JPH0534110Y2 - - Google Patents

Info

Publication number
JPH0534110Y2
JPH0534110Y2 JP2666086U JP2666086U JPH0534110Y2 JP H0534110 Y2 JPH0534110 Y2 JP H0534110Y2 JP 2666086 U JP2666086 U JP 2666086U JP 2666086 U JP2666086 U JP 2666086U JP H0534110 Y2 JPH0534110 Y2 JP H0534110Y2
Authority
JP
Japan
Prior art keywords
wafer
wafers
container
semiconductor
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2666086U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62140731U (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2666086U priority Critical patent/JPH0534110Y2/ja
Publication of JPS62140731U publication Critical patent/JPS62140731U/ja
Application granted granted Critical
Publication of JPH0534110Y2 publication Critical patent/JPH0534110Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Packaging Frangible Articles (AREA)
JP2666086U 1986-02-27 1986-02-27 Expired - Lifetime JPH0534110Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2666086U JPH0534110Y2 (zh) 1986-02-27 1986-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2666086U JPH0534110Y2 (zh) 1986-02-27 1986-02-27

Publications (2)

Publication Number Publication Date
JPS62140731U JPS62140731U (zh) 1987-09-05
JPH0534110Y2 true JPH0534110Y2 (zh) 1993-08-30

Family

ID=30827949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2666086U Expired - Lifetime JPH0534110Y2 (zh) 1986-02-27 1986-02-27

Country Status (1)

Country Link
JP (1) JPH0534110Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004009472A1 (ja) * 2002-07-22 2004-01-29 Asahi Glass Company, Limited 大型ガラス板の搬送方法及び搬送用トレイ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004009472A1 (ja) * 2002-07-22 2004-01-29 Asahi Glass Company, Limited 大型ガラス板の搬送方法及び搬送用トレイ

Also Published As

Publication number Publication date
JPS62140731U (zh) 1987-09-05

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