JPH0542101B2 - - Google Patents
Info
- Publication number
- JPH0542101B2 JPH0542101B2 JP59098724A JP9872484A JPH0542101B2 JP H0542101 B2 JPH0542101 B2 JP H0542101B2 JP 59098724 A JP59098724 A JP 59098724A JP 9872484 A JP9872484 A JP 9872484A JP H0542101 B2 JPH0542101 B2 JP H0542101B2
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- sample
- ion
- temperature
- metal element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims 4
- 150000002500 ions Chemical class 0.000 description 20
- 239000007789 gas Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 5
- 229910001338 liquidmetal Inorganic materials 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000001819 mass spectrum Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59098724A JPS60243958A (ja) | 1984-05-18 | 1984-05-18 | イオンビ−ム装置 |
US06/736,123 US4687930A (en) | 1984-05-18 | 1985-05-20 | Ion beam apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59098724A JPS60243958A (ja) | 1984-05-18 | 1984-05-18 | イオンビ−ム装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60243958A JPS60243958A (ja) | 1985-12-03 |
JPH0542101B2 true JPH0542101B2 (de) | 1993-06-25 |
Family
ID=14227464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59098724A Granted JPS60243958A (ja) | 1984-05-18 | 1984-05-18 | イオンビ−ム装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US4687930A (de) |
JP (1) | JPS60243958A (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IE58049B1 (en) * | 1985-05-21 | 1993-06-16 | Tekscan Ltd | Surface analysis microscopy apparatus |
JP2713923B2 (ja) * | 1987-10-07 | 1998-02-16 | 株式会社日立製作所 | 集束イオンビームを用いたデバイス加工方法 |
US4846920A (en) * | 1987-12-09 | 1989-07-11 | International Business Machine Corporation | Plasma amplified photoelectron process endpoint detection apparatus |
JP2811073B2 (ja) * | 1988-11-01 | 1998-10-15 | セイコーインスツルメンツ株式会社 | 断面加工観察装置 |
US5059785A (en) * | 1990-05-30 | 1991-10-22 | The United States Of America As Represented By The United States Department Of Energy | Backscattering spectrometry device for identifying unknown elements present in a workpiece |
FR2678425A1 (fr) * | 1991-06-25 | 1992-12-31 | Cameca | Procede de renforcement de l'emission d'ions secondaires positifs dans des matrices oxydees. |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5288900A (en) * | 1976-01-19 | 1977-07-25 | Matsushita Electric Ind Co Ltd | Ion beam machine tool |
JPS5310860U (de) * | 1976-07-12 | 1978-01-30 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3930155A (en) * | 1973-01-19 | 1975-12-30 | Hitachi Ltd | Ion microprobe analyser |
-
1984
- 1984-05-18 JP JP59098724A patent/JPS60243958A/ja active Granted
-
1985
- 1985-05-20 US US06/736,123 patent/US4687930A/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5288900A (en) * | 1976-01-19 | 1977-07-25 | Matsushita Electric Ind Co Ltd | Ion beam machine tool |
JPS5310860U (de) * | 1976-07-12 | 1978-01-30 |
Also Published As
Publication number | Publication date |
---|---|
JPS60243958A (ja) | 1985-12-03 |
US4687930A (en) | 1987-08-18 |
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