JPH0536723B2 - - Google Patents
Info
- Publication number
- JPH0536723B2 JPH0536723B2 JP24284784A JP24284784A JPH0536723B2 JP H0536723 B2 JPH0536723 B2 JP H0536723B2 JP 24284784 A JP24284784 A JP 24284784A JP 24284784 A JP24284784 A JP 24284784A JP H0536723 B2 JPH0536723 B2 JP H0536723B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- beam splitter
- lens
- reflecting surface
- laterally shifted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000004907 flux Effects 0.000 description 7
- 238000010008 shearing Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24284784A JPS61120910A (ja) | 1984-11-16 | 1984-11-16 | 形状測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24284784A JPS61120910A (ja) | 1984-11-16 | 1984-11-16 | 形状測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61120910A JPS61120910A (ja) | 1986-06-09 |
| JPH0536723B2 true JPH0536723B2 (fr) | 1993-05-31 |
Family
ID=17095174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24284784A Granted JPS61120910A (ja) | 1984-11-16 | 1984-11-16 | 形状測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120910A (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4899408B2 (ja) * | 2005-02-25 | 2012-03-21 | 株式会社ニコン | 顕微鏡装置 |
| JP5598063B2 (ja) * | 2010-04-07 | 2014-10-01 | 日立工機株式会社 | 空気圧縮機 |
-
1984
- 1984-11-16 JP JP24284784A patent/JPS61120910A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61120910A (ja) | 1986-06-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |