JP5350170B2 - Surface texture measuring machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface property measuring instrument reducing a burden on a measurer while preventing interference between a stylus and a measuring object. <P>SOLUTION: This surface property measuring instrument includes a stage 10 for thereon mounting the measuring object, a contact type detector 20 with a stylus 24, an image probe 30 for taking a surface image of the measuring object, a relative movement mechanism 40 for moving the detector and the image probe relative to the stage, and a controller 50. The image probe includes a probe body 32, and a probe head 33 supported on a distal end of the probe body 32 and capable of taking an image of the measuring object. The probe head is provided on the probe body so as to be turnable around an axis orthogonal to a direction in which the detector is moved relative to the stage in such a state that the stylus is contacted with the measuring object and to the axial direction of the stylus. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a surface texture measuring instrument for measuring the surface shape, surface roughness and the like of an object to be measured. More specifically, the present invention relates to a surface texture measuring instrument including a contact detector having a stylus and an image probe.

  While the stylus is in contact with the surface of the object to be measured, the stylus is moved along the surface of the object to be measured. At this time, the displacement of the stylus caused by the surface shape and surface roughness of the object to be measured is detected. 2. Description of the Related Art A surface property measuring machine that measures surface properties such as a surface shape and surface roughness of an object to be measured from a stylus displacement is known (see, for example, Patent Document 1).

  Conventionally, when measuring the surface shape, surface roughness, etc. of an object to be measured with a surface texture measuring instrument, the measurer visually adjusts the relative position between the tip of the stylus and the measurement location of the object to be measured while measuring the stylus. Is set at the measurement start position of the object to be measured, and then the stylus is relatively moved along the surface of the object to be measured. Then, since the stylus is displaced up and down depending on the surface shape and surface roughness of the object to be measured, the surface properties such as the surface shape and surface roughness of the object to be measured are measured from the vertical displacement of the stylus.

JP-A-5-87562

In recent years, the measurement objects and measurement locations have become finer in the process of miniaturization and thinning of objects to be measured, and the above-described stylus setting work is very difficult and takes time. The burden on the measurer is also great.
In addition, depending on the object to be measured, there may be a case where the stylus and the object to be measured interfere (collision) and the stylus or the object to be measured is damaged.

  The object of the present invention is to reduce the burden on the measurer, to prevent interference between the stylus and the object to be measured, and to measure the surface property of the inner surface of the hole formed in the vertical surface. Is to provide.

The surface texture measuring machine according to the present invention is a surface texture measuring machine for measuring the surface texture of an object to be measured, and a contact type having a stage on which the object to be measured is placed and a stylus that is in contact with the surface of the object to be measured. A detector, an image probe that captures a surface image of the object to be measured, a relative movement mechanism that relatively moves the contact detector and the image probe, and the stage; and controls the driving of the relative movement mechanism A control device for processing the measurement data obtained from the contact detector and the image data acquired by the image probe, the image probe being supported by a probe main body and a tip of the probe main body, constructed an image of the object and a capturing probe capable head, the probe head is in a state in which the stylus is in contact with the object to be measured Serial contact-type detector and said stage is mounted to pivotally the probe body about an axis perpendicular to the direction of displacement of direction and the stylus moves relative, the relative movement mechanism, the contact-type detector the has a pivoting mechanism for pivoting about an axis parallel to the said shaft, said control device, when the measurement starting position on the basis of the image of the measured object taken by the image probe is designated, the contact In accordance with the movement trajectory calculated by the movement trajectory calculating means, the movement trajectory calculating means for calculating and storing the movement trajectory of the relative movement mechanism so that the stylus of the detector is in contact with the measurement start position of the object to be measured. And stylus setting means for operating the relative movement mechanism including the turning mechanism .

According to such a configuration, first, after the image of the object to be measured is captured by the image probe, the measurement start position is designated based on the captured image of the object to be measured. The movement locus of the relative movement mechanism is calculated and stored so that the stylus of the detector contacts the measurement start position of the object to be measured. After that, when the measurement is executed, the relative movement mechanism is operated according to the movement locus obtained by the movement locus calculating means. That is, the relative movement mechanism is operated according to the stored movement trajectory, and the stylus of the contact detector is brought into contact with the measurement start position of the object to be measured.
Therefore, since the stylus of the contact detector can be automatically set to the measurement start position of the object to be measured, that is, as in the past, the measurer can visually compare the tip of the stylus and the measurement start position of the object to be measured. Since it is not necessary to set the tip of the stylus to the measurement start position of the object to be measured while adjusting the position, the burden on the measurer can be reduced and interference between the stylus and the object to be measured can be prevented.

In particular, the image probe includes a probe body and a probe head that is supported at the tip of the probe body and can capture an image of the object to be measured. The probe head is in a state where the stylus is in contact with the object to be measured. The probe head is attached to the probe body so that it can be swiveled around an axis perpendicular to the direction in which the contact detector and the stage move relative to each other (that is, the trace direction) and the stylus displacement direction. By turning around the center, the orientation of the probe head can be changed in the stylus displacement direction and the direction orthogonal thereto.
Therefore, if the orientation of the probe head is changed to the stylus displacement direction, for example, an image of the horizontal surface of the object to be measured can be acquired, and the orientation of the probe head can be changed to a direction orthogonal to the stylus displacement direction. Then, an image of the vertical surface of the object to be measured can be acquired. Therefore, even when measuring the inner surface properties of the hole formed on the vertical surface of the object to be measured, the image of the vertical surface of the object to be measured is acquired with an image probe, so that the stylus is formed on the inner surface of the hole formed on the vertical surface. Therefore, the burden on the measurer can be reduced and the interference between the stylus and the object to be measured can be prevented.

In the surface texture measuring instrument according to the present invention, the relative movement mechanism includes a first movement mechanism that moves the stage in one direction within a horizontal plane, a column, and an elevating member provided on the column so as to be movable in the vertical direction. A second movement mechanism for moving the elevating member in the vertical direction, a revolving plate provided on the elevating member so as to be rotatable about an axis parallel to the moving direction of the stage via the revolving mechanism, and the revolving plate A slide member provided on the plate so as to be movable in a direction orthogonal to the moving direction of the stage and the lifting direction of the lifting member; and a third moving mechanism for moving the sliding member. The contact detector and the image probe are attached, and the probe head is pivotable about an axis parallel to the moving direction of the stage. It has been kicked, it is preferable.

According to such a configuration, when the first to third moving mechanisms are operated, the contact detector, the image probe, and the stage can be relatively moved in the three-dimensional direction. Moreover, since the contact detector and the image probe are both attached to the slide member with an offset, the structure can be simplified compared to the case where a mechanism for separately moving the contact detector and the image probe is provided. Can be configured at low cost.
In particular, since the swivel plate is provided so as to be able to swivel around an axis parallel to the moving direction of the stage via the swivel mechanism, the swiveling motion of the swivel plate can change the orientation of the contact detector and the orientation of the image probe. Can be changed.
Therefore, when measuring the inner surface properties of the hole formed in the inclined surface of the object to be measured, the image of the inclined surface of the object to be measured is changed by changing the direction of the image probe to the direction facing the inclined surface of the object to be measured. Can be obtained. When the position where the stylus is brought into contact is designated from the acquired image and the swivel plate is swung, the position of the contact-type detector coincides with the slant of the hole formed on the slant surface of the object to be measured. The stylus can be accurately positioned on the inner surface of the hole formed in the inclined surface. Therefore, when measuring the surface properties of the inner surface of the hole formed in the inclined surface, the burden on the measurer can be reduced and interference between the stylus and the object to be measured can be prevented.

In the surface texture measuring instrument according to the present invention, the image probe receives an object lens, a light source disposed on the outer periphery of the object lens, and reflected light from the object to be measured that has passed through the object lens, and It is preferable to include a CCD sensor that captures an image.
According to such a configuration, the surface image of the object to be measured can be acquired with high accuracy by the CCD sensor through the objective lens. And since the light source is arrange | positioned around the objective lens, it can reduce in size compared with the case where an illuminating device is provided separately.

In the surface texture measuring instrument according to the present invention, the stylus of the contact-type detector and the image probe are arranged offset to a position where the other does not get in the way during the measurement of one of them, and the stylus of the contact-type detector An offset amount storage means for storing an offset amount between the tip and the image probe is provided, and the movement trajectory calculation means takes the offset amount stored in the offset amount storage means into consideration when the stylus of the contact detector is It is preferable to calculate a movement locus of the relative movement mechanism so as to come into contact with a measurement start position of the object to be measured.
According to such a configuration, the stylus and the image probe of the contact type detector are arranged so as to be offset so that the other does not get in the way during the measurement of one of them, so that the other is retracted during each measurement. Even if no mechanism is attached, measurement will not be hindered.
Moreover, the offset amount between the stylus tip of the contact detector and the image probe is stored in the offset amount storage means, and the stylus of the contact detector is measured in consideration of the offset amount stored in the offset amount storage means. Since the object is brought into contact with the measurement start position of the object, the stylus of the contact-type detector can be brought into contact with the measurement start position of the object to be measured accurately based on the image acquired by the image probe.

The perspective view which shows the surface texture measuring machine which concerns on one Embodiment of this invention. The expansion perspective view which shows the contact-type detector and image probe part of embodiment same as the above. The front view which shows the contact-type detector and image probe part of embodiment same as the above. The figure which shows the image probe of embodiment same as the above. The block diagram which shows the control system of embodiment same as the above. The perspective view which shows the example of a to-be-measured object. The figure which shows a mode that the hole of a vertical wall is measured using a surface texture measuring machine same as the above. The figure which shows a mode that the hole of an inclined wall is measured using a surface texture measuring machine same as the above. The figure which shows a mode that the hole of a horizontal wall is measured using a surface texture measuring machine same as the above.

<Description of surface texture measuring instrument (see FIGS. 1 to 5)>
As shown in FIGS. 1 and 2, the surface texture measuring machine according to the present embodiment has an installation base 1, a base 2 fixed to the upper surface of the installation base 1, and a base 2 mounted on the base 2. A stage 10 for placing the object to be measured, a contact detector 20 having a stylus 24 in contact with the surface of the object to be measured, an image probe 30 for capturing a surface image of the object to be measured, and a contact detector 20 And a relative movement mechanism 40 for relatively moving the image probe 30 and the stage 10, and a control device 50.

  The relative movement mechanism 40 is provided between the base 2 and the stage 10, a Y-axis drive mechanism 41 as a first movement mechanism that moves the stage 10 in one horizontal direction (Y-axis direction), and the upper surface of the base 2. A column 42 standing upright, a Z slider 43 as an elevating member provided on the column 42 so as to be movable in the vertical direction (Z-axis direction), and a second moving mechanism for raising and lowering the Z slider 43 in the vertical direction. A Z-axis drive mechanism 44, a revolving plate 46 provided on the Z slider 43 so as to be rotatable about the Y axis via a revolving mechanism 45 (see FIG. 5), and a stage 10 provided on the revolving plate 46. An X slider 47 as a slide member provided so as to be movable in a direction (X axis direction) orthogonal to the moving direction (Y axis direction) and the raising / lowering direction (Z axis direction) of the Z slider 43; The X slider 47 and an X-axis driving mechanism 48 as a third movement mechanism for moving the X-axis direction.

  In the present embodiment, the contact detector 20 and the image probe 30 are attached to the X slider 47. Accordingly, the relative movement mechanism 40 includes a Y-axis drive mechanism 41 that moves the stage 10 in the Y-axis direction, a Z-axis drive mechanism 44 that moves the contact detector 20 and the image probe 30 in the Z-axis direction, and contact detection. And a three-dimensional movement mechanism including an X-axis drive mechanism 48 that moves the imager 20 and the image probe 30 in the X-axis direction.

The Y-axis drive mechanism 41 and the Z-axis drive mechanism 44 are not shown in the figure, but are constituted by, for example, a feed screw mechanism having a ball screw shaft and a nut member screwed to the ball screw shaft.
The X-axis drive mechanism 48 includes a guide rail 48B provided parallel to the X-axis direction on the drive mechanism main body 48A and movably supporting the X slider 47, and a drive source for reciprocating the X slider 47 along the guide rail 48B. (Not shown) and the like.

  As shown in FIG. 3, the contact detector 20 includes a detector main body 21 supported by being suspended by the X slider 47, and a contact probe 22 supported by the detector main body 21 in parallel with the X-axis direction. Prepare. The contact probe 22 includes a probe main body 23, an arm 25 that is supported by the probe main body 23 so as to be swingable and has a stylus 24 at the tip, and a detection unit 26 that detects the swing amount of the arm 25. .

The image probe 30 includes a cylindrical probe main body 32 integrally connected to the X slider 47 together with the contact detector 20 via a connecting member 31, and a stylus 24 at the tip of the probe main body 32 serving as an object to be measured. Centering on an axis (Y axis) orthogonal to the direction in which the contact detector 20 and the stage 10 move relative to each other in the contact state (X axis direction) and the displacement direction of the stylus 24 (Z axis direction: vertical direction) A probe head 33 supported so as to be able to turn, and a head oscillation mechanism 34 such as a motor for turning the probe head 33 are provided.
As shown in FIG. 4, the probe head 33 receives the reflected light from the objective lens 35, the LED 36 as the light source disposed on the outer periphery of the objective lens 35, and the object to be measured that has passed through the objective lens 35, and receives the light. A CCD sensor 37 that captures an image of the measurement object and a cover 38 that covers the periphery of the LED 36 are configured.

  The image probe 30 is arranged at a position offset with respect to the contact detector 20. Specifically, as shown in FIG. 2, the focal position of the objective lens 35 of the image probe 30 is lower than the tip of the stylus 24 of the contact detector 20 by an offset amount OFz in the Z-axis direction. In the Y-axis direction, they are arranged at positions shifted backward from the axis of the stylus 24 by the offset amount OFy. In the X-axis direction, it is arranged at the same position as the axis of the stylus 24, that is, at a position where the offset amount OFx = 0.

As shown in FIG. 5, in addition to the relative movement mechanism 40, the contact detector 20, and the image probe 30, an input device 51, a display device 52, and a storage device 53 are connected to the control device 50.
The input device 51 is composed of, for example, a portable keyboard or a joystick, and specifies a position (measurement start position) where the stylus 24 is set from an image acquired by the image probe 30 in addition to inputting various operation commands and data. It can be done.
The display device 52 displays the image acquired by the image probe 30 and the shape and roughness data obtained by the contact detector 20.
The storage device 53 includes a program storage unit 54 that stores measurement programs and the like, an offset amount storage unit 55 that serves as an offset storage unit that stores the offset amounts OFz and OFy of the stylus 24 of the contact detector 20 and the image probe 30, and A data storage unit 56 for storing image data, measurement data, and the like captured at the time of measurement is provided.

  When the measurement start position is designated on the basis of the measurement object image captured by the image probe 30 in accordance with the measurement program stored in the program storage unit 54, the control device 50 causes the stylus 24 of the contact detector 20 to move. The movement trajectory calculating means for calculating and storing the movement trajectory of the relative movement mechanism 40 so as to contact the measurement start position of the object to be measured, and the relative movement mechanism 40 is operated according to the movement trajectory obtained by the movement trajectory calculation means. In a state where the stylus setting means, the stylus 24 of the contact type detector 20 and the object to be measured are in contact with each other, the relative movement mechanism 40 is operated to move the contact type detector 20 and the object to be measured relatively. Measuring execution means for measuring the surface property of the object.

  Furthermore, the control device 50 has an edge detection function for detecting the edge of the object to be measured from the image of the object to be measured captured by the image probe 30, and an objective lens on the surface in the height direction (Z-axis direction) of the object to be measured. The objective lens 35 is displaced in the height direction so that the focal positions coincide with each other, and an autofocus function for detecting the position in the height direction of the object to be measured from the amount of displacement is provided. As the edge detection function, a known detection principle can be used. For example, an average density (brightness density) in a direction orthogonal to the detection direction of the image probe 30 is obtained, and this average density is set in advance. Alternatively, a method of detecting a position below the threshold as an edge may be used.

<Description of measurement method (see FIGS. 6 to 9)>
For example, the example which measures the to-be-measured object 60 shown in FIG. 6 is demonstrated.
An object to be measured 60 includes a horizontal wall 61, a vertical wall 62 erected perpendicularly to one end of the horizontal wall 61, and an inclined wall formed in an inclined shape between the horizontal wall 61 and the vertical wall 62. 63. Four holes 62A to 62D are formed on both sides of the vertical wall 62 across the inclined wall 63, and two holes 61A and 61B are formed on both sides of the horizontal wall 61. One hole 63 </ b> A is formed at a right angle with respect to the inclined wall 63 at the center position of the inclined wall 63.

(Example of measuring the shape of the holes 62A to 62D of the vertical wall 62)
First, as shown in FIG. 7A, the probe head 33 of the image probe 30 is held in a horizontal posture in accordance with a command from the input device 51. In this state, the vertical wall of the object 60 to be measured is held by the image probe 30. 62 images are acquired. Then, the image data of the vertical wall 62 of the DUT 60 is stored in the data storage unit 56 and then displayed on the display device 52.

Here, based on the image of the vertical wall 62 displayed on the display device 52, when the measurement start position (position where the stylus 24 of the contact detector 20 is first contacted) is designated from the input device 51, for example, the hole 62A When the lower inner peripheral surface is designated, the control device 50 takes the offset amounts OFz and OFy stored in the offset amount storage unit 55 into consideration so that the stylus 24 of the contact-type detector 20 has the hole 62A of the object 60 to be measured. The movement trajectory of the relative movement mechanism 40 is calculated and stored in the program storage unit 54 so as to be in contact with the lower inner peripheral surface.
Thereafter, when a measurement start command is issued, the relative movement mechanism 40 is operated according to the movement locus stored in the program storage unit 54. That is, as shown in FIG. 7B, the relative movement mechanism 40 is operated so that the stylus 24 of the contact detector 20 contacts the designated position (the lower inner peripheral surface of the hole 62A).

  When the stylus 24 of the contact detector 20 is set at the position of the lower inner peripheral surface of the hole 62A, the control device 50 operates the X-axis drive mechanism 48. Then, the stylus 24 of the contact detector 20 is moved in the X-axis direction from the designated position. As a result, the stylus 24 is displaced up and down in accordance with the surface roughness of the measurement object 60 with which the stylus 24 is in contact, and the displacement amount is detected by the detection unit 26. As a result, the displacement amount and the X-axis direction are detected. The surface roughness of the hole 62A of the object 60 to be measured is measured from the amount of movement.

(Example of measuring the shape of the hole 63A of the inclined wall 63)
First, as shown in FIG. 8A, in response to a command from the input device 51, the probe head 33 of the image probe 30 is rotated and the probe head 33 is held in a posture facing the inclined wall 63. An image of the inclined wall 63 of the object to be measured 60 is acquired by the image probe 30. Then, the image data of the inclined wall 63 of the DUT 60 is stored in the data storage unit 56 and then displayed on the display device 52.

Here, when the measurement start position is specified from the input device 51 based on the image of the inclined wall 63 displayed on the display device 52, for example, when the lower inner peripheral surface position of the hole 63A is specified, the control device 50 In consideration of the offset amounts OFz and OFy stored in the offset amount storage unit 55, the relative movement mechanism 40 so that the stylus 24 of the contact detector 20 contacts the lower inner peripheral surface of the hole 63A of the object 60 to be measured. Is calculated and stored in the program storage unit 54.
Thereafter, when a measurement start command is issued, the relative movement mechanism 40 is operated according to the movement locus stored in the program storage unit 54. That is, as shown in FIG. 8B, the turning mechanism 45 is rotated to incline the X-axis drive mechanism 48, so that the inclination of the hole 63A and the moving direction of the X-axis drive mechanism 48 coincide. Thereafter, the relative movement mechanism 40 is operated to bring the stylus 24 of the contact detector 20 into contact with the lower inner peripheral surface of the designated hole 63A.

  When the stylus 24 of the contact detector 20 is set at the designated position, the control device 50 operates the X-axis drive mechanism 48. Then, the stylus 24 of the contact detector 20 is moved in the axial direction of the hole 63A from the designated position. As a result, the stylus 24 is displaced up and down in accordance with the surface roughness of the measurement object 60 with which the stylus 24 is in contact, and the displacement amount is detected by the detection unit 26. As a result, the displacement amount and the axial direction are detected. From the amount of movement, the surface roughness of the hole 63A of the DUT 60 is measured.

(Example of measuring images of the holes 61A and 61B of the horizontal wall 61)
First, as shown in FIG. 9, in response to a command from the input device 51, the probe head 33 of the image probe 30 is rotated and the probe 60 is held in a downward posture. When the image of the horizontal wall 61 is acquired, the image data of the horizontal wall 61 of the DUT 60 is stored in the data storage unit 56 and then displayed on the display device 52.
Here, the control device 50 performs image processing on the image of the horizontal wall 61 of the DUT 60 stored in the data storage unit 56, and measures the shape and size of the holes 61A and 61B.

<Effect of embodiment>
According to the present embodiment, the contact type detector 20 having the stylus 24 that is in contact with the surface of the object to be measured and the image probe 30 that captures the surface image of the object to be measured are provided. After the image of the measurement object is captured, the stylus 24 of the contact detector 20 is automatically brought into contact with the measurement location of the measurement object based on the captured image. However, it is not necessary to set the tip of the stylus to the measurement start position of the measurement object while visually adjusting the relative position of the measurement point of the measurement object and the stylus tip. At the same time, interference between the stylus 24 and the object to be measured can be prevented.

Further, since the stylus 24 and the image probe 30 of the contact type detector 20 are arranged so as to be shifted by the offset amounts OFz and OFy in the Z-axis direction and the Y-axis direction, a mechanism for retracting the other at the time of each measurement is attached. Even without it, it will not interfere with the measurement.
Moreover, the offset amounts OFz and OFy between the tip of the stylus 24 of the contact detector 20 and the image probe 30 are stored in the offset amount storage unit 55, and the offset amount stored in the offset amount storage unit 55 is taken into consideration. The movement trajectory of the relative movement mechanism 40 is calculated so that the stylus 24 of the contact detector 20 contacts the measurement start position of the object to be measured, and the relative movement mechanism 40 is operated according to this movement trajectory. The stylus 24 of the vessel 20 can be brought into precise contact with the measurement start position of the object to be measured.

In addition, since the image probe 30 is provided, measurement using the image probe 30 alone is also possible.
For example, the line width and the hole diameter can be measured from the image acquired by the image probe 30, and the size (step size) of the objective lens 35 in the optical axis direction can also be measured using the autofocus function of the image probe 30. It can be measured.

In addition, the image probe 30 is supported by a cylindrical probe main body 32 integrally connected to the X slider 47 together with the contact detector 20 and at the tip of the probe main body 32 so as to be rotatable about an axis parallel to the Y axis. Since the probe head 33 and the head swing mechanism 34 such as a motor for rotating the probe head 33 are provided, the head swing mechanism 34 can change the orientation of the probe head 33 from downward to horizontal. .
Therefore, not only the horizontal surface of the object to be measured but also images of vertical surfaces and arbitrary inclined surfaces can be acquired, and the shapes of holes and protrusions provided on these surfaces are measured by the contact detector 20. Can do.

The relative movement mechanism 40 moves the stage 10 on which the object to be measured is moved in the Y-axis direction, and moves the contact detector 20 and the image probe 30 in the X-axis direction and the Z-axis direction. Since the X-axis drive mechanism 48 and the Z-axis drive mechanism 44 are configured to be moved, the object to be measured, the contact detector 20 and the image probe 30 are arranged in a three-dimensional direction, that is, the X-axis direction orthogonal to each other. It can be moved in the Y-axis direction and the Z-axis direction. Therefore, the shape and surface roughness can be measured regardless of the orientation and orientation of the measurement site of the object to be measured.
In addition, since both the contact detector 20 and the image probe 30 are attached to the X slider 47 with an offset, the structure of the contact detector 20 and the image probe 30 is greater than when a mechanism for moving the contact detector 20 and the image probe 30 separately is provided. Can be simplified and configured at low cost.

  The image probe 30 receives the reflected light from the object to be measured that has passed through the objective lens 35, the LED 36 as a light source disposed on the outer periphery of the objective lens 35, and the objective lens 35, and displays an image of the object to be measured. Since it includes the CCD sensor 37 for imaging, the surface image of the object to be measured can be acquired with high accuracy by the CCD sensor 37 through the objective lens 35. In addition, since the LED 36 is disposed around the objective lens 35, the size can be reduced as compared with a case where an illumination device is separately provided.

<Modification>
The present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
The contact-type detector 20 is configured to include a contact-type probe 22 having an arm 25 having a stylus 24 at the tip and a detection unit 26 that detects the swinging amount of the arm 25. However, the stylus 24 is to be measured. Other structures may be used as long as the mechanism can measure the surface shape or roughness of the object to be measured while contacting the object with the surface.

The image probe 30 receives the reflected light from the object to be measured that has passed through the objective lens 35, the LED 36 as a light source disposed on the outer periphery of the objective lens 35, and the objective lens 35, and captures an image of the object to be measured. Although the probe head 33 including the CCD sensor 37 is included, the present invention is not limited to this.
For example, the LED 36 as a light source may be provided separately from the image probe. If the objective lens 35 can be exchanged so that it can be exchanged for an objective lens 35 having a different magnification, an optimum operation can be performed according to the size of the measurement location of the object to be measured.

Although the relative movement mechanism 40 is configured to be able to move the stage 10 in the Y-axis direction and the contact detector 20 and the image probe 30 in the X-axis direction and the Z-axis direction, it is not limited thereto. In short, as long as the stage 10, the contact detector 20, and the image probe 30 are movable in the three-dimensional direction, any of the structures may be moved.
Further, the contact detector 20 and the image probe 30 may be moved independently by separate relative movement mechanisms.

  The present invention can be used, for example, when automatically measuring the shape and surface roughness of a machined object having a complex shape.

10 ... stage,
20 ... contact type detector,
24 ... Stylus,
30: Image probe,
32 ... probe body,
33 ... probe head,
35 ... objective lens,
36 ... LED (light source)
37 ... CCD sensor 40 ... Relative movement mechanism,
41 ... Y-axis drive mechanism (first movement mechanism),
42 ... Column,
43 ... Z slider,
44 ... Z-axis drive mechanism (second movement mechanism),
47 ... X slider (sliding member),
48 ... X-axis drive mechanism (third movement mechanism)
55. Offset amount storage unit (offset amount storage means)
60: An object to be measured.

Claims (4)

In a surface texture measuring machine that measures the surface texture of an object to be measured,
A stage on which the object to be measured is placed;
A contact detector having a stylus that contacts the surface of the object to be measured;
An image probe for capturing a surface image of the object to be measured;
A relative movement mechanism for relatively moving the contact detector and the image probe and the stage;
A controller for controlling the driving of the relative movement mechanism and processing measurement data obtained from the contact detector and image data obtained by the image probe;
The image probe includes a probe main body and a probe head supported at the tip of the probe main body and capable of capturing an image of the object to be measured.
The probe head is pivotally said about an axis wherein the stylus is orthogonal to the direction of displacement of the direction and the stylus and the contact-type detector in a state of being in contact with the object to be measured and the stage are moved relative to Attached to the probe body,
The relative movement mechanism has a turning mechanism for turning the contact detector around an axis parallel to the axis,
Said control device, said when the captured by the image probe measurement start position based on the image of the object to be measured is designated as the stylus of the contact-type detector is in contact with the measurement starting position of the object to be measured Movement trajectory calculating means for calculating and storing a movement trajectory of the relative movement mechanism, and stylus setting means for operating the relative movement mechanism including the turning mechanism according to the movement trajectory obtained by the movement trajectory calculation means. Consists of
A surface texture measuring machine characterized by that. In the surface texture measuring machine according to claim 1,
The relative movement mechanism includes a first movement mechanism that moves the stage in one direction within a horizontal plane, a column, a lifting member that is movable in the vertical direction on the column, and a movement of the lifting member in the vertical direction. a second moving mechanism for the the movement direction of the stage via a turning mechanism and a pivot plate provided rotatably about an axis parallel to the moving direction and the said stage to the pivot plate to the lifting member A slide member provided movably in a direction orthogonal to the raising / lowering direction of the raising / lowering member, and a third movement mechanism for moving the slide member;
The contact type detector and the image probe are attached to the slide member,
The probe head is provided so as to be pivotable about an axis parallel to the moving direction of the stage.
A surface texture measuring machine characterized by that. In the surface texture measuring machine according to claim 1 or 2,
The image probe includes an objective lens, a light source disposed on an outer periphery of the objective lens, a CCD sensor that receives reflected light from the object to be measured that has passed through the objective lens, and captures an image of the object to be measured; A surface texture measuring machine characterized by comprising. In the surface texture measuring instrument according to any one of claims 1 to 3,
The stylus of the contact-type detector and the image probe are arranged offset at a position where the other does not get in the way when measuring one of these,
An offset amount storing means for storing an offset amount between the stylus tip of the contact detector and the image probe;
The movement trajectory calculating means takes the offset amount stored in the offset amount storage means into consideration so that the stylus of the contact detector contacts the measurement start position of the object to be measured. A surface texture measuring machine characterized by:

Images