JPH0532898B2 - - Google Patents
Info
- Publication number
- JPH0532898B2 JPH0532898B2 JP63240498A JP24049888A JPH0532898B2 JP H0532898 B2 JPH0532898 B2 JP H0532898B2 JP 63240498 A JP63240498 A JP 63240498A JP 24049888 A JP24049888 A JP 24049888A JP H0532898 B2 JPH0532898 B2 JP H0532898B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- drawn
- positional
- resist film
- positional accuracy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 13
- 238000003745 diagnosis Methods 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- GTKRFUAGOKINCA-UHFFFAOYSA-M chlorosilver;silver Chemical compound [Ag].[Ag]Cl GTKRFUAGOKINCA-UHFFFAOYSA-M 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63240498A JPH0287614A (ja) | 1988-09-26 | 1988-09-26 | パターン位置精度診断方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63240498A JPH0287614A (ja) | 1988-09-26 | 1988-09-26 | パターン位置精度診断方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0287614A JPH0287614A (ja) | 1990-03-28 |
| JPH0532898B2 true JPH0532898B2 (enrdf_load_stackoverflow) | 1993-05-18 |
Family
ID=17060410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63240498A Granted JPH0287614A (ja) | 1988-09-26 | 1988-09-26 | パターン位置精度診断方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0287614A (enrdf_load_stackoverflow) |
-
1988
- 1988-09-26 JP JP63240498A patent/JPH0287614A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0287614A (ja) | 1990-03-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090518 Year of fee payment: 16 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090518 Year of fee payment: 16 |