JP2789543B2 - XY table - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY table for moving a mounted object in an XY manner, and is suitably used, for example, as an XY table for a die bonding apparatus or a wire bonding apparatus.

[0002]

2. Description of the Related Art For example, a conventional XY table used in a bonding apparatus has a structure in which a driving force of a rotary motor is transmitted to a moving plate via a feed screw and a nut screwed to the feed screw.

[0003]

Therefore, if the size of the moving plate is large enough to cover the rotary motor and the feed screw, providing the rotary motor and the feed screw below the moving plate will save space. Although there is no problem, in the case of a small moving plate such as a bonding device, the size of the entire XY table depends on the driving device. For example, in the illustrated example shown in Japanese Patent Publication No. 59-52540, a space for disposing a movable table and two rotary motors is required. SUMMARY OF THE INVENTION The present invention is to solve the above-mentioned conventional problems, and has a small XY space with a small driving device space.
It is intended to provide a table.

[0004]

SUMMARY OF THE INVENTION The present invention provides an X-direction drive linear motor in which a mover can move in the X direction, a Y-direction drive linear motor in which a mover can move in the Y direction,
An XY table having an X and a Y table driven in XY directions by a directional drive linear motor and a Y direction drive linear motor, wherein the movable element of the X direction drive linear motor is formed in a substantially flat block shape. And this is X
Tables are connected, the X-direction driving linear motor is provided below the X table, the Y table is provided on the X table, and the X table is provided at one end of the Y table.
A connecting bar that extends in the direction is fixed, and a roller mounting plate that holds the connecting bar between rollers that can rotate is connected to the mover of the linear motor for driving in the Y direction. An XY table, wherein the upper surface does not protrude from the upper surface of the Y table.

[0005]

When a linear motor is compared with a driving device comprising a rotary motor and a feed screw, the moving plate reciprocates on the feed screw in the former case and reciprocates integrally with the movable side (movable element) in the latter. The length of the feed screw and the length space required for the movement of the linear motor on the movable side need to be substantially the same. However, in the former, the rotary motor must be connected to the feed screw, so the length becomes longer by adding the rotary motor and the feed screw, but in the latter, the fixed side of the linear motor is provided along the movable side, so the linear motor Is approximately equal to the length of the feed screw alone.
The XY table of the present invention is a block-shaped drive device as a whole, that is, a movable element is provided below the X table using a substantially flat block-shaped linear motor and is connected to the movable element. The Y-direction drive device for driving the Y table also uses a linear motor, and the upper surfaces of the connecting bars and rollers fixed to the Y table are prevented from protruding from the upper surface of the Y table. In comparison with the example shown in Japanese Patent Publication No. 52540, the space for the motors 12 'and 12 is not required, and a compact XY table can be obtained.
Mounting of the device mounted on the upper surface of the Y table becomes easy.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. First, before describing the embodiment shown in FIGS. 1 and 2, the linear motor used in this embodiment will be described in advance with reference to FIGS.

The yoke of the linear motor 1 comprises a rectangular flat lower yoke 2 and an upper yoke 3 having a shorter side shorter than the shorter side of the lower yoke 2. The upper yoke 3 is a U-shaped cross-section yoke having side yokes on both short sides, and the lower yoke 2 and the upper yoke 3 are aligned so that their center lines parallel to the longer sides thereof overlap in the vertical direction. Are linked. Lower yoke 2
And a group of permanent magnets 4 is provided on the inner surface of the upper yoke 3. The permanent magnets 4 are arranged within the same yoke and between the upper and lower yokes with different poles on the center line 5 parallel to the short side. ing. For example, in FIGS. 3 and 4, the left side of the planting yoke 3 has an N pole on the inside and the right side has an S pole on the inside.

[0008] The coil 6 serving as a mover of the linear motor 1 is formed around a flat coil winding material 7.
This coil wrapping material 7 has a long side longer than the short side of the upper yoke 3 and a short side that always positions the coil part 61 shown in FIG. 4 on the left side of the center line 5 and the coil part 62 on the right side. A space in which the short side of the coil wrapping material 7 has a side length and protrudes into a region outside the long side of the upper yoke 3 as shown in FIGS. Has been inserted and deployed.

Now, for example, the coil 6 on the left side in FIG.
When a current is caused to flow in the opposite direction, a thrust for moving the coil 6 relatively to the yoke is generated, and when a current is caused to flow in the opposite direction, a thrust for moving the coil 6 right is generated. That is, the coil 6 and the yoke reciprocate relatively in a direction perpendicular to the center line 5.

Either the yoke or the coil 6 may be on the movable side, and the screw hole 3 for connection with a fixed member or a driven member may be provided.
Reference numerals 1 and 32 are provided at portions protruding from the lower yoke 2 and the upper yoke 3 of the coil wrapping material 7, respectively.

In the XY table shown in FIGS. 1 and 2, two linear motors 1 as described above are used as driving devices in the X and Y directions, respectively. For convenience, they are used as driving devices in the X direction. The linear motor using the linear motor as the X-direction linear motor 1 and the Y-direction driving device is referred to as the Y-direction linear motor 1 ′ (corresponding members are indicated by dashes in the drawing).

In FIGS. 1 and 2 (X table 10 is moved to the front and Y table 14 is shown to the left), the X-direction linear motor 1 moves the coil 6 to the movable side ( The yoke 8 is fixed to a base as a fixed side (stator). An X-direction guide portion 9 having guide rails on both sides is provided on the upper surface of the yoke 8.

An X table 10 has a pair of sliders 11, 11 on a guide rail of an X direction guide portion 9 at a lower portion.
X is applied to the yoke 8 via the cross roller and the X-direction guide 9.
It is supported movably in the direction. The connecting plate 1 is attached to the coil winding material 7 of the coil 6 of the X-direction linear motor 1.
The coils 6 are connected to each other via the coils 2 and 12 so as to reciprocate in the X direction integrally with the coil 6.

The X table 10 has guide rails 13 in the Y direction on its upper surface. The rectangular Y table 14 which is long in the Y direction has side surfaces on the long sides thereof as guide rails 13,
A pair of sliders 13 is supported above the X table 10 via a cross roller and guide rails 13 so as to be movable in the Y direction.

At one end of the short side of the main body of the Y table 14, a concave portion serving as a roller insertion hole 15 is provided long in the X direction, and a connecting bar 16 is provided at the end. On the Y table 14, a main unit of a bonding apparatus and the like are mounted and fixed.

Below the Y table 14 and adjacent to the X-direction linear motor 1, a Y-direction linear motor 1 'in which the same linear motor as the X-direction linear motor 1 is provided in a different direction is used. Instead, roller mounting plate 1
7 are provided. Rollers 18, 18 are provided on the upper surface of the roller mounting plate 17 at intervals in the Y direction, and the connecting bar 16 of the Y table 14 is inserted between the rollers 18, 18 to move the Y table 14 in the X direction. The movement in the Y direction is transmitted while permitting.

In the XY table of the bonding apparatus, an XY position detecting device or the like is provided in a main unit mounted on the Y table 14, but depending on the mounting device, the positions of the X table 10 and the Y table 14 may be changed as necessary. And linear encoders 33 and 34 for controlling the speed can be provided. For example, the linear encoder 33 of the X table 10 is fixedly provided on the base, and the linear encoder 34 of the Y table 14 is fixedly provided on the guide rail 13.

In the above example, the linear motors 1 and 1 'are provided below the X table 10 and the Y table 14, respectively.
This is an example in which the Y-direction linear motor 27 is provided below the table 10 but is provided in a region deviated from below the Y table 14. Hereinafter, differences from the above-described embodiment will be described.

The X table 10 has a slider on the side surface,
Guide rails 19, 19 erected on both sides are movably supported in the X direction. The X-direction linear motor 20 provided below the X table 10 has an iron core, and has a yoke 2 having an E-shaped cross section having permanent magnets 21 and 21 'at predetermined positions.
2, 22 'are fixed to the base with the ends of the iron cores facing each other. The coils 23, 23 'are provided at both ends of the cylindrical coil winding material 24 so as to correspond to the yokes 22, 22', respectively. The coil wrapping material 24 is the X table 10
To the X table 10
Is moved in the X direction.

The connecting bar 16 of the Y table 14 is provided at the end so as to protrude from the lower surface. The roller mounting plate 17 is supported by a guide block 26 so as to be movable in the Y direction. One end of the roller mounting plate 17 is connected to a coil winding material 28 which is a movable side of a Y direction linear motor 27. The yoke 29 of the Y-direction linear motor 27 is of the same type as the yoke 22 of the X-direction linear motor 20, but the coil wrapping member 28 is a U-shaped member having a coil 30 at the open end, and the other end. The part is connected to the roller mounting plate 17.

Although the coil is provided on the movable side as described above, the yoke may be provided on the movable side. Further, the present invention can be applied to an XY table other than the bonding apparatus.

[0022]

The XY table according to the present invention uses a linear motor having a substantially flat block shape as a drive device for the X table and is provided below the X table, and a Y table is provided above the X table. A linear motor is used as a driving device of the table, and a connecting bar is provided at one end of the Y table in the X direction. The connecting bar is rotatably held by a roller.
Insert the roller mounting plate so that it does not project
Since it is connected to the linear motor for driving the table, the space for the driving device can be minimized, and the mounting of the device mounted on the upper surface of the Y table becomes easy.
The XY table can be made compact in the plane direction.

[Brief description of the drawings]

FIG. 1 is a plan view of an embodiment of the present invention.

FIG. 2 is a front view of FIG. 1 (linear encoder 34 is omitted);

FIG. 3 is a plan view of a linear motor.

FIG. 4 is a longitudinal sectional view of FIG.

FIG. 5 is a side view of FIG. 3;

FIG. 6 is a plan view of another embodiment.

FIG. 7 is a sectional front view taken along the line II of FIG. 6;

8 is a sectional side view taken along line II-II in FIG.

FIG. 9 is a sectional side view taken along the line III-III in FIG. 6;

FIG. 10 is a sectional side view taken along the line IV-IV in FIG. 6;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Linear motor (X direction linear motor) 1 'Y direction linear motor 2 Lower yoke 3 Upper yoke 4 Permanent magnet 4' Permanent magnet 5 Center line 6 Coil 6 'Coil 7 Coil winding material 8 Yoke 8' Yoke 9 X direction guide Part 9 'X-direction guide part 10 X table 11 Slider 12 Connection plate 12' Connection plate 13 Guide rail 14 Y table 15 Roller insertion hole 16 Connection bar 17 Roller mounting plate 18 Roller 19 Guide rail 20 X-direction linear motor 21 Permanent magnet 21 'Permanent magnet 22 Yoke 22' Yoke 23 Coil 23 'Coil 24 Coil wrapping material 25 Connection plate 26 Guide block 27 Y-direction linear motor 28 Coil wrapping material 29 Yoke 30 Coil 31 Connection screw hole 32 Connection screw hole 33 Linear encoder 34 Lini Aenkoda

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) H01L 21/60 301 H01L 21/52

Claims (1)

(57) [Claims] 1. An X-direction drive linear motor in which a mover can move in an X direction, a Y-direction drive linear motor in which a mover can move in a Y direction, the X-direction drive linear motor, and a Y-direction drive. XY table provided with an X and Y table driven in the XY directions by a linear motor for driving, wherein the mover of the linear motor for driving in the X direction is formed in a substantially flat block shape, and the X table is connected thereto. Providing the X-direction driving linear motor below the X-table, providing the Y-table on the X-table, and fixing a connecting bar extending in the X-direction on one end side of the Y-table; A roller mounting plate that holds the connection bar between rollers that can roll freely is connected to the mover of the Y-direction driving linear motor, and the upper surfaces of the connection bar and the roller are connected to the Y table. XY not protruding from the upper surface of
table.