JPH0432633Y2 - - Google Patents

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to an X-Y movement mechanism, and more particularly to an X-Y movement mechanism suitable for use in an electron beam lithography apparatus or the like.

(Prior Art) An electron beam lithography apparatus is an apparatus that accelerates and focuses an electron beam and performs lithography on a sample (for example, a wafer) placed on a table by beam exposure. In this case, since there is a limit to the deflection range of the electron beam by the deflector, it is also possible to move the table on which the sample is placed in the X-Y two-dimensional direction in order to draw the beam over a wide area on the sample. It is done as follows. An X-Y moving mechanism is used to move the table in the two-dimensional X-Y direction.

An X-Y moving mechanism for highly accurate positioning used in an electron beam exposure apparatus or the like is constructed as shown in FIG. In this mechanism, the guide rail 1 has good straightness as a guide in the X-axis direction. A guide rail 2 assembled at right angles thereto is a guide in the Y-axis direction. A table 3 is placed on the guide rail 2 so as to be movable in the Y-axis direction.
As a result, the table 3 is assembled and moved while being guided by the guide rail 1 in the X-axis direction and by the guide rail 2 in the Y-axis direction.

The reciprocating motion by a drive device (not shown) in the X-axis direction is transmitted to the guide rail 2 (or table 3) on the guide rail 1 by the transmission rod 4,
The table 3 above it moves in the X-axis direction. The reciprocating motion by a drive device (not shown) in the Y-axis direction is
A rail 6 fixed to the transmission rod 5 is held by a bearing 7 fixed to the table 3, and by pushing (or pulling) the bearing 7, the table 3
moves in the Y-axis direction. This allows the table 3 to be positioned on the XY plane.

(Problem to be solved by the invention) When the table 3 is moved in the X-axis direction, the guide rail 2 moves straight in the X-axis direction under the guidance of the guide rail 1, but the bearing 7 fixed to the table 3
moves with the guide of the rail 6, so the table 3 moves along the rail 6. Therefore, unless the guide rail 1 and the rail 6 are in a perfectly parallel positional relationship, highly accurate positioning of the table 3 is impossible. In addition, since guide rail 1 and guide rail 2 are directly assembled, they can be assembled with good orthogonality, but rail 6
Since these are independent of the guide rails 1 and 2, it is difficult to assemble them with high precision.

The present invention was developed in view of these points, and its purpose is to move the table in a direction perpendicular to the direction of movement (for example, the X direction) when the table is moved in either the X or Y direction. The object of the present invention is to realize an X-Y movement mechanism that does not move in the Y direction (for example, in the Y direction).

(Means for Solving the Problems) The present invention for solving the above-mentioned problems includes an X-axis guide rail that is a guide in the X-axis direction, and a guide rail that is a guide in the Y-axis direction and that A Y-axis guide rail that is combined and guided in the X-axis direction, and a Y-axis guide rail that is placed on the Y-axis guide rail and guided in the X-axis direction.
a table guided in the Y-axis direction by an axial guide rail; an X-axis transmission rod that transmits motion in the X-axis direction to the table or the Y-axis guide rail; In an X-Y movement mechanism having a transmission rod in the Y-axis direction that transmits the A fixed rail, a slider attached to the rail so as to be slidable only in the axial direction of the rail, and a circular rotating body attached to the slider so as to be rotatable about an axis perpendicular to the X-Y plane. and an actuator fixed to the table, which pinches or separates the circumferential surface of the circular rotating body from the axial direction of the rail in response to a control signal.

(Function) In the present invention, when the table is driven, the actuator is prevented from pinching the circumferential surface of the circular rotating body on the slider that slides in the same direction as the driving direction. As a result, when the table is moved in a certain axis direction, the table will not move in a direction perpendicular to this axis.

(Embodiments) Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a mechanical configuration diagram showing an embodiment of the present invention. Components that are the same as those in FIG. 3 are designated by the same numbers. In the figure, a guide rail 1, which is a guide in the X-axis direction, is combined with a guide rail 2, which is a guide in the Y-axis direction, and a table 3 is placed on top of the guide rail 2. The transmission rod 4 transmits motion in the X-axis direction to the table 3 via the guide rail 2. A rail 6' is fixed to the transmission rod 5, which transmits motion in the Y-axis direction, perpendicular to the direction of movement of the transmission rod 5 and parallel to the X-Y plane. Furthermore, a slider 11 that can slide only in the X-axis direction is attached to this rail 6', and a circular rotating body (for example, a bearing) 12 is attached to this so as to be rotatable about an axis perpendicular to the X-Y plane. It is being The actuator 13 is fixed to the table 3, and the X of the bearing 12
A pair of bearings are arranged on both sides in the axial direction, and are arranged so as to sandwich the bearing 12 therebetween. The actuator 13 can be operated to pinch or separate the bearing 12 in response to a control signal. The bottom of the rail 6' extends in a triangular shape, and the transmission rod 5 is attached to the tip thereof to prevent interference between the transmission rod 5 and the slider 11. Note that the circular rotating body 12 is not limited to a bearing, but may be a roller. The operation of the device configured as described above will be explained as follows.

When the table 3 is moved in the X-axis direction, the table 3 is moved via the transmission rod 4 and the guide rail 2 by the drive device in the X-axis direction. At that time, since the actuator 13 is also fixed to the table 3,
Move in the X-axis direction. In this state, since the actuator 13 is not driven by the control signal, the actuator 13 and the bearing 12
There is a gap between them, and the bearing 12 is free with respect to the actuator 13. however,
When the actuator 13 moves in the X-axis direction, the bearing 12 is pushed, and the bearing 1
2 and the slider 11 fixing it also move in the X-axis direction.

Here, the slider 11 moves along the rail 6', but the bearing 12 and actuator 13
Since they are separated, the bearing 12 and actuator 13 are in point contact, so even if the rail 6' is not straight or parallel to the guide rail 1,
The movement of table 3 is not affected at all. Also, since the slider 11 on the rail 6' moves without resistance,
No moment force is applied to table 3.
Due to this, the table 3 is
can be moved along the axis without being affected by other influences, that is, without moving in the Y-axis direction.

Next, when moving the table 3 in the Y-axis direction,
A control signal is applied to the actuator 13. The actuator 13 is made of, for example, a combination of electrostrictive elements, and extends in the X-axis direction when a voltage is applied. Therefore, the bearing 12 is connected to the actuator 1.
3 and does not move relative to the actuator 13. As a result, movement by a drive device (not shown) in the Y-axis direction is transmitted to the table 3 via the transmission rod 5 → rail 6' → slider 11 → bearing 12 → actuator 13.

Here, if there is a shift in the X-axis direction in the movement of the transmission rod 5, the rail 6' will shift in the X-axis direction, but since the slider 11 is free in the X-axis direction with respect to the rail 6', Transmit only power to table 3.
As a result, the table 3 does not move in the X-axis direction. Furthermore, table 3 is the maximum (or minimum) on the X axis
A moment force may be applied to the rail 6' if the rail 6' is in the position shown in FIG. However, since the bearing 12 is free in the rotational direction, no moment force is applied to the table 3. Therefore, the table 3 can move along the guide rail 2 without being affected by other influences. Furthermore, actuator 1
Although the position of the bearing 12 moves in the X-axis direction due to the expansion and contraction of the slider 3, the table 3 is not affected at all because the slider 11 is free in the X-axis direction with respect to the rail 6'.

In the above description, an example is given in which an electrostrictive element is used as the actuator 13, but the present invention is not limited to this, and any device that can be expanded and contracted arbitrarily, such as a hydraulic cylinder, shape memory It may be made of any alloy or the like. or,
In the above description, the case where the moving mechanism according to the present invention is provided only in the Y-axis direction is taken as an example, but it may be provided only in the X-axis direction. Further, it may be provided in both the X and Y directions.

FIG. 2 shows a mechanism in which the moving mechanism according to the present invention is used on two axes and is further provided with a stopper. (In Figure 2, the same parts as in Figure 1 are given the same symbols.)
An actuator 21 is fixed to the lower part of the guide rail 2, and the shift of the guide rail 2 on the guide rail 1 is fixed except when moving in the X-axis direction. In addition, the actuator 22 is fixed to the lower part of the table 3, and the table 3 is moved on the guide rail 2 except for movement in the Y-axis direction.
Fix the misalignment. This prevents displacement even if a force outside the specified direction is applied during movement. Furthermore, by using the moving mechanism on both axes, the center of gravity of the table 3 can be pushed (or pulled) at all times, so no moment force is generated and rotational meandering is eliminated.

(Effects of the invention) As explained in detail above, according to the invention, the actuator fixed to the table is configured to sandwich the circular rotating body attached to the slider placed on the rail, so that the table When the table is moved in a specific direction, the table can be prevented from moving in a direction perpendicular to this direction. Therefore, accurate movement of the table is possible.

[Brief explanation of the drawing]

FIG. 1 is a mechanical block diagram showing one embodiment of the present invention, FIG. 2 is a mechanical block diagram showing another embodiment of the present invention, and FIG. 3 is a diagram showing an example of the structure of a conventional device. 1, 2...Guide rail, 3...Table,
4, 5...Transmission rod, 6,6'...Rail, 11...
...Slider, 12...Circular rotating body (bearing),
13, 21, 22...actuator.

Claims (1)

[Claims for Utility Model Registration] An X-axis guide rail that guides in the X-axis direction, and a Y-axis guide that guides in the Y-axis direction and is combined with the X-axis guide rail and guided in the X-axis direction. a rail, a table placed on the Y-axis guide rail and guided in the Y-axis direction by the Y-axis guide rail, and transmitting motion in the X-axis direction to the table or the Y-axis guide rail. An X-Y machine having a transmission rod in the X-axis direction and a transmission rod in the Y-axis direction that transmits movement in the Y-axis direction to the table.
In the movement mechanism, a rail is fixed to at least one of the transmission rods in the X and Y axis directions at right angles to the movement direction of the transmission rod and parallel to the X-Y plane, and the rail slides only in the axial direction of the rail. a slider rotatably attached to the rail; a circular rotating body rotatably attached to the slider about an axis perpendicular to the X-Y plane; and a circular rotating body fixed to the table and controlled by a control signal. an actuator that pinches or separates the circumferential surface of the rail from the axial direction of the rail;