WO2019186753A1

WO2019186753A1 - Working machine

Info

Publication number: WO2019186753A1
Application number: PCT/JP2018/012711
Authority: WO
Inventors: 山田　修平
Original assignee: 株式会社Ｆｕｊｉ
Priority date: 2018-03-28
Filing date: 2018-03-28
Publication date: 2019-10-03
Also published as: JPWO2019186753A1; JP7127114B2

Abstract

This working machine comprises a box-shaped frame and a center frame spanning the center portion of the box-shaped frame in the X-direction across the Y-direction. A first XY robot comprises: a pair of first guide rails, one of the rails being fixed to one end portion of the box-shaped frame in the X-direction, and the other rail being fixed to the center frame; and a first slider suspended from the first guide rails. A second XY robot comprises: a pair of second guide rails, one of the rails being fixed to the other end portion of the box-shaped frame in the X-direction, and the other rail being fixed to the center frame so as to be aligned with the other rail from the first guide rails in parallel in the X-direction; and a second slider suspended from the second guide rails. Along the Y-direction, the center frame is split at the area in between the two other rails fixed thereto over at least half of the frame length in the Y-direction, including the center portion.

Description

Working machine

This specification discloses work implements.

Conventionally, there has been proposed a component mounting machine in which two Y-axis robots are installed on a frame, and an X-axis robot and a mounting head are attached to these Y-axis robots (see, for example, Patent Document 1). The gantry includes a first frame member installed on the operation side (front end) with respect to the base, a second frame member installed on the non-operation side (rear end) facing the operation side, and the substrate transport direction of the base ( A third frame member installed on both sides in the X direction). The gantry includes a sixth connecting member that extends in an orthogonal direction (Y direction) orthogonal to the substrate transport direction and connects the first frame member and the second frame member. The first frame member, the second frame member, the third frame member, and the sixth connecting member are integrally formed, and are fixed to the base to constitute a housing of the component mounting machine. The first frame member is configured as a gate-type frame member that is erected on the base, and includes a first support member that is erected on both ends of the operation side of the base, and upper ends of the first support members. A first connecting member to be connected; and a separating member that is erected on the base and connected to a central portion of the first connecting member. The second frame member is configured as a square frame member that is erected on the base, a second column member that is erected at both ends on the non-operation side of the base, and an upper end portion of each second column member And a second connecting member for connecting the two. The sixth connecting member extends in the orthogonal direction and connects the separating member of the first frame member and the second connecting member of the second frame member. An orthogonal direction perpendicular to the substrate transport direction with a predetermined gap between the first connection member of the first frame member and the second connection member of the second frame member with the sixth connection member as the center in the substrate transport direction. Two Y-axis robots arranged in parallel with each other are installed. Each of the two Y-axis robots has a beam-shaped main body having a substantially gate-like cross-sectional shape, guide rails disposed on both sides of the lower end of the beam-shaped main body, and moves to the guide rail via a linear guide member. And a movable part (slider) supported freely.

Japanese Patent Laid-Open No. 2005-64222

In the work machine described above, the two beam-shaped Y-axis robots are arranged in parallel in the X direction so that the vibration caused by the movement of one Y-axis robot is transmitted to the other Y-axis robot. Can be suppressed. However, the two Y-axis robots can stably support the movable part (slider) in the X direction because each pair of guide rails is disposed on both sides of the lower end of the narrow beam-shaped main body. Difficult and prone to vibrations due to own movement.

The present disclosure suppresses vibration caused by movement of each of the first and second XY robots, and transmits vibration caused by movement of one of the first and second XY robots in the Y direction to the other XY robot. The main purpose is to suppress the occurrence of the damage.

This disclosure has taken the following measures to achieve the main purpose described above.

The work machine of the present disclosure is a work machine in which a first XY robot that moves a first head in the XY direction and a second XY robot that moves the second head in the XY direction are provided side by side in the X direction on the same frame. A box frame forming a part of the gantry and a center frame fixed so as to be bridged in the Y direction at a center portion in the X direction of the box frame. A pair of first guides are fixed to one end of the box frame in the X direction so as to extend in the Y direction and the other rail is fixed to the central frame so as to extend in the Y direction. Rails and a first slider suspended on the pair of first guide rails and movable in the Y direction, wherein the second XY robot has one rail in the X direction of the box frame. And a pair of rails fixed to the other end of the pair of first guide rails so as to be parallel to the other rail of the pair of first guide rails. A second guide rail, and a second slider suspended in the pair of second guide rails and movable in the Y direction, wherein the central frame is the other of the two other fixed to the central frame. The gist is that the rails are divided along the Y direction over a length of ½ or more including the central portion of the frame length in the Y direction.

In this working machine of the present disclosure, the first XY robot that moves the first head in the XY direction and the second XY robot that moves the second head in the XY direction are provided side by side in the X direction on the same frame. In addition, the work machine includes a box-shaped frame that forms a part of the gantry and a central frame that is fixed so as to be bridged in the Y direction at a central portion in the X direction of the box-shaped frame. One rail of the pair of first guide rails of the first XY robot and one rail of the pair of second guide rails of the second XY robot are respectively fixed to end portions in the X direction of the box-shaped frame. . The other rail of the pair of first guide rails of the first XY robot and the other rail of the pair of second guide rails of the second XY robot are fixed to the central frame. For this reason, the rails of the pair of first guide rails are arranged sufficiently apart from each other in the X direction, and the rails of the pair of second guide rails are arranged sufficiently apart from each other in the X direction. Therefore, vibration of the first XY robot including the first slider suspended from the pair of first guide rails is suppressed, and vibration of the second XY robot including the second slider suspended from the pair of second guide rails is suppressed. Vibration due to the movement of itself can be suppressed. Further, the central frame is divided along the Y direction over a length of ½ or more including the central portion of the frame length in the Y direction between the two other rails fixed to the central frame. For this reason, it is possible to satisfactorily suppress the vibration generated by the movement of one XY robot in the Y direction among the first and second XY robots from being transmitted to the other XY robot.

It is an appearance perspective view of working machine 10 of this embodiment. 3 is a top view of the work machine 10. FIG. 2 is a side view of the work machine 10. FIG. FIG. 4 is a cross-sectional view showing an AA cross section of the working machine 10 in FIG. 3. FIG. 3 is an external view of the central beam 16. It is an external view of the center beam 160 of a modification.

Next, modes for carrying out the present disclosure will be described with reference to the drawings.

FIG. 1 is an external perspective view of a working machine 10 according to the present embodiment. FIG. 2 is a top view of the work machine 10. FIG. 3 is a side view of the work machine 10. 4 is a cross-sectional view showing an AA cross section of the work machine 10 of FIG. FIG. 5 is an external view of the central beam 16. 1 to 5, the X direction is the transport direction of the substrate S as the work target, the Z direction is the vertical direction, and the Y direction is a direction orthogonal to the X direction and the Z direction.

In this embodiment, the working machine 10 is a component mounting machine that is mounted with a component supply device (not shown) on the front, picks up an electronic component supplied from the component supply device, and mounts it on the substrate S. The work machine 10 includes first and second XY robots 21 and 22 (see FIGS. 1, 2, and 4) arranged in the X direction, and first and second heads 23 and 24 (to be moved by the corresponding XY robots). 4).

Further, as shown in FIG. 1, the work machine 10 includes a base 11, a main body frame 12, and an upper frame 15. Each of the main body frame 12 and the upper frame 15 has a box-shaped outer shape that is open at the top and bottom and has substantially the same size in the XY directions as the base 11. As shown in FIGS. 1 and 2, the main body frame 12 and the upper frame 15 are stacked on the base 11 in order of the main body frame 12 and the upper frame 15 so as to form a pedestal so that the wall surfaces are continuous.

As shown in FIG. 1, the main body frame 12 includes a lower frame 13 erected on the base 11 and a middle frame 14 stacked on the lower frame 13. The lower frame 13 is erected on the rear wall portion (not shown) erected on the rear end portion of the base 11, the right end portion and the left wall portion of the base 11, and is parallel to the Y direction. A right side wall part 133 and a left side wall part 134 which extend and are connected to both side edges in the X direction of the rear wall part. The middle frame 14 is connected to each other so as to be continuous with the portal-shaped front wall portion 141, the rear wall portion 142 connected to the rear wall portion of the lower frame 13, and the right wall portion 133 and the left wall portion 134 of the lower frame 13. A right side wall 143 and a left side wall 144 that extend in the direction and connect both ends in the X direction of the front wall 141 and both ends in the X direction of the rear wall 133. In the present embodiment, the main body frame 12 is divided into the lower frame 13 and the middle frame 14, but may be configured as an integral frame.

The upper frame 15 supports the first XY robot 21 and the second XY robot 22 and is installed so as to be stacked on the main body frame 12. The upper frame 15 includes a front wall portion 151, a rear wall portion 152, a right wall portion 153, and a left wall portion 154 that are connected to the front wall portion 141, the rear wall portion 142, the right wall portion 143, and the left wall portion 144 of the middle frame 14. Have. As shown in FIG. 2, a central beam 16 extending in the Y direction is bridged between the front wall portion 151 and the rear wall portion 152 of the upper frame 15. In the present embodiment, the central beam 16 is a long and plate-like member, and the center of the front wall 151 in the X direction and the center of the rear wall 152 in the X direction with the plate surface being perpendicular to the Z direction. It is stretched over to the department. Further, as shown in FIG. 5, the central beam 16 is formed with slits 16s extending in the Y direction leaving both ends in the Y direction at the center in the X direction. Further, a pair of support members 17 extending in the Y direction are bridged between the front wall portion 151 and the rear wall portion 152 of the upper frame 15 so as to support the central beam 16 as shown in FIGS. Has been. The pair of support members 17 are long and plate-like members, and are provided on both the left and right sides with the slit 16s of the central beam 16 interposed therebetween. The pair of support members 17 are fixed vertically to the upper surface of the central beam 16, and end portions in the Y direction are fixed to the inner surface of the front wall portion 151 and the inner surface of the rear wall portion 152 of the upper frame 15. .

The first XY robot 21 includes a first X-axis robot 21X and a first Y-axis robot 21Y.

As shown in FIG. 4, the first Y-axis robot 21Y has a pair of first Y-axis guide rails (first left rail 211, first right rail 212) extending in parallel to the Y direction with a predetermined interval in the X direction. ), A suspended first Y-axis slider 213 suspended on a pair of first Y-axis guide rails so as to be movable in the Y direction, and a first Y-axis actuator 214 that drives the first Y-axis slider 213. The first left rail 211 is fixed to the lower portion of the left wall portion 154 of the upper frame 15 with a fastening member such as a screw. The first right rail 212 is fixed to the lower part of the central beam 16 and on the left side of the slit 16s by a fastening member such as a screw. The 1st right rail 212 is being fixed so that it may be located in the surface on the back side of the part to which the left support member 17 of the center beam 16 was fixed. In this embodiment, the first Y-axis actuator 214 is a linear motor, and includes a shaft 214a in which a plurality of permanent magnets are arranged in the axial direction, and a mover 214b including a coil arranged so as to go around the shaft 214a. Have The plurality of permanent magnets are arranged such that the directions of the magnetic poles of two adjacent permanent magnets are opposite to each other. The linear motor generates a thrust force on the mover 214b by the action of the magnetic force generated from the permanent magnet and the current flowing in the coil. The first Y-axis slider 213 is fixed to the mover 214b. Thus, the first Y-axis actuator 214 (linear motor) can move the first Y-axis slider 213 to a desired position in the Y direction by controlling the current flowing through the coil. Note that the first Y-axis actuator 214 may be configured by a ball screw mechanism.

The first X-axis robot 21X includes a first X-axis guide rail 215 fixed to the first Y-axis slider 213 so as to extend in the X direction, and a first X-axis supported by the first X-axis guide rail 215 so as to be movable in the X direction. It has an axis slider 216 and a first X-axis actuator 217 that drives the first X-axis slider 216. The first X-axis actuator 217 may be configured by a linear motor similar to the first Y-axis actuator 214, or may be configured by a ball screw mechanism. A first head 23 is fixed to the first X-axis slider 216. Thus, the first head 23 can be moved in the XY directions by the first XY robot 21.

The second XY robot 22 includes a second X-axis robot 22X and a second Y-axis robot 22Y.

As shown in FIG. 4, the second Y-axis robot 22Y has a pair of second Y-axis guide rails (second left rail 221 and second right rail 222) extending in parallel to the Y direction with a predetermined interval in the X direction. ), A suspended second Y-axis slider 223 suspended from a pair of second Y-axis guide rails so as to be movable in the Y direction, and a second Y-axis actuator 224 that drives the second Y-axis slider 223. The second left rail 221 is fixed by a fastening member such as a screw below the center beam 16 and on the right side of the slit 16s. The second left rail 221 is fixed so as to be positioned on the back surface of the portion to which the right support member 17 of the central beam 16 is fixed. The second right rail 222 is fixed to the lower portion of the right side wall 153 of the upper frame 15 with a fastening member such as a screw. In the present embodiment, the second Y-axis actuator 224 is a linear motor having a shaft 224a and a mover 224b similar to the first Y-axis actuator 214. The second Y-axis slider 223 is fixed to the mover 224b. Accordingly, the second Y-axis actuator 224 (linear motor) moves the second Y-axis slider 223 to a desired position in the Y direction independently of the first Y-axis slider 213 by controlling the current flowing through the coil. Can do. Note that the second Y-axis actuator 224 may be configured by a ball screw mechanism.

The second X axis robot 22X includes a second X axis guide rail 225 fixed to the second Y axis slider 223 so as to extend in the X direction, and a second X axis supported by the second X axis guide rail 225 so as to be movable in the X direction. An axis slider 226, and a second X-axis actuator 227 for driving the second X-axis slider 226. The second X-axis actuator 227 may be configured with a linear motor similar to the second Y-axis actuator 224, or may be configured with a ball screw mechanism. The second head 24 is fixed to the second X-axis slider 226. Accordingly, the second head 24 can be moved in the XY directions by the second XY robot 22.

The left rail 211 of the first Y-axis robot 21Y is fixed to the left wall portion 154 of the upper frame 15. Further, the right rail 212 of the first Y-axis robot 21Y is fixed to the central beam 16 spanned in the Y direction at the center in the X direction of the upper frame 15. Thus, the first left rail 211 and the first right rail 212 (first Y-axis guide rail) are arranged with an interval of about ½ of the width of the upper frame 15 in the X direction. The upper frame 15 is formed in a box shape, and the central beam 16 is bridged between the center portion in the X direction of the front wall portion 151 and the center portion in the X direction of the rear wall portion 152, and has high rigidity. ing. Accordingly, the first left rail 211 and the first right rail 212 (first Y-axis guide rail) stably support the Y-axis slider 213 and vibrate with the movement of the first X-axis robot 21X and the first Y-axis robot 21Y. It can suppress well.

The left rail 221 of the second Y-axis robot 22Y is fixed to a central beam 16 that spans the central portion of the upper frame 15 in the X direction in the Y direction. The right rail 222 of the second Y-axis robot 22Y is fixed to the right wall 153 of the upper frame 15. As a result, the second left rail 221 and the second right rail 222 (second Y-axis guide rail) are arranged at an interval of about ½ of the width of the upper frame 15 in the X direction. Therefore, the second left rail 221 and the second right rail 222 (second Y-axis guide rail) stably support the Y-axis slider 223 and vibrate due to the movement of the second X-axis robot 22X and the second Y-axis robot 22Y. It can suppress well.

Further, the right rail 212 of the first Y-axis robot 21Y and the left rail 221 of the second Y-axis robot 22Y fixed to the central beam 16 are arranged on the left and right sides with the slit 16s interposed therebetween. For this reason, even if vibration is generated on the left side of the central beam 16 due to the movement of the first Y-axis robot 21Y, most of the vibration is absorbed by the slit 16s and transmitted to the right side of the central beam 16, that is, the second Y-axis robot 22Y side. Not to be. Further, even if vibration is generated on the right side of the central beam 16 due to the movement of the second Y-axis robot 22Y, most of the vibration is absorbed by the slit 16s and is not transmitted to the left side of the central beam 16, that is, the first Y-axis robot 21Y side. It is like that.

In the work machine 10 of the present embodiment described above, the first XY robot 21 that moves the first head 23 in the XY direction and the second XY robot 22 that moves the second head 24 in the XY direction are arranged on the same frame in the X direction. It is provided side by side. In addition, the work machine 10 includes an upper frame 15 that forms a part of the gantry, and a central beam 16 that is fixed so as to be bridged in the Y direction at the center of the upper frame 15 in the X direction. The left rail 211 of the pair of first Y-axis guide rails of the first XY robot 21 and the right rail 222 of the pair of second Y-axis guide rails of the second XY robot 22 are the left side wall 154 and the right side wall of the upper frame 15. 153. The right rail 212 of the pair of first Y-axis guide rails of the first XY robot 21 and the left rail 221 of the pair of second Y-axis guide rails of the second XY robot 22 are fixed to the central beam 16. For this reason, the

rails

211 and 212 of the pair of first Y-axis guide rails are arranged sufficiently spaced apart from each other in the X direction, and the first XY including the first Y-axis slider 213 suspended from the pair of first Y-axis guide rails. Vibration caused by the movement of the robot 21 can be suppressed. In addition, each of the

rails

221 and 222 of the pair of second Y-axis guide rails is sufficiently spaced apart from each other in the X direction, and includes a second Y-axis slider 223 suspended from the pair of second Y-axis guide rails. The vibration by 22's own movement can be suppressed. The central beam 16 is divided along the Y direction by a slit 16s between the right rail 212 of the first Y-axis guide rail and the left rail 221 of the second Y-axis guide rail fixed thereto. For this reason, it can suppress that the vibration which arises by the movement to the Y direction of one XY robot among the 1st and

2nd XY robots

21 and 22 is transmitted to the other XY robot.

Further, the slit 16s of the central beam 16 is formed so as to extend in the Y direction leaving both ends in the Y direction. As a result, vibrations caused by movement of one XY robot in the Y direction among the first and

second XY robots

21 and 22 can be satisfactorily suppressed and the central beam 16 can be used as a single unit. The number of parts can be reduced.

It should be noted that the present disclosure is not limited to the above-described embodiment, and it goes without saying that the present disclosure can be implemented in various modes as long as it belongs to the technical scope of the present disclosure.

For example, in the above-described embodiment, the slit 16s of the central beam 16 is formed so as to extend in the Y direction leaving both ends in the Y direction. However, the slit of the central beam 16 should just be divided | segmented over 1/2 or more including the center part of the length in the Y direction of the central beam 16. FIG. Even in this case, although the effect of the slit of the central beam 16 is slightly reduced, the vibration caused by the operation of one of the first and

second XY robots

21 and 22 is caused by the other through the left rail 221 and the right rail 212. Can be absorbed without being transmitted to the XY robot.

In the embodiment described above, the central beam 16 is composed of a single member, but may be composed of two members. FIG. 6 is an external view of a modified central beam 160. The center beam 160 of the modification includes a first frame member 161, a second frame member 162, and a connecting member 163, as shown in the figure. The first frame member 161 is formed in substantially the same shape as the left half of the central beam 60. The second frame member 162 is formed in substantially the same shape as the right half of the central beam 60. The connecting member 163 is attached to both ends of the first and

second frame members

161, 162 in the Y direction, and the first and

second frame members

161, 162 are spaced apart in the X direction by a gap equivalent to the slit 16s. To be connected. In the central beam 160 of this modified example, the vibration generated by the operation of one of the first and

second XY robots

21 and 22 is caused to pass through the left rail 221 and the right rail 212 in the same manner as the central beam 16 of the embodiment. So that it is not transmitted to the other XY robot.

In the above-described embodiment, the upper frame 15 is formed in a box shape having an upper opening, but the upper frame 15 may be covered with a plate, a cover, or the like.

In the above-described embodiment, the work machine 10 is configured as a component mounter. However, the working machine may be any working machine as long as it has two heads arranged in the X direction and independently movable in the XY direction. The working machine may be, for example, an applicator that applies an adhesive, or an inspection machine that inspects components mounted on a substrate.

Here, the correspondence between the main elements of the embodiment and the main elements of the present disclosure described in the claims will be described. That is, the first head 23 of the present embodiment corresponds to the first head of the present disclosure. The first XY robot 21 corresponds to the first XY robot. The second head 24 corresponds to the second head. The second XY robot 22 corresponds to the second XY robot. The upper frame 15 corresponds to a box frame. The central beam 16 corresponds to the central frame. The first left rail 211 corresponds to one rail of the first guide rail, and the first right rail 212 corresponds to the other rail of the first guide rail. The first Y-axis slider 213 corresponds to the first slider. The second right rail 222 corresponds to one rail of the second guide rail, and the second left rail 221 corresponds to the other rail of the second guide rail. The second Y-axis slider 223 corresponds to the second slider. The slit 16s of the central beam 16 corresponds to the slit of the central frame. The first frame member 161 and the second frame member 162 correspond to two frame members. The connecting member 163 corresponds to the connecting member. The main body frame 12 (the lower frame 13 and the middle frame 14) corresponds to the main body frame.

The present disclosure can be used in the work machine manufacturing industry.

10 working machines, 11 base, 12 body frame, 13 lower frame, 14 middle frame, 15 upper frame, 16, 160 central beam, 16s slit, 21 1st XY robot, 21X 1st X axis robot, 21Y 1st Y axis robot, 22 2nd XY robot, 22X 2nd X axis robot, 22Y 2nd Y axis robot, 23 1st head, 24 2nd head, 132, 142, 152 Rear wall part, 133, 143, 153 Right side wall part, 134, 144, 154 Left side wall, 141, 151 Front wall, 161 First frame member, 162 Second frame member, 163 Connecting member, 211, 221 Left rail, 212, 222 Right rail, 213, First Y-axis slider, 214 First Y-axis actuator 215 1st X-axis guidelay , 216 the 1X axis slider 217 a 1X axis actuator, 223 the 2Y axis slider 224 the 2Y axis actuator, 225 the 2X axis guide rail, 226 a 2X axis slider 227 a 2X axis actuator.

Claims

The first XY robot that moves the first head in the XY direction and the second XY robot that moves the second head in the XY direction are working machines provided side by side in the X direction on the same frame,
A box-shaped frame forming a part of the frame;
A central frame fixed so as to be bridged in the Y direction at a central portion in the X direction of the box-shaped frame;
With
The first XY robot is
A pair of first rails is fixed so that one rail extends in the Y direction at one end in the X direction of the box-shaped frame and the other rail is fixed so as to extend in the Y direction on the central frame. A guide rail,
A first slider suspended in the pair of first guide rails and movable in the Y direction;
Have
The second XY robot is
One rail is fixed to the other end portion in the X direction of the box-shaped frame so as to extend in the Y direction, and the other rail is fixed to the central frame with the other rail of the pair of first guide rails in the X direction. A pair of second guide rails fixed in parallel to each other,
A second slider suspended in the pair of second guide rails and movable in the Y direction;
Have
The central frame is divided along the Y direction between the two other rails fixed to the central frame over a length of ½ or more including the central portion of the frame length in the Y direction. Yes,
Work machine.
The work machine according to claim 1,
The central frame has slits extending in the Y direction leaving both ends in the Y direction.
Work machine.
The work machine according to claim 1,
The central frame has two frame members to which the other rail is fixed,
The two frame members are connected by connecting members at both ends in the Y direction with a predetermined gap in the X direction.
Work machine.
The working machine according to any one of claims 1 to 3,
The mount has a box-shaped main body frame that is open at the top,
The box-shaped frame is substantially the same in size in the XY direction as the main body frame, and is installed at the upper end of the main body frame so that the wall surface is continuous with the main body frame.
Work machine.