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Ube Corp
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Ube Industries Ltd
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Application filed by Ube Industries LtdfiledCriticalUbe Industries Ltd
Priority to JP59270448ApriorityCriticalpatent/JPS61148810A/ja
Publication of JPS61148810ApublicationCriticalpatent/JPS61148810A/ja
Publication of JPH0535563B2publicationCriticalpatent/JPH0535563B2/ja
Influence of sputtering and annealing conditions on the structure and ferroelectric properties of Pb (Zr, Ti) O3 thin films prepared by RF magnetron sputtering