JPH0540905Y2 - - Google Patents
Info
- Publication number
- JPH0540905Y2 JPH0540905Y2 JP2253987U JP2253987U JPH0540905Y2 JP H0540905 Y2 JPH0540905 Y2 JP H0540905Y2 JP 2253987 U JP2253987 U JP 2253987U JP 2253987 U JP2253987 U JP 2253987U JP H0540905 Y2 JPH0540905 Y2 JP H0540905Y2
- Authority
- JP
- Japan
- Prior art keywords
- moving
- guide
- bearing
- slider
- moving body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2253987U JPH0540905Y2 (US20080094685A1-20080424-C00004.png) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2253987U JPH0540905Y2 (US20080094685A1-20080424-C00004.png) | 1987-02-18 | 1987-02-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63131335U JPS63131335U (US20080094685A1-20080424-C00004.png) | 1988-08-26 |
JPH0540905Y2 true JPH0540905Y2 (US20080094685A1-20080424-C00004.png) | 1993-10-18 |
Family
ID=30820020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2253987U Expired - Lifetime JPH0540905Y2 (US20080094685A1-20080424-C00004.png) | 1987-02-18 | 1987-02-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0540905Y2 (US20080094685A1-20080424-C00004.png) |
-
1987
- 1987-02-18 JP JP2253987U patent/JPH0540905Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63131335U (US20080094685A1-20080424-C00004.png) | 1988-08-26 |
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