JP2529242Y2 - Moving device for positioning optical components - Google Patents

Moving device for positioning optical components

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Publication number
JP2529242Y2
JP2529242Y2 JP1988076696U JP7669688U JP2529242Y2 JP 2529242 Y2 JP2529242 Y2 JP 2529242Y2 JP 1988076696 U JP1988076696 U JP 1988076696U JP 7669688 U JP7669688 U JP 7669688U JP 2529242 Y2 JP2529242 Y2 JP 2529242Y2
Authority
JP
Japan
Prior art keywords
base
moving
moving device
male screw
screw member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988076696U
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Japanese (ja)
Other versions
JPH01180170U (en
Inventor
一房 野田
Original Assignee
株式会社 雄島試作研究所
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Priority to JP1988076696U priority Critical patent/JP2529242Y2/en
Publication of JPH01180170U publication Critical patent/JPH01180170U/ja
Application granted granted Critical
Publication of JP2529242Y2 publication Critical patent/JP2529242Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【考案の詳細な説明】 (産業上の利用分野) 本考案は、モータで雄ねじ部材を回動させ、基台に対
して移動台を移動させる移動装置を三つ用いた光学部品
位置合せ用移動装置に関する。
[Detailed description of the invention] (Industrial application field) In the invention, an optical component alignment movement using three moving devices for rotating a male screw member with a motor and moving a movable table with respect to a base. Related to the device.

(従来の技術) モータで雄ねじ部材を回動させ、基台に対して移動台
を移動させる移動装置は、被移動物の受け渡しや位置決
め等をするために広く用いられている。
(Prior Art) A moving device in which a male screw member is rotated by a motor to move a moving table with respect to a base is widely used for delivering and positioning a moving object.

このよな移動装置は、一般に、第6図に斜視図で示す
如くである。
Such a moving device is generally as shown in a perspective view in FIG.

即ち、基台51は互いに対向する立壁部51Aと、この両
立壁部51Aを接続する接続壁部51Bとからほぼコ字状に形
成されている。
That is, the base 51 is formed in a substantially U-shape from the upright wall 51A facing each other and the connection wall 51B connecting the upright wall 51A.

移動台53は両立壁部51Aと接続壁部51Bとで画成された
空間51Cに配設されている。
The moving table 53 is provided in a space 51C defined by the compatible wall 51A and the connecting wall 51B.

基台51には移動台53を案内する案内部材55が設けられ
ている。
The base 51 is provided with a guide member 55 for guiding the moving table 53.

雄ねじ部材57は基台51と移動台53間で立壁部51A方向
に延出して設けられている。
The male screw member 57 is provided between the base 51 and the movable base 53 so as to extend in the direction of the vertical wall 51A.

そして、この雄ねじ部材57に連結し該雄ねじ部材57を
回動するモータ59は、雄ねじ部材57の延長上で基台51側
に取付けられている。
A motor 59 connected to the male screw member 57 and rotating the male screw member 57 is attached to the base 51 on an extension of the male screw member 57.

一方、モータ59を小型化していくと、その径は小さく
なるものの、長さは大きくならざるを得ず、モータ59の
長さに対応して基台51側の長さが大きくなる。
On the other hand, when the size of the motor 59 is reduced, the diameter is reduced, but the length is unavoidably increased, and the length of the base 51 side is increased corresponding to the length of the motor 59.

(考案が解決しようとする課題) そのため、モータを小型化し移動装置をコンパクト化
しようとすると、従来装置では、モータの長さに対応し
て全体の長さが大きくなり、移動装置のコンパクト化を
図ることができない不具合がある。
(Problems to be Solved by the Invention) Therefore, when attempting to make the motor smaller and the moving device more compact, the conventional device has a larger overall length corresponding to the length of the motor. There is a problem that cannot be solved.

特に、部品部分に対して発光素子を互いに直交するX
軸、Y軸、Z軸の三方向に移動して位置決めを行い、位
置決め後、部品部分に発光素子を接着する際等に用いら
れる光学部品位置合せ用移動装置では、前記のような移
動装置がX軸、Y軸、Z軸の三方向に対応して三つ設け
られるため、移動装置が更に大型化してしまう。
In particular, the light emitting elements are orthogonal to each other with respect to the component part.
Axis, Y-axis, and Z-axis to perform positioning by moving in three directions. After the positioning, the optical device positioning moving device used when, for example, bonding a light emitting element to a component portion, includes the moving device described above. Since three units are provided corresponding to the three directions of the X-axis, the Y-axis, and the Z-axis, the size of the moving device is further increased.

本考案は前記事情に鑑み案出されたものであって、本
考案の目的は、小型化、長形化されたモータを用いてコ
ンパクト化を図れる光学部品位置合せ用移動装置を提供
するにある。
The present invention has been devised in view of the above circumstances, and an object of the present invention is to provide an optical component positioning moving device which can be made compact by using a downsized and elongated motor. .

(課題を解決するための手段) 第1図乃至第5図を参照して前記目的を達成するため
の本考案を説明すると、本考案に係る光学部品位置合せ
用移動装置29は、第1、第2、第3の三つの移動装置10
1,102,103を備え、各移動装置101,102,103は、互いに対
向する立壁部5Aと、この両立壁部5Aを接続する接続壁部
5Bとからなる断面がほぼコ字状の移動台5と、前記両立
壁部5Aと接続壁部5Bとの間の空間部5Cに配設された基台
3と、移動台5と基台3間に設けられ移動台5の両立壁
部5A間方向における直線移動を案内する案内部材11と、
移動台5と基台3間で両立壁部5A間方向に延出して設け
られ回動することで基台3に対して移動台5を移動させ
る雄ねじ部材7と、前記雄ねじ部材7の長手方向に長形
で基台3に収容され取付けられ、雄ねじ部材7にほぼ直
線状に連結されて該雄ねじ部材7を回動させるモータ9
とからなり、前記第1移動装置101は、その雄ねじ部材
7の長手方向が水平面上で延在するX軸方向に向けて配
置され、前記第2移動装置102は、その雄ねじ部材7の
長手方向が水平面上で前記X軸方向とは直交するY軸方
向に向けて配置され、前記第3移動装置103は、その雄
ねじ部材7の長手方向が鉛直面上で延在するZ軸方向に
向けて配置され、前記第1、第2移動装置101,102の移
動台5は前記空間部5Cを下方に向けて配置されると共
に、第2移動装置102の基台3は第1移動装置101の移動
台5上に取り付けられ、前記第3移動装置103の基台3
は第2移動装置102の移動台5上にL型の支持片37を介
して取り付けられ、光学部品を保持する保持装置33が前
記第3移動装置103の移動台5に設けられている。
(Means for Solving the Problems) The present invention for achieving the above-mentioned object will be described with reference to FIGS. 1 to 5. The moving device 29 for aligning an optical component according to the present invention comprises: Second and third three moving devices 10
1, 102, 103, each mobile device 101, 102, 103 has a standing wall 5A facing each other, a connecting wall connecting the both standing wall 5A
5B, a base 5 having a substantially U-shaped cross section, a base 3 disposed in a space 5C between the compatible wall 5A and the connecting wall 5B, a base 5 and a base 3 A guide member 11 provided therebetween for guiding a linear movement in a direction between the compatible wall portions 5A of the movable base 5;
A male screw member 7 extending between the movable base 5 and the base 3 in the direction between the compatible wall portions 5A and rotating to move the movable base 5 with respect to the base 3, and a longitudinal direction of the male screw member 7; A motor 9 which is accommodated in the base 3 in an elongated shape and is attached thereto, and is connected to the male screw member 7 in a substantially linear manner to rotate the male screw member 7.
The first moving device 101 is arranged in the X-axis direction in which the longitudinal direction of the male screw member 7 extends on a horizontal plane, and the second moving device 102 is arranged in the longitudinal direction of the male screw member 7. Are arranged on a horizontal plane in a Y-axis direction orthogonal to the X-axis direction, and the third moving device 103 moves in a Z-axis direction in which a longitudinal direction of the male screw member 7 extends on a vertical plane. The moving table 5 of the first and second moving apparatuses 101 and 102 is disposed so that the space 5C faces downward, and the base 3 of the second moving apparatus 102 is moved to the moving table 5 of the first moving apparatus 101. Mounted on the base 3 of the third moving device 103
Is mounted on the moving table 5 of the second moving device 102 via an L-shaped support piece 37, and a holding device 33 for holding optical components is provided on the moving table 5 of the third moving device 103.

(作用) 第1、第2、第3の各移動装置101,102,103におい
て、基台3にモータ9を取付ける点では従来装置と同様
であるが、移動台5をその断面をほぼコ字状に形成した
点、移動台5の両立壁部5Aと接続壁部5Bとの間の空間部
5Cに基台3を配設した点、モータ9を基台3に収容し取
付ける点において異なり、これら構造から小型化、長形
化されたモータ9を用い、モータ9の長さに対応して装
置の全長を大きくすることなく第1、第2、第3の各移
動装置101,102,103を構成し、これにより光学部品位置
合せ用移動装置29のコンパクト化を図る。
(Operation) The first, second, and third moving devices 101, 102, and 103 are the same as the conventional device in that the motor 9 is mounted on the base 3, but the moving table 5 has a substantially U-shaped cross section. Point, space between the compatible wall 5A and the connecting wall 5B of the moving base 5
The difference is that the base 3 is arranged in 5C and the motor 9 is accommodated and mounted in the base 3. The first, second, and third moving devices 101, 102, and 103 are configured without increasing the overall length of the device, and thereby the optical device positioning moving device 29 is downsized.

(実施例) 以下、本考案の好適一実施例を添付図面に従って説明
する。
Hereinafter, a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

第1図は移動装置の要部断面側面図、第2図及び第3
図は夫々第1図のII矢視、III矢視図、第4図は光部品
組立用の位置合せ装置の側面図、第5図は第4図のV矢
視図を示す。
FIG. 1 is a cross-sectional side view of a main part of a moving device, FIG. 2 and FIG.
FIG. 4 is a side view of an alignment device for assembling an optical component, and FIG. 5 is a view taken in the direction of the arrow V in FIG.

第4図及び第5図において、29は光学部品位置合せ用
移動装置を示し、光学部品位置合せ用移動装置29は第
1、第2、第3の三つの移動装置101、102、103と、光
学部品、即ち発光素子31の保持装置33からなる。
4 and 5, reference numeral 29 denotes an optical component positioning moving device, and the optical component positioning moving device 29 includes first, second, and third moving devices 101, 102, and 103; It comprises an optical component, that is, a holding device 33 for the light emitting element 31.

この実施例で光学部品は、光ファイバやレンズ等が組
み込まれた部品部分35と、発光素子31とを備える。
In this embodiment, the optical component includes a component portion 35 in which an optical fiber, a lens, and the like are incorporated, and a light emitting element 31.

位置合せ装置1により部品部分35に対して発光素子31
を互いに直交するX軸、Y軸、Z軸の三方向に移動して
部品部分35に対して位置決めを行い、位置決め後、部品
部分35に発光素子31を接着し、光部品を完成する。
The light emitting element 31 is applied to the component part 35 by the alignment device 1.
Are moved in three directions of the X axis, the Y axis, and the Z axis, which are orthogonal to each other, to perform positioning with respect to the component portion 35. After the positioning, the light emitting element 31 is adhered to the component portion 35 to complete the optical component.

各第1、第2、第3移動装置101、102、103は夫々第
1図乃至第3図に示す移動装置1と同様な構成からな
る。
Each of the first, second and third mobile devices 101, 102 and 103 has the same configuration as the mobile device 1 shown in FIGS. 1 to 3, respectively.

第1図乃至第3図を参照して移動装置1を説明する
と、移動装置1は基台3と、移動台5と、雄ねじ部材7
と、モータ9等を備える。
The moving device 1 will be described with reference to FIGS. 1 to 3. The moving device 1 includes a base 3, a moving table 5, and a male screw member 7.
And a motor 9 and the like.

移動台5は互いに対応する立壁部5A,5Aと、この両立
壁部5Aを接続する接続壁部5Bとを備え、断面がほぼコ字
状を呈する。
The moving table 5 includes upstanding wall portions 5A, 5A corresponding to each other, and a connecting wall portion 5B connecting the two upstanding wall portions 5A, and has a substantially U-shaped cross section.

基台3は前記両立壁部5Aと接続壁部5Bとの間の空間部
5Cに配設する。
The base 3 is a space between the compatible wall 5A and the connecting wall 5B.
Installed at 5C.

移動台5と基台3間には直動型の軸受11を設け、この
直動型の軸受11により移動台5の立壁部5A方向への移動
を案内する。
A direct-acting bearing 11 is provided between the moving base 5 and the base 3, and the direct-acting bearing 11 guides the moving of the moving base 5 in the direction of the upright wall 5 </ b> A.

前記直動型の軸受11は基台3の両側に取付けられた軌
道台13と、前記軌道台13に対向して移動台5の両側に取
付けられた軌道台15と、両軌道台13、15のV溝間に組み
込まれた複数の保持器付き円筒ころ17からなる。
The direct-acting type bearing 11 includes a track 13 mounted on both sides of the base 3, a track 15 mounted on both sides of the moving table 5 opposite to the track 13, and both tracks 13, 15. And a plurality of cylindrical rollers 17 with retainers incorporated between the V grooves.

雄ねじ部材7は基台3の一方の端部と移動台5の一方
の立壁部5A間に設ける。
The male screw member 7 is provided between one end of the base 3 and one standing wall 5A of the movable base 5.

モータ9はこの雄ねじ部材7の端部に連結する。 The motor 9 is connected to the end of the male screw member 7.

モータ9はDCサーボモータで、モータ本体9Aと、減速
機構部9Bと、エンコーダ部9Cとからなる。モータ9は小
型化され、そのため、モータ9の径は小さいが雄ねじ部
材7の長手方向に長形である。
The motor 9 is a DC servo motor, and includes a motor body 9A, a speed reduction mechanism 9B, and an encoder 9C. The size of the motor 9 is reduced, and therefore, the diameter of the motor 9 is small, but is long in the longitudinal direction of the male screw member 7.

雄ねじ部材7はモータ9の減速機構部9Bにカップリン
グ19を介してほぼ直線状に連結し、先端部を一方の立壁
部5Aのねじ孔21に螺合させる。
The male screw member 7 is connected to the speed reduction mechanism 9B of the motor 9 in a substantially linear manner via a coupling 19, and the leading end is screwed into the screw hole 21 of the one upright wall 5A.

モータ9は基台3側に収容し取り付ける。 The motor 9 is housed and mounted on the base 3 side.

モータ9の取り付けは、エンコーダ部9Cを他方の立壁
部5Aの支持孔23に回転不能に嵌合させ、且つ、雄ねじ部
材7の基部を、基台3の一方の端部に組み込んだ軸受25
と、雄ねじ部材7の鍔部7Aと、カラー27とにより支持す
ることにより行う。
The motor 9 is mounted by fitting the encoder 9C into the support hole 23 of the other standing wall 5A in a non-rotatable manner, and incorporating the base of the male screw member 7 into one end of the base 3.
And the collar 27 supports the flange portion 7A of the male screw member 7.

これにより雄ねじ部材7は基台3に対して回転自在、
且つ長手方向に移動不能に組付られる。
Thereby, the male screw member 7 is rotatable with respect to the base 3,
And it is assembled so that it cannot move in the longitudinal direction.

従って、モータ9の駆動により雄ねじ部材7は回動
し、移動台5は両立壁部5A方向に移動する。
Accordingly, the male screw member 7 is rotated by the driving of the motor 9, and the movable table 5 moves in the direction of the compatible wall 5A.

次に、上記のような構成からなる第1、第2、第3移
動装置101、102、103相互の関係について説明する。
Next, the relationship among the first, second, and third mobile devices 101, 102, and 103 having the above configuration will be described.

第1、第2移動装置101,102の移動台5は共にその空
間部5Cを下方に向けて配置する。
The moving table 5 of each of the first and second moving devices 101 and 102 is arranged with its space 5C facing downward.

更に、第1移動装置101はその移動台5をX軸方向に
移動自在に配設し、この移動台5に第2移動装置102の
基台3を取付ける。
Further, the first moving device 101 has its moving table 5 movably arranged in the X-axis direction, and the base 3 of the second moving device 102 is mounted on this moving table 5.

第2移動装置102はその移動台5をY軸方向に移動自
在に配設し、この移動台5にL型の支持片37を介して第
3移動装置103の基台3を取付ける。
The second moving device 102 has its moving table 5 movably arranged in the Y-axis direction, and the base 3 of the third moving device 103 is attached to this moving table 5 via an L-shaped support piece 37.

第3移動装置103はその移動台5をZ軸方向に移動自
在に配設し、この移動台5に保持装置33を取付ける。
The third moving device 103 has the moving table 5 movably arranged in the Z-axis direction, and the holding device 33 is mounted on the moving table 5.

発光素子31は各移動装置101、102、103のモータ9の
駆動によりX軸、Y軸、Z軸方向に移動し、0.001mmの
単位で制御される。
The light emitting element 31 moves in the X-axis, Y-axis, and Z-axis directions by driving the motors 9 of the moving devices 101, 102, and 103, and is controlled in units of 0.001 mm.

次に作用について説明する。 Next, the operation will be described.

各移動装置101、102、103において、移動台5をその
断面をほぼコ字状に形成し、移動台5の両立壁部5Aの間
に基台3を配設し、この基台3にモータ9を収容し取付
けるようにしたので、モータ9が長形化しても、各移動
装置101、102、103の基台3の全長を大きくすることは
ない。
In each of the moving devices 101, 102, and 103, the moving table 5 is formed to have a substantially U-shaped cross section, and the base 3 is disposed between the compatible walls 5A of the moving table 5; Since the motor 9 is accommodated and mounted, the overall length of the base 3 of each of the moving devices 101, 102, and 103 does not increase even if the motor 9 becomes longer.

従って、モータ9の長さに対応して各移動装置101、1
02、103の全長を大きくする不具合はなく、X軸、Y
軸、Z軸方向の寸法を短縮化して光学部品位置合せ用移
動装置29のコンパクト化を図ることができる。
Therefore, each moving device 101, 1 corresponds to the length of the motor 9.
There is no problem to increase the total length of 02, 103, X axis, Y
The size in the axis and Z-axis directions can be shortened, and the moving device 29 for positioning optical components can be made compact.

尚、実施例では、案内部材11を直動型の軸受により構
成した場合について説明したが、案内部材の構成は任意
で、例えば従来の如く、ロッドとスライド軸受等により
構成してもよい。
In the embodiment, the case where the guide member 11 is constituted by a direct-acting type bearing has been described.

(考案の効果) 以上の説明で明らかなように、本考案によれば、小型
化、長形化したモータを用いてコンパクトな光学部品位
置合せ用移動装置を得ることができる。
(Effects of the Invention) As is clear from the above description, according to the present invention, a compact moving device for positioning optical components can be obtained using a downsized and elongated motor.

【図面の簡単な説明】[Brief description of the drawings]

第1図は移動装置の要部断面側面図、第2図及び第3図
は夫々第1図のII矢視、III矢視図、第4図は光部品組
立用の位置合せ装置の側面図、第5図は第4図のV矢視
図、第6図は従来の移動装置の斜視図である。 尚図中、1,101,102,103は移動装置、3は基台、5は移
動台、5Aは立壁部、5Bは接続壁部、5Cは空間部、7は雄
ねじ部材、9はモータ、11は案内部材、29は光学部品位
置合せ用移動装置である。
1 is a cross-sectional side view of a main part of a moving device, FIGS. 2 and 3 are views taken along arrows II and III of FIG. 1, respectively, and FIG. 4 is a side view of a positioning device for assembling optical components. FIG. 5 is a view taken in the direction of the arrow V in FIG. 4, and FIG. 6 is a perspective view of a conventional moving device. In the figure, 1, 101, 102, 103 are moving devices, 3 is a base, 5 is a moving stand, 5A is a standing wall, 5B is a connecting wall, 5C is a space, 7 is a male screw member, 9 is a motor, 11 is a guide member, 29 Is a moving device for aligning optical components.

Claims (1)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】第1、第2、第3の三つの移動装置101,10
2,103を備え、 各移動装置101,102,103は、 互いに対向する立壁部5Aと、この両立壁部5Aを接続する
接続壁部5Bとからなる断面がほぼコ字状の移動台5と、 前記両立壁部5Aと接続壁部5Bとの間の空間部5Cに配設さ
れた基台3と、 移動台5と基台3間に設けられ移動台5の両立壁部5A間
方向における直線移動を案内する案内部材11と、 移動台5と基台3間で両立壁部5A間方向に延出して設け
られ回動することで基台3に対して移動台5を移動させ
る雄ねじ部材7と、 雄ねじ部材7の長手方向に長形で基台3に収容され取付
けられ、雄ねじ部材7にほぼ直線状に連結されて該雄ね
じ部材7を回動させるモータ9とからなり、 前記第1移動装置101は、その雄ねじ部材7の長手方向
が水平面上で延在するX軸方向に向けて配置され、 前記第2移動装置102は、その雄ねじ部材7の長手方向
が水平面上で前記X軸方向とは直交するY軸方向に向け
て配置され、 前記第3移動装置103は、その雄ねじ部材7の長手方向
が鉛直面上で延在するZ軸方向に向けて配置され、 前記第1、第2移動装置101,102の移動台5は前記空間
部5Cを下方に向けて配置されると共に、第2移動装置10
2の基台3は第1移動装置101の移動台5上に取り付けら
れ、 前記第3移動装置103の基台3は第2移動装置102の移動
台5上にL型の支持片37を介して取り付けられ、 光学部品を保持する保持装置33が前記第3移動装置103
の移動台5に設けられている、 ことを特徴とする光学部品位置合せ用移動装置。
1. First, second and third three moving devices 101 and 10.
Each of the moving devices 101, 102, and 103 includes a movable base 5 having a substantially U-shaped cross section including a standing wall portion 5A facing each other and a connecting wall portion 5B connecting the both standing wall portions 5A, and the both standing wall portions 5A. A base 3 disposed in a space 5C between the base 5 and the connecting wall 5B, and a guide provided between the base 5 and the base 3 for guiding the linear movement of the base 5 in the direction between the compatible walls 5A. A member 11, a male screw member 7 extending between the moving base 5 and the base 3 in the direction between the compatible wall portions 5A and rotating to move the moving base 5 with respect to the base 3, and a male screw member 7; The first moving device 101 includes a motor 9 that is long and elongated in the longitudinal direction, is accommodated in the base 3, is attached to the base 3, is connected to the male screw member 7 in a substantially linear manner, and rotates the male screw member 7. The longitudinal direction of the male screw member 7 is arranged in the X-axis direction extending on the horizontal plane, and the second moving device 102 The longitudinal direction of the male screw member 7 is arranged on a horizontal plane in the Y-axis direction orthogonal to the X-axis direction, and the third moving device 103 has a longitudinal direction of the male screw member 7 extending on a vertical plane. The moving table 5 of the first and second moving devices 101 and 102 is disposed to face the space 5C downward, and the second moving device 10
The second base 3 is mounted on the moving base 5 of the first moving device 101, and the base 3 of the third moving device 103 is mounted on the moving base 5 of the second moving device 102 via an L-shaped support piece 37. The holding device 33 holding the optical component is attached to the third moving device 103.
A moving device for positioning an optical component, the moving device being provided on a moving table (5).
JP1988076696U 1988-06-09 1988-06-09 Moving device for positioning optical components Expired - Lifetime JP2529242Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988076696U JP2529242Y2 (en) 1988-06-09 1988-06-09 Moving device for positioning optical components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988076696U JP2529242Y2 (en) 1988-06-09 1988-06-09 Moving device for positioning optical components

Publications (2)

Publication Number Publication Date
JPH01180170U JPH01180170U (en) 1989-12-25
JP2529242Y2 true JP2529242Y2 (en) 1997-03-19

Family

ID=31301710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988076696U Expired - Lifetime JP2529242Y2 (en) 1988-06-09 1988-06-09 Moving device for positioning optical components

Country Status (1)

Country Link
JP (1) JP2529242Y2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5466412U (en) * 1977-10-19 1979-05-11
JPS6188461U (en) * 1984-11-16 1986-06-09

Also Published As

Publication number Publication date
JPH01180170U (en) 1989-12-25

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