JPS5761436A - X-y table - Google Patents

X-y table

Info

Publication number
JPS5761436A
JPS5761436A JP13520280A JP13520280A JPS5761436A JP S5761436 A JPS5761436 A JP S5761436A JP 13520280 A JP13520280 A JP 13520280A JP 13520280 A JP13520280 A JP 13520280A JP S5761436 A JPS5761436 A JP S5761436A
Authority
JP
Japan
Prior art keywords
axis
driven
guide part
mount
upper table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13520280A
Other languages
Japanese (ja)
Other versions
JPH0141466B2 (en
Inventor
Kiyoshi Kamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13520280A priority Critical patent/JPS5761436A/en
Publication of JPS5761436A publication Critical patent/JPS5761436A/en
Publication of JPH0141466B2 publication Critical patent/JPH0141466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)

Abstract

PURPOSE:To simplify a mechanism and improve accuracy, by forming the coupling part of an upper table of an X-Y table and driving unit to a slide guide part parallelly movable to the moving direction of a lower table. CONSTITUTION:A fixed mount 3 is provided on the upper side of a base mount 1, and a lower table 4 is slidably mounted to a Y-axis guide part 5 on said fixed mount 3, further an upper table 12 is slidably placed to an X-axis guide part on said lower table 4. The lower table 4 is driven to the direction of Y-axis by a linear motor 9 provided on the base board 1. To the lower side of an overhung part 13 in the upper table 12, a Y-axis direction guide unit 14 is provided and engaged to a slide contacting unit 18 on a supporting mount 17 driven by a linear motor 15 to the direction of X-axis. The upper table is freely driven by the linear motors 9, 15 to XY directions.
JP13520280A 1980-09-30 1980-09-30 X-y table Granted JPS5761436A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13520280A JPS5761436A (en) 1980-09-30 1980-09-30 X-y table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13520280A JPS5761436A (en) 1980-09-30 1980-09-30 X-y table

Publications (2)

Publication Number Publication Date
JPS5761436A true JPS5761436A (en) 1982-04-13
JPH0141466B2 JPH0141466B2 (en) 1989-09-05

Family

ID=15146232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13520280A Granted JPS5761436A (en) 1980-09-30 1980-09-30 X-y table

Country Status (1)

Country Link
JP (1) JPS5761436A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917141U (en) * 1982-07-23 1984-02-02 桐生機械株式会社 2 axis slider
DE3732570A1 (en) * 1986-12-26 1988-07-07 Nippon Thompson Co Ltd SLIDING TABLE IN AN XY LEVEL
US4896869A (en) * 1987-10-30 1990-01-30 Tokyo Electron Limited Moving table apparatus
JPH0355093A (en) * 1989-07-24 1991-03-08 Brother Ind Ltd Cloth thickness detector for sewing machine
JP2004349289A (en) * 2003-05-20 2004-12-09 Canon Inc Movement guiding device and exposure system using it
US7535552B2 (en) 2001-03-09 2009-05-19 Canon Kabushiki Kaisha Moving/guiding apparatus and exposure apparatus using the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917141U (en) * 1982-07-23 1984-02-02 桐生機械株式会社 2 axis slider
DE3732570A1 (en) * 1986-12-26 1988-07-07 Nippon Thompson Co Ltd SLIDING TABLE IN AN XY LEVEL
US4896869A (en) * 1987-10-30 1990-01-30 Tokyo Electron Limited Moving table apparatus
JPH0355093A (en) * 1989-07-24 1991-03-08 Brother Ind Ltd Cloth thickness detector for sewing machine
US7535552B2 (en) 2001-03-09 2009-05-19 Canon Kabushiki Kaisha Moving/guiding apparatus and exposure apparatus using the same
JP2004349289A (en) * 2003-05-20 2004-12-09 Canon Inc Movement guiding device and exposure system using it
JP4500507B2 (en) * 2003-05-20 2010-07-14 キヤノン株式会社 Movement guide apparatus and exposure apparatus using the same

Also Published As

Publication number Publication date
JPH0141466B2 (en) 1989-09-05

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