JPH0540905Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an X-Y precision movement device for moving large materials or samples with high precision, such as in an electron beam lithography device.

[Prior Art] An example of a conventional device of this type is shown in FIG. In the figure, reference numeral 1 denotes a base, which is fixed, for example, in a sample chamber of an electron beam lithography apparatus, and has a groove 2 in the X-axis direction, and this groove serves as an X-guide.
Reference numeral 3 denotes a moving body in the X direction, which is fitted into the groove 2 of the base body and can be guided by the groove to move accurately in the X direction. A moving rod 4 having a drive source outside the sample chamber is in contact with this X-direction moving body, and by moving it in the axial direction (in the direction of the arrow),
Move the X moving body 3 in the X direction. The X-direction moving body 3 is provided with a groove 5 extending in a direction perpendicular to the X-direction groove 2, that is, in the Y-direction, and serves as a guide for movement in the Y-direction. A table 6 is fitted into the guide groove 5 in the Y direction, and is moved by a moving rod 7 connected to a drive source outside the sample chamber. A rail 8 extending parallel to the X-axis is fixed to the tip of the moving rod 7, and a slider 9 is slidably placed on the rail 8. Bearing 1 is located at the center of the top surface of this slider.
0 is installed. Two actuators 11a, 11b are arranged with this bearing in between from the X-axis direction, and each actuator is fixed to a holder 12a, 12b fixed to the table 6.
The actuator is made of, for example, a piezo element that expands in length when a voltage is applied.The actuator operates only when driving the moving rod 7, that is, when moving in the Y direction, and firmly holds the bearing 10 from both sides. It plays the role of holding the slider 9 and the table 6 together.

In a device with such a configuration, the table is
If you want to move in the direction, actuator 11
By applying voltage to a and 11b, the bearing 10 is firmly held between both actuators, and the slider 9
When the moving rod 7 is moved in the direction of the arrow after integrating the table 6 and the table 6, the slider 9 is pushed (or pulled) by the rail 8, and the table 6 is guided by the groove 5 and moved in the Y direction. At this time, if there is a slight deviation between the driving direction of the moving rod 7 and the moving direction of the table in the Y direction by the guide of the groove 5, the slider 9 slides on the rail 8 in the X direction to absorb the deviation. On the other hand, when moving the table in the X direction, after canceling the voltage application to the actuators 11a and 11b and releasing the integration of the table 6 and the slider 9, when the moving rod 4 is driven, the moving body 3
moves in the X direction, and the table placed on it moves in the same direction. Therefore, by appropriately driving both moving rods 4 and 7, the table 6 can be moved in arbitrary X and Y directions.

[Problems to be solved by the invention] In such a device, when the table 6 is moved in the The slider 9 that is fixed moves in the X direction. At this time, the resistance of the slider 9 moving on the rail 8 is directly applied as a load to the movement of the table 6, so if the resistance of the slider is large, the positions of the moving rod 4 and the slider in the Y direction will be greatly misaligned.
A large rotational moment is applied to the table 6, causing the table to meander and become unable to move accurately. In addition, since the rail 8 is fixed to the tip of the moving rod 7 for moving in the Y direction, and the slider 9 and bearing 10 are placed on it, all of their weight is applied to the Y-axis moving rod, and the movement of the moving rod is It has the disadvantage of affecting accuracy.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a moving device that overcomes the above-mentioned conventional drawbacks and enables highly accurate movement.

[Means for solving the problem] The present invention includes an X-direction moving body, an X-guide for guiding the movement of the moving body, a drive mechanism for moving the X-direction movement, and an a Y-guide that is perpendicular to the Y-guide, a Y-direction movable body guided by the Y-guide, a table placed on the Y-direction movable body and guided by the Y-guide, and a drive mechanism for moving the Y-direction movable body. , a rail-like member extending in the X direction attached to the tip of the drive mechanism, a pair of bearings arranged in parallel in the Y-direction and sandwiching the rail-like member from both sides, and moving in the Y direction approximately in the center of the table. A second bearing attached to the body and the second bearing are attached in the table so as to sandwich the second bearing from the X-axis direction, and are activated only when moving in the Y direction to sandwich the second bearing and move the second bearing in the Y direction. There is a structural feature in the XY precision movement device, which consists of a pair of actuators for integrating a moving body and a table.

[Example] Fig. 1 is a perspective view showing an embodiment of the present invention, and Fig. 2 is a perspective view showing an embodiment of the present invention.
The figure is a sectional view taken along the line AA in FIG. 1, and the same reference numerals as in FIG. 4 indicate the same constituent members. In this embodiment, a rail 5' is provided on the moving body 3 in the X direction, and
It forms a directional guide. A slider (Y-direction movable body) 13 is slidably engaged with this Y-direction guide 5', and a table 6 is disposed astride the slider 13 and the Y-direction guide rail 5'. The table 6 moves only along the rail 5',
In the X direction, it is integrated with the rail and moves together with the X direction moving body 3. Two bearings 14a and 14b are mounted on the slider 13 along the Y axis.
are fixed, and a rail 15 extending in the X direction fixed to the tip of a moving rod 7 in the Y direction is sandwiched between them, so that the slider 13 can move smoothly with respect to the rail 15. The slider 13
A second bearing 16 is fixed at the center of the table on top of the table, and two actuators 17a, 17 are mounted across this bearing from the X-axis direction.
b, and this actuator is fixed to the inner wall of the table 6. This actuator is fixed to the inner wall of the table 6. This actuator is formed of a member such as a piezo element that expands and contracts when a voltage is applied, and serves to integrate the slider 13 and the table 6 by applying a voltage when the table moves in the Y direction.

In such a device, when the moving rod 4 is driven in the direction of the arrow, the X-direction moving body 3 is guided by the groove 2 and moves, and the table 6 placed thereon is pushed by the rail 5' and moved in the same direction. Move to. At this time,
Since no voltage is applied to the actuators 17a and 17b, the slider 13 and table 6 are not integrated, and even if the direction of the X-direction guide groove 2 and the direction of the rail 15 are slightly misaligned, the slider There is no problem in moving in the X direction by escaping in the direction. On the other hand, when moving in the Y direction, voltage is applied to the actuators 17a and 17b to drive the moving rod 7. Since the table 6 and the slider 13 are integrated, the rail 15 and the bearing 14
The slider moves via a, 14b, and along with it, the bearing 16, actuator 17a, 1
The table 6 moves in the Y direction via 7b. At this time, the moving direction of the Y-direction moving rod 7 and the rail 5'
Even if the direction of
5 moves between the bearings 14a and 14b without interfering with movement in the Y direction. Further, since the rotation of the slider 13 is centered on the bearing 16 located at the center of the table, it is absorbed by the bearing and is not transmitted to the table 6.

FIG. 3 shows another embodiment of the present invention, in which the base body 1 is not provided with a guide groove, but both sides of the base body 1 are used as guides, and the X-direction movable body 3 is engaged with the side faces. Furthermore, two grooves 18a and 18b are formed in the Y direction in the movable body 3, and the table 6 is configured to slide on the base body 1 at the same time as the guide rail 5' is formed. Movement in each direction is the same as in FIG.

[Effect] With the configuration detailed above, when the table 6 is moved in the X-axis direction, the slider 13 is not pushed by the table but by the guide 5' in the Y direction, so that the slider Even if there is resistance between the table and the Y-direction guide, no moment acts directly on the table, so rotational meandering does not occur.
Further, since the connecting portion is the center of the table for movement in the Y-axis direction, all unnecessary rotational force can be released by the bearing 16, and rotational meandering of the table can be prevented. Furthermore, since the number of members attached to the tip of the Y-direction moving rod 7 is small and it is lightweight, the rigidity of the Y-direction moving rod 7 can be maintained and the accuracy of movement can be improved.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing one embodiment of the present invention;
The drawings are a sectional view taken along the line A-A in FIG. 1, FIG. 3 is a perspective view showing another embodiment of the present invention, and FIG. 4 is a perspective view showing an example of a conventional device. 1... Base body, 2... X direction guide, 3... X direction moving body, 4... X direction moving rod, 5'... Y direction guide, 6... Table, 7... Y direction moving rod,
13...Slider, 14a, 14b...Bearing, 15...Rail, 16...Second bearing, 17a, 17b...Actuator.

Claims (1)

[Scope of utility model registration request] X-direction moving body, X that guides the movement of this moving body
- A guide, a drive mechanism for moving the X-direction moving body, a Y-guide installed on the X-direction moving body and making a right angle to the X-guide, a Y-direction moving body guided by this Y-guide, and this Y-direction movement A table placed on the body and guided by a Y-guide, a drive mechanism for moving the moving body in the Y direction, a rail-like member attached to the tip of the drive mechanism and extending in the X direction, and arranged in parallel in the Y direction. a pair of bearings that sandwich the rail-like member from both sides, a second bearing that is attached to the Y-direction moving body at a substantially center portion within the table, and a pair of bearings that sandwich the second bearing from the X-axis direction. An X-Y precision movement device that is installed in the table and is operated only when moving in the Y direction to sandwich the second bearing and integrate the Y-direction moving body and the table.