JPH0536497B2 - - Google Patents

Info

Publication number
JPH0536497B2
JPH0536497B2 JP59031933A JP3193384A JPH0536497B2 JP H0536497 B2 JPH0536497 B2 JP H0536497B2 JP 59031933 A JP59031933 A JP 59031933A JP 3193384 A JP3193384 A JP 3193384A JP H0536497 B2 JPH0536497 B2 JP H0536497B2
Authority
JP
Japan
Prior art keywords
strain gauge
thin film
tcr
composition
amorphous alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59031933A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60174844A (ja
Inventor
Takeshi Masumoto
Kazuaki Fukamichi
Masami Ishii
Hiroshi Motoyama
Ryohei Yabuno
Tetsuo Oka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd filed Critical Aisin Seiki Co Ltd
Priority to JP3193384A priority Critical patent/JPS60174844A/ja
Publication of JPS60174844A publication Critical patent/JPS60174844A/ja
Publication of JPH0536497B2 publication Critical patent/JPH0536497B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP3193384A 1984-02-21 1984-02-21 ひずみゲ−ジ材料用非晶質合金 Granted JPS60174844A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3193384A JPS60174844A (ja) 1984-02-21 1984-02-21 ひずみゲ−ジ材料用非晶質合金

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3193384A JPS60174844A (ja) 1984-02-21 1984-02-21 ひずみゲ−ジ材料用非晶質合金

Publications (2)

Publication Number Publication Date
JPS60174844A JPS60174844A (ja) 1985-09-09
JPH0536497B2 true JPH0536497B2 (enExample) 1993-05-31

Family

ID=12344766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3193384A Granted JPS60174844A (ja) 1984-02-21 1984-02-21 ひずみゲ−ジ材料用非晶質合金

Country Status (1)

Country Link
JP (1) JPS60174844A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222137A (ja) * 1986-03-24 1987-09-30 Aisin Seiki Co Ltd 圧力センサ用ダイヤフラム
US4812801A (en) * 1987-05-14 1989-03-14 The United States Of America As Represented By The Secretary Of The Air Force Solid state gas pressure sensor
CN100389219C (zh) * 2006-06-22 2008-05-21 山东大学 一种镍-硅-硼中间合金及其制备方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4236946A (en) * 1978-03-13 1980-12-02 International Business Machines Corporation Amorphous magnetic thin films with highly stable easy axis

Also Published As

Publication number Publication date
JPS60174844A (ja) 1985-09-09

Similar Documents

Publication Publication Date Title
Parker et al. Electrical Resistance‐Strain Characteristics of Thin Evaporated Metal Films
JP4436064B2 (ja) サーミスタ用材料及びその製造方法
EP0035351B1 (en) Deformable flexure element for strain gage transducer and method of manufacture
JPH10270201A (ja) Ｃｒ−Ｎ基歪抵抗膜およびその製造法ならびに歪センサ
JPS63165725A (ja) 圧力センサ−用歪ゲ−ジ
Gregory et al. High temperature strain gages based on reactively sputtered AlNx thin films
US8963263B2 (en) Resistant strain gauge
Li et al. Effect of AlN/Al 2 O 3 thin-film protective layer on the high-temperature performance of ITO thin-film strain gauge
US4100524A (en) Electrical transducer and method of making
JP2001221696A (ja) 感温感歪複合センサ
JP3933213B2 (ja) Ｃｒ基合金薄膜およびその製造法ならびにストレインゲージ
JPH0536497B2 (enExample)
Rajanna et al. Strain-sensitive property of vacuum evaporated manganese films
JP2019074452A (ja) 薄膜ひずみセンサ材料および薄膜ひずみセンサ
Ayerdi et al. Ceramic pressure sensor based on tantalum thin film
Bethe et al. Thin-film strain-gage transducers
JPS63245962A (ja) 歪センサ−
US3305816A (en) Ternary alloy strain gauge
Suzuki et al. Thickness dependence of H2 gas sensor in amorphous SnQx films prepared by ion-beam sputtering
JPH07218348A (ja) 薄膜熱電対
JP4895481B2 (ja) 抵抗薄膜および抵抗薄膜形成用のスパッタリングターゲット
JPH03212903A (ja) 薄膜測温抵抗体の製造方法
Robinson et al. The effect of ion bombardment on the strain gauge factor of thin gold films
US3609625A (en) Semiconductor strain gauge
Patterson LXXII. On the electrical properties of thin metal films