JPH054006Y2 - - Google Patents
Info
- Publication number
- JPH054006Y2 JPH054006Y2 JP20019284U JP20019284U JPH054006Y2 JP H054006 Y2 JPH054006 Y2 JP H054006Y2 JP 20019284 U JP20019284 U JP 20019284U JP 20019284 U JP20019284 U JP 20019284U JP H054006 Y2 JPH054006 Y2 JP H054006Y2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- stages
- reticle
- laser
- rotary stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 5
- 229910001374 Invar Inorganic materials 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 14
- 230000007547 defect Effects 0.000 description 7
- 238000007689 inspection Methods 0.000 description 7
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20019284U JPH054006Y2 (enrdf_load_stackoverflow) | 1984-12-25 | 1984-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20019284U JPH054006Y2 (enrdf_load_stackoverflow) | 1984-12-25 | 1984-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61112406U JPS61112406U (enrdf_load_stackoverflow) | 1986-07-16 |
| JPH054006Y2 true JPH054006Y2 (enrdf_load_stackoverflow) | 1993-02-01 |
Family
ID=30760810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20019284U Expired - Lifetime JPH054006Y2 (enrdf_load_stackoverflow) | 1984-12-25 | 1984-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH054006Y2 (enrdf_load_stackoverflow) |
-
1984
- 1984-12-25 JP JP20019284U patent/JPH054006Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61112406U (enrdf_load_stackoverflow) | 1986-07-16 |
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