JPH0540914Y2 - - Google Patents
Info
- Publication number
- JPH0540914Y2 JPH0540914Y2 JP1987059589U JP5958987U JPH0540914Y2 JP H0540914 Y2 JPH0540914 Y2 JP H0540914Y2 JP 1987059589 U JP1987059589 U JP 1987059589U JP 5958987 U JP5958987 U JP 5958987U JP H0540914 Y2 JPH0540914 Y2 JP H0540914Y2
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical
- plate
- single crystal
- crystal
- cylindrical crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Jigs For Machine Tools (AREA)
- Feeding Of Workpieces (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987059589U JPH0540914Y2 (en, 2012) | 1987-04-20 | 1987-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987059589U JPH0540914Y2 (en, 2012) | 1987-04-20 | 1987-04-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63166334U JPS63166334U (en, 2012) | 1988-10-28 |
| JPH0540914Y2 true JPH0540914Y2 (en, 2012) | 1993-10-18 |
Family
ID=30891220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987059589U Expired - Lifetime JPH0540914Y2 (en, 2012) | 1987-04-20 | 1987-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0540914Y2 (en, 2012) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2527743Y2 (ja) * | 1990-07-27 | 1997-03-05 | スズキ株式会社 | 支持装置 |
| JP5007682B2 (ja) * | 2008-02-15 | 2012-08-22 | 信越半導体株式会社 | 円筒研削装置および研削方法 |
| JP5416527B2 (ja) * | 2009-09-29 | 2014-02-12 | 株式会社太陽工機 | 研削盤 |
| CN115703206A (zh) * | 2021-08-09 | 2023-02-17 | 环球晶圆股份有限公司 | 晶棒治具组件与晶棒边抛机台 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5217180Y2 (en, 2012) * | 1973-03-08 | 1977-04-18 | ||
| JPS60108246A (ja) * | 1983-11-18 | 1985-06-13 | Washino Koki Kk | センタリングマシン |
-
1987
- 1987-04-20 JP JP1987059589U patent/JPH0540914Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63166334U (en, 2012) | 1988-10-28 |
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