JPH0531598Y2 - - Google Patents
Info
- Publication number
- JPH0531598Y2 JPH0531598Y2 JP17938285U JP17938285U JPH0531598Y2 JP H0531598 Y2 JPH0531598 Y2 JP H0531598Y2 JP 17938285 U JP17938285 U JP 17938285U JP 17938285 U JP17938285 U JP 17938285U JP H0531598 Y2 JPH0531598 Y2 JP H0531598Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- cleaning liquid
- processing
- filtration layer
- processing container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 claims description 60
- 239000007788 liquid Substances 0.000 claims description 44
- 238000001914 filtration Methods 0.000 claims description 41
- 239000000443 aerosol Substances 0.000 claims description 33
- 238000004891 communication Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 49
- 230000005587 bubbling Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000003595 mist Substances 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000010795 gaseous waste Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000941 radioactive substance Substances 0.000 description 1
- 239000002901 radioactive waste Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17938285U JPH0531598Y2 (US07714131-20100511-C00001.png) | 1985-11-21 | 1985-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17938285U JPH0531598Y2 (US07714131-20100511-C00001.png) | 1985-11-21 | 1985-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6286600U JPS6286600U (US07714131-20100511-C00001.png) | 1987-06-02 |
| JPH0531598Y2 true JPH0531598Y2 (US07714131-20100511-C00001.png) | 1993-08-13 |
Family
ID=31122394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17938285U Expired - Lifetime JPH0531598Y2 (US07714131-20100511-C00001.png) | 1985-11-21 | 1985-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0531598Y2 (US07714131-20100511-C00001.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0816310D0 (en) * | 2008-09-05 | 2008-10-15 | Mtt Technologies Ltd | Filter assembly |
| JP5674609B2 (ja) * | 2011-09-21 | 2015-02-25 | 株式会社流機エンジニアリング | 集塵装置及び集塵装置の洗浄方法 |
-
1985
- 1985-11-21 JP JP17938285U patent/JPH0531598Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6286600U (US07714131-20100511-C00001.png) | 1987-06-02 |
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