JPH0535220B2 - - Google Patents

Info

Publication number
JPH0535220B2
JPH0535220B2 JP61268601A JP26860186A JPH0535220B2 JP H0535220 B2 JPH0535220 B2 JP H0535220B2 JP 61268601 A JP61268601 A JP 61268601A JP 26860186 A JP26860186 A JP 26860186A JP H0535220 B2 JPH0535220 B2 JP H0535220B2
Authority
JP
Japan
Prior art keywords
crucible
thin film
deformable member
heat
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61268601A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63125672A (ja
Inventor
Nobutaka Koshirakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP26860186A priority Critical patent/JPS63125672A/ja
Publication of JPS63125672A publication Critical patent/JPS63125672A/ja
Publication of JPH0535220B2 publication Critical patent/JPH0535220B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP26860186A 1986-11-13 1986-11-13 薄膜形成装置 Granted JPS63125672A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26860186A JPS63125672A (ja) 1986-11-13 1986-11-13 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26860186A JPS63125672A (ja) 1986-11-13 1986-11-13 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS63125672A JPS63125672A (ja) 1988-05-28
JPH0535220B2 true JPH0535220B2 (enExample) 1993-05-26

Family

ID=17460801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26860186A Granted JPS63125672A (ja) 1986-11-13 1986-11-13 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS63125672A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250954A (ja) * 1988-08-15 1990-02-20 Ricoh Co Ltd 薄膜形成装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184369A (ja) * 1984-10-01 1986-04-28 Ulvac Corp イオン化装置
JPS61235557A (ja) * 1985-04-10 1986-10-20 Mitsubishi Electric Corp 薄膜蒸着装置

Also Published As

Publication number Publication date
JPS63125672A (ja) 1988-05-28

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