JPH0537470Y2 - - Google Patents

Info

Publication number
JPH0537470Y2
JPH0537470Y2 JP6674490U JP6674490U JPH0537470Y2 JP H0537470 Y2 JPH0537470 Y2 JP H0537470Y2 JP 6674490 U JP6674490 U JP 6674490U JP 6674490 U JP6674490 U JP 6674490U JP H0537470 Y2 JPH0537470 Y2 JP H0537470Y2
Authority
JP
Japan
Prior art keywords
processing chamber
wafer
processing
mounting table
passage space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6674490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426526U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6674490U priority Critical patent/JPH0537470Y2/ja
Publication of JPH0426526U publication Critical patent/JPH0426526U/ja
Application granted granted Critical
Publication of JPH0537470Y2 publication Critical patent/JPH0537470Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6674490U 1990-06-26 1990-06-26 Expired - Lifetime JPH0537470Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6674490U JPH0537470Y2 (cs) 1990-06-26 1990-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6674490U JPH0537470Y2 (cs) 1990-06-26 1990-06-26

Publications (2)

Publication Number Publication Date
JPH0426526U JPH0426526U (cs) 1992-03-03
JPH0537470Y2 true JPH0537470Y2 (cs) 1993-09-22

Family

ID=31599712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6674490U Expired - Lifetime JPH0537470Y2 (cs) 1990-06-26 1990-06-26

Country Status (1)

Country Link
JP (1) JPH0537470Y2 (cs)

Also Published As

Publication number Publication date
JPH0426526U (cs) 1992-03-03

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