JPS5371569A - X - y moving table - Google Patents
X - y moving tableInfo
- Publication number
- JPS5371569A JPS5371569A JP14651376A JP14651376A JPS5371569A JP S5371569 A JPS5371569 A JP S5371569A JP 14651376 A JP14651376 A JP 14651376A JP 14651376 A JP14651376 A JP 14651376A JP S5371569 A JPS5371569 A JP S5371569A
- Authority
- JP
- Japan
- Prior art keywords
- moving table
- driving
- constituted
- high speed
- screw shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain the XY moving table, which is able of driving at a high speed, can employ light materials, and can be constituted by a small number of parts, by providing the motor driving the table mounted on the upper stage and a rotary screw shaft to the lower stage with their faces down.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14651376A JPS5371569A (en) | 1976-12-08 | 1976-12-08 | X - y moving table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14651376A JPS5371569A (en) | 1976-12-08 | 1976-12-08 | X - y moving table |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5371569A true JPS5371569A (en) | 1978-06-26 |
Family
ID=15409328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14651376A Pending JPS5371569A (en) | 1976-12-08 | 1976-12-08 | X - y moving table |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5371569A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58112107A (en) * | 1981-12-25 | 1983-07-04 | Tokyo Sokuhan Kk | Table moving in direction of orthogonal coordinates |
JPS5961924A (en) * | 1982-10-01 | 1984-04-09 | Hitachi Ltd | Sample transfer apparatus |
JPH0211330U (en) * | 1988-07-05 | 1990-01-24 | ||
JPH05299464A (en) * | 1992-07-30 | 1993-11-12 | Kaijo Corp | X-y table |
-
1976
- 1976-12-08 JP JP14651376A patent/JPS5371569A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58112107A (en) * | 1981-12-25 | 1983-07-04 | Tokyo Sokuhan Kk | Table moving in direction of orthogonal coordinates |
JPS5961924A (en) * | 1982-10-01 | 1984-04-09 | Hitachi Ltd | Sample transfer apparatus |
JPH0211330U (en) * | 1988-07-05 | 1990-01-24 | ||
JPH05299464A (en) * | 1992-07-30 | 1993-11-12 | Kaijo Corp | X-y table |
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