CN106771979A - A kind of pair of calibration method of probe flying probe device - Google Patents
A kind of pair of calibration method of probe flying probe device Download PDFInfo
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- CN106771979A CN106771979A CN201611270453.1A CN201611270453A CN106771979A CN 106771979 A CN106771979 A CN 106771979A CN 201611270453 A CN201611270453 A CN 201611270453A CN 106771979 A CN106771979 A CN 106771979A
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- probe
- coordinate
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- traveling
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
Abstract
The invention discloses a kind of pair of calibration method of probe flying probe device, including：The second coordinate when obtaining first coordinate of the fixed probe when probe is since 0 degree of rotation the origin of its rotary shaft, turning 90 degrees certainly and the 3rd coordinate from turnback；Obtain 4-coordinate of the traveling probe when the fixed probe initial distance of its distance and the Five Axis when the fixed probe predeterminable range of its distance；Obtain the coordinate of image unit；According to described first, second, third, fourth, Five Axis and the coordinate of image unit, obtain when line and X-axis angle that the distance of fixed probe and the traveling probe is the first distance, fixed probe and traveling probe are first angle, the distance of fixed probe to image unit；Double probe flying probe devices are calibrated to the distance of image unit according to fixed probe.Hereby it is achieved that the calibration to double probe locations, it is ensured that double probes can exactly prick corresponding point on test line plate.
Description
Technical field
The present invention relates to wiring board technical field of measurement and test, and in particular to a kind of pair of calibration side of probe flying probe device
Method.
Background technology
Flying probe is a kind of wiring board measuring technology, contacts two ends on wiring board simultaneously especially by two probes
Put and be powered, short-circuit judgement is carried out out according to the electrical quantities for being obtained.Fig. 1 is a kind of schematic diagram of existing probe, its
In, each probe on only a probe and a CCD camera, by CCD observe test line plate, it is possible to achieve CCD and
Test line plate is accurately positioned, but in order to realize being accurately positioned for probe and test line plate, it is necessary to obtain CCD and probe
Position relationship.In order to obtain the position relationship of CCD and probe, circle can be found out by the method for making probe prick a round pad
Disk center, records mechanical coordinate during probe alignment disc centre, then moves CCD, makes CCD centers alignment disk center,
The mechanical coordinate of now CCD is recorded, CCD to the displacement of needle point can be obtained by by two above mechanical coordinate.
However, because a pair of end points of test need mobile two probes, the probe testing efficiency of this Single probe is not high.Such as
Fruit sets multiple probes to improve efficiency on probe, then still need to obtain the position relationship between CCD and multiple probe, but on
The acquisition CCD and the method for probe location relation for stating no longer are applicable again.
The content of the invention
Therefore, the technical problem to be solved in the present invention is that existing single probe test technical efficiency is not high, and existing
Calibration method is not suitable for the probe with multiprobe.
Therefore, the embodiment of the invention provides a kind of pair of calibration method of probe flying probe device, the flying probe
Device includes image unit and described pair of probe on the same probe, and the described pair of probe includes the fixed probe and can
The traveling probe with the fixed probe distance is adjusted, the probe can be translated around its rotary shaft rotation and on X-Y axles, institute
The method of stating includes：Obtain first coordinate of the fixed probe when the probe is since 0 degree of rotation the origin of its rotary shaft,
The second coordinate when turning 90 degrees and the 3rd coordinate from turnback；The traveling probe is obtained when it is apart from the fixed spy
4-coordinate during pin initial distance and the Five Axis when it is apart from the fixed probe predeterminable range；Taken the photograph described in obtaining
As the coordinate of unit；According to described first, second, third, fourth, Five Axis and the coordinate of the image unit, obtain and work as
The distance of the fixed probe and the traveling probe be first apart from D, the fixed probe and the traveling probe line
When with the X-axis angle being first angle aN, the distance of the fixed probe to the image unit；According to the fixed probe
Distance to the image unit is calibrated to described pair of probe flying probe device.
Optionally, it is described to obtain the fixed probe when the probe is since 0 degree of rotation the origin of its rotary shaft
First coordinate, the second coordinate when turning 90 degrees certainly, include from the 3rd coordinate of turnback：When the probe from its rotary shaft
When origin starts 0 degree of rotation, the movement probe makes the fixed probe alignment calibration zero point, obtains first coordinate；When
The probe is since when turning 90 degrees, the movement probe makes to be calibrated described in the fixed probe alignment the origin of its rotary shaft
Zero point, obtains first coordinate；When the probe is since the origin of its rotary shaft from turnback when, the movement probe
Make to calibrate zero point described in the fixed probe alignment, obtain the 3rd coordinate.
Optionally, it is described obtain the 4-coordinate of the traveling probe when it is apart from the fixed probe initial distance with
And the Five Axis when it is apart from the fixed probe predeterminable range include：Origin of the rotation probe to its rotary shaft；
The movement traveling probe makes the traveling probe apart from initial distance described in the fixed probe；The movement probe makes described
Traveling probe alignment calibration zero point, obtains the 4-coordinate；The movement traveling probe makes the traveling probe distance described
Predeterminable range described in fixed probe；The movement probe makes the traveling probe be directed at the calibration zero point, obtains the described 5th
Coordinate；The coordinate for obtaining the image unit includes：The described probe of movement makes the center of the image unit be directed at described
Calibration zero point, obtains the coordinate of the image unit.
It is optionally, described according to described first, second, third, fourth, Five Axis and the coordinate of the image unit,
The distance when the fixed probe and the traveling probe is obtained for first apart from D, the fixed probe and the traveling probe
Line when being first angle aN with the X-axis angle, the fixed probe includes to the distance of the image unit：According to institute
State radius of turn and rotation center coordinate that first, second, and third coordinate obtains the fixed pin；According to the described first, the 4th
Projection coordinate of first coordinate on the straight line for connecting the 4-coordinate and Five Axis is obtained with Five Axis；According to
First coordinate and the projection coordinate obtain first coordinate to the 4-coordinate and the Five Axis of connecting
The second distance d of straight line；According to described first apart from the D and second distance d, obtain and work as the mobile pin and the fixed pin
Distance for described first apart from D when, the mobile pin to the projection coordinate the 3rd apart from dNN；Sat according to the described 5th
Mark, the projection coordinate and the described 3rd are obtained when the distance of the mobile pin and the fixed pin is described first apart from dNN
During apart from D, the 6th coordinate of the mobile pin, and the mobile pin from it apart from the position of initial distance described in the fixed pin
Put and start to need the 4th mobile distance；According to first coordinate and the rotation center coordinate, first coordinate is obtained
With the rotation center coordinate angulation；According to the 6th coordinate and the rotation center coordinate, obtain the described 6th and sit
Mark and the central coordinate of circle angulation；According to the 6th coordinate and first coordinate, the 6th coordinate and institute are obtained
State the first coordinate angulation；According to the 6th coordinate and the first coordinate angulation and the first angle aN,
Obtain when the line of the fixed probe and the traveling probe is first angle aN with the X-axis angle, the probe from
The origin of its rotary shaft starts to need the second angle aNN of rotation；According to the rotation center coordinate, the radius of turn, institute
The first coordinate and the second coordinate angulation and the second angle aNN are stated, is obtained and is worked as the fixed probe and institute
It first is apart from the line and the X-axis angle of D, the fixed probe and the traveling probe that the distance for stating traveling probe is
During one angle aN, the 7th coordinate of the fixed pin；Institute is worked as in coordinate and the 7th coordinate according to the image unit, acquisition
The distance for stating fixed probe and the traveling probe be first apart from D, the fixed probe and the traveling probe line with
When the X-axis angle is first angle aN, the distance of the fixed probe to the image unit.
The calibration method of double probe flying probe devices of the embodiment of the present invention, by being arranged on consolidating on same probe
Determine probe and traveling probe, reduce the movement of probe, improve testing efficiency；When double probes are in different angles, different spacing
When (distance of the fixed probe and the traveling probe is the first distance, the fixed probe and the traveling probe
Line is first angle with the X-axis angle), only by six coordinates (i.e. when the probe is opened from the origin of its rotary shaft
Begin 0 degree of rotation successively, 90 degree when and during 180 degree the fixed probe three coordinates, when the traveling probe is apart from described solid
Determine two coordinates that probe is respectively traveling probe when initial distance and predeterminable range, and the image unit seat
Mark), it is possible to obtain the fixed probe to the distance of the image unit；So as to realize the calibration to double probe locations, protect
The double probes of card can exactly prick corresponding point on test line plate.
Brief description of the drawings
In order to illustrate more clearly of the specific embodiment of the invention or technical scheme of the prior art, below will be to specific
The accompanying drawing to be used needed for implementation method or description of the prior art is briefly described, it should be apparent that, in describing below
Accompanying drawing is some embodiments of the present invention, for those of ordinary skill in the art, before creative work is not paid
Put, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram of existing Single probe flying probe device；
Fig. 2 is the schematic diagram of double probe flying probe devices of the embodiment of the present invention；
Fig. 3 is the schematic diagram of double probe flying probe device calibration processes of the embodiment of the present invention；
Fig. 4 is the schematic diagram of the calibration glass plate of the embodiment of the present invention；
Fig. 5 is the flow chart of the calibration method of double probe flying probe devices of the embodiment of the present invention.
Specific embodiment
Technical scheme is clearly and completely described below in conjunction with accompanying drawing, it is clear that described implementation
Example is a part of embodiment of the invention, rather than whole embodiments.Based on the embodiment in the present invention, ordinary skill
The every other embodiment that personnel are obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
As shown in Fig. 2 double probe flying probe devices of the embodiment of the present invention include：Probe, camera head (such as CCD
Camera), fixed probe and traveling probe, wherein, the relative position of the probe and the camera head is fixed, and the probe can be around
180 degree is arrived in its rotary shaft rotation -180, and fixed probe and traveling probe are arranged on the bottom of the probe, and fixed probe is on probe
Position fix, traveling probe can adjust its spacing with the fixation probe.This pair of probe flying probe device is using transmission
Device can be moved on X-Y axial planes, also be translated on X-Y axles equivalent to probe.Specifically, although ideally, when
During the mechanical origin that probe rotates origin, i.e. rotary shaft in it, the line of fixed probe and traveling probe is parallel with X-axis, from
And can be readily ascertained by after probe rotates fixing the line and X-axis angulation of probe and traveling probe；Traveling probe and solid
Determine the line of probe through the rotary shaft, and the traveling probe motion track also with the line coincident, so as to ought for example need
When the spacing of traveling probe and fixed probe is 5mm, traveling probe is moved 5mm just can be with, and traveling probe and fixation
The coordinate of probe is also easily calculated.But in fact, when probe is in its rotation origin, fix the line of probe and traveling probe
Generally with X-axis into a unknown angle；The line of traveling probe and fixed probe not necessarily passes through the rotary shaft, traveling probe
Motion track also not necessarily with the line coincident.These uncertainties come very big tired to the double probe flying probe device bands of correction
It is difficult.Will below illustrate, by the antidote of the embodiment of the present invention, even if in the case of there is above-mentioned uncertainty,
The correction to probe can still be realized.
When double probe flying probe devices of the embodiment of the present invention are calibrated, as shown in Figure 3 and Figure 4, flying needle is surveyed
Trial assembly rests against the armorplate glass of a nearly calibration, is used to align with empty cross hairs on the glass plate, and one is set under glass plate
High Resolution CCD, the position for checking probe tip, calibration origin is located in the empty cross hairs on the glass plate
The heart.When calibrated, traveling probe is aligned by High Resolution CCD to confirm to the calibration origin is directed at, and records
Coordinate now.
The calibration method to double probe flying probe devices of the embodiment of the present invention is specifically described below.
As shown in figure 5, the calibration method of double probe flying probe devices of the embodiment of the present invention, including：
S1. obtain first coordinate of the fixed probe when the probe is since 0 degree of rotation the origin of its rotary shaft,
The second coordinate when turning 90 degrees and the 3rd coordinate from turnback.Specifically, when the probe from the origin of its rotary shaft
When starting 0 degree of rotation, the movement probe makes the fixed probe alignment calibration zero point, obtains first coordinate；When described
Probe is since when turning 90 degrees, the movement probe makes to calibrate zero described in the fixed probe alignment the origin of its rotary shaft
Point, obtains second coordinate；When the probe is since the origin of its rotary shaft from turnback when, the movement probe makes
Zero point is calibrated described in the fixed probe alignment, the 3rd coordinate is obtained.
S2. obtain 4-coordinate of the traveling probe when it is apart from the fixed probe initial distance and when its away from
Five Axis during from the fixed probe predeterminable range.The predeterminable range is, for example, and since initial distance, is moved by increasing
Dynamic probe is obtained with fixed probe apart from 1mm.Specifically, the probe to the origin of its rotary shaft, Ran Houyi are rotated first
Moving the traveling probe makes the traveling probe apart from initial distance described in the fixed probe, and finally moving the probe makes institute
Traveling probe alignment calibration zero point is stated, the 4-coordinate is obtained；Move first the traveling probe make the traveling probe away from
From predeterminable range described in the fixed probe, then moving the probe makes the traveling probe be directed at the calibration zero point, obtains
The Five Axis.
S3. the coordinate of the image unit is obtained.Specifically, the movement probe is directed at the center of the image unit
The calibration zero point, obtains the coordinate of the image unit.
S4. according to described first, second, third, fourth, Five Axis and the coordinate of the image unit, institute is worked as in acquisition
The distance for stating fixed probe and the traveling probe be first apart from D, the fixed probe and the traveling probe line with
When the X-axis angle is first angle aN, the distance of the fixed probe to the image unit；
S5. the distance according to the fixed probe to the image unit carries out school to described pair of probe flying probe device
It is accurate.
The calibration method of double probe flying probe devices of the embodiment of the present invention, by being arranged on consolidating on same probe
Determine probe and traveling probe, reduce the movement of probe, improve testing efficiency；When double probes are in different angles, different spacing
When, by only six coordinates, image unit to the distance of fixed probe can be just obtained, so as to realize the school to double probe locations
It is accurate, it is ensured that double probes can exactly prick corresponding point on test line plate.
Specifically, above-mentioned steps S4 can include：
1) obtains the radius of turn and rotation center coordinate of the fixed pin according to first, second, and third coordinate.
If first, second, and third coordinate is respectively (x0, y0), (x1, y1), (x2, y2), the radius of turn of the fixed pin is
R1, the rotation center coordinate is (XR1,YR1), then specific calculation procedure is as follows
XR1=(x0+x2)/2
YR1=(y0+y2)/2
R=Sqr ((x0-x2) ^2+ (y0-y2) ^2)
R1=(R+Sqr ((x1-XR1)^2+(y1-YR1)^2))/3；
2) obtains first coordinate and is connecting the 4-coordinate and the according to the described first, the 4th and Five Axis
Projection coordinate on the straight line of Five Axis.If 4-coordinate is (x3, y3), Five Axis are (x4, y4), and the projection coordinate is
(px, py), then calculation procedure is as follows：
K=((x0-x3) * (x4-x3)+(y0-y3) * (y4-y3))/((x4-x3) ^2+ (y4-y3) ^2)
Px=K* (x4-x3)+x3
Py=K* (y4-y3)+y3；
3) obtains first coordinate and is sat to the connection the described 4th according to first coordinate and the projection coordinate
The second distance d of the straight line of mark and Five Axis, wherein
D=Sqr ((y0-py) ^2+ (x0-px) ^2)；
4) according to described first apart from the D and second distance d, obtain when the mobile pin and the fixed pin away from
During from for the first distance D, the mobile pin to the projection coordinate the 3rd apart from dNN, wherein
DNN=Sqr (Abs (D^2-d^2))；
5) according to the Five Axis, the projection coordinate and the described 3rd apart from dNN, obtain when the mobile pin and
The distance of the fixed pin be described first apart from D when, the 6th coordinate (dNNx, dNNy) of the mobile pin, and the shifting
Dynamic pin needs mobile the 4th apart from Dist1 apart from the position of initial distance described in the fixed pin since it.Specific meter
Calculate step as follows：
D4=Sqr ((y4-py) ^2+ (x4-px) ^2)
DNNk=dNN/d4
DNNx=dNNk* (x4-px)+px
DNNy=dNNk* (y4-py)+py
Dist1=Sqr ((x4-dNNx) ^2+ (y4-dNNy) ^2)；
6) obtains first coordinate and the rotation center according to first coordinate and the rotation center coordinate
Coordinate angulation OaG, wherein
OaG=Atn ((y0-YR1)/(x0-XR1))*180/π；
7) obtains the 6th coordinate and the central coordinate of circle according to the 6th coordinate and the rotation center coordinate
Angulation OaY, wherein
OaY=Atn ((dNNy-YR1)/(dNNx-XR1))*180/π；
8) is according to the 6th coordinate and first coordinate, obtain the 6th coordinate and first coordinate institute into
Angle OaC, wherein
OaC=Atn ((dNNy-y0)/(dNNx-x0)) * 180/ π；
9) according to the 6th coordinate and the first coordinate angulation and the first angle aN, institute is worked as in acquisition to
When to state the line of fixed probe and the traveling probe be first angle aN with the X-axis angle, the probe is from its rotary shaft
Origin start need rotation second angle aNN, wherein
ANN=aN-OaC；
10) according to the rotation center coordinate, the radius of turn, first coordinate and second coordinate institute into
Angle and the second angle aNN, obtain the distance when the fixed probe and the traveling probe for first apart from D,
When the line of the fixed probe and the traveling probe is first angle aN with the X-axis angle, the 7th of the fixed pin the
Coordinate (X3N, Y3N), wherein
X3N=Rx+Rr*Cos ((OaG+aNN)/180* π)
Y3N=Ry+Rr*sIn ((OaG+aNN)/180* π)；
11) is according to the coordinate (x5, y5) and the 7th coordinate of the image unit, obtain when the fixed probe and
The distance of the traveling probe is first to be with the X-axis angle apart from the line of D, the fixed probe and the traveling probe
During first angle aN, the distance (x5-X3N, y5-Y3N) of the fixed probe to the image unit.
Obviously, above-described embodiment is only intended to clearly illustrate example, and not to the restriction of implementation method.It is right
For those of ordinary skill in the art, can also make on the basis of the above description other multi-forms change or
Change.There is no need and unable to be exhaustive to all of implementation method.And the obvious change thus extended out or
Among changing still in the protection domain of the invention.
Claims (4)
1. a kind of pair of calibration method of probe flying probe device, it is characterised in that the flying probe device includes being arranged on
Image unit and described pair of probe on same probe, described pair of probe include the fixed probe and can adjust and the fixation
The traveling probe of probe distance, the probe can be translated around its rotary shaft rotation and on X-Y axles, the calibration method bag
Include：
Obtain first coordinate, rotation 90 of the fixed probe when the probe is since 0 degree of rotation the origin of its rotary shaft
The second coordinate when spending and the 3rd coordinate from turnback；
Obtain 4-coordinate of the traveling probe when it is apart from the fixed probe initial distance and when its distance is described
Five Axis during fixed probe predeterminable range；
Obtain the coordinate of the image unit；
According to described first, second, third, fourth, Five Axis and the coordinate of the image unit, obtain when the fixed spy
The distance of pin and the traveling probe is that the line of the first distance, the fixed probe and the traveling probe is pressed from both sides with the X-axis
When angle is first angle, the distance of the fixed probe to the image unit；
Distance according to the fixed probe to the image unit is calibrated to described pair of probe flying probe device.
2. method according to claim 1, it is characterised in that the acquisition fixed probe is when the probe from its rotation
The first coordinate when the origin of rotating shaft starts 0 degree of rotation, the second coordinate, the 3rd coordinate bag from turnback when turning 90 degrees certainly
Include：
When the probe is since 0 degree of rotation the origin of its rotary shaft, the movement probe makes the fixed probe alignment school
Quasi- zero point, obtains first coordinate；
When the probe is since when turning 90 degrees, the movement probe makes the fixed probe alignment institute the origin of its rotary shaft
Calibration zero point is stated, second coordinate is obtained；
When the probe is since the origin of its rotary shaft from turnback when, the movement probe makes the fixed probe alignment
The calibration zero point, obtains the 3rd coordinate.
3. method according to claim 1, it is characterised in that the acquisition traveling probe is when it is apart from the fixation
4-coordinate during probe initial distance and the Five Axis when it is apart from the fixed probe predeterminable range include：
Origin of the rotation probe to its rotary shaft；
The movement traveling probe makes the traveling probe apart from initial distance described in the fixed probe；
The movement probe makes the traveling probe alignment calibration zero point, obtains the 4-coordinate；
The movement traveling probe makes the traveling probe apart from predeterminable range described in the fixed probe；
The movement probe makes the traveling probe be directed at the calibration zero point, obtains the Five Axis；
The coordinate for obtaining the image unit includes：
The described probe of movement makes the center of the image unit be directed at the calibration zero point, obtains the coordinate of the image unit.
4. the method according to any one of claim 1-3, it is characterised in that described according to described first, second,
3rd, the 4th, the coordinate of Five Axis and the image unit, obtains when the distance of the fixed probe and the traveling probe is
When the line of the first distance, the fixed probe and the traveling probe is first angle with the X-axis angle, the fixed spy
Pin includes to the distance of the image unit：
The radius of turn and rotation center coordinate of the fixed pin are obtained according to first, second, and third coordinate；
First coordinate is obtained according to the described first, the 4th and Five Axis and is connecting the 4-coordinate and Five Axis
Projection coordinate on straight line；
First coordinate is obtained according to first coordinate and the projection coordinate and connects the 4-coordinate and the to described
The second distance of the straight line of Five Axis；
According to first distance and the second distance, it is described the to obtain the distance when the mobile pin and the fixed pin
One apart from when, the 3rd distance of the mobile pin to the projection coordinate；
According to the Five Axis, the projection coordinate and the 3rd distance, obtain and work as the mobile pin and the fixed pin
Distance for described first apart from when, the 6th coordinate of the mobile pin, and the mobile pin from it apart from the fixed pin
The position of the initial distance starts to need the 4th mobile distance；
According to first coordinate and the rotation center coordinate, obtain first coordinate and rotation center coordinate institute into
Angle；
According to the 6th coordinate and the rotation center coordinate, the 6th coordinate and central coordinate of circle institute angulation are obtained
Degree；
According to the 6th coordinate and first coordinate, the 6th coordinate and the first coordinate angulation are obtained；
According to the 6th coordinate and the first coordinate angulation and the first angle, obtain and work as the fixed probe
When with the line of the traveling probe with the X-axis angle being first angle, the probe is needed since the origin of its rotary shaft
The second angle to be rotated；
According to the rotation center coordinate, the radius of turn, first coordinate and the second coordinate angulation, with
And the second angle, obtain when the distance of the fixed probe and the traveling probe is the first distance, the fixed probe
When with the line of the traveling probe with the X-axis angle being first angle, the 7th coordinate of the fixed pin；
Coordinate and the 7th coordinate according to the image unit, obtain when the fixed probe and the traveling probe away from
With a distance from for first, the line of the fixed probe and the traveling probe is when being first angle with the X-axis angle, described solid
Determine probe to the distance of the image unit.
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| CN201611270453.1A CN106771979B (en) | 2016-12-30 | 2016-12-30 | A kind of calibration method of double probe flying probe devices |
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| CN201611270453.1A CN106771979B (en) | 2016-12-30 | 2016-12-30 | A kind of calibration method of double probe flying probe devices |
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| CN114942381A (en) * | 2022-07-21 | 2022-08-26 | 深圳市东方宇之光科技股份有限公司 | Flying probe testing machine and testing method based on cantilever type structure test circuit board |
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