JPH0534818B2 - - Google Patents

Info

Publication number
JPH0534818B2
JPH0534818B2 JP59125152A JP12515284A JPH0534818B2 JP H0534818 B2 JPH0534818 B2 JP H0534818B2 JP 59125152 A JP59125152 A JP 59125152A JP 12515284 A JP12515284 A JP 12515284A JP H0534818 B2 JPH0534818 B2 JP H0534818B2
Authority
JP
Japan
Prior art keywords
mask
holding
holding member
hands
guide rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59125152A
Other languages
English (en)
Japanese (ja)
Other versions
JPS615519A (ja
Inventor
Morio Inoe
Takao Kawanabe
Akitoshi Ookawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59125152A priority Critical patent/JPS615519A/ja
Publication of JPS615519A publication Critical patent/JPS615519A/ja
Publication of JPH0534818B2 publication Critical patent/JPH0534818B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP59125152A 1984-06-20 1984-06-20 受け渡し装置 Granted JPS615519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59125152A JPS615519A (ja) 1984-06-20 1984-06-20 受け渡し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59125152A JPS615519A (ja) 1984-06-20 1984-06-20 受け渡し装置

Publications (2)

Publication Number Publication Date
JPS615519A JPS615519A (ja) 1986-01-11
JPH0534818B2 true JPH0534818B2 (enrdf_load_html_response) 1993-05-25

Family

ID=14903156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59125152A Granted JPS615519A (ja) 1984-06-20 1984-06-20 受け渡し装置

Country Status (1)

Country Link
JP (1) JPS615519A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3107310B2 (ja) * 1988-11-30 2000-11-06 東京エレクトロン株式会社 処理装置
CH680275A5 (enrdf_load_html_response) * 1990-03-05 1992-07-31 Tet Techno Investment Trust
JP7117996B2 (ja) * 2018-12-28 2022-08-15 株式会社荏原製作所 移載機及びベベル研磨装置

Also Published As

Publication number Publication date
JPS615519A (ja) 1986-01-11

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