JPH05104368A - Xy positioning table - Google Patents

Abstract

PURPOSE:To form a flexible structure so as to reduce the thickness of an XY positioning table, and to easily respond to required accuracy, rigidity and resolution. CONSTITUTION:Direct-moving slides 4A-4D are fitted to grooves 2A, 2B running in parallel to one another on a bed 2, in such a way that each slide can be moved directly, while guiding slides 7A-7D are fixed to the upper surface of the direct-moving slides 4A-4D respectively, in such a way that any of direct- moving slides 4A-4D that are fitted to the same groove 2A or 2B will not run in parallel to one another in the guiding direction, and guiding grooves 3A-3D for sliding the guiding slides 7A-7D are formed on the lower surface of a table 3 to be positioned.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY positioning table for positioning a table at an arbitrary position on a plane, and in particular, the overall thickness can be reduced and the required accuracy, rigidity, resolution and the like can be easily achieved. This is a flexible structure that can be used.

[0002]

2. Description of the Related Art In a conventional XY positioning table, a sub-table movable in the X-direction and a first actuator for moving the sub-table in the X-direction are arranged on the upper surface of the bed, and the sub-table is also provided. A main table movable in the Y direction and a second actuator for directly moving the main table in the Y direction are provided on the upper surface of the first actuator, and the first actuator is operated in accordance with the target displacement amount in the X direction. By driving, both the sub table and the main table are moved in the X direction, and the second actuator is driven according to the target displacement amount in the Y direction.
The main table is moved in the Y direction to position the uppermost main table at an arbitrary position on a plane including the X direction and the Y direction.

[0003]

However, in the conventional XY positioning table as described above, the two tables are stacked on the bed in order to divide the movements in the X and Y directions between the two tables. Since it is necessary, there was a problem that the whole becomes thick.

This is because in the conventional structure, two actuators are required to drive the two tables, but the driving directions thereof are deviated by 90 degrees.
This is because, for example, interference between drive components is avoided. Further, the arrangement position of the actuator or the like is not so flexible, and therefore, for example, the arrangement position of the actuator cannot be changed in accordance with the use position, etc., and the applicability to a place having a space limitation is not so great. There was also the problem that it was not good.

The present invention has been made by paying attention to the problems of the prior art as described above, and it is possible to reduce the thickness of the whole and to select the arrangement of members relatively freely. It is an object of the present invention to provide an XY positioning table having a flexible structure that can be used.

[0006]

In order to achieve the above object, the present invention provides an XY positioning table for positioning a table disposed on a bed at an arbitrary position on a plane, the bed and the table facing each other. The first and second linearly moving members, which are linearly movable independently of each other on the same or parallel straight lines along the plane, are provided on one of the surfaces Forming a first drive-side guide surface whose guide direction is different from the linear motion direction and parallel to the plane, and in which the second linear motion member has the guide direction Forming a second drive side guide surface that is different from the linear movement direction and is parallel to the plane and is not parallel to the direction of guide of the first drive side guide surface; and the bed and table. To the other of the opposing surfaces of the first Second matching a first passive side guide surface fit to the dynamic side guide surface, said second drive-side guide surface
And the passive side guide surface of the.

[0007]

Here, the direction in which the first and second linearly moving members linearly move is defined as the X direction, and the direction orthogonal to the X direction and parallel to the plane for positioning the table is defined as the Y direction. And
The guide direction of the first drive-side guide surface and the guide direction of the second drive-side guide surface are not parallel to each other and do not coincide with the X direction. Therefore, consider an extension line of these guide directions. Then, the X-direction distance between the extension lines changes linearly according to the position in the Y-direction.

Therefore, when the first and second linear motion members are moved in the same direction by the same amount, the distance in the X direction between the first and second linear motion members does not change. The Y-direction positions of the first and second passive-side guide surfaces with which the second drive-side guide surface comes into contact are the same positions before and after the movement of the first and second linear motion members, and therefore, the first and second The displacement of the second linear motion member is transmitted to the table via the first and second drive-side guide surfaces and the first and second passive-side guide surfaces, and the table moves in the first and second linear motion directions. It is displaced in the X direction together with the member.

Further, if the first and second linear moving members are moved by the same amount in the opposite direction to the above, the table together with the first and second linear moving members is in the X direction. However, it is displaced in the opposite direction. On the other hand, the first and second
When the linear motion members of the above are moved in a direction in which their X-direction distances are reduced, the X-direction distances between the extension lines are reduced, so that the first and second drive-side guide surfaces contact each other. The position of the passive side guide surface in the Y direction changes, and the table is displaced in the Y direction.

Further, when the first and second linear motion members are displaced in a direction in which the X-direction distance between them extends, the X-direction distance between the extension lines increases, so that the first and second drive-side guides. The Y-direction positions of the first and second passive-side guide surfaces with which the surfaces come into contact change in the opposite direction to the above, and the table is displaced in the Y-direction but in the opposite direction. In this way, the table can be displaced in either the X direction or the Y direction, so that the table can be positioned at any position on the plane by appropriately moving the first and second linear motion members. It

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a first embodiment of the present invention,
It is a perspective view of the XY positioning table 1 in the state which separated the bed 2 and the table 3. First, the configuration will be described.

That is, the table 3 that is placed on the bed 2
Can slide on the upper surface of the bed 2, which is finished in a horizontal plane, by a hydrostatic bearing using oil or air formed between the bed 2 and the table 3.
Two parallel grooves 2 extending in the X direction and extending from one side surface of the bed 2 to the other side surface of the bed 2 are provided on the upper surface of the bed 2.
A and 2B are formed in the grooves 2A and 2B,
Two linear slides 4A, 4B, 4C and 4D respectively
Is fitted. In addition, the inner surface of the groove 2A, 2B,
The end faces of the linear motion slides 4A, 4B, 4C and 4D that face the Y direction serve as bearing surfaces, so that the linear motion slides 4A, 4B, 4C and 4D move in the grooves 2A and 2B, respectively.
It can be moved directly in the X direction.

The end faces of the linear slides 4A, 4B, 4C and 4D on the side not facing the other linear slides in the X direction extend in the X direction along the grooves 2A, 2B and are relatively long. The rods 5A, 5B, 5C and 5D, the portions of which protrude outside the side surface of the bed 2, are fixed. Further, on the side surface of the bed 2 on the side where the grooves 2A, 2B are opened, the drive devices 6A, 6B, 6C and the drive devices 6A, 6B, 6C and the like configured so that the rods 5A, 5B, 5C and 5D pass thereabove. 6D (however, drive devices 6A and 6B do not appear in FIG. 1 due to the positional relationship) are fixed.

The drive devices 6A, 6B, 6C and 6D can be individually driven, and rods 5A, 5B, 5C and 5D are provided between a pair of friction rollers 6a and 6b, which are rotary output shafts located above them. Is sandwiched between. Therefore, the driving force of the driving devices 6A, 6B, 6C and 6D is transmitted to the rods 5A, 5B, 5C and 5D via the frictional force of the friction rollers 6a and 6b, whereby
The rods 5A, 5B, 5C and 5D can independently advance and retreat in the X direction.

Then, each linear motion slide 4A, 4B, 4C
Guide slides 7A, 7B, 7C and 7D, which have a rectangular parallelepiped appearance, are formed on the upper surfaces of the side surfaces 7a.
(The other side surface does not appear in FIG. 1 due to the positional relationship.)
Of the guide slides 7A and 7A, which are diagonal to each other, while the longer ridge intersects the axes in the X and Y directions at 45 degrees.
It is fixed so that the end faces of D face each other and the end faces of the guide slides 7B and 7C face each other.

On the other hand, the table 3 has a square planar shape, and the lower surface thereof has four guide grooves 3A extending from the center to the apex along the diagonal of the square.
3B, 3C and 3D are formed. These guide grooves 3
A, 3B, 3C and 3D are guide slides 7A, 7B,
7C and 7D are formed to have a width corresponding to the width dimension, and both inner side surfaces of the guide grooves 3A, 3B, 3C and 3D and both side surfaces 7a of the guide slides 7A, 7B, 7C and 7D serve as bearing surfaces. The guide slides 7A, 7B,
7C and 7D can slide in the guide grooves 3A, 3B, 3C and 3D.

Next, the operation of this embodiment will be described. This X
The Y positioning table 1 is used by stacking the table 3 on the bed 2 so that the guide slides 7A, 7B, 7C and 7D fit into the guide grooves 3A, 3B, 3C and 3D. 2A and 2B show an XY positioning table 1 for explaining the operation when the table 3 is displaced in the X direction.
FIG.

First, as shown in FIG. 2A, the rod 5
A and 5B drive the drive devices 6A and 6B in the direction in which they are pulled out from the grooves 2A and 2B, and the rods 5C and 5B
Drive device 6C, D in the direction in which D is pushed into grooves 2A, 2B.
Drive 6D. However, each rod 5A, 5B, 5C
The movement amount and the movement speed of 5D are equal. Then,
Since the linear motion slides 4A, 4B, 4C and 4D (not shown in FIG. 2) move in the X direction at the same speed by the same amount, the guide slides 7A, 7 fixed to them.
B, 7C, and 7D are also displaced in the X direction without changing their relative positional relationship.

Therefore, the displacements of the guide slides 7A, 7B, 7C and 7D in the X direction are the same as those of the guide grooves 3A, 3B.
Since it is transmitted to 3C and 3D, the linear motion slide 4A,
4B, 4C and 4D are displaced in the X direction by the guide slide 7
It is transmitted to the table 3 through A, 7B, 7C and 7D and the guide grooves 3A, 3B, 3C and 3D, and the table 3 is displaced in the X direction.

On the contrary, as shown in FIG.
The drive devices 6A and 6B are driven in a direction in which the A and 5B are pushed into the grooves 2A and 2B, and the rods 5C and 5D.
Drive device 6C, in the direction of being pulled out from the grooves 2A, 2B.
6D is driven (however, as in the above, each rod 5
The moving amount and moving speed of A, 5B, 5C, and 5D are equal. ), And this time, the table 3 is displaced in the X direction in the direction opposite to the above by the operation in the direction opposite to the above.

In this way, the table 3 is driven by the driving device 6
By appropriately driving A, 6B, 6C and 6D,
It can be displaced to any position in the X direction. Figure 3
(A) And (b) is a top view of XY positioning table 1 explaining operation at the time of displacing table 3 in the Y direction. First, as shown in FIG. 3A, the rods 5A,
Drive devices 6A and 6C in the direction in which 5C is pushed into the groove 2A
And drive the drive devices 6B and 6D in the direction in which the rods 5B and 5D are pulled out from the groove 2B. However, similar to the above, each rod 5A, 5B, 5C
The movement amount and the movement speed of 5D are equal.

Then, the linear motion slides 4A and 4C (see FIG. 3)
Is omitted. ) Between X-directions is reduced, and X between the linear motion slides 4B and 4D (omitted in FIG. 3).
Since the directional distance increases, the X-direction distance between the guide slides 7A and 7C fixed to them also decreases, and the X-direction distance between the guide slides 7B and 7D also increases. When the distance between the guide slides 7A and 7C in the X direction is reduced, the guide slides 7A and 7C are fitted in the guide grooves 3A and 3C, and thus move toward the center in the guide grooves 3A and 3C. Further, when the distance between the guide slides 7B and 7D in the X direction increases, the guide slides 7B and 7D
Since D is fitted in the guide grooves 3B and 3D, it moves in the guide grooves 3B and 3D toward the apex.

However, the linear slides 4A, 4B, 4C to which the guide slides 7A, 7B, 7C and 7D are fixed.
Since 4 and 4D are fitted in the grooves 2A and 2B extending in the X direction, the guide slides 7A, 7B, 7C and 7D are formed.
Can move only in the X direction with respect to the base 2,
Eventually, the Y-direction component when the guide slides 7A, 7B, 7C and 7D move in the guide grooves 3A, 3B, 3C and 3D acts on the table 3 side, and as a result, the table 3 becomes It is displaced in the Y direction.

On the contrary, as shown in FIG.
The drive device 6 in the direction in which A and 5C are pulled out from the groove 2A
A and 6C are driven, and at the same time, the drive devices 6B and 6D are driven in a direction in which the rods 5B and 5D are pushed into the groove 2B (however, similarly to the above, each rod 5A, 5B,
The movement amount and the movement speed of 5C and 5D are equal. )
Then, since the X-direction distance between the guide slides 7A and 7C is expanded and the X-direction distance between the guide slides 7B and 7D is reduced, the guide slides 7A and 7C are connected to the guide groove 3A.
And inside 3C toward the apex, guide slide 7B
And 7D move toward the center in the guide grooves 3B and 3D.

As a result, since the table 3 is displaced in the Y direction in the opposite direction to the above, the drive devices 6A, 6B,
By appropriately driving 6C and 6D, the table 3
Can be displaced to any position in the Y direction. As described above, the table 3 can be displaced in any of the X direction and the Y direction by appropriately driving the driving devices 6A, 6B, 6C, and 6D, so that the table 3 is positioned at an arbitrary position on the upper surface of the bed 2. be able to.

With the structure of this embodiment, as described above, the table 3 can be displaced in both the X and Y directions, so that it can be displaced in the X direction like a conventional XY positioning table. Since it is not necessary to stack the movable table and the table that is displaced in the Y direction, it is possible to reduce the thickness of the entire apparatus and reduce the size of the apparatus.

Further, in this embodiment, when the table 3 is displaced in the X direction, the linear motion slides 4A, 4B, 4 are used.
The displacements of C and 4D in the X direction are directly transmitted to the table 3, but when the table 3 is displaced in the Y direction, the guide slides 7A, 7B, 7C and 7D and the guide grooves 3A, 3B,
Since the Y-direction component of the relative displacement between 3C and 3D becomes the Y-direction displacement of the table 3, the guide slides 7A, 7
Since the angle formed by the guide directions of B, 7C and 7D and the axis in the X direction is 45 degrees, the linear motion slides 4A, 4
The displacement amounts of B, 4C and 4D are the displacement amounts of the table 3 in the Y direction.

In other words, in the configuration of this embodiment, when the XY positioning table 1 of this embodiment is applied to a device that requires high-precision positioning, such as a semiconductor device manufacturing apparatus, high-precision positioning is possible. It is desirable that the direction in which the XY position is required and the Y direction of the XY positioning table 1 of the present embodiment match. Then, as shown in FIG. 4, the guide groove 3
The resolution in the Y direction can be further increased by increasing the angle θ formed by A and 3D and the guide grooves 3B and 3C. For example, although θ = 90 degrees in the above embodiment, by setting θ = 120 degrees, the resolution in the Y direction can be increased by about 1.7 times compared to the configuration of FIG. It is possible to meet the requirement of positioning.

Here, in this embodiment, the linear slide 4A
Is the first linearly moving member, the linearly moving slide 4C is the second linearly moving member, the side surface 7a of the guide slide 7A is the first driving side guiding surface, and the side surface 7a of the guiding slide 7C is the second driving side. The inner surface of the guide surface and the guide groove 3A serves as a first passive-side guide surface, and the inner surface of the guide groove 3C serves as a second passive-side guide surface. Further, when the linear motion slide 4B is the first linear motion member, the linear motion slide 4D is the second linear motion member and the side surface 7a of the guide slide 7B.
Is the first drive side guide surface, the side surface 7a of the guide slide 7D is the second drive side guide surface, the inner side surface of the guide groove 3B is the first passive side guide surface, and the inner side surface of the guide groove 3D is the second passive side. It becomes the side guide surface.

FIG. 5 is a diagram showing a second embodiment of the present invention and is a plan view of the XY positioning table 1. First, the configuration will be described. That is, a groove 2C extending in the X direction and extending from one side surface of the bed 2 to the other side surface is formed on the upper surface of the bed 2 on which the table 3 is slidably stacked, and both ends of the groove 2C are formed. The individually drivable electric motors 10A and 10B are fixed with their output shafts facing the inside of the groove 2C.

The output shafts of the electric motors 10A and 10B are connected to screw shafts 11A and 11B, which constitute a ball screw mechanism and extend along the groove 2C, so as to be able to transmit a rotational force. The end portions of 11A and 11B are rotatably supported by a support bearing 11a, and the groove 2 is formed in each of the screw shafts 11A and 11B.
Nut 12 which is fitted into C and constitutes a ball screw mechanism.
A and 12B are screwed together.

Further, the side surfaces of the nuts 12A and 12B,
The inner side surface of the groove 2C facing this is a bearing surface, whereby the nuts 12A and 12B are prevented from rotational movement and can be individually displaced in the groove 2C in the X direction. Further, the guide slide 13 is provided on the upper surface of the nut 12A so that its side surface and the axis in the X direction intersect at 45 degrees.
A is fixed, and a guide slide 13B is fixed to the upper surface of the nut 12B so that the side surface of the nut 12B and the axis in the X direction intersect at 45 degrees. However, guide slide 1
3A and 13B are fixed so that their side surfaces are not parallel to each other.

On the other hand, the table 3 has a plane shape which is a rectangle formed by combining two squares, and the lower surface of the table 3 is
Two guide grooves 14A, 14B extending from the end of one longer side of the rectangle toward the center of the other side are formed. However, the two guide grooves 14A and 14B intersect at a right angle. And the guide grooves 14A and 14B are
The guide slides 13A and 13B are formed to have a width corresponding to the width dimension, and both inner side surfaces of the guide grooves 14A and 14B and both side surfaces of the guide slides 13A and 13B serve as bearing surfaces.
As a result, the guide slides 13A and 13B have the guide groove 1
It can slide in 4A and 14B.

Next, the operation of this embodiment will be described. This X
The Y positioning table 1 is used by stacking the table 3 on the bed 2 so that the guide slides 13A and 13B fit into the guide grooves 14A and 14B. Then, when the electric motor 10A is rotationally driven, the screw shaft 11A connected to the output shaft thereof rotates, and the rotational force thereof is converted into the advancing / retreating force of the nut 12A by the ball screw mechanism, so that the nut 12A moves along the groove 2C. Displace in the X direction.

Similarly, when the electric motor 10B is rotationally driven, the screw shaft 11B connected to the output shaft thereof is rotated,
The rotational force is converted into a forward / backward force of the nut 12B by the ball screw mechanism, and the nut 12B is displaced in the X direction along the groove 2C. Then, if the nuts 12A and 12B are displaced in the same direction by the same amount, the nuts 12A and 1
Since the X-direction distance between 2B does not change, the guide grooves 14A, 14 of the guide slides 13A, 13B fixed to them do not change.
The position in B does not change and therefore its nut 12
With the displacement of A and 12B, the table 3 is displaced in the X direction.

If the nuts 12A and 12B are displaced in the direction in which the distance between them in the X direction contracts, the guide slide 13A moves in the guide groove 14A from the upper left to the lower right in FIG. The guide slide 13B moves in the guide groove 14B from the upper right side to the lower left side in FIG. 5, but the nut 1 to which the guide slides 13A and 13B are fixed.
Since 2A and 12B are fitted in the groove 2C and cannot be displaced in the Y direction, the Y-direction component of the relative displacement generated between the guide slides 13A and 13B and the guide grooves 14A and 14B acts on the table 3 side. As a result, Table 3
Is displaced upward in FIG. 5, which is the Y direction.

On the contrary, when the nuts 12A and 12B are displaced in the direction in which the distance between them in the X direction increases, the guide slide 13A moves in the guide groove 14A from the lower right to the upper left in FIG. Since the guide slide 13B moves in the guide groove 14B from the lower left to the upper right in FIG. 5, the Y-direction component of the relative displacement generated between the guide slides 13A and 13B and the guide grooves 14A and 14B is opposite to the above. On table 3
Acting on the side, the table 3 is displaced downward in FIG. 5, which is the Y direction.

Thus, even with the configuration of this embodiment,
Since the table 3 can be displaced in either the X direction or the Y direction, the table 3 can be positioned at any position on the bed 2. With the configuration of this embodiment, the drive system parts such as the electric motors 10A and 10B are half of those of the first embodiment, and therefore the XY of the first embodiment is used.
Although the rigidity and accuracy are slightly inferior to those of the positioning table, the number of parts is reduced, and the XY positioning table 1 can be made compact, lightweight and low cost.

Further, since the nuts 12A and 12B are moved back and forth by the ball screw mechanism, as in the first embodiment,
The rod for moving the linear motion slide does not significantly protrude to the outside of the device. Here, in this embodiment, the nut 12A corresponds to the first linear motion member, and the nut 1
2B corresponds to the second linear motion member, and the side surface of the guide slide 13A constitutes the first drive side guide surface.
The side surface of B constitutes the second drive side guide surface, and the guide groove 13A
The inner side surface of the groove constitutes the first passive side guide surface, and the guide groove 13B
The inner side surface of the second side guide surface.

FIG. 6 is a diagram showing a third embodiment of the present invention and is a plan view of the XY positioning table 1. The same members and parts as those in the configuration of the first embodiment are designated by the same reference numerals, and the duplicate description thereof will be omitted. That is, in this embodiment, the two grooves 2 extending in the X direction are formed on the upper surface of the bed 2.
A and 2B are formed and two linear motion slides 4A and 4C are fitted into one groove 2A so as to be linearly movable, which is similar to the first embodiment, but the other groove 2B is linearly moved. Slide 4D
It is fitted so that it can be moved directly.

The guide slides 7A and 7B are fixed to the upper surfaces of the linear motion slides 4A and 4C so that the side surfaces thereof and the axis in the X direction intersect at a more acute angle than the configuration shown in FIG. The slide 7D is fixed to the upper surface of the linear motion slide 4D so that its side surface is parallel to the Y-direction axis. On the other hand, a guide groove 3A aligned with the guide slide 7A, a guide groove 3C aligned with the guide slide 7C, and a guide groove 3E aligned with the guide slide 7D and extending in the Y direction are formed on the lower surface of the table 3.

With such a configuration, the table 3 is
Similar to the first and second embodiments described above, the linear motion slides 4A and 4C are displaced in the Y direction by displacing them in opposite directions, but the guide grooves 3A and 3C and the guide slide 7 are provided.
Since the directions of the A and 7C guides are closer to the axis in the X direction than in the configuration shown in FIG. 4, the resolution in the Y direction can be further increased, and the demand for higher precision positioning can be met. be able to.

When the table 3 is moved in the Y direction, since the guide directions of the guide groove 3E and the guide slide 7D coincide with the Y direction, the guide groove 3E and the guide slide 7D impede the movement. It never happens. On the other hand, if the linear motion slides 4A, 4C and 4D are displaced in the same direction by the same amount, the displacement is directly transmitted to the table 3,
The table 3 can be displaced in the X direction.

In this embodiment, the guide grooves 3A, 3C
Since the guide directions of the guide slides 7A and 7C are closer to the X-direction axis than the configuration shown in FIG. 4, the Y-direction resolution can be increased as described above, but the guide grooves 3A, The rigidity in the X direction between the 3C and the guide slides 7A and 7C becomes low. However, drive source 6D
Driving force is transmitted to the table 3 through the guide slide 7D and the guide groove 3E whose guide direction is the Y direction,
It is possible to prevent a decrease in rigidity in the X direction as a whole.

Here, in this embodiment, the linear slide 4A
Is regarded as the first linear motion member, the linear motion slides 4C and 4
Each of D corresponds to the second linear motion member, the side surface of the guide slide 7A corresponds to the first drive side guide surface, and each side surface of the guide slides 7C and 7D corresponds to the second drive side guide surface. However, the inner side surface of the guide groove 3A corresponds to the first passive side guide surface, and the inner side surface of each of the guide grooves 3C and 3E is the second side surface.
Corresponding to the passive side guide surface.

FIG. 7 is a diagram showing a fourth embodiment of the present invention, and is a perspective view of the XY positioning table 1 with the bed 2 and the table 3 separated from each other, as in FIG. In addition,
The same members and parts as those of the configuration of the first embodiment are designated by the same reference numerals, and the duplicated description thereof will be omitted. That is, in the present embodiment, the electric motors 20A, 2 are arranged at the ends of the grooves 2A, 2B so that their output shafts face the insides of the grooves 2A, 2B.
0B, 20C and 20D are fixed, and screw shafts 21A, 21B, 21C and 21D that form a ball screw mechanism and extend along the grooves 2A and 2B are connected to the electric motors 20A, 20B, 20C and 20D. ing.

Each screw shaft 21A, 21B, 21C and 21
The end portions of D are individually rotatably supported by the support bearings 21a, and therefore the electric motor 20
It can be rotated individually by receiving the rotational force of A, 20B, 20C and 20D. Then, each screw shaft 21A, 21
B, 21C, and 21D are nuts 22 that form a ball screw mechanism that is linearly fitted into the grooves 2A and 2B.
A, 22B, 22C and 22D are screwed together.

Further, bearings 23A, 23B, 23C and 23D forming a linear guide are fixed on the upper surfaces of the nuts 22A, 22B, 22C and 22D so that the guiding directions thereof face the center of the bed 2. There is. On the lower surface of the table 3, the bearings 23A,
Rails 24A and 24B forming a linear guide together with 23B, 23C and 23D are fixed along a diagonal line of the table 3 having a square planar shape.

Even with such a construction, substantially the same operation as that of the first embodiment can be obtained, so that the table 3 can be positioned at any position on the bed 2, and the first embodiment can be positioned. The same effect as can be obtained. In the structure of the present embodiment, the rails 24A and 24B are fixed instead of forming the guide groove on the lower surface of the table 3, so that the process is simpler than that of the XY positioning table of the first embodiment. It becomes possible to manufacture.

Further, since the nuts 22A, 22B, 22C and 22D are moved back and forth by the ball screw mechanism, the rod for moving the linear motion slide largely projects to the outside of the apparatus as in the first embodiment. There is no such thing.
Here, in the present embodiment, if the nut 22A is the first linear motion member, the nut 22C is the second linear motion member, the bearing surface of the bearing 23A is the first drive side guide surface, and the bearing 23.
The bearing surface of C is the second drive side guide surface, of the rail 24A,
The portion where the bearing 23A is fitted becomes the first passive side guide surface, and the portion of the rail 24B where the bearing 23C is fitted becomes the second passive side guide surface.

If the nut 22B is the first linear motion member, the nut 22D is the second linear motion member and the bearing 23.
The bearing surface of B is the first drive side guide surface, the bearing surface of the bearing 23D is the second drive side guide surface, and the portion of the rail 24B where the bearing 23B fits is the first passive side guide surface.
A portion of the rail 24A where the bearing 23D is fitted serves as a second passive side guide surface.

FIG. 8 is a diagram showing a fifth embodiment of the present invention and is a plan view of the XY positioning table 1. That is, two sets of guide rails 30A, 30B and 31A, 31B extending in the X direction are fixed to the upper surface of the bed 2, and a sub-table 32 that is linearly movable in the X direction along the guide rails 30A, 30B. , Guide rails 31A, 31
A sub-table 33 that can move linearly in the X direction is provided along B.

Between the guide rails 30A and 30B, a screw shaft 34 extending in the X direction in parallel with the guide rails 30A and 30B is rotatably disposed with its both ends supported by support bearings 35a and 35b, and the screw thereof is provided. One end of the shaft 34 is
It is connected to the output shaft of an electric motor 36 fixed to the side surface of the bed 2. Similarly, the guide rails 31A and 31
Between B, the screw shaft 37 extending in the X direction in parallel with them.
Is rotatably disposed with both ends supported by support bearings 38a and 38b, and one end of the screw shaft 37 is a side surface of the bed 2 on the same side as the electric motor 36 is fixed. Is connected to the output shaft of an electric motor 39 fixed to the.

A nut constituting a ball screw mechanism together with the screw shafts 34 and 37 is screwed together, and the upper surface of the nut screwed onto the screw shaft 34 is
The upper surface of the nut fixed to the lower surface of the sub-table 32 and screwed to the screw shaft 37 is fixed to the lower surface of the sub-table 33. A pair of guide rails 40A and 40B are fixed to the upper surface of the sub-table 32 so as to be parallel to each other and intersect the axis in the X direction at an angle of 45 degrees. Guide rails 41A, 41B are parallel to each other and intersect the axis in the X direction at an angle of 45 degrees and guide rails 40A, 40B.
It is fixed so that it is not parallel to.

On the other hand, on the lower surface of the table 3, a pair of guide rails 42A and 42B that sandwich the guide rails 40A and 40B from the outside and a pair of guide rails 43A and 43B that sandwich the guide rails 41A and 41B from the outside are fixed. Has been done. Then, the guide rails 40A, 4
The outer surface of 0B and the inner surfaces of the guide rails 42A and 42B form a bearing surface, and the guide rails 41A and 4B.
The outer surface of 1B and the inner surfaces of the guide rails 43A and 43B form a bearing surface.

Even with such a construction, if the sub-tables 32 and 33 are moved in the same direction by the same amount, the displacements of the sub-tables 32 and 33 are directly transferred to the table 3 as in the above embodiments. As the table 3 is transmitted, the table 3 is displaced in the X direction, and if the subtables 32 and 33 are displaced in the opposite directions, the guide rails 40A and 40B are guided.
And the Y-direction component of the relative displacement between the guide rails 42A and 42B and the Y-direction component of the relative displacement between the guide rails 41A and 41B and the guide rails 43A and 43B act on the table 3. Is displaced to.
Therefore, the table 3 can be positioned at any position on the bed 2.

In the structure of this embodiment, the electric motors 36 and 39 are arranged on only one side surface of the bed 2, so that the drive system parts do not project to the other side surfaces. And has an advantage that the arrangement is easy even if there is a space limitation. Other functions and effects are similar to those of the first embodiment. Here, in this embodiment, the sub table 32 corresponds to the first linear motion member, the sub table 33 corresponds to the second linear motion member, and the outer side surfaces of the guide rails 40A and 40B are the first drive side. Corresponding to the guide surface, the outer surfaces of the guide rails 41A and 41B correspond to the second drive side guide surface, and the guide rail 42
The inner side surfaces of A and 42B correspond to the first passive side guide surface, and the inner side surfaces of the guide rails 43A and 43B correspond to the second passive side guide surface.

In each of the above embodiments, members corresponding to the first and second linearly moving members are provided on the bed 2 side, but conversely, the linearly moving members are provided on the lower surface of the table 3. Even if a corresponding member is provided, the same effect can be obtained. Further, the drive system such as the linear motion slide is not limited to the configuration of each of the above embodiments, and may be configured to be driven by using, for example, a hydraulic pump, a wire drive, a gear drive, a linear motor or the like.

Further, a hydrostatic bearing, a rolling bearing, a linear guide or the like can be appropriately used on each bearing surface.

[0060]

As described above, according to the present invention,
Since the table placed on the bed can be moved in two directions orthogonal to each other, the overall thickness of the device can be reduced, and the drive source and drive force transmission mechanism can be selected relatively freely. Therefore, it is possible to flexibly respond to required accuracy, rigidity, resolution, and the like.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration of a first embodiment of the present invention.

FIG. 2 is a plan view illustrating the operation of the first embodiment.

FIG. 3 is a plan view illustrating the operation of the first embodiment.

FIG. 4 is a plan view showing a configuration example for improving resolution.

FIG. 5 is a plan view showing the configuration of the second exemplary embodiment of the present invention.

FIG. 6 is a plan view showing a configuration of a third exemplary embodiment of the present invention.

FIG. 7 is a perspective view showing a configuration of a fourth exemplary embodiment of the present invention.

FIG. 8 is a plan view showing a configuration of a fifth exemplary embodiment of the present invention.

[Explanation of symbols]

1 XY Positioning Table 2 Bed 2A, 2B, 2C Groove 3 Table 3A, 3B, 3C, 3D, 3E Guide Groove 4A, 4B, 4C, 4D Linear Slide 7A, 7B, 7C, 7D Guide Slide 12A, 12B, Nut 13A , 13B Guide slide 14A, 14B Guide groove 22A, 22B, 22C, 22D Nut 23A, 23B, 23C, 23D Bearing 24A, 24B Rail 32, 33 Subtable 40A, 40B, 41A, 41B Guide rail 42A, 42B, 43A, 43B Guide rail

Claims (1)

[Claims] 1. An XY positioning table for positioning a table disposed on a bed at an arbitrary position on a plane, wherein one of the facing surfaces of the bed and the table is the same or parallel along the plane. The first and second linearly moving members that can be linearly moved independently of each other on a straight line, and the guide direction of the first linearly moving member is different from the linearly moving direction. And forming a first drive side guide surface parallel to the plane, and guiding the second linear motion member in a direction different from the linear motion direction and parallel to the plane. A second drive-side guide surface that is present and is not parallel to the guiding direction of the first drive-side guide surface, and the first drive-side is formed on the other of the facing surfaces of the bed and the table. A first passive side guide surface aligned with the guide surface, and the second side Second alignment with the driving side guide surface of the
An XY positioning table, characterized in that the passive side guide surface of is formed.