CN107390155B - Magnetic sensor calibration device and method - Google Patents
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Abstract
The invention relates to the technical field of sensor detection, and provides a magnetic sensor calibration device and method. The method comprises the steps of arranging an acceleration sensor which is calibrated and a magnetic sensor to be detected in the same detection environment; acquiring detection data of the acceleration sensor and the magnetic sensor, and establishing a first equation of the detection data of the acceleration sensor and the magnetic sensor according to the theory that points of the detected acceleration data and the detected magnetic field data are multiplied by a constant; and converting the first equation into a first functional expression formed by each parameter to be calibrated, substituting a plurality of groups of detection data into the first functional expression, and solving to obtain the detection result of the magnetic sensor. The method provided by the invention overcomes the problem of sensor sensitive axis consistency caused by the fact that the calibration process is completed only by the self detection data of the magnetic sensor in the prior art.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of sensor detection, in particular to a magnetic sensor calibration device and method.
[ background of the invention ]
Magnetic sensors are widely used in modern industry and electronic products to sense magnetic field strength to measure physical parameters such as current, direction, etc. In the prior art, there are many different types of sensors for measuring magnetic fields and other parameters. A magnetic sensor based on a Micro-Electro-mechanical System (abbreviated as MEMS) has the advantages of small volume, light weight, high reliability, low cost, easy mass production, etc., and is used in the fields of mobile phones, pedestrian navigation, etc. The principle is mostly based on Anisotropic Magnetoresistive (AMR) technology, which is used to detect the geomagnetic field and is combined with an accelerometer to form a familiar electronic compass for determining the heading of a moving object.
However, the earth's magnetic field is very weak, typically only 0.5 gauss, and is about 4 gauss at 2 cm distance from a typical handset horn and about 6 gauss at 2 cm distance from the handset motor. When the geomagnetic field is measured by using the magnetic sensor in the electronic equipment, the geomagnetic field is easily interfered by an external magnetic field, so that the measurement is inaccurate, and the course estimation precision is further influenced. Therefore, the magnetic sensor must be calibrated before an accurate measurement of the earth's magnetic field can be achieved using the magnetic sensor. It is difficult to obtain geomagnetic field components (i.e., input values of the magnetic sensors) in different orientations as reference standards without a complicated magnetic field measurement apparatus.
Although the magnetic sensor can be calibrated with errors by an expensive precision magnetic field measurement turntable, a more serious problem is that the calibration of the magnetic sensor needs to be performed anew even if the magnetic sensor that has been calibrated on an indoor turntable is not suitable for use in a place where the external magnetic field is too disturbing. Therefore, the calibration of the magnetic sensor by the magnetic field measurement turntable is very limited, and the calibration in place cannot be realized, so that the practical use is inconvenient.
The conventional on-site calibration method for a magnetic sensor mainly includes a plane ellipse calibration method and a three-dimensional ellipsoid calibration method, a projection trajectory of a geomagnetic field in an xy plane, which is measured when the magnetic sensor performs a circular motion in the xy plane around a z axis, is represented by a standard circle, as shown in fig. 1, when there is no external magnetic field interference, the trajectory may be represented by a standard circle having O (0, 0) as a center and a magnitude of geomagnetic intensity as a radius, when there is external magnetic field interference, a magnetic field intensity α measured by the magnetic sensor is a sum of the geomagnetic field at the point and an additional magnetic field γ, β:
αmeasured value＝βGeomagnetic field+γAdditional magnetic field
The external interference magnetic field gamma can be regarded as a constant vector in a short time range, and the calibration of the magnetic sensor can be realized by calculating and solving the gamma so as to eliminate the influence of external magnetic field interference on course angle estimation.
The position of the center of a circle in the xy plane is obtained as ((x)max+xmin)/2,(ymax+ymin)/2). Likewise, rotating the device in the xz plane can obtain a trajectory circle of the earth magnetic field in the xz plane, which can determine a magnetic field disturbance vector gamma (gamma) in three-dimensional spacex,γy,γz)。
For ellipsoidal calibration, typically, when the magnetic sensor is rotated in all directions in air, the spatial geometry of the measured values is effectively a sphere, with all the sample points falling on the surface of the sphere, similar to a circle projected in a two-dimensional plane. In this case, the output of the magnetic sensor satisfies the following equation:
(x-γx)2+(y-γy)2+(z-γz)2＝R2
obtaining O (gamma) by least square fittingx,γy,γz) I.e. the magnitude and direction of the stationary magnetic field disturbance vector.
Currently, the most commonly used magnetic sensor calibration method is mainly based on ellipsoid fitting calibration, for example, a calibration method of drawing an "∞" character is required before a compass is used on a smart phone. The calibration method does not need auxiliary measuring equipment, is simple and easy to operate and is very effective for calibrating the magnetic sensor. However, the biggest disadvantage of this method is that the sensitive axis of the magnetic sensor is misaligned with the sensitive axes of other inertial sensors such as an accelerometer and the like when the ellipsoid fitting calibration is adopted, so that a new heading estimation error is brought.
[ summary of the invention ]
The invention aims to solve the technical problem that a high-precision non-magnetic rotary table can realize the precise calibration of a magnetic sensor, is suitable for factory calibration of manufacturers, but is not suitable for the calibration of a processing field after the magnetic sensor is interfered. The plane calibration method is similar to the ellipsoid fitting calibration in nature, the optimal solution of the assumed error model parameters is obtained by adopting a mathematical fitting method, and the consistency of the sensor sensitive axes in the physical and actual conditions is not considered. When the ellipsoid fitting calibration is adopted, the sensitive axis of the magnetic sensor may not coincide with the sensitive axes of other sensors such as an accelerometer and the like, so that a new heading estimation error is brought.
The invention adopts the following technical scheme:
in a first aspect, the present invention provides a magnetic sensor calibration device, which is formed by processing a non-magnetic aluminum alloy, and includes a plurality of end faces formed by preset angles and used for placing a magnetic sensor to be detected, wherein the bottom of the device is provided with one or more fixed bases for placing the magnetic sensor to be detected, and the bottom of each fixed base is provided with a power supply port and a data port of a corresponding magnetic sensor, specifically:
the magnetic sensor to be tested is a unit main body which is packaged by the verified acceleration sensor; alternatively, the first and second electrodes may be,
the device is also provided with a preset base for fixing the calibrated acceleration sensor.
Preferably, on a cross section formed by connecting center lines among the end surfaces, the intersection point of the center line and the two sides of each end surface to the center of a circumscribed circle of the device forms the preset angle, and the range of the preset angle is 30-45 degrees.
Preferably, the end faces are respectively provided with at least two fixing grooves, and the fixing grooves are used for being embedded into fixing table tops and provided with the same number of fixing feet to finish the fixing of the calibration device.
Preferably, the at least two fixing grooves comprise power supply electrodes and data electrodes, and the power supply electrodes and the data electrodes are respectively connected with power supply ports and data ports of all bases arranged on the bottom of the device through leads.
In a second aspect, the present invention also provides a magnetic sensor calibration method, the method comprising:
arranging the calibrated acceleration sensor and the magnetic sensor to be detected in the same detection environment;
acquiring detection data of the acceleration sensor and the magnetic sensor, and establishing a first equation of the detection data of the acceleration sensor and the magnetic sensor according to the theory that points of the detected acceleration data and the detected magnetic field data are multiplied by a constant;
and converting the first equation into a first functional expression formed by each parameter to be calibrated, substituting a plurality of groups of detection data into the first functional expression, and solving to obtain the detection result of the magnetic sensor.
Preferably, the first equation is: a, u ═ aTLy-aTd is a constant, where u is the input of the magnetic sensor, i.e., the magnetic sensor output value after theoretical calibration is completed; and a is a gravity value measured after the accelerometer is calibrated.
Preferably, the first functional formula is:
Preferably, the calibration method of the acceleration sensor that has completed calibration specifically includes:
fixing one or more acceleration sensors to be tested in a calibration device;
selecting at least 12 end faces of the calibration device to be fixed respectively according to a preset calculation method, and completing corresponding data acquisition;
and respectively substituting the acquired data into a calculation equation of each acceleration sensor, and calculating to obtain a calibration result corresponding to each acceleration sensor and comprising one or more parameters of zero offset, scale factors, inter-axis errors and scale factors.
Preferably, the step of bringing the acquired data into the calculation equation of each acceleration sensor includes:
substituting the acquired data into the equation: y isk＝SkTkMkuk+bkCalculating to obtain a scale factor error and an interaxial error;
where k denotes a different type of sensor, ukRepresenting a measured physical quantity, y, in an ideal coordinate systemkVector representing raw output values of sensor, bkRepresenting the sensor offset vector, SkRepresenting a sensor scale factor matrix, TkAnd MkRespectively representing the inter-axis orthogonal matrix and the alignment matrix of the sensor.
Preferably, the calibration device comprises three columns with mutually vertical centers, and six top surfaces of the three columns form main end surfaces for fixing during calibration;
the three cylinders are respectively divided into two sections at the central vertical position, a connecting block is arranged between the cylinder sections, the surface of the connecting block is in a fan shape or a polygon shape, and the thickness is designed according to the length of the cylinder; the three inclined planes intersected at the top of the cone in the cone are used for placing an acceleration sensor to be detected.
The invention provides a novel magnetic sensor calibration method and a novel magnetic sensor calibration device. On the basis of calibrating an acceleration sensor in advance, a first function is established by using the theoretical basis that the point of a gravity vector acquired by the acceleration sensor and a magnetic field vector acquired by the magnetic sensor after calibration is multiplied by a constant, and a calibration parameter value is calculated by bringing in the acquired data of the acceleration sensor and the detection data of the magnetic sensor (namely the acquired data of the magnetic sensor which is not calibrated). The method provided by the invention overcomes the problem of sensor sensitive axis consistency caused by the fact that the calibration process is completed only by the self detection data of the magnetic sensor in the prior art.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments of the present invention will be briefly described below. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
FIG. 1 is a schematic diagram of a magnetic line projection trajectory of an xy plane of a magnetic sensor in the prior art;
FIG. 2 is a front view of a magnetic sensor calibration device according to an embodiment of the present invention;
FIG. 3 is a structural bottom view of a magnetic sensor calibration device according to an embodiment of the present invention;
FIG. 4 is a top view of a magnetic sensor calibration device according to an embodiment of the present invention;
FIG. 5 is a cross-sectional end view of a magnetic sensor calibration apparatus provided in accordance with an embodiment of the present invention;
FIG. 6 is a front view of a magnetic sensor calibration device with a groove structure according to an embodiment of the present invention;
fig. 7 is a schematic flowchart of a calibration method for a magnetic sensor according to an embodiment of the present invention;
fig. 8 is a schematic flowchart of a calibration method for an acceleration sensor according to an embodiment of the present invention;
fig. 9 is a schematic diagram of a sensor error model according to an embodiment of the present invention.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, the terms "inner", "outer", "longitudinal", "lateral", "upper", "lower", "top", "bottom", and the like indicate orientations or positional relationships based on those shown in the drawings, and are for convenience only to describe the present invention without requiring the present invention to be necessarily constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
In the prior art:
generally, an error model of a three-axis MEMS magnetic sensor can be written as follows:
y3×1＝H3×3·u3×1+Bias3×1
where u represents the input vector of the sensor; h is a composite error calibration matrix of the sensor, the composite error calibration matrix comprises scale factor errors and interaxial errors of the sensor, Bias is zero offset of the sensor, and y represents a sensor output vector. Suppose L ═ H-1、d＝H-1Bias, obtained from the above formula:
u＝Ly-d
although the true geomagnetic component is difficult to know, the modulus of the geomagnetic field u is known constantly. Namely:
||u||2＝(Ly-d)2＝(Ly-d)·(Ly-d)＝yTLTLy-2dTLy+dTd is constant
Measured by different magnetic sensorsiL and d are determined such that
And at the moment, the least square method ellipsoid fitting method can be used as the optimal solution only in the mathematical form, and the axial direction of the magnetic sensor is difficult to be ensured to be consistent with the axial line of the inertial sensor after the calibration is finished.
The inventor finds that the point product g.h of the two vectors is a constant according to the fact that the gravity acceleration g and the geomagnetic field intensity h of a certain point on the earth are known quantities. Suppose that the matrix of output values of the magnetic sensor at the K static positions is
Let the corresponding accelerometer output at this time be
The available accelerometer output and magnetic sensor output satisfy the formula:
a·u＝aTLy-aTd is constant
u is the magnetic sensor input, i.e. the geomagnetic field value h; the accelerometer is calibrated to measure the gravity value g, so the above equation holds. At this time, Y is outputted according to the magnetic sensor in different directionsmAnd accelerometer output AmL and d can be determined by least squares such that
The calibration method provided by the invention fully utilizes the gravity field information, can keep the sensitive axis of the magnetic sensor consistent with the sensitive axis of the accelerometer, and realizes the accurate calibration of the magnetic field in the real sense.
The calibration method, and the associated apparatus (e.g., embodiment 1) and ancillary methods (e.g., embodiment 3) for supporting the calibration method will be explained next by way of specific embodiments.
Example 1:
embodiment 1 of the present invention provides a magnetic sensor calibration apparatus, as shown in fig. 2 to 4, the apparatus is formed by processing a non-magnetic aluminum alloy, and includes a plurality of end surfaces (as shown in fig. 2) formed by preset angles and used for placing, wherein the bottom of the apparatus is provided with one or more fixed bases (as shown in fig. 4) for placing a magnetic sensor to be detected, and the bottom of each fixed base is provided with a power supply port and a data port of a corresponding magnetic sensor, specifically:
the magnetic sensor to be tested is a unit main body which is completed by packaging the acceleration sensor which is verified (for example, the sensor module to be calibrated shown in fig. 4 is completed by packaging the magnetic sensor to be tested and the acceleration sensor which is completed by calibration); alternatively, the first and second electrodes may be,
the device is also provided with a preset base (shown in figure 2) for fixing the acceleration sensor which is verified. The number of the preset bases may be one or more, wherein if the number of the preset bases is multiple, the calibration values of a group of magnetic sensors can be obtained by solving according to the detection data of each acceleration sensor, and the accuracy of the final calibration result of the magnetic sensors is further improved by means of averaging.
The device provided in the embodiment of the present invention may be used in conjunction with the magnetic sensor calibration method provided in embodiment 2 to establish a first function based on a theoretical basis that a point of a gravity vector acquired by the acceleration sensor and a point of a magnetic field vector acquired by the magnetic sensor after calibration is multiplied by a constant on the basis of calibrating the acceleration sensor in advance, and calculate a calibration parameter value by taking in the acquired data of the acceleration sensor and the detection data of the magnetic sensor (i.e., the acquired data of the magnetic sensor whose calibration is not completed). The device provided by the embodiment of the invention can be matched with the method described in the embodiment 2, and the problem of consistency of the sensitive axis of the sensor caused by the fact that the calibration process is completed only by the detection data of the magnetic sensor in the prior art is solved.
In the embodiment of the invention, on the cross section formed by connecting the central lines between the end surfaces, the intersection points of the central lines and the two sides of each end surface and the center of a circumscribed circle of the device form the preset angle, and the range of the preset angle is 30-45 degrees. As shown in fig. 5, the effect of the preset angle of 30 ° is schematically shown, wherein the included angles from the two sides of each end face to the center of the circle are all 30 ° except for the measured end faces (the two faces are not usually used as the end faces for fixing).
In the embodiment of the present invention, there is a preferred implementation scheme, which not only can improve the horizontal placement stability of the calibration device, but also can further solve the problem of power supply of each magnetic sensor to be detected in the calibration device, as shown in fig. 6, at least two fixing grooves are respectively arranged on the end surfaces, and the fixing grooves are used for embedding the same number of fixing pins on the table top to complete the fixing of the calibration device.
In order to obtain the above power supply and data transmission functions, the at least two fixing grooves include power supply electrodes and data electrodes, and the power supply electrodes and the data electrodes are respectively connected to power supply ports and data ports of the respective bases disposed on the bottom of the device through wires.
Example 2:
after providing the magnetic sensor calibration method as described in embodiment 1, an embodiment of the present invention further provides a magnetic sensor calibration method. The calibration method for a magnetic sensor according to an embodiment of the present invention may be applied to the calibration apparatus according to embodiment 1, and may also be applied to other common calibration apparatuses (however, the calibration apparatus according to embodiment 1 of the present invention is preferable in view of external interference and convenience of calibration), as shown in fig. 7, the method includes:
in step 201, the acceleration sensor that has completed calibration and the magnetic sensor to be detected are placed in the same detection environment.
The same test environment may be on a test device as described in example 1. The acceleration sensor and the magnetic sensor may be already packaged objects, or may be components that are independent from each other (i.e., not packaged together).
In step 202, the detection data of the acceleration sensor and the magnetic sensor are acquired, and a first equation of the detection data of the acceleration sensor and the magnetic sensor is established according to the theory that the points of the detected acceleration data and the detected magnetic field data are multiplied by a constant.
In step 203, the first equation is converted into a first functional expression formed by each parameter to be calibrated, and a plurality of sets of detection data are substituted into the first functional expression, and the detection result of the magnetic sensor is obtained through solving.
The embodiment of the invention provides a novel magnetic sensor calibration method, which is characterized in that on the basis of pre-calibrating an acceleration sensor, a first function is established by utilizing the theoretical basis that the point of a gravity vector acquired by the acceleration sensor and a magnetic field vector acquired by the magnetic sensor after calibration is multiplied by a constant, and a calibration parameter value is calculated by bringing in the acquired data of the acceleration sensor and the detection data of the magnetic sensor (namely the acquired data of the magnetic sensor which is not calibrated). The method provided by the embodiment of the invention overcomes the problem of sensor sensitive axis consistency caused by the fact that the calibration process is completed only by the self detection data of the magnetic sensor in the prior art.
In the embodiment of the present invention, the first equation is: a, u ═ aTLy-aTd is a constant, where u is the input of the magnetic sensor, i.e., the magnetic sensor output value after theoretical calibration is completed; and a is a gravity value measured after the accelerometer is calibrated.
In an embodiment of the present invention, the first functional formula is:
h represents a composite error matrix of the magnetic sensor, and Bias is the Bias of the magnetic sensor; the detection result of the magnetic sensor obtained by the solution includes a least square method and a newton iteration method.
Example 3:
an embodiment of the present invention further provides a calibration method for an acceleration sensor, where the calibration method uses the calibration apparatus for an acceleration sensor described in embodiment 1, and as shown in fig. 8, the method further includes:
in step 301, one or more acceleration sensors to be tested are fixed in a calibration device; such as the calibration device shown in fig. 2 (in this case, the predetermined base may be spread over the entire surface as shown in fig. 2).
In step 302, at least 12 end faces of the calibration device are selected to be fixed respectively according to a preset calculation method, and corresponding data acquisition is completed. In order to increase the number of detection end faces (the effective number of end faces is 9 as shown in fig. 2), the angle between the end face and the center of the circle of the calibration device as shown in fig. 2 can be further reduced (for example, 20 °). Embodiment 4 of the present invention provides a calibration apparatus applicable to calibration of an acceleration sensor.
In step 303, the collected data are respectively substituted into the calculation equation of each acceleration sensor, and the calibration result corresponding to each acceleration sensor and including one or more parameters of zero offset, scale factor, inter-axis error and scale factor is calculated.
The embodiment of the invention designs a calibration method for an accelerometer. Complete error calibration of the accelerometer, such as zero offset, scale factors and the like, can be realized. On the other hand, the calibration method provided by the embodiment of the invention can realize that a single detection device is used for calibrating the acceleration sensors as many as possible at the same time, thereby improving the calibration efficiency.
For a multi-axis sensor, the sensitive axes of the sensor should ideally remain orthogonal. Further, for a multi-sensor system, the sensors should be maintained to be vertically mounted with respect to each other, and the sensitive axes of the sensors should be aligned to a uniform reference coordinate system, however, various cross-coupling errors including non-orthogonality and non-alignment between the axes due to errors in the manufacturing process and the chip mounting process of the sensors are difficult to avoid. As shown in fig. 9, the error propagation characteristics of the sensor are described using a sensor error model.
The subscript k in fig. 9 denotes the different types of sensors. u. ofkTo representPhysical quantity, y, of the measured object in an ideal coordinate systemkRepresenting a vector of raw sensor output values. bkRepresenting the sensor bias vector:
Skrepresenting a sensor scale factor matrix (where the scale factor is the ratio of the acceleration sensor output to the input angular rate):
Tkand MkThe inter-axis orthogonal matrix and the alignment matrix, respectively, representing the sensors, are the dominant cross-coupling error terms. In summary, the relationship between the raw output value of the sensor and the measured physical quantity can be expressed as:
yk＝SkTkMkuk+bk(1-3)
after obtaining the sensor output values of a plurality of test points, a least square method is adopted to process the formulas 1-3, and a two-step parameter estimation method is adopted to simplify the optimization processing process of the deterministic error parameters of the sensor. First, a composite error matrix H is definedkAnd satisfies the following conditions:
Hk＝SkTkMk(1-4)
instead of estimating the scaling factor matrix S separatelykOrthogonalizing the matrix TkAnd an alignment matrix Mk. By this simplification, linear time-varying errors that are not accounted for in the sensor deterministic error model equations (1-3) will also be calibrated.
When the sensor is in a static state, only gravity acceleration acts on the accelerometer under the condition of not considering Coriolis acceleration, the sensor is kept in W different positions, and the output of the accelerometer in the W positions is defined as
Wherein
Representing the accelerometer output in the ith position. Suppose that the attitude angles of the accelerometer at W positions are respectively phiiAnd thetai(i 1, 2.. times.w), according to the relationship between the accelerometer input value and the gravitational acceleration in the stationary state:
wherein
Representing the gravitational acceleration input acting on the accelerometer, i.e. the measured acceleration, in the i-th position. The expansion (1-5) can obtain accurate input acceleration at different positions
Value of (A)
Defining the total input acceleration as
The total bias vector of the accelerometer at different positions is defined as Ba|3×w＝R(ba) (R () function represents BaIs set as the bias b of the accelerometera). Bias vector for accelerometer
And a composite error matrix
The iterative estimation can be performed as in equations (1-7) until convergence.
In the formula
Represents (y)a-HaUa) Column i.
It should be noted that, for the information interaction, execution process and other contents between the modules and units in the apparatus and system, the specific contents may refer to the description in the embodiment of the method of the present invention because the same concept is used as the embodiment of the processing method of the present invention, and are not described herein again.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (4)
1. A magnetic sensor calibration method, the method comprising:
arranging the calibrated acceleration sensor and the magnetic sensor to be detected in the same detection environment;
acquiring detection data of the acceleration sensor and the magnetic sensor, and establishing a first equation of the detection data of the acceleration sensor and the magnetic sensor according to the theory that points of the detected acceleration data and the detected magnetic field data are multiplied by a constant;
converting the first equation into a first functional expression formed by each parameter to be calibrated, substituting a plurality of groups of detection data into the first functional expression, and solving to obtain a detection result of the magnetic sensor;
the first equation is: a, u ═ aTLy-aTd is a constant, where u is the input of the magnetic sensor, i.e., the magnetic sensor output value after theoretical calibration is completed; a is a gravity value measured after the acceleration sensor is calibrated; y represents a sensor output vector;
the first functional formula is:
wherein, H represents a composite error matrix of the magnetic sensor, and the Bias of the magnetic sensor is used as the Bias of the magnetic sensor, and the detection result of the magnetic sensor obtained by the solving comprises a least square method; wherein L is H-1，d＝H-1·Bias。
2. The calibration method according to claim 1, wherein the calibration process of the acceleration sensor that has completed calibration specifically comprises:
fixing one or more acceleration sensors to be tested in a calibration device;
selecting at least 12 end faces of the calibration device to be fixed respectively according to a preset calculation method, and completing corresponding data acquisition;
and respectively substituting the acquired data into a calculation equation of each acceleration sensor, and calculating to obtain a calibration result corresponding to each acceleration sensor and comprising one or more parameters of zero offset, scale factors, inter-axis errors and scale factors.
3. The calibration method according to claim 2, wherein the step of substituting the collected data into the calculation equation of each acceleration sensor comprises:
substituting the acquired data into the equation: y isk＝SkTkMkuk+bkCalculating to obtain a scale factor error and an interaxial error;
where k denotes a different type of sensor, ukRepresenting a measured physical quantity, y, in an ideal coordinate systemkVector representing raw output values of sensor, bkRepresenting the sensor offset vector, SkRepresenting a sensor scale factor matrix, TkAnd MkRespectively representing the inter-axis orthogonal matrix and the alignment matrix of the sensor.
4. The calibration method according to claim 2, wherein the calibration means comprises three columns perpendicular to each other with respect to the center, and six top surfaces of the three columns constitute main end surfaces for fixing at the time of calibration;
the three cylinders are respectively divided into two sections at the central vertical position, a connecting block is arranged between the cylinders of each section, the surface of the connecting block is fan-shaped or polygonal, and the thickness is designed according to the diameter length or the side length of the cylinder; the three inclined planes intersected at the top of the cone in the cone are used for placing an acceleration sensor to be detected.
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