JPS6339965Y2 - - Google Patents

Info

Publication number
JPS6339965Y2
JPS6339965Y2 JP4244281U JP4244281U JPS6339965Y2 JP S6339965 Y2 JPS6339965 Y2 JP S6339965Y2 JP 4244281 U JP4244281 U JP 4244281U JP 4244281 U JP4244281 U JP 4244281U JP S6339965 Y2 JPS6339965 Y2 JP S6339965Y2
Authority
JP
Japan
Prior art keywords
holding plate
electron beam
attached
stage
reference bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4244281U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57157134U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4244281U priority Critical patent/JPS6339965Y2/ja
Publication of JPS57157134U publication Critical patent/JPS57157134U/ja
Application granted granted Critical
Publication of JPS6339965Y2 publication Critical patent/JPS6339965Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4244281U 1981-03-26 1981-03-26 Expired JPS6339965Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4244281U JPS6339965Y2 (enrdf_load_stackoverflow) 1981-03-26 1981-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4244281U JPS6339965Y2 (enrdf_load_stackoverflow) 1981-03-26 1981-03-26

Publications (2)

Publication Number Publication Date
JPS57157134U JPS57157134U (enrdf_load_stackoverflow) 1982-10-02
JPS6339965Y2 true JPS6339965Y2 (enrdf_load_stackoverflow) 1988-10-19

Family

ID=29839468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4244281U Expired JPS6339965Y2 (enrdf_load_stackoverflow) 1981-03-26 1981-03-26

Country Status (1)

Country Link
JP (1) JPS6339965Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS57157134U (enrdf_load_stackoverflow) 1982-10-02

Similar Documents

Publication Publication Date Title
US7548322B2 (en) Multi-axis interferometers and methods and systems using multi-axis interferometers
KR100471018B1 (ko) 두 개의 대상물 간의 갭 조절장치 및 조절방법
US7528961B2 (en) Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers
JPS6140085B2 (enrdf_load_stackoverflow)
JP2008046108A (ja) 基板上の構造の座標を決定する際の計測精度を向上させる方法
JP2006510199A (ja) フォトリソグラフィック露光サイクルの間のステージ・ミラー歪の工程内補正
Leach et al. Development and characterization of a new instrument for the traceable measurement of areal surface texture
US20090073458A1 (en) Means and method for determining the spatial position of moving elements of a coordinate measuring machine
US7280223B2 (en) Interferometry systems and methods of using interferometry systems
JPH05172769A (ja) 細長い体部の線膨脹量を測定する方法と装置
JP2960746B2 (ja) ビーム照射方法および電子ビーム描画方法とビーム照射装置並びに電子ビーム描画装置
JPS6339965Y2 (enrdf_load_stackoverflow)
US20070046949A1 (en) Coordinate measuring device
JP4505662B2 (ja) 基準マーク構造体、その製造方法及びそれを用いた荷電粒子線露光装置
US7397039B2 (en) Real-time compensation of mechanical position error in pattern generation or imaging applications
JPH11300581A (ja) スライダ装置およびスライダ装置を用いた工作機械ならびにこの工作機械を用いた回折格子の加工方法
JPS60254615A (ja) 電子ビーム露光における温度測定方法
JP3918932B2 (ja) Ｘ線ｃｔ装置における中心軸較正治具およびこの治具を用いた較正方法
GB2153995A (en) Coordinate measuring instrument
JPH04162337A (ja) 電子線装置
JPH054006Y2 (enrdf_load_stackoverflow)
JPH09199573A (ja) 位置決めステージ装置およびこれを用いた露光装置
JP2005024534A (ja) 形状測定装置及びその校正方法
JPS5952534B2 (ja) 電子線描画装置
KR20240017400A (ko) 시료 지지대의 위치 설정 동안 간섭 변수 보상을 위한 방법 및 장치