JPS6288528A - X-y stage - Google Patents
X-y stageInfo
- Publication number
- JPS6288528A JPS6288528A JP23063485A JP23063485A JPS6288528A JP S6288528 A JPS6288528 A JP S6288528A JP 23063485 A JP23063485 A JP 23063485A JP 23063485 A JP23063485 A JP 23063485A JP S6288528 A JPS6288528 A JP S6288528A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- guide
- stator
- cross
- linear motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
この発明は精密測定機、産業用ロボット半導体製造装置
等において、精密値＝決め装置に適用するＸＹステージ
に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to an XY stage applied to a precision value determining device in a precision measuring machine, an industrial robot semiconductor manufacturing device, etc.
〈発明の概要〉
この発明は、定盤上の縦横側辺に各々対向してリニアモ
ータを配設し、リニアモータの移動子間に立体交叉のク
ロスガイド、その交叉部に自在ステージを配備したＸＹ
ステージにおいて、各リニアモータの固定子に対し長手
方向に沿う側面に対向固定子と平行な案内面を形成し、
各クロスガイドの両端部には、前記案内面および定盤に
対向して圧力空気噴出口を開設した空気軸受を配備して
なり、ＸＹステージの構成の簡易化および小型、薄型化
、軽量化を実現したものである。<Summary of the Invention> This invention has linear motors arranged facing each other on the longitudinal and lateral sides of a surface plate, a three-dimensional intersecting cross guide between the movers of the linear motors, and a flexible stage at the intersecting part. XY
In the stage, a guide surface parallel to the opposing stator is formed on the side surface along the longitudinal direction of the stator of each linear motor,
At both ends of each cross guide, air bearings are provided with pressurized air outlets facing the guide surface and the surface plate, simplifying the configuration of the XY stage and making it smaller, thinner, and lighter. This has been achieved.
〈発明の背景〉
従来、この種ＸＹステージは、通常、第４図に示す如く
、定盤７上の縦横側辺にベースガイド７１、このベース
ガイド７１の上方にリニアモータ８を配設し、対向する
りニアモータ８の移動子８１間にクロスガイド９を立体
交叉して配備し、クロスガイド９の交叉部に自在ステー
ジを支承している。そして、クロスガイド９の両端部に
対し、前記ベースガイド７１および定盤７に対向して噴
出口を有す空気軸受９１を取付けて、ステージを含むク
ロスガイド９を空気・軸受９１を介して定盤７、ベース
ガイド７１に支承している。しかし、斯る構造のＸＹス
テージでは、ベースガイド７１が定盤７に対し広面積を
占有し、ＸＹステージを大型化する詐りでなく、特に、
組立てに際し、ベースガイド７１とリニアモータ８との
平行度、縦横リニアモータ８の直交度、平行度の調整、
設定に長時間を要す等の問題があった。<Background of the Invention> Conventionally, this type of XY stage usually has a base guide 71 disposed on the vertical and horizontal sides of the surface plate 7, a linear motor 8 above the base guide 71, as shown in FIG. A cross guide 9 is arranged three-dimensionally intersecting between movable elements 81 of opposing linear motors 8, and a flexible stage is supported at the intersecting portion of the cross guide 9. Then, air bearings 91 having jet ports are attached to both ends of the cross guide 9 so as to face the base guide 71 and the surface plate 7, and the cross guide 9 including the stage is fixed via the air/bearings 91. It is supported by the board 7 and the base guide 71. However, in the XY stage with such a structure, the base guide 71 occupies a large area with respect to the surface plate 7, which does not make the XY stage large, but in particular,
When assembling, adjust the parallelism between the base guide 71 and the linear motor 8, the orthogonality and parallelism of the vertical and horizontal linear motors 8,
There were problems such as it took a long time to set up.
〈発明の目的〉
この発明はりニアモータにおける固定子の長手方向に沿
う側面をベースガイドに利用することにより、従来の諸
問題を一挙に解消し、構成および組立調整作業の簡易化
、小型軽量化を実現し得る新規なＸＹステージを提供す
ることを目的とする。<Purpose of the Invention> By utilizing the longitudinal side surface of the stator in the beam near motor of the present invention as a base guide, various conventional problems can be solved at once, and the configuration and assembly/adjustment work can be simplified, and the size and weight can be reduced. The purpose is to provide a new XY stage that can be realized.
〈発明の構成および効果〉
上記の目的を達成するため、この発明では、定盤上の縦
横側辺に互いに対向してリニアモータを配設し、各リニ
アモータの移動子間に立体交叉のクロスガイド、その交
叉部に自在ステージを配備したＸＹステージにおいて、
各リニアモータの固定子に対し、長手方向に沿う側面に
対向する固定子と平行な案内面を形成し、各クロスガイ
ドの両端部に、前記案内面および定盤に対向して圧力空
気噴出口を開設した空気軸受を配備して成る。<Structure and Effects of the Invention> In order to achieve the above object, in this invention, linear motors are arranged facing each other on the vertical and horizontal sides of a surface plate, and a three-dimensional cross is provided between the movers of each linear motor. In the XY stage, which has a guide and a flexible stage at its intersection,
For the stator of each linear motor, a guide surface parallel to the stator is formed on the side surface along the longitudinal direction, and a pressurized air outlet is provided at both ends of each cross guide, facing the guide surface and the surface plate. It is equipped with air bearings.
上記の構成によると、この発明では、各リニアモータの
固定子の側面に案内面を形成し、この案内面と定盤にて
クロスガイドを摺動可能に支承し・たため、従来装置の
如き特別なベースガイドを省略できる。従って、ＸＹス
テージの小型化、薄型化、軽量化を実現し得ると共に、
特に、組立てでは、リニアモータの平行度、直交度の設
定のみとなり、作業が一段と簡易となりコストダウンを
実現できる等、構成簡易にして発明目的を達成した効果
を奏する。According to the above configuration, in this invention, a guide surface is formed on the side surface of the stator of each linear motor, and the cross guide is slidably supported by the guide surface and the surface plate, so that it is not possible to use a special device like the conventional device. The base guide can be omitted. Therefore, it is possible to make the XY stage smaller, thinner, and lighter, and
In particular, during assembly, only the parallelism and orthogonality of the linear motors need to be set, which further simplifies the work and reduces costs, thereby achieving the object of the invention by simplifying the configuration.
〈実施例の説明〉 第１図は本発明にかかるＸＹステージを示す。<Explanation of Examples> FIG. 1 shows an XY stage according to the present invention.
該ＸＹステージは、平面正方形をなす定盤１上の縦横側
辺にリニアモータ２が互いに平行して配設され、対向す
るりニアモータ２の移動子間２ａ、’ｌｂに立体交叉の
クロスガイド３，４、クロスガイド３，４の交叉部に自
在ステージ５を支承し、クロスガイド３，４の移行によ
る交叉部の変位により、ステージ５が位置決めされる。The XY stage has linear motors 2 arranged parallel to each other on the longitudinal and lateral sides of a surface plate 1 having a square plane, and a three-dimensionally intersecting cross guide 3 between the moving elements 2a and 'lb of the opposing linear motors 2. , 4. A flexible stage 5 is supported at the intersection of the cross guides 3 and 4, and the stage 5 is positioned by displacement of the intersection by the movement of the cross guides 3 and 4.
本発明は、各リニアモータ２の固定子２ａおよび定盤１
をクロスガイド３．４の摺動案内面となしたことを特徴
とするもので、リニアモータ２は、第２図に示す如く、
固定子２ａと固定子２ａに摺動可能に嵌挿された移動子
２ｂとからなり、固定子２ａは、高透磁率材料からなる
内、外側ヨーク２１ａ、２２ａの中間にセンタヨーク２
３ａを配備し両端をサイドヨークにて一体結合すると共
に、実施例では、該固定子２ａを定盤１に対し直接取付
けて内側ヨーク２１ａの内側面に定盤案内面１１と直角
をなす摺動案内面２４ａを形成している。尚、図面には
示していないが内、外側ヨークおよびセンタヨークには
、互いに極性の異なる永久磁石が接合配備される。The present invention provides a stator 2a of each linear motor 2 and a surface plate 1.
is used as the sliding guide surface of the cross guide 3.4, and the linear motor 2 has, as shown in FIG.
The stator 2a is composed of a stator 2a and a mover 2b that is slidably inserted into the stator 2a.
3a and integrally connect both ends with side yokes, and in the embodiment, the stator 2a is directly attached to the surface plate 1 so that the stator 2a is slidable on the inner surface of the inner yoke 21a at right angles to the surface plate guide surface 11. A guide surface 24a is formed. Although not shown in the drawings, permanent magnets having different polarities are bonded to the inner and outer yokes and the center yoke.
移動子２ｂは、前記センタヨーク２３ａに嵌挿した導電
体ポビン２５ｂの外周に駆動コイル２６ｂを巻付けてな
り、該移動子２ｂの上面にクロスガイド３．４の端部を
取付は固定している。The mover 2b is constructed by winding a drive coil 26b around the outer periphery of a conductor pobbin 25b fitted into the center yoke 23a, and an end of a cross guide 3.4 is mounted and fixed on the upper surface of the mover 2b. There is.
上記各クロスガイド３．４の両端に空気軸受６が取付け
られ、空気軸受６には、固定子２ａおよび定盤１の案内
面２４３．１１に対向して圧力空気噴出口６１．６２を
開設している。Air bearings 6 are attached to both ends of each of the cross guides 3.4, and pressure air outlets 61.62 are provided in the air bearings 6, facing the guide surfaces 243.11 of the stator 2a and the surface plate 1. ing.
第３図はりニアモータ２の他の例を示す。FIG. 3 shows another example of the beam near motor 2.
該実施例において固定子２ａは、ボトムヨーク２７ａと
移動子２ｂを嵌挿したトップヨーク２８ａにて構成し、
ボトムヨーク２７ａを定盤１に取付けて内側面に定盤案
内面１１と直角をなす案内面２４ａを形成し、クロスガ
イド３゜４に取付けた軸受６を支承している。In this embodiment, the stator 2a is composed of a bottom yoke 27a and a top yoke 28a into which a slider 2b is fitted,
A bottom yoke 27a is attached to the surface plate 1, and a guide surface 24a that is perpendicular to the surface plate guide surface 11 is formed on the inner surface to support a bearing 6 attached to the cross guide 3.4.
本発明は上記の如（、定盤１の縦横側辺にリニアモータ
２を対向配備し、各リニアモータ２における固定子２ａ
の長手方向に沿う側面に対向する固定子２ａと平行な案
内面２４ａを形成し、クロスガイド３，４０両端部に空
気軸受６を取付けて、゛前記案内面２４ａおよび定盤１
に対し摺動可能に支持したから、本発明のＸＹステージ
では、従来装置の如く特別なベースガイドを要せず、従
って、部品の減少、構成、組立作業が簡易となると共に
、小型化、薄型化、軽量化およびコストダウンを実現し
得る等、所期の目的を達成した効果を有す。The present invention operates as described above (the linear motors 2 are arranged facing each other on the vertical and horizontal sides of the surface plate 1, and the stator 2a of each linear motor 2 is
A guide surface 24a parallel to the stator 2a facing the side surface along the longitudinal direction is formed, and air bearings 6 are attached to both ends of the cross guides 3 and 40.
Since the XY stage of the present invention is supported slidably against It has the effect of achieving the intended purpose, such as being able to realize weight reduction, weight reduction, and cost reduction.
第１図は本発明にかかるＸＹステージの斜面図、第２図
は第１図の縦断面図、第３図は他の例を示す断面図、第
４図は従来例を示す図である。
１・・・・定盤 １１・・・・案内面２・・・
・リニアモータ ２ａ・・・・固定子２ｂ・・・・移動
子 ２１ａ・・・・ヨーク２４ａ・・・・摺動面FIG. 1 is a perspective view of an XY stage according to the present invention, FIG. 2 is a vertical sectional view of FIG. 1, FIG. 3 is a sectional view of another example, and FIG. 4 is a diagram of a conventional example. 1... Surface plate 11... Guide surface 2...
・Linear motor 2a... Stator 2b... Mover 21a... Yoke 24a... Sliding surface
Claims (1)
、各モータの移動子間に直交するクロスガイド、その交
叉部に自在ステージを配備したＸＹステージにおいて、
各リニアモータの固定子には、長手方向に沿う側面に対
向する固定子と平行な案内面を形成し、各クロスガイド
の両端部には、前記案内面および定盤に対向して圧力空
気噴出口を開設した空気軸受を配備して成るＸＹステー
ジ。In the XY stage, linear motors are arranged facing each other on the vertical and horizontal sides of the surface plate, a cross guide is orthogonal between the movable elements of each motor, and a flexible stage is installed at the intersection of the cross guides.
The stator of each linear motor is formed with a guide surface parallel to the stator that faces the side surface along the longitudinal direction, and pressure air jets are provided at both ends of each cross guide opposite the guide surface and the surface plate. An XY stage equipped with an air bearing with an outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23063485A JPS6288528A (en) | 1985-10-15 | 1985-10-15 | X-y stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23063485A JPS6288528A (en) | 1985-10-15 | 1985-10-15 | X-y stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6288528A true JPS6288528A (en) | 1987-04-23 |
Family
ID=16910861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23063485A Pending JPS6288528A (en) | 1985-10-15 | 1985-10-15 | X-y stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6288528A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6285102B1 (en) | 1999-04-02 | 2001-09-04 | Tokyo Electron Limited | Drive mechanism having a gas bearing operable under a negative pressure environment |
| US6634845B1 (en) | 1999-06-18 | 2003-10-21 | Tokyo Electron Limited | Transfer module and cluster system for semiconductor manufacturing process |
| JP2003311567A (en) * | 2002-04-26 | 2003-11-05 | Yaskawa Electric Corp | X-y stage apparatus |
| EP2298493A1 (en) * | 2009-09-17 | 2011-03-23 | GAS - Automation GmbH | Handling device with linear motors for grippers, tools and/or workpieces |
| CN110313120A (en) * | 2017-01-31 | 2019-10-08 | C.C.M.贝希尔公司 | The positioning device of plane |
-
1985
- 1985-10-15 JP JP23063485A patent/JPS6288528A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6285102B1 (en) | 1999-04-02 | 2001-09-04 | Tokyo Electron Limited | Drive mechanism having a gas bearing operable under a negative pressure environment |
| KR100644001B1 (en) * | 1999-04-02 | 2006-11-13 | 동경 엘렉트론 주식회사 | Drive mechanism having a gas bearing operable under a negative pressure environment |
| US6634845B1 (en) | 1999-06-18 | 2003-10-21 | Tokyo Electron Limited | Transfer module and cluster system for semiconductor manufacturing process |
| JP2003311567A (en) * | 2002-04-26 | 2003-11-05 | Yaskawa Electric Corp | X-y stage apparatus |
| JP4501099B2 (en) * | 2002-04-26 | 2010-07-14 | 株式会社安川電機 | XY stage device |
| EP2298493A1 (en) * | 2009-09-17 | 2011-03-23 | GAS - Automation GmbH | Handling device with linear motors for grippers, tools and/or workpieces |
| CN110313120A (en) * | 2017-01-31 | 2019-10-08 | C.C.M.贝希尔公司 | The positioning device of plane |
| CN110313120B (en) * | 2017-01-31 | 2021-10-29 | C.C.M.贝希尔公司 | Planar positioning device |
| US11201533B2 (en) | 2017-01-31 | 2021-12-14 | C.C.M. Beheer B.V. | Planar positioning device |
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