JPS5371569A - X - y moving table - Google Patents

X - y moving table

Info

Publication number
JPS5371569A
JPS5371569A JP14651376A JP14651376A JPS5371569A JP S5371569 A JPS5371569 A JP S5371569A JP 14651376 A JP14651376 A JP 14651376A JP 14651376 A JP14651376 A JP 14651376A JP S5371569 A JPS5371569 A JP S5371569A
Authority
JP
Japan
Prior art keywords
moving table
driving
constituted
high speed
screw shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14651376A
Other languages
Japanese (ja)
Inventor
Shunichiro Fujioka
Shunei Uematsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14651376A priority Critical patent/JPS5371569A/en
Publication of JPS5371569A publication Critical patent/JPS5371569A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the XY moving table, which is able of driving at a high speed, can employ light materials, and can be constituted by a small number of parts, by providing the motor driving the table mounted on the upper stage and a rotary screw shaft to the lower stage with their faces down.
COPYRIGHT: (C)1978,JPO&Japio
JP14651376A 1976-12-08 1976-12-08 X - y moving table Pending JPS5371569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14651376A JPS5371569A (en) 1976-12-08 1976-12-08 X - y moving table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14651376A JPS5371569A (en) 1976-12-08 1976-12-08 X - y moving table

Publications (1)

Publication Number Publication Date
JPS5371569A true JPS5371569A (en) 1978-06-26

Family

ID=15409328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14651376A Pending JPS5371569A (en) 1976-12-08 1976-12-08 X - y moving table

Country Status (1)

Country Link
JP (1) JPS5371569A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58112107A (en) * 1981-12-25 1983-07-04 Tokyo Sokuhan Kk Table moving in direction of orthogonal coordinates
JPS5961924A (en) * 1982-10-01 1984-04-09 Hitachi Ltd Sample transfer apparatus
JPH0211330U (en) * 1988-07-05 1990-01-24
JPH05299464A (en) * 1992-07-30 1993-11-12 Kaijo Corp X-y table

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58112107A (en) * 1981-12-25 1983-07-04 Tokyo Sokuhan Kk Table moving in direction of orthogonal coordinates
JPS5961924A (en) * 1982-10-01 1984-04-09 Hitachi Ltd Sample transfer apparatus
JPH0211330U (en) * 1988-07-05 1990-01-24
JPH05299464A (en) * 1992-07-30 1993-11-12 Kaijo Corp X-y table

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