JPS5976745A - X-y table - Google Patents

Abstract

PURPOSE:To simplify the structure of the device and contrive the speed-up and the like of the device by a method wherein the movable coil unit of one of lenear motors in the device, whose upper and lower two layers of the X-Y tables are driven by the linear motors respectively, is constituted so as to be movable along the axial direction of the main body of the motor and the direction orthogonal thereto. CONSTITUTION:When the X-table 14 is desired to be moved, the X-axis linear motor 12 is conducted, the movable coil unit 12a of the motor is advanced or retreated in accordance with the amount of conduction and the amount of the displacement thereof is detected by a plane mirror 21 and an interferometer 24 to control the same motor 12. When the Y-table 15 is desired to be moved, the Y- axis linear motor 13 is conducted and the amount of displacement of the movable coil 17 is detected by the plane mirror 22 and the interferometer 23 in the same manner to control the same motor 13. In this case, the movable coil unit 17 is movable into the X-direction, therefore, the coil unit 17 will never cause troubles when the Y-table 55 is moved to the X-direction. According to this method, a conventional connecting table may be unnecessitated and the desired purposes may be achieved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an upper and lower two-layer XY table, and particularly to an improvement of a near motor for driving an upper table.

[Technical background of the invention J: Problems]

In a general XY table having a two-layer structure, a linear motor (linear DC motor) is often used as a table drive source in order to satisfy the recent demands for high speed and high accuracy. The problem here is the arrangement structure of the linear motor for driving the upper table. This is because, for example, if the thrust is 10
Even if it is a beginner, its weight can exceed 9 out of 10, and depending on its placement, high speed and high accuracy will be impaired. One possible means is to place and fix the linear motor on the lower table. However, in this case, since the entire load of the linear motor is applied to the lower table, the movement of the table is poor and it is difficult to adopt this method. Another possibility is to place and fix the linear motor on a pace that supports the upper and lower tables. Naturally, a lower table driving glue near motor is also mounted and fixed on the pace. In this case, the movement of each table is not impaired, which is advantageous.

FIG. 1 shows its specific configuration. In the figure, 1 is -gusu, 2
3 is an X-axis near motor, 3 is an auxiliary pace, 4 is an X table, 5 is a Y table, 6 is a Y-axis near motor, 7 is an auxiliary pace, and 8 is a connection table. When fixing each of the linear motors 2 and 6 to the pace 1 in this way, a connection table 8 is required. Is the connection table 8 the Y-axis near motor coil? It must hold the bottle 9, directly guide its movement, and slide in the X direction with the rear end of the arm 5a extending from the Y table 5.

Therefore, the connection table 8 can also be said to be a type of XY table that moves in the xyx directions. For this reason, the number of parts increased, the installation area increased, and high-precision machining to obtain the right angles for each of the two sets of XY tables was required.
Various cost-increasing conditions become more important.

[Purpose of the invention]

The present invention was made in view of the above circumstances, and its purpose is to reduce the number of parts, reduce the installation area, simplify assembly work, and achieve high speed and high precision. It is intended to provide an XY table to be maintained.

[Summary of the invention]

The present invention provides a linear motor used for driving an upper table, which has a movable coil portion fixed to the upper table, and a main body fixed to the pace, the movable coil portion comprising:
It is configured to be driven forward and backward along the axial direction of the main body and to be movable in a direction perpendicular to the axial direction.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIGS. 2 and 3. 10 in the figure is the pace. this pace 1
0, an auxiliary pace 11 is superimposed and fixed, and an X-axis near motor 12 and a Y-axis near motor 13 are mounted and fixed. The axial directions of these X-axis and Y-axis near motors 12 and 13 are x-X with respect to the auxiliary pace 11.
facing the direction. There is an X on the top of the auxiliary pace 11 above.
A bevel guiding process is performed in the axial direction, and an X-table 14, which is a lower table having a bevel groove, is slidably superimposed thereon.

The X-axis near motor 12 is mounted on the end face of this X table 14.
A movable coil portion 12m protruding from one end surface of is fixed. An X-axis tacho generation 12b protrudes from the other end surface of the X-axis near motor 12, and the amount of movement of the movable coil portion 12a can be measured from the amount of this protrusion.

The upper surface of the X table 14 is provided with a bevel guide in the Y-axis direction, and a Y table 15, which is an upper table having a bevel groove, is slidably fitted therein.

A movable coil portion 17 of a Y-axis sunar motor 13, which will be described later, is fixed to the end face of this Y-table 15.

That is, in the Y-axis near motor 13, permanent magnets 19 and 19 are respectively attached to the upper and lower inner surfaces of a main body 18 having a rectangular frame shape in cross section, and a center yoke 20 is provided with a gap between them. In the gap between the permanent magnets 19, 19 and the center yoke 20, the movable coil portion 17, which has a rectangular frame shape in cross section, is interposed. The movable coil section 17 has an end surface protruding from the main body 18 that is closed, and a rear end surface of the main body 18 that is open so that the coil surrounding the center yoke 20 is connected to the bin J7a and this coil is connected to the open end of the bin 17&. It consists of a coil 17b wound around the side outer peripheral surface. Furthermore, the widthwise dimension t1 of the coil bin 17a is much larger than the widthwise dimension of the center yoke 2o than expected. Therefore, the movable coil section 17
can be driven forward and backward along the axial direction of the main body 18, and is also movable in the width direction, which is a direction perpendicular to the axial direction.

The width direction is the X direction in which the X table 14 moves.

In addition, an X-axis circumferential plane mirror 21 and a Y-axis circumferential plane mirror 22 are mounted on the corners of the Y table 15, and these reflect light from a Rade length measuring machine (not shown), and separate the interferometer 2 installed as
It is now possible to measure distances of 3°24.

The action of these allows highly accurate cheagle positioning. Further, a Y-axis tacho generator 25 is mounted on a corner of the X-table 14, and its tip abuts on a reference piece 26 attached to the side surface of the Y-table 15. Y
The axis tachometer generator 25 has a tU of the Y-axis near motor 13.
+The amount of movement of the coil section 17 can be measured.

Next, the operation of the XY table configured in this manner will be explained. To move the X table 14, it is sufficient to energize the X-axis near motor 12. Moving coil part 12
The motor m moves forward or backward depending on the amount of current applied, and the amount of movement is detected from the plane mirror 21 and the interferometer 24 to control the X-axis near motor 12. To move the Y-table 15, it is sufficient to energize the Y-axis near motor 13. The movable coil section 17 moves forward and backward depending on the amount of current applied, and the amount of movement is detected from the plane mirror 22 and the interferometer 23 to control the Y-axis near motor 13. Furthermore, since this movable coil section 17 also moves in the X direction, the Y table 1
5 does not pose any hindrance when moving in the X direction. Moreover, the weight of the moving coil part 170 is very small (several 100 f
F), the load applied to the Y table 15 is small;
It has little effect on movement. Therefore, XXYX
High-speed and highly accurate positioning is also achieved with the table 145.

In the above embodiment, the X table 14 is the lower layer, and the Y table 14 is the lower layer.
Although the table 15 is in the upper layer, they may be reversed.

In this case, the movable coil portion 17 of the linear motor 13, which is movable in a direction perpendicular to the axial direction, is fixed to the X table 14 side.

Further, although the main body 18 and the movable coil portion 17 of the Y-axis near motor 13 each have a rectangular frame shape in cross section, they are not limited to this, and may have a rectangular cross section, for example. In short, it is sufficient that the movable coil portion is movable in a direction perpendicular to the axial direction.

〔Effect of the invention〕

The present invention uses the above-described energization, eliminates the need for a conventional connection table, eliminates the load of the weight and frictional resistance of this part on the drive linear motor, and improves the high-speed operation of the table. In addition to achieving high accuracy, assembly work is also facilitated and high accuracy is obtained. Furthermore, the required installation area is reduced, and various effects such as a four-compartment system are achieved.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of an XY table showing a conventional example of the present invention;
FIG. 2 is a perspective view of an XY table showing an embodiment of the present invention, and FIG. 3 is a longitudinal sectional view of a linear motor for driving the upper table. 10...Pace, 14...X (lower layer) f -7"
15... Y (upper layer) table, 13... (for upper layer table drive) linear motor, 18... Main body, 17
...Movable coil section.

Claims (1)

[Claims] In a system in which XY tables stacked on top and bottom in two layers on a pace are each driven by a linear motor, the linear motor used to drive the upper table is connected to the main body that is placed and fixed on the pace and in the axial direction of this main body. A moving coil part provided on an upper table that is driven to move forward and backward along the table.