JPH0533305B2 - - Google Patents

Info

Publication number
JPH0533305B2
JPH0533305B2 JP61278655A JP27865586A JPH0533305B2 JP H0533305 B2 JPH0533305 B2 JP H0533305B2 JP 61278655 A JP61278655 A JP 61278655A JP 27865586 A JP27865586 A JP 27865586A JP H0533305 B2 JPH0533305 B2 JP H0533305B2
Authority
JP
Japan
Prior art keywords
base material
graphite
film
support rod
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61278655A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63134663A (ja
Inventor
Masahisa Sanmonji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Carbon Co Ltd
Original Assignee
Tokai Carbon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Carbon Co Ltd filed Critical Tokai Carbon Co Ltd
Priority to JP27865586A priority Critical patent/JPS63134663A/ja
Publication of JPS63134663A publication Critical patent/JPS63134663A/ja
Publication of JPH0533305B2 publication Critical patent/JPH0533305B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP27865586A 1986-11-25 1986-11-25 カ−ボン基材面への被膜形成方法 Granted JPS63134663A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27865586A JPS63134663A (ja) 1986-11-25 1986-11-25 カ−ボン基材面への被膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27865586A JPS63134663A (ja) 1986-11-25 1986-11-25 カ−ボン基材面への被膜形成方法

Publications (2)

Publication Number Publication Date
JPS63134663A JPS63134663A (ja) 1988-06-07
JPH0533305B2 true JPH0533305B2 (enrdf_load_stackoverflow) 1993-05-19

Family

ID=17600309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27865586A Granted JPS63134663A (ja) 1986-11-25 1986-11-25 カ−ボン基材面への被膜形成方法

Country Status (1)

Country Link
JP (1) JPS63134663A (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5457043B2 (ja) 2009-01-30 2014-04-02 東洋炭素株式会社 Ｃｖｄ方法
JP5394092B2 (ja) 2009-02-10 2014-01-22 東洋炭素株式会社 Ｃｖｄ装置
JPWO2013054876A1 (ja) * 2011-10-14 2015-03-30 東洋炭素株式会社 Ｃｖｄ装置、該ｃｖｄ装置を用いたサセプターの製造方法、及びサセプター
JP6460659B2 (ja) * 2014-06-30 2019-01-30 イビデン株式会社 セラミック部材
JP6506056B2 (ja) * 2015-03-13 2019-04-24 イビデン株式会社 セラミック部材の製造方法
JP7083732B2 (ja) * 2017-12-04 2022-06-13 信越化学工業株式会社 炭化タンタル被覆炭素材料及び半導体単結晶製造装置用部材
KR102675266B1 (ko) * 2017-12-04 2024-06-14 신에쓰 가가꾸 고교 가부시끼가이샤 탄화탄탈 피복 탄소 재료 및 그 제조 방법, 반도체 단결정 제조 장치용 부재
JP7321768B2 (ja) 2018-05-23 2023-08-07 信越化学工業株式会社 化学気相成長装置および被膜形成方法
JP7470026B2 (ja) * 2020-12-10 2024-04-17 クアーズテック合同会社 サセプタ及びその製造方法
US20220411959A1 (en) * 2021-06-24 2022-12-29 Coorstek Kk Susceptor and manufacturing method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6030742A (ja) * 1983-07-29 1985-02-16 川崎重工業株式会社 立体構造物の結合構造

Also Published As

Publication number Publication date
JPS63134663A (ja) 1988-06-07

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