JPH0141466B2 - - Google Patents

Description

[Detailed description of the invention] This invention relates to an XY table.

Conventionally, this type of table has a lower table that moves linearly in one direction along a guide provided on the base, and a lower table that is placed on this lower table and moves in a direction perpendicular to the lower table and moves in parallel with the movement of the lower table. It consists of an upper table that moves in a plane in two dimensions. There are two ways to drive the upper table and lower table.

(a) The drive motor for the lower table is installed on the base, and the drive motor for the upper table is placed on the lower table.

(b) Both the drive motors for the upper and lower tables are installed on the base. In this case, the upper table is moved in a direction perpendicular to the lower table through a shaft connected to an upper table drive motor via a ball spline, a worm gear, etc.

In the case of method (a), the lower table bears the burden of the driving body for the upper table as well as the upper table.
The load burden becomes large, making it difficult to move with high precision. In addition, while the method (b) has a complicated mechanism with many components such as ball splines and gears, it also suffers from poor high-speed response and accuracy problems. moreover,
In the case of screw rotation, since a rotational moment acts, a correction device for suppressing this rotational moment is essential, making the structure complicated.

This invention was made in view of the above circumstances,
A guide shaft is provided at one end of the upper table and across the width of the upper table, the guide shaft being in the same direction as the moving direction of the lower table on which this table is placed.
The linear drive shaft for the upper table is separably slidably engaged with the guide shaft, thereby simplifying the structure and improving accuracy.

EMBODIMENT OF THE INVENTION Hereinafter, this invention will be explained based on drawing which shows an Example.

In the drawings, a base 1 is provided, and a fixing base 3 is installed on an upper surface 2 that is a reference surface of the base 1. A lower table 4 is attached to both ends of this fixed base 3.
A pair of Y-axis guide portions 5 are provided, each parallel to the upper surface 2 and extending in the Y direction in the figure, for movement. This Y-axis guide part 5 includes a pair of fixed guide bodies 6 fixed to the fixed base 3 at a predetermined interval.
and a pair of moving guide bodies 7 that slide on this via rollers (not shown). The lower table 4 is fixed on the movable guide 7. An engagement plate 8 is attached to one side surface of the lower table 4 that intersects with the Y-axis direction. Top surface 2 of base 1
A first linear motor 9, which is a first drive body for the Y-axis, is installed at , and a moving core 10, which is a first linear drive shaft, is connected to the center of the engagement plate 8.

On the other hand, a pair of X-axis guide portions 11 are placed on the lower table 4 and have the same configuration as the Y-axis guide body 5 described above and extend in the X direction in the figure, which is an orthogonal direction. It is made to be able to freely reciprocate along these X-axis guide portions 11 in this state. One end of the upper table 12 on the X-axis side is formed into an overhang 13, and a guide shaft 14 extending in the Y direction is attached to the lower surface of the overhang 13.

On the side of the overhang 13, a second linear motor 15, which is a second drive body for the installed. A sliding member 18 is fixed onto the support base 17 and is slidably engaged with the guide shaft 14 via rollers (not shown) in a separable manner. Incidentally, this sliding member may be constituted by a part of the moving core 16.

With the above configuration, movement in the Y direction, for example, is performed as follows. That is, when the moving core 10 is moved by the operation of the first linear motor 9, the lower table 4 moves in the Y direction in synchronization with the movement of the moving core 10, and the upper table 12 placed on the lower table 4 moves. also moves in synchronization with the above movement. This upper table 12
During the movement in the Y direction, the guide shaft 14 provided on the lower surface of the overhang 13 moves along the sliding body 18, so that the second linear motor 15 is not affected at all. Further, in the movement in the X direction, the movement of the moving core 16 due to the operation of the second linear motor 15 is applied only to the upper table 12 via the moving body 14 and the sliding body 18, regardless of the movement of the lower table 4. will be carried out.

As described in detail above, the present invention provides an upper table which is scanned in two dimensions by the movement of the lower table, parallel to the movement direction of the lower table which is responsible for one of the two-dimensional directions of the table. A guide shaft is provided at one end of the upper table within the width of this table, and a guide shaft is provided on this guide shaft.
For example, by slidingly engaging a non-rotating, linear drive shaft such as a linear motor in a separable manner, the following effects can be obtained.

(a) The guide shaft can be assembled in advance into the upper table with high precision. Therefore, by simply slidingly engaging the second drive shaft with this highly precisely assembled guide shaft,
The second linear motor could be installed on the base without sacrificing the above-mentioned high precision.

(b) In addition, since what is in sliding contact with the guide shaft is a linear drive shaft that does not rotate and moves straight, such as the drive shaft of a linear motor, no rotational moment is applied during driving, so the threaded shaft A correction device for suppressing the rotational moment, which is essential for driving, is no longer necessary, and the configuration can be significantly simplified.

(C) Furthermore, since the guide shaft and the drive shaft are simply in sliding contact, it is necessary to install the guide shaft parallel to the moving direction of the lower table, but as long as the sliding contact part does not come off, especially in the horizontal direction. There is no need to take this into consideration, and in this case, high-precision movement is not affected in any way.

In addition, if the guide movement parts of the upper and lower tables have a static pressure guide structure instead of roller sliding, the movement accuracy can be further improved.

[Brief explanation of drawings]

1 to 3 are a plan view and a side view showing one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Base, 4... Lower table, 5... Y-axis guide part, 10... Moving core (first linear drive shaft), 11... X-axis guide part, 12... Upper table, 14... ... Guide shaft, 15 ... Second linear motor (second drive body), 16 ... Moving core (second linear drive shaft), 18 ... Sliding body.

Claims (1)

[Claims] 1 a base, a lower table provided on the base and movable in one of the two-dimensional plane directions, a first driver provided on one of the bases for moving the lower table, and the lower table; An XY comprising an upper table mounted on the table and movable in the other two-dimensional direction in the plane, and a second driving body disposed on the other side of the base and moving the upper table.
In the table, the first drive body has a first linear drive shaft that drives in a straight line without rotating, and the second drive body has a second linear drive shaft that drives in a straight line without rotating, and a width of the upper table. The guide shaft has a guide shaft attached to one end side of the upper table parallel to the moving direction of the lower table, and the guide shaft and the second linear drive shaft are in sliding contact with each other so as to be freely separable. An XY table that is characterized by the fact that