JPH0542316B2 - - Google Patents
Info
- Publication number
- JPH0542316B2 JPH0542316B2 JP9445989A JP9445989A JPH0542316B2 JP H0542316 B2 JPH0542316 B2 JP H0542316B2 JP 9445989 A JP9445989 A JP 9445989A JP 9445989 A JP9445989 A JP 9445989A JP H0542316 B2 JPH0542316 B2 JP H0542316B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- processing chamber
- cleaned
- cleaning tank
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 claims description 79
- 238000012545 processing Methods 0.000 claims description 68
- 238000004891 communication Methods 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 21
- 238000005406 washing Methods 0.000 claims description 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 11
- 239000002904 solvent Substances 0.000 description 11
- 238000013020 steam cleaning Methods 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9445989A JPH02273587A (ja) | 1989-04-14 | 1989-04-14 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9445989A JPH02273587A (ja) | 1989-04-14 | 1989-04-14 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02273587A JPH02273587A (ja) | 1990-11-08 |
| JPH0542316B2 true JPH0542316B2 (enrdf_load_html_response) | 1993-06-28 |
Family
ID=14110856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9445989A Granted JPH02273587A (ja) | 1989-04-14 | 1989-04-14 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02273587A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013202566A (ja) * | 2012-03-29 | 2013-10-07 | Sharp Corp | 洗浄乾燥装置および洗浄乾燥方法 |
| JP7125810B1 (ja) * | 2021-10-25 | 2022-08-25 | ジャパン・フィールド株式会社 | 被洗浄物の洗浄方法 |
-
1989
- 1989-04-14 JP JP9445989A patent/JPH02273587A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02273587A (ja) | 1990-11-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 15 Free format text: PAYMENT UNTIL: 20080628 |
|
| LAPS | Cancellation because of no payment of annual fees |