JPH0535119B2 - - Google Patents

Info

Publication number
JPH0535119B2
JPH0535119B2 JP61058281A JP5828186A JPH0535119B2 JP H0535119 B2 JPH0535119 B2 JP H0535119B2 JP 61058281 A JP61058281 A JP 61058281A JP 5828186 A JP5828186 A JP 5828186A JP H0535119 B2 JPH0535119 B2 JP H0535119B2
Authority
JP
Japan
Prior art keywords
crystal growth
heating element
growth chamber
container
graphite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61058281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62216990A (ja
Inventor
Tooru Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sakaguchi Dennetsu KK
Original Assignee
Sakaguchi Dennetsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sakaguchi Dennetsu KK filed Critical Sakaguchi Dennetsu KK
Priority to JP5828186A priority Critical patent/JPS62216990A/ja
Publication of JPS62216990A publication Critical patent/JPS62216990A/ja
Publication of JPH0535119B2 publication Critical patent/JPH0535119B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5828186A 1986-03-18 1986-03-18 単結晶成長装置 Granted JPS62216990A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5828186A JPS62216990A (ja) 1986-03-18 1986-03-18 単結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5828186A JPS62216990A (ja) 1986-03-18 1986-03-18 単結晶成長装置

Publications (2)

Publication Number Publication Date
JPS62216990A JPS62216990A (ja) 1987-09-24
JPH0535119B2 true JPH0535119B2 (enrdf_load_stackoverflow) 1993-05-25

Family

ID=13079802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5828186A Granted JPS62216990A (ja) 1986-03-18 1986-03-18 単結晶成長装置

Country Status (1)

Country Link
JP (1) JPS62216990A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994028206A1 (fr) * 1993-05-31 1994-12-08 Sumitomo Sitix Corporation Appareil et procede de production d'une matiere monocristalline

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2614095B2 (ja) * 1988-12-26 1997-05-28 信越半導体 株式会社 単結晶棒の引上げ装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53142386A (en) * 1977-05-18 1978-12-12 Toshiba Ceramics Co Low carbon silicon single crystal manufacturing apparatus
JPS5930792A (ja) * 1982-08-10 1984-02-18 Toshiba Corp 単結晶育成装置
JPS60131892A (ja) * 1983-12-19 1985-07-13 Mitsubishi Monsanto Chem Co 単結晶育成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994028206A1 (fr) * 1993-05-31 1994-12-08 Sumitomo Sitix Corporation Appareil et procede de production d'une matiere monocristalline

Also Published As

Publication number Publication date
JPS62216990A (ja) 1987-09-24

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