless transmitter (14) is installed in the shell (1) and electrically connected with the sensor, the measurement data of the sensor are wirelessly transmitted to an external terminal display unit, and the terminal display unit runs corresponding application programs and processes and displays the measurement data according to requirements.
6. According to claims 1 toThe method for measuring a single-axis measuring head according to any one of claims 5, wherein the sensor is an absolute angle sensor that measures an absolute angle position value A corresponding to a case where a measuring contact of the ball 4 is positioned on a center line of a spindle of a machine tool0The reference value of the zero position is marked, and the deviation angle of the sphere center of the measuring sphere (4) relative to the zero position is alpha0(ii) a During measurement, the swing radius H and the zero reference value A of the measuring ball (4) are passed0A zero-position deflection angle alpha relative to the center of the ball (4)0And calculating the offset L of the measuring contact and the center of the machine tool spindle according to the spherical measuring point position of the measuring ball (4) and a trigonometric function relationship.
7. Method for measuring a single-axis measuring head according to claim 6, characterized in that the swing radius H of the measuring ball (4) is calibrated by:
under the driving of machine tool feeding, a measuring ball (4) of the measuring rod (2) is contacted with a corresponding position of a reference block, the measuring rod (2) deflects leftwards or rightwards along the direction of a laser line (7) emitted by the laser line indicating device (3), and after the measuring rod (2) deflects, the movable grating (5) of the sensor is driven by the deflection measuring mechanism to synchronously swing relative to the static grating (6) so as to measure the angle of the deflection as alpha1Reading out the travel distance S relative to the main shaft of the machine tool by a machine tool measuring system, and finally passing through alpha1And S calibrating the swing radius H of the test ball (4) according to the following formula: h ═ S/alpha1*180/π。
8. The method for measuring a single-axis measuring head according to claim 6, characterized in that the zero reference value of the measuring ball (4) when the measuring contact point is located on the center line of the machine tool spindle is calibrated by:
under the driving of machine tool feeding, a measuring ball (4) of the measuring rod (2) is firstly contacted with one side of a calibration point (14), so that the measuring rod (2) deflects leftwards or rightwards along the direction of a laser line (7) emitted by the laser line indicating device (3), and after the measuring rod (2) deflects, the measuring rod (2) drives a movable grating (5) of the sensor to synchronously swing relative to a static grating (6) through the deflection measuring mechanism and outputs the absolute value of the deflection angle asA1(ii) a Then the main shaft of the machine tool is controlled to rotate 180 degrees, the measuring ball (4) of the measuring rod (2) is driven to contact the other side of the calibration point (14), the measuring rod (2) deflects leftwards or rightwards along the direction of the laser line (7) emitted by the laser line indicating device (3), and after deflection of the measuring rod (2), the movable grid (5) of the sensor is driven to synchronously swing relative to the static grid (6) through the deflection measuring mechanism and the absolute value of the deflection angle is A1'; according to A1And A1Calculating a zero reference value A when a measuring contact of the measuring ball (4) is positioned on the central line of the main shaft of the machine tool0：A0＝(A1+A1′)/2。
9. The method for measuring a uniaxial measuring head according to claim 6, wherein the yaw angle α of the center of the sphere of the measuring ball (4) with respect to the zero reference is calculated according to the following formula0：
α0ASIN (d/2/H), d is the diameter of the ball (4).
10. The method of measuring a uniaxial measuring head according to claim 6, wherein the measurement is performed by H, A in the following manner0And alpha0And calculating the offset L between the measuring contact and the center of the machine tool spindle according to the trigonometric function relation of the spherical contact position of the measuring ball (4):
the measuring rod (2) is driven to contact with a workpiece (15) through the feeding of a machine tool, the measuring rod (2) deflects leftwards or rightwards along the direction of a laser line (7) emitted by the laser line indicating device (3), and the measuring rod (2) deflects and then drives the movable grating (5) of the sensor to synchronously swing relative to the static grating (6) through the deflection measuring mechanism, so that the absolute value of the deflection angle is A3(ii) a According to A3And A0Calculating the angle offset alpha between the measuring contact and the center of the machine tool spindle as A3-A0Finally by H, α and α0Calculating the offset between the measuring contact and the center of the machine tool spindle: l ═ H ═ (SIN (α + α)0)-sinα0)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011100372.3A CN112247670B (en) | 2020-10-15 | 2020-10-15 | Single-axis measurement type measuring head and measurement method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011100372.3A CN112247670B (en) | 2020-10-15 | 2020-10-15 | Single-axis measurement type measuring head and measurement method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112247670A true CN112247670A (en) | 2021-01-22 |
| CN112247670B CN112247670B (en) | 2024-07-09 |
Family
ID=74243295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011100372.3A Active CN112247670B (en) | 2020-10-15 | 2020-10-15 | Single-axis measurement type measuring head and measurement method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112247670B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681350A (en) * | 2021-08-30 | 2021-11-23 | 牟贞学 | CNC digit control machine tool non-contact tool setting appearance |
| CN114178904A (en) * | 2022-02-15 | 2022-03-15 | 成都飞机工业（集团）有限责任公司 | Resolution measuring method of machine tool measuring system |
| CN115464466A (en) * | 2022-09-29 | 2022-12-13 | 巨冈精工(广东)股份有限公司 | Auxiliary tool for R-test detection of double-swing-head five-axis numerical control machine tool |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0996518A (en) * | 1995-09-29 | 1997-04-08 | Canon Inc | Stylus-type probe |
| JPH1190787A (en) * | 1997-09-17 | 1999-04-06 | Makino Milling Mach Co Ltd | Work shape measuring method and device in machine tool |
| JP2004294390A (en) * | 2003-03-28 | 2004-10-21 | Kawasaki Heavy Ind Ltd | Method and apparatus for optically measuring three-dimensional shape |
| JP2008304413A (en) * | 2007-06-11 | 2008-12-18 | Panasonic Corp | Shape measurement method |
| US20100011601A1 (en) * | 2006-05-18 | 2010-01-21 | Takanori Funabashi | Shape measurement device probe and shape measurement device |
| JP2010089182A (en) * | 2008-10-06 | 2010-04-22 | Fanuc Ltd | Machine tool having workpiece reference measurement position setting function |
| CN102501136A (en) * | 2011-10-10 | 2012-06-20 | 华中科技大学 | On-machine detection measuring head and detection system for numerical control machine tool |
| CN104215186A (en) * | 2014-10-09 | 2014-12-17 | 中国科学院光电技术研究所 | Device and method for measuring spatial position coordinate relationship of measuring head system of swing arm type contourgraph |
| WO2016101289A1 (en) * | 2014-12-23 | 2016-06-30 | 电子科技大学 | Five-axis machine tool cutter posture and cutter tip position error synchronous detection mechanism |
| US20170292916A1 (en) * | 2014-09-18 | 2017-10-12 | Zhejiang University | Surface defects evaluation system and method for spherical optical components |
| CN107843165A (en) * | 2017-11-22 | 2018-03-27 | 桂林市晶瑞传感技术有限公司 | A kind of Rongshan typd digital band tape |
| CN111397555A (en) * | 2020-04-14 | 2020-07-10 | 中国计量科学研究院 | Parameter error measuring method and system of trigger type measuring head |
| CN214054599U (en) * | 2020-10-15 | 2021-08-27 | 桂林市晶瑞传感技术有限公司 | Single-shaft measuring type measuring head |
-
2020
- 2020-10-15 CN CN202011100372.3A patent/CN112247670B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0996518A (en) * | 1995-09-29 | 1997-04-08 | Canon Inc | Stylus-type probe |
| JPH1190787A (en) * | 1997-09-17 | 1999-04-06 | Makino Milling Mach Co Ltd | Work shape measuring method and device in machine tool |
| JP2004294390A (en) * | 2003-03-28 | 2004-10-21 | Kawasaki Heavy Ind Ltd | Method and apparatus for optically measuring three-dimensional shape |
| US20100011601A1 (en) * | 2006-05-18 | 2010-01-21 | Takanori Funabashi | Shape measurement device probe and shape measurement device |
| JP2008304413A (en) * | 2007-06-11 | 2008-12-18 | Panasonic Corp | Shape measurement method |
| JP2010089182A (en) * | 2008-10-06 | 2010-04-22 | Fanuc Ltd | Machine tool having workpiece reference measurement position setting function |
| CN102501136A (en) * | 2011-10-10 | 2012-06-20 | 华中科技大学 | On-machine detection measuring head and detection system for numerical control machine tool |
| US20170292916A1 (en) * | 2014-09-18 | 2017-10-12 | Zhejiang University | Surface defects evaluation system and method for spherical optical components |
| CN104215186A (en) * | 2014-10-09 | 2014-12-17 | 中国科学院光电技术研究所 | Device and method for measuring spatial position coordinate relationship of measuring head system of swing arm type contourgraph |
| WO2016101289A1 (en) * | 2014-12-23 | 2016-06-30 | 电子科技大学 | Five-axis machine tool cutter posture and cutter tip position error synchronous detection mechanism |
| CN107843165A (en) * | 2017-11-22 | 2018-03-27 | 桂林市晶瑞传感技术有限公司 | A kind of Rongshan typd digital band tape |
| CN111397555A (en) * | 2020-04-14 | 2020-07-10 | 中国计量科学研究院 | Parameter error measuring method and system of trigger type measuring head |
| CN214054599U (en) * | 2020-10-15 | 2021-08-27 | 桂林市晶瑞传感技术有限公司 | Single-shaft measuring type measuring head |
Non-Patent Citations (2)
| Title |
|---|
| 刘芳芳;费业泰;夏豪杰;: "纳米坐标测量机的三维接触式测头机构", 纳米技术与精密工程, no. 03, 15 May 2011 (2011-05-15), pages 249 - 252 * |
| 陈晓怀;陈贺;王珊;李瑞君;高伟;: "微纳测量机测头弹性结构的参数设计", 光学精密工程, no. 10, 15 October 2013 (2013-10-15), pages 2587 - 2593 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681350A (en) * | 2021-08-30 | 2021-11-23 | 牟贞学 | CNC digit control machine tool non-contact tool setting appearance |
| CN114178904A (en) * | 2022-02-15 | 2022-03-15 | 成都飞机工业（集团）有限责任公司 | Resolution measuring method of machine tool measuring system |
| CN114178904B (en) * | 2022-02-15 | 2022-06-14 | 成都飞机工业（集团）有限责任公司 | Resolution measuring method of machine tool measuring system |
| CN115464466A (en) * | 2022-09-29 | 2022-12-13 | 巨冈精工(广东)股份有限公司 | Auxiliary tool for R-test detection of double-swing-head five-axis numerical control machine tool |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112247670B (en) | 2024-07-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102384732B (en) | Axis coplanarity detection device for orthogonal spinning axis with built-in intersection point and precision detection method thereof | |
| CN103692292B (en) | The method carrying out workpiece size on-line measurement on lathe | |
| CN102937409B (en) | Polar coordinate gear measurement center and zero calibrating method thereof | |
| CN214054599U (en) | Single-shaft measuring type measuring head | |
| CN112247670A (en) | Single-shaft measuring type measuring head and measuring method thereof | |
| CN103264318B (en) | A kind of online test method of three-dimensional profile | |
| CN110186400B (en) | Friction welding coaxiality precision detection device and detection method thereof | |
| CN108007295B (en) | Automatic detection device for M value and tooth surface jumping of worm | |
| CN114782513B (en) | Point laser sensor mounting pose calibration method based on plane | |
| CN109253710B (en) | Calibration method for zero error of A axis of REVO measuring head | |
| CN110186398B (en) | Rotary workbench with motion deviation real-time measurement function and measurement method | |
| CN107900781B (en) | Calibration device and calibration method for contact type online detection system of lathe | |
| CN107414602B (en) | Calibration device and calibration method for trigger type measurement system of vertical machining center | |
| CN101963479A (en) | Double-ball corner gauge | |
| CN110977612B (en) | CNC (computer numerical control) machining online measurement error correction method and system | |
| CN114087972B (en) | Device for measuring shape error of long hole part | |
| CN103659466B (en) | Trigger sensor axially triggers calibration method and the calibrating accessory of stroke | |
| CN215147387U (en) | Machine tool three-dimensional error measuring device combining ball rod instrument and capacitance displacement sensor | |
| CN111922783B (en) | Machine tool multidimensional geometric error measuring method based on lever principle | |
| TWM462360U (en) | Vertical axis detection device | |
| JPH11271007A (en) | Method and apparatus for measurement of screw shaft | |
| CN113199303B (en) | Method for measuring three-dimensional error of machine tool by combining ball bar instrument and capacitance displacement sensor | |
| CN111283479B (en) | Motion precision compensation method for large-scale boring and milling machine | |
| CN220690067U (en) | On-line measuring device for outer diameter of numerical control cylindrical grinding machine | |
| CN114877840B (en) | Electric triggering type soft measuring head calibration device and calibration method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |