JP2011085401A - Instrument and method for measuring surface property - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface property measuring instrument and a method of measuring surface properties for shortening stylus setting time. <P>SOLUTION: This surface property measuring instrument includes a stage, a contact type detector 20 with a stylus, an image probe 30, a relative movement mechanism 40, and a controller 50. The controller 50 includes a center position calculation means and a stylus setting means. The calculation means is for finding the center position of a circle by applying the circle to input position data when the position data on at least three points are input by the image probe, the three points being out of the circular outline of a circular projection or a circular recess of a measuring object. The setting means is for positioning the stylus of the detector in the center position by operating the movement mechanism when the center position is found. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a surface texture measuring machine and a surface texture measuring method for measuring the surface shape, surface roughness, and the like of an object to be measured. Specifically, the present invention relates to a surface texture measuring device and a surface texture measuring method provided with a contact detector having a stylus and an image probe.

  While the stylus is in contact with the surface of the object to be measured, the stylus is moved along the surface of the object to be measured. At this time, the displacement of the stylus caused by the surface shape and surface roughness of the object to be measured is detected. 2. Description of the Related Art A surface property measuring machine that measures surface properties such as a surface shape and surface roughness of an object to be measured from a stylus displacement is known (see, for example, Patent Document 1).

  Conventionally, when measuring the surface shape, surface roughness, etc. of an object to be measured with a surface texture measuring instrument, the measurer visually adjusts the relative position between the tip of the stylus and the measurement location of the object to be measured while measuring the stylus. Is set at the measurement start position of the object to be measured, and then the stylus is relatively moved along the surface of the object to be measured. Then, since the stylus is displaced up and down depending on the surface shape and surface roughness of the object to be measured, the surface properties such as the surface shape and surface roughness of the object to be measured are measured from the vertical displacement of the stylus.

JP-A-5-87562

In recent years, the measurement object and the measurement location have been miniaturized in the trend of miniaturization and thinning of the object to be measured, and the above-described stylus setting work is very difficult and takes time. The burden on the measurer is also great.
In addition, depending on the object to be measured, there may be a case where the stylus and the object to be measured interfere (collision) and the stylus or the object to be measured is damaged.

In particular, as shown in FIG. 18, when obtaining the radius value, diameter value, etc. of the convex (or concave) microlens molding surface 72 having a diameter of 1 mm or less formed on the microlens array mold 71, the microlens If the stylus does not correctly trace the center line where the apex (peak or bottom point) of the molding surface 72 is located, an accurate measurement result cannot be obtained.
Conventionally, with respect to such a measured object, as shown in FIG. 19, the measurer visually confirms the relative position between the tip of the stylus 24 and the microlens molding surface 72 (see FIG. 19A). ), The tip of the stylus 24 is positioned on the microlens molding surface 72, and then the stage on which the microlens array mold 71, which is the object to be measured, is moved (see FIG. 5B) to form the microlens. The vertex of the surface 72 is detected (see FIG. 3C), and in this state, the stylus 24 needs to be moved by relative movement so as to trace on the center line of the microlens molding surface 72, and measurement is required.
Therefore, in the conventional work, the setting time of the stylus is extremely longer than the measuring time (for example, the measuring time is about 10 seconds and the setting time is about 120 seconds).

  An object of the present invention is to provide a surface texture measuring machine and a surface texture measuring method that can shorten the setting time of a stylus.

  The surface texture measuring machine of the present invention is a surface texture measuring machine for measuring the surface texture of a measurement object having a circular concave part or a circular convex part, a stage on which the measurement object is placed, and the measurement object A contact detector having a stylus in contact with the surface; an image probe that captures a surface image of the object to be measured; a relative movement mechanism that relatively moves the contact detector, the image probe, and the stage; A control device for controlling the driving of the relative movement mechanism and processing the measurement data obtained from the contact detector and the image data obtained by the image probe; When position data of at least three points of the circular concave portion of the object to be measured or the circular contour of the circular convex portion is input, a circle is added to the input position data. When the center position is obtained by the center position calculating means for obtaining the center position of the circle and the center position calculating means, the relative movement mechanism is operated to position the stylus of the contact detector at the center position. And stylus setting means to be configured.

According to such a configuration, first, the measurer operates the relative movement mechanism to obtain position data of at least three points of the circular concave portion of the object to be measured or the circular outline of the circular convex portion by the image probe. take in.
Then, the control device applies a circle to the input position data to obtain the center position of the circle (center position calculation means), and then operates the relative movement mechanism to position the stylus of the contact detector at the center position. (Stylus setting means).
Accordingly, the stylus of the contact type detector can be automatically set to the circular concave portion of the object to be measured or the center position of the circular convex portion, that is, as in the past, the measurer can visually check the tip of the stylus. Since the tip of the stylus does not have to be positioned on the microlens molding surface while adjusting the relative position with the microlens molding surface, the setting time of the stylus can be shortened.

  In the surface texture measuring instrument according to the present invention, the stylus of the contact-type detector and the image probe are arranged offset to a position where the other does not get in the way during the measurement of one of them, and the stylus of the contact-type detector An offset amount storage means for storing an offset amount between the tip and the image probe is provided, and the stylus setting means operates the relative movement mechanism when the center position is obtained by the center position calculation means, It is preferable that after being positioned at the center position, the relative movement mechanism is operated by the offset amount stored in the offset amount storage means to position the stylus of the contact detector at the center position.

According to such a configuration, the stylus and the image probe of the contact type detector are arranged so as to be offset so that the other does not get in the way during the measurement of one of them, so that the other is retracted during each measurement. Even if no mechanism is attached, measurement will not be hindered.
In addition, since the offset amount between the tip of the stylus of the contact detector and the image probe is stored in the offset amount storage means, the relative movement mechanism is operated after the center position of the circular concave portion or the circular convex portion is calculated. If the image probe is positioned at the center position and then the relative movement mechanism is operated by the offset amount stored in the offset amount storage means, the stylus of the contact detector is automatically positioned at the center position. Can do.
Therefore, if the offset amount between the stylus of the contact type detector and the image probe is accurately obtained and stored in advance, the stylus of the contact type detector can be attached to the circular concave portion or the circular convex portion with a simple operation and processing. It can be automatically positioned at the center position.

  The surface property measuring method of the present invention includes a stage on which a measurement object is placed, a contact detector having a stylus in contact with the surface of the measurement object, and an image probe that captures a surface image of the measurement object A relative movement mechanism for relatively moving the contact detector and the image probe and the stage, and controlling the driving of the relative movement mechanism, and measuring data obtained from the contact detector and the image probe. In the surface texture measurement method for measuring the surface texture of a measurement object having a circular concave section or a circular convex section using a surface texture measuring machine provided with a control device for processing the acquired image data, the relative movement By operating the mechanism, the image probe acquires position data of at least three points of the circular concave portion of the object to be measured or the circular outline of the circular convex portion. A contour data acquisition step, a circle fitting step for applying a circle to the position data acquired in the contour data acquisition step to obtain the center position of the circle, and operating the relative movement mechanism to move the stylus of the contact detector. A stylus setting step that is positioned at the center position determined in the circle fitting step, and a state in which the stylus of the contact detector is positioned at the center position of the circular concave portion or the circular convex portion of the object to be measured. A measurement step of measuring the surface property of the circular concave portion or the circular convex portion while operating the relative movement mechanism to relatively move the stylus of the contact detector and the object to be measured. To do.

According to such a configuration, first, in the contour data acquisition step, the relative movement mechanism is operated and the position of at least three points of the circular concave portion of the object to be measured or the circular contour line of the circular convex portion by the image probe. After acquiring the data, in the circle fitting process, the circle is applied to the position data acquired in the contour data acquisition process to obtain the center position of the circle.
Next, in the stylus setting process, the relative movement mechanism is operated to position the stylus of the contact detector at the center position obtained in the circle fitting process, and then in the measurement process, the relative movement mechanism is operated to make contact. The surface property of the circular concave portion or the circular convex portion is measured while relatively moving the stylus of the detector and the object to be measured.
Therefore, since the center position of the circular concave portion or the circular convex portion of the object to be measured is known in advance, the stylus of the contact detector can be set to the center position of the circular concave portion or the circular convex portion of the object to be measured. In other words, as in the past, the measurer can visually adjust the relative position between the tip of the stylus and the measurement location of the object to be measured without positioning the tip of the stylus at the measurement start position of the object to be measured. Because it is good, the setting time of the stylus can be shortened.

The perspective view which shows the surface texture measuring machine which concerns on one Embodiment of this invention. The expansion perspective view which shows the contact-type detector and image probe part of embodiment same as the above. The front view which shows the contact-type detector and image probe part of embodiment same as the above. The figure which shows the image probe of embodiment same as the above. The block diagram which shows the control system of embodiment same as the above. The figure which shows the to-be-measured object measured by embodiment same as the above. The figure of the state which the image probe moved to the to-be-measured object vicinity in embodiment same as the above. The figure which acquires the position data of a circular outline in embodiment same as the above. The figure which shows a circle fitting process in embodiment same as the above. The figure of the state which the image probe moved to the center position in embodiment same as the above. The figure of the state which the stylus moved to the center position in embodiment same as the above. The figure which shows the other example of the to-be-measured object measured by embodiment same as the above. FIG. 13 is a diagram illustrating a state in which the image probe is moved to the vicinity of the measurement object in the measurement of the measurement object illustrated in FIG. 12. The figure which acquires the positional data of a circular outline in the measurement of the to-be-measured object shown in FIG. The figure of the state which the image probe moved to the other position in the measurement of the to-be-measured object shown in FIG. FIG. 13 is a diagram showing a circle fitting process in the measurement of the object to be measured shown in FIG. 12. The figure of the state which the stylus moved to the center position in embodiment same as the above. The figure at the time of measuring a microlens metal mold | die. The figure which shows the example which measures a microlens metal mold | die by the conventional measuring method.

<Description of surface texture measuring instrument (see FIGS. 1 to 5)>
As shown in FIGS. 1 and 2, the surface texture measuring machine according to the present embodiment has an installation base 1, a base 2 fixed to the upper surface of the installation base 1, and a base 2 mounted on the base 2. A stage 10 for placing the object to be measured, a contact detector 20 having a stylus 24 in contact with the surface of the object to be measured, an image probe 30 for capturing a surface image of the object to be measured, and a contact detector 20 And a relative movement mechanism 40 for relatively moving the image probe 30 and the stage 10, and a control device 50.

  The relative movement mechanism 40 is provided between the base 2 and the stage 10, a Y-axis drive mechanism 41 as a first movement mechanism that moves the stage 10 in one horizontal direction (Y-axis direction), and the upper surface of the base 2. A column 42 standing upright, a Z slider 43 as an elevating member provided on the column 42 so as to be movable in the vertical direction (Z-axis direction), and a second moving mechanism for raising and lowering the Z slider 43 in the vertical direction. A Z-axis drive mechanism 44, a revolving plate 46 provided on the Z slider 43 so as to be rotatable about the Y axis via a revolving mechanism 45 (see FIG. 5), and a stage 10 provided on the revolving plate 46. An X slider 47 as a slide member provided so as to be movable in a direction (X axis direction) orthogonal to the moving direction (Y axis direction) and the raising / lowering direction (Z axis direction) of the Z slider 43; The X slider 47 and an X-axis driving mechanism 48 as a third movement mechanism for moving the X-axis direction.

  In the present embodiment, the contact detector 20 and the image probe 30 are attached to the X slider 47. Accordingly, the relative movement mechanism 40 includes a Y-axis drive mechanism 41 that moves the stage 10 in the Y-axis direction, a Z-axis drive mechanism 44 that moves the contact detector 20 and the image probe 30 in the Z-axis direction, and contact detection. And a three-dimensional movement mechanism including an X-axis drive mechanism 48 that moves the imager 20 and the image probe 30 in the X-axis direction.

The Y-axis drive mechanism 41 and the Z-axis drive mechanism 44 are not shown in the figure, but are constituted by, for example, a feed screw mechanism having a ball screw shaft and a nut member screwed to the ball screw shaft.
The X-axis drive mechanism 48 includes a drive mechanism main body 48A fixed to the swivel plate 46, a guide rail 48B provided parallel to the X-axis direction on the drive mechanism main body 48A and movably supporting an X slider 47, and the guide A drive source (not shown) for reciprocating the X slider 47 along the rail 48B is included.

  As shown in FIG. 3, the contact detector 20 includes a detector main body 21 supported by being suspended by the X slider 47, and a contact probe 22 supported by the detector main body 21 in parallel with the X-axis direction. Prepare. The contact probe 22 includes a probe main body 23, an arm 25 that is supported by the probe main body 23 so as to be swingable and has a stylus 24 at the tip, and a detection unit 26 that detects the swing amount of the arm 25. .

The image probe 30 includes a cylindrical probe main body 32 integrally connected to the X slider 47 together with the contact detector 20 via a connecting member 31, and a probe head supported downward at the tip of the probe main body 32. 33.
As shown in FIG. 4, the probe head 33 receives the reflected light from the objective lens 35, the LED 36 as the light source disposed on the outer periphery of the objective lens 35, and the object to be measured that has passed through the objective lens 35, and receives the light. A CCD sensor 37 that captures an image of the measurement object, and a cover 38 that covers the periphery of the LED 36;

  The image probe 30 is arranged at a position offset with respect to the contact detector 20. Specifically, as shown in FIG. 2, the focal position of the objective lens 35 of the image probe 30 is lower than the tip of the stylus 24 of the contact detector 20 by an offset amount OFz in the Z-axis direction. In the Y-axis direction, they are arranged at positions shifted backward from the axis of the stylus 24 by the offset amount OFy. In the X-axis direction, it is arranged at the same position as the axis of the stylus 24, that is, at a position where the offset amount OFx = 0.

As shown in FIG. 5, in addition to the relative movement mechanism 40, the contact detector 20, and the image probe 30, an input device 51, a display device 52, and a storage device 53 are connected to the control device 50.
The input device 51 is composed of, for example, a portable keyboard or joystick, and in addition to inputting various operation commands and data, specifies the position (measurement start position) where the stylus 24 is set from the image acquired by the image probe 30. It can be done.
The display device 52 displays the image acquired by the image probe 30 and the shape and roughness data obtained by the contact detector 20.
The storage device 53 includes a program storage unit 54 that stores a measurement program and the like, an offset amount storage unit that serves as an offset amount storage unit that stores the offset amounts OFx, OFy, and OFz of the stylus 24 of the contact detector 20 and the image probe 30. 55 and a data storage unit 56 for storing image data, measurement data, and the like captured at the time of measurement.

When the control device 50 receives position data of at least three points from the circular concave portion of the object to be measured or the circular outline of the circular convex portion by the image probe according to the measurement program stored in the program storage unit 54. When the center position is obtained by applying a circle to the input position data to obtain the center position of the circle, and when the center position is obtained by the center position computing means, the relative movement mechanism 40 is operated to operate the contact detector 20. In a state where the stylus setting means for positioning the stylus 24 at the center position and the stylus 24 of the contact detector 20 and the object to be measured are in contact with each other, the relative movement mechanism 40 is operated to operate the contact detector 20 and the object to be measured. Measurement execution means for measuring the surface properties of the object to be measured while relatively moving the object to be measured.
When the center position is obtained by the center position calculating means, the stylus setting means operates the relative movement mechanism 40 to position the image probe 30 at the center position, and then stores the offset amount OFx stored in the offset amount storage unit 55. , OFy, OFz, the relative movement mechanism 40 is operated to position the stylus 24 of the contact detector 20 at the center position.

  Furthermore, the control device 50 has an edge detection function for detecting the edge of the object to be measured from the image of the object to be measured captured by the image probe 30, and an objective lens on the surface in the height direction (Z-axis direction) of the object to be measured. The objective lens 35 is displaced in the height direction so that the focal positions of the 35 coincide with each other, and an autofocus function for detecting the position in the height direction of the object to be measured from the amount of displacement is provided. As the edge detection function, a known detection principle can be used. For example, an average density (brightness density) in a direction orthogonal to the detection direction of the image probe 30 is obtained, and this average density is set in advance. Alternatively, the following threshold may be detected as an edge at the following position.

<Description of device under test (see FIG. 6)>
The device under test 60A has a circular concave portion 61 having a circular outline at the center and a spherical inside and recessed in a concave shape. The circular concave portion 61 is, for example, a concave microlens molding surface formed in a microlens array mold, but is not limited thereto.

<Description of measurement method (see FIGS. 7 to 11)
(1) As shown in FIG. 7, the relative movement mechanism 40 is operated and moved to a position where the circular concave portion 61 of the object to be measured 60 </ b> A enters within the field of view 64 of the image probe 30.
(2) As shown in FIG. 8, in the vicinity of the circular concave portion 61 of the object to be measured 60A, the focal position of the objective lens 35 of the image probe 30 coincides with the vicinity of the circular concave portion 61 of the object to be measured 60A. After the auto focus, the edge detection function is used to acquire position data D1, D2, D3... At least three points of the circular contour line of the circular concave portion 61 (contour data acquisition step).

(3) Then, as shown in FIG. 9, the control device 50 applies the circle 63 to the position data acquired in the contour data acquisition step to obtain the center position C of the circle (circle fitting step).
(4) Subsequently, as shown in FIG. 10, the relative movement mechanism 40 is operated to position the image probe 30 at the center position C.
(5) Thereafter, as shown in FIG. 11, the relative movement mechanism 40 is operated by the offset amounts OFx, OFy, OFz stored in the offset amount storage unit 55, and the stylus 24 of the contact detector 20 is moved to the center position. C is positioned (stylus setting step).
(6) In this state, that is, in a state where the stylus 24 of the contact detector 20 is positioned at the center position C of the circular concave portion 61 of the object to be measured 60A, the relative movement mechanism 40 is operated, and the contact detector The 20 styluses 24 and the object to be measured 60A are relatively moved (measurement process). Thereby, the surface property of the circular recessed part 61 is measured.

<Effect of embodiment>
According to the present embodiment, in the surface texture measuring instrument including the contact detector 20 having the stylus 24 and the image probe 30, first, the measurer operates the relative movement mechanism 40 to be covered by the image probe 30. When the position data of at least three points of the circular contour of the circular concave portion 61 of the measurement object 60A is captured, the control device 50 applies the circle 63 to the input position data to obtain the center position C of the circle 63. Thereafter, the relative movement mechanism 40 is operated to position the stylus 24 of the contact detector 20 at the center position C.
Accordingly, the stylus 24 of the contact detector 20 can be automatically set at the center position C of the circular concave portion 61 of the object 60A to be measured. That is, as in the prior art, the measurer can visually check the tip of the stylus. Since the tip of the stylus does not have to be positioned in the circular concave portion while adjusting the relative position to the circular concave portion, the setting time of the stylus can be shortened.

Further, since the stylus 24 and the image probe 30 of the contact type detector 20 are arranged so as to be shifted by the offset amounts OFz and OFy in the Z-axis direction and the Y-axis direction, a mechanism for retracting the other at the time of each measurement is attached. Even without it, it will not interfere with the measurement.
Moreover, since the offset amounts OFx, OFy, OFz between the tip of the stylus 24 of the contact detector 20 and the image probe 30 are stored in the offset amount storage unit 55, the center position C of the circular concave portion 61 is calculated. Thereafter, the relative movement mechanism 40 is operated to position the image probe 30 at the center position C. Thereafter, the relative movement mechanism 40 is operated by the offset amounts OFx, OFy, OFz stored in the offset amount storage unit 55. The stylus 24 of the contact detector 20 can be automatically positioned at the center position C.
Accordingly, if the offset amounts OFx, OFy, OFz between the stylus 24 of the contact detector 20 and the image probe 30 are accurately obtained in advance and stored in the offset amount storage unit 55, the contact type can be obtained with simple operation and processing. The stylus 24 of the detector 20 can be automatically positioned at the center position C of the circular concave portion 61.

In addition, since the image probe 30 is provided, measurement using the image probe 30 alone is also possible.
For example, the line width and the hole diameter can be measured from the image acquired by the image probe 30, and the size (step size) of the objective lens 35 in the optical axis direction can also be measured using the autofocus function of the image probe 30. It can be measured.

The relative movement mechanism 40 moves the stage 10 on which the object to be measured is moved in the Y-axis direction, and moves the contact detector 20 and the image probe 30 in the X-axis direction and the Z-axis direction. Since the X-axis drive mechanism 48 and the Z-axis drive mechanism 44 are configured to be moved, the object to be measured, the contact detector 20 and the image probe 30 are arranged in a three-dimensional direction, that is, the X-axis direction orthogonal to each other. It can be moved in the Y-axis direction and the Z-axis direction. Therefore, the shape and surface roughness can be measured regardless of the orientation and orientation of the measurement site of the object to be measured.
In addition, since both the contact detector 20 and the image probe 30 are attached to the X slider 47 with an offset, the structure of the contact detector 20 and the image probe 30 is greater than when a mechanism for moving the contact detector 20 and the image probe 30 separately is provided. Can be simplified and configured at low cost.

  The image probe 30 receives the reflected light from the object to be measured that has passed through the objective lens 35, the LED 36 as a light source disposed on the outer periphery of the objective lens 35, and the objective lens 35, and displays an image of the object to be measured. Since it includes the CCD sensor 37 for imaging, the surface image of the object to be measured can be acquired with high accuracy by the CCD sensor 37 through the objective lens 35. In addition, since the LED 36 is disposed around the objective lens 35, the size can be reduced as compared with a case where an illumination device is separately provided.

<Modification (see FIGS. 12 to 17)>
The present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.

The object to be measured is not limited to that shown in FIG. For example, as shown in FIG. 12, a DUT 60 </ b> B may have a circular convex portion 62 having a circular outline at the center and having a spherical inner surface and a convex shape.
In order to measure the surface property of the circular convex portion 62 of the DUT 60B, measurement is performed as shown in FIGS.

(11) As shown in FIG. 13, the relative movement mechanism 40 is operated and moved to a position where the circular convex portion 62 of the object to be measured 60 </ b> B enters the field of view of the image probe 30.
(12) As shown in FIG. 14, in the vicinity of the circular convex portion 62 of the object to be measured 60B, the focal position of the objective lens 35 of the image probe 30 coincides with the vicinity of the circular convex portion 62 of the object to be measured 60B. As described above, the position data D1, D2, D3... Of the circular outline of the circular convex portion 62 are acquired using the edge detection function after autofocusing. This is moved to another position where the circular convex portion 62 of the object to be measured 60B enters within the field of view of the image probe 30 (see FIG. 15), and is performed three or more times in total (contour data acquisition step).

(13) Then, as shown in FIG. 16, the control device 50 applies the circle 63 to the position data acquired in the contour data acquisition step to obtain the center position C of the circle 63 (circle fitting step).
(14) Subsequently, the relative movement mechanism 40 is operated to position the image probe 30 at the center position C.
(15) Thereafter, as shown in FIG. 17, the relative movement mechanism 40 is operated by the offset amounts OFx, OFy, OFz stored in the offset amount storage unit 55, and the stylus 24 of the contact detector 20 is moved to the center position. C is positioned (stylus setting step).
(16) In this state, that is, in a state where the stylus 24 of the contact detector 20 is positioned at the center position C of the circular convex portion 62 of the object to be measured 60B, the relative movement mechanism 40 is operated to detect contact. The stylus 24 of the container 20 and the object 60B to be measured are moved relative to each other (measurement process). Thereby, the surface property of the circular convex-shaped part 62 is measured.

  In this measurement, when autofocusing and edge detection are performed at the other three positions where the circular convex portion 62 of the object to be measured 60B enters the field of view of the image probe 30, the autofocused height If the inclination of the object to be measured 60B (inclination with respect to the horizontal) is calculated from the data in the vertical direction (Z-axis direction), and the posture of the object to be measured 60B is changed so that this inclination disappears (so that it becomes horizontal). More accurate measurement can be expected. By the way, the posture of the DUT 60B can be changed by inserting a tilt table between the stage 10 and the DUT 60B and operating the tilt table.

  The contact-type detector 20 is configured to include a contact-type probe 22 having an arm 25 having a stylus 24 at the tip and a detection unit 26 that detects the swinging amount of the arm 25. However, the stylus 24 is to be measured. Other structures may be used as long as the mechanism can measure the surface shape and roughness of the object to be measured while contacting the surface of the object.

The image probe 30 receives the reflected light from the object to be measured that has passed through the objective lens 35, the LED 36 as a light source disposed on the outer periphery of the objective lens 35, and the objective lens 35, and captures an image of the object to be measured. Although the probe head 33 including the CCD sensor 37 is included, the present invention is not limited to this.
For example, the LED 36 as a light source may be provided separately from the image probe. If the objective lens 35 can be exchanged so that it can be exchanged for an objective lens 35 having a different magnification, an optimum operation can be performed according to the size of the measurement location of the object to be measured.

Although the relative movement mechanism 40 is configured to be able to move the stage 10 in the Y-axis direction and the contact detector 20 and the image probe 30 in the X-axis direction and the Z-axis direction, it is not limited thereto. In short, as long as the stage 10, the contact detector 20, and the image probe 30 are movable in the three-dimensional direction, any of the structures may be moved.
Further, the contact detector 20 and the image probe 30 may be moved independently by separate relative movement mechanisms.

  The present invention can be used, for example, when automatically measuring the shape and surface roughness of a machined object having a complex shape.

10 ... stage,
20 ... contact type detector,
24 ... Stylus,
30: Image probe,
35 ... objective lens,
36 ... LED (light source)
37 ... CCD sensor 40 ... Relative movement mechanism,
41 ... Y-axis drive mechanism (first movement mechanism),
42 ... Column,
43 ... Z slider,
44 ... Z-axis drive mechanism (second movement mechanism),
47 ... X slider (sliding member),
48 ... X-axis drive mechanism (third movement mechanism)
55. Offset amount storage unit (offset amount storage means)
60A, 60B ... DUT 61 ... Circular concave part,
62 ... circular convex part,
63 ... Circle C ... Center position,
OFx, OFy, OFz: Offset amount.

Claims (3)

In a surface texture measuring instrument for measuring the surface texture of an object to be measured having a circular concave portion or a circular convex portion,
A stage on which the object to be measured is placed;
A contact detector having a stylus that contacts the surface of the object to be measured;
An image probe for capturing a surface image of the object to be measured;
A relative movement mechanism for relatively moving the contact detector and the image probe and the stage;
A controller for controlling the driving of the relative movement mechanism and processing measurement data obtained from the contact detector and image data obtained by the image probe;
The controller is
When position data of at least three points of the circular concave portion of the object to be measured or the circular outline of the circular convex portion is input by the image probe, a circle is applied to the input position data and the center position of the circle Center position calculating means for obtaining
When the center position is obtained by the center position calculation means, the stylus setting means is configured to operate the relative movement mechanism to position the stylus of the contact detector at the center position.
A surface texture measuring machine characterized by that. In the surface texture measuring machine according to claim 1,
The stylus of the contact-type detector and the image probe are arranged offset at a position where the other does not get in the way when measuring one of these,
An offset amount storing means for storing an offset amount between the stylus tip of the contact detector and the image probe;
When the center position is calculated by the center position calculation means, the stylus setting means operates the relative movement mechanism to position the image probe at the center position, and then stores the offset stored in the offset amount storage means. Operating the relative movement mechanism by an amount to position the stylus of the contact detector at the center position;
A surface texture measuring machine characterized by that. A stage for placing an object to be measured; a contact detector having a stylus in contact with the surface of the object to be measured; an image probe for capturing a surface image of the object to be measured; the contact detector; A relative movement mechanism for moving the image probe and the stage relative to each other, and a control for processing the measurement data obtained from the contact detector and the image data obtained by the image probe while controlling the driving of the relative movement mechanism In the surface texture measuring method for measuring the surface texture of the object to be measured having a circular concave portion or a circular convex portion using a surface texture measuring machine equipped with an apparatus,
A contour data acquisition step of operating the relative movement mechanism to acquire position data of at least three points of a circular concave portion of the object to be measured or a circular contour line of the circular convex portion by the image probe;
A circle fitting step of applying a circle to the position data acquired in the contour data acquisition step to obtain the center position of the circle;
A stylus setting step of operating the relative movement mechanism to position the stylus of the contact-type detector at a center position determined in the circle fitting step;
In a state where the stylus of the contact type detector is positioned at the circular concave portion or the center position of the circular convex portion of the object to be measured, the stylus of the contact type detector and the object to be measured are operated by operating the relative movement mechanism. Measuring step of measuring the surface properties of the circular concave portion or the circular convex portion while relatively moving
A surface texture measuring method comprising:

Images