JPH0529391A - Manufacture of thick film circuit board - Google Patents

Manufacture of thick film circuit board

Info

Publication number
JPH0529391A
JPH0529391A JP3184416A JP18441691A JPH0529391A JP H0529391 A JPH0529391 A JP H0529391A JP 3184416 A JP3184416 A JP 3184416A JP 18441691 A JP18441691 A JP 18441691A JP H0529391 A JPH0529391 A JP H0529391A
Authority
JP
Japan
Prior art keywords
thick film
dried
resistor
printed
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3184416A
Other languages
Japanese (ja)
Inventor
Katsuhiro Nakano
克宏 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3184416A priority Critical patent/JPH0529391A/en
Publication of JPH0529391A publication Critical patent/JPH0529391A/en
Pending legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Wire Bonding (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

PURPOSE:To provide a method for manufacturing a thick film circuit board having excellent features, which has a simple line structure and a small facility investment amount, and can suppress dispersion of exhibiting resistance value of a formed resistor to a small value. CONSTITUTION:First, thick film resistor paste is printed on an alumina board 1, dried, then thick film Ag/Pt paste is printed, dried as it is without baking, both dried films are simultaneously baked to form electrodes, wirings for connecting a semiconductor chip, component lands 2 and a resistor 3 at the same time, then thick film overcoating glass is printed, dried and baked to form a circuit protecting overcoating glass 4. Thus, large effects can be realized at the points of a line structure, a facility investment amount, dispersing degree of exhibiting resistance value of the resistor.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体チップをフェー
スダウン方式にて半田接続で実装する場合等に用いるこ
とのできる電子部品実装用の厚膜回路基板の製造方法に
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a thick film circuit board for mounting electronic components, which can be used when a semiconductor chip is mounted by solder connection in a face-down method.

【0002】[0002]

【従来の技術】近年、厚膜回路基板の製造方法として
は、半導体チップをフェースダウン方式にて半田接続で
実装するニーズの高まりに対応して、導体材料として半
田濡れ性及び耐半田性に優れ且つコスト面でも有利な厚
膜Ag/Ptペーストを使用する方法が多く用いられて
いる。
2. Description of the Related Art In recent years, as a method for manufacturing a thick film circuit board, in response to an increasing need for mounting a semiconductor chip by solder connection in a face-down method, it has excellent solder wettability and solder resistance as a conductor material. In addition, a method of using a thick film Ag / Pt paste, which is advantageous in terms of cost, is often used.

【0003】以下に従来の厚膜回路基板の製造方法につ
いて説明する。図2は従来の製造方法を用いた厚膜回路
基板の断面図を示すものである。図2において、1はア
ルミナ基板であり、2は半導体チップ接続用電極,配
線,部品ランドであり、3は抵抗体、4は回路保護用オ
ーバーコートガラスである。
A conventional method for manufacturing a thick film circuit board will be described below. FIG. 2 shows a cross-sectional view of a thick film circuit board using a conventional manufacturing method. In FIG. 2, 1 is an alumina substrate, 2 is a semiconductor chip connecting electrode, wiring, and component land, 3 is a resistor, and 4 is a circuit protection overcoat glass.

【0004】以上のように構成された厚膜回路基板につ
いて、以下具体的にその製造方法について説明する。ま
ずアルミナ基板1上に厚膜Ag/Ptペーストを印刷乾
燥後、焼成して半導体チップ接続用電極,配線,部品ラ
ンド2を形成する。続いて厚膜抵抗体ペーストを印刷乾
燥後、焼成して抵抗体3を形成する。さらに厚膜ガラス
ペーストを印刷乾燥後、焼成して回路保護用オーバーコ
ートガラス4を形成する。
A method of manufacturing the thick film circuit board having the above structure will be described below in detail. First, a thick film Ag / Pt paste is printed and dried on the alumina substrate 1 and baked to form electrodes for semiconductor chip connection, wiring, and component lands 2. Subsequently, the thick film resistor paste is printed and dried, and then fired to form the resistor 3. Further, the thick film glass paste is printed and dried, and then fired to form the circuit protection overcoat glass 4.

【0005】[0005]

【発明が解決しようとする課題】しかしながら上記の構
成による厚膜回路基板の製造方法では、製造工程中に焼
成工程が3工程も存在するために、製造ラインが冗長で
設備投資額も大きくなるという問題点を有し、さらに半
導体チップ接続用電極,配線,部品ランドを形成した後
の非常に起伏の大きい膜面に厚膜抵抗体ペーストを印刷
するために、その出現抵抗値の分散が非常に大きくなる
という課題も有していた。
However, in the method of manufacturing a thick film circuit board having the above-mentioned structure, since there are as many as three baking steps in the manufacturing process, the manufacturing line is redundant and the capital investment is large. Since the thick film resistor paste is printed on a film surface having a problem and having a very large undulation after the electrodes for connecting the semiconductor chip, the wiring, and the component land are formed, the dispersion of the resistance value appears very much. It also had the problem of becoming larger.

【0006】本発明は、上記従来の課題を解決するもの
で、簡潔なライン構成を有し設備投資額も小さく、形成
された抵抗体の出現抵抗値の分散も小さく抑えることが
可能な厚膜回路基板の製造方法を提供することを目的と
する。
The present invention solves the above-mentioned conventional problems, and has a simple line structure, a small amount of capital investment, and a small dispersion of the resistance value of the formed resistor. An object is to provide a method for manufacturing a circuit board.

【0007】[0007]

【課題を解決するための手段】この目的を達成するため
に本発明の製造方法による厚膜回路基板は、まずアルミ
ナ基板上に厚膜抵抗体ペーストを印刷乾燥後焼成せずに
そのまま厚膜Ag/Ptペーストの印刷乾燥を行い、両
乾燥膜を同時に焼成して半導体チップ接続用電極,配
線,部品ランド及び抵抗体を一挙に形成し、その後厚膜
オーバーコートガラスを印刷乾燥後、焼成して回路保護
用オーバーコートガラスを形成するという構成を有して
いる。
In order to achieve this object, a thick film circuit board manufactured by the method of the present invention is as follows. / Pt paste is printed and dried, and both dried films are simultaneously fired to form electrodes for semiconductor chip connection, wiring, component lands, and resistors all at once, and then thick film overcoat glass is dried by printing and fired. It has a structure of forming an overcoat glass for circuit protection.

【0008】[0008]

【作用】この構成による厚膜回路基板の製造方法では、
製造工程中に焼成工程が2工程しか存在せずライン構成
が簡潔であり設備投資額も小さくすませることができ、
さらに半導体チップ接続用電極,配線,部品ランドを形
成する前の起伏の少ないアルミナ基板上に直接厚膜抵抗
体ペーストの印刷を行うため、その出現抵抗値の分散も
小さく抑えることが可能である。
In the method of manufacturing the thick film circuit board having this structure,
Since there are only two firing processes in the manufacturing process, the line configuration is simple and the capital investment can be reduced.
Further, since the thick film resistor paste is printed directly on the alumina substrate with less undulation before the semiconductor chip connecting electrodes, wirings, and component lands are formed, it is possible to suppress the dispersion of the appearing resistance value.

【0009】[0009]

【実施例】以下、本発明の一実施例について、図面を参
照しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0010】図1において、1はアルミナ基板であり、
2は半導体チップ接続用電極,配線,部品ランドであ
り、3は抵抗体であり、4は回路保護用オーバーコート
ガラスである。
In FIG. 1, 1 is an alumina substrate,
Reference numeral 2 is a semiconductor chip connecting electrode, wiring, and component land, 3 is a resistor, and 4 is a circuit protection overcoat glass.

【0011】以上のように構成された厚膜回路基板につ
いて、以下具体的にその製造方法について説明する。ま
ずアルミナ基板1上に厚膜抵抗体ペーストを印刷乾燥後
焼成せずにそのまま厚膜Ag/Ptペーストの印刷乾燥
を行い、両乾燥膜を同時に焼成して半導体チップ接続用
電極,配線,部品ランド2及び抵抗体3を一挙に形成
し、その後厚膜オーバーコートガラスを印刷乾燥後、焼
成して回路保護用オーバーコートガラス4を形成する。
A method of manufacturing the thick film circuit board having the above-described structure will be described below in detail. First, the thick film resistor paste is printed and dried on the alumina substrate 1 and then the thick film Ag / Pt paste is directly printed and dried without firing, and both dried films are fired at the same time to form electrodes for semiconductor chip connection, wiring, and component land. 2 and the resistor 3 are formed all at once, and then the thick film overcoat glass is printed, dried, and fired to form the circuit protection overcoat glass 4.

【0012】本実施例による厚膜回路基板の製造方法の
特徴と従来の厚膜回路基板の製造方法の特徴を(表1)
に比較して示している。
The characteristics of the method for manufacturing the thick film circuit board according to this embodiment and the characteristics of the conventional method for manufacturing the thick film circuit board are shown in Table 1 below.
It shows in comparison with.

【0013】[0013]

【表1】 [Table 1]

【0014】この(表1)から明らかなように、本実施
例による厚膜回路基板の製造方法は、ライン構成、設備
投資額、抵抗体の出現抵抗値の分散度合の点で優れた効
果が得られる。
As is clear from (Table 1), the method for manufacturing the thick film circuit board according to this embodiment has excellent effects in terms of the line configuration, the amount of equipment investment, and the degree of dispersion of the resistance values of the resistors. can get.

【0015】以上のように本実施例によれば、まずアル
ミナ基板1上に厚膜抵抗体ペーストを印刷乾燥後焼成せ
ずにそのまま厚膜Ag/Ptペーストの印刷乾燥を行
い、両乾燥膜を同時に焼成して半導体チップ接続用電
極,配線,部品ランド2及び抵抗体3を一挙に形成し、
その後厚膜オーバーコートガラスを印刷乾燥後、焼成し
て回路保護用オーバーコートガラス4を形成するため、
製造工程中に焼成工程が1回しか存在せずライン構成が
簡潔であり且つ設備投資額も小さくすることができ、さ
らに半導体チップ接続用電極,配線,部品ランドを形成
する前の起伏の少ないアルミナ基板上に直接厚膜抵抗体
ペーストの印刷を行うため、その出現抵抗値の分散も小
さく抑えることが可能である。
As described above, according to the present embodiment, first, the thick film resistor paste is printed and dried on the alumina substrate 1 and then the thick film Ag / Pt paste is directly printed and dried without firing, and both dried films are formed. Simultaneously baking to form electrodes for semiconductor chip connection, wiring, component land 2 and resistor 3 all at once,
After that, the thick film overcoat glass is printed and dried, and then baked to form the circuit protection overcoat glass 4,
Since the firing process only exists once during the manufacturing process, the line structure is simple and the capital investment can be reduced, and furthermore, there is little undulation before forming electrodes for semiconductor chip connection, wiring, and component lands. Since the thick film resistor paste is printed directly on the substrate, it is possible to suppress the dispersion of the appearing resistance value to be small.

【0016】[0016]

【発明の効果】以上のように本発明は、まずアルミナ基
板上に厚膜抵抗体ペーストを印刷乾燥後焼成せずにその
まま厚膜Ag/Ptペーストの印刷乾燥を行い。両乾燥
膜を同時に焼成して半導体チップ接続用電極,配線,部
品ランドおよび抵抗体を一挙に形成し、その後厚膜オー
バーコートガラスを印刷乾燥後、焼成して回路保護用オ
ーバーコートガラスを形成することにより、簡潔なライ
ン構成を有し設備投資額も小さく、形成された抵抗体の
出現抵抗値の分散も小さく抑えることが可能な優れた厚
膜回路基板の製造方法を提供できる。
As described above, according to the present invention, the thick film resistor paste is first printed and dried on the alumina substrate, and then the thick film Ag / Pt paste is directly printed and dried without firing. Both dry films are simultaneously fired to form electrodes for semiconductor chip connection, wiring, component lands and resistors all at once, and then the thick film overcoat glass is printed and dried and then fired to form the circuit protection overcoat glass. As a result, it is possible to provide an excellent method for manufacturing a thick film circuit board, which has a simple line configuration, requires a small amount of capital investment, and can suppress the dispersion of the resistance values of the formed resistors.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の厚膜回路基板の製造方法を
示す断面図
FIG. 1 is a sectional view showing a method of manufacturing a thick film circuit board according to an embodiment of the present invention.

【図2】従来の厚膜回路基板の製造方法を示す断面図FIG. 2 is a sectional view showing a conventional method for manufacturing a thick film circuit board.

【符号の説明】[Explanation of symbols]

1 アルミナ基板 2 半導体チップ接続用電極,配線,部品ランド 3 抵抗体 4 回路保護用オーバーコートガラス 1 Alumina substrate 2 Semiconductor chip connection electrodes, wiring, component land 3 Resistor 4 Circuit protection overcoat glass

Claims (1)

【特許請求の範囲】 【請求項1】 抵抗体を形成するための厚膜抵抗体ペー
ストを印刷乾燥後、半導体チップ接続用電極、配線およ
び部品ランドのうち少なくとも一つを形成するための厚
膜Ag/Ptペーストを印刷乾燥し、その乾燥膜と前記
乾燥膜の両者を同時に焼成する工程を少なくとも有する
ことを特徴とする厚膜回路基板の製造方法。
Claim: What is claimed is: 1. A thick film for forming at least one of a semiconductor chip connecting electrode, a wiring and a component land after printing and drying a thick film resistor paste for forming a resistor. A method of manufacturing a thick film circuit board, comprising at least a step of printing and drying an Ag / Pt paste and simultaneously firing both the dried film and the dried film.
JP3184416A 1991-07-24 1991-07-24 Manufacture of thick film circuit board Pending JPH0529391A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3184416A JPH0529391A (en) 1991-07-24 1991-07-24 Manufacture of thick film circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3184416A JPH0529391A (en) 1991-07-24 1991-07-24 Manufacture of thick film circuit board

Publications (1)

Publication Number Publication Date
JPH0529391A true JPH0529391A (en) 1993-02-05

Family

ID=16152787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3184416A Pending JPH0529391A (en) 1991-07-24 1991-07-24 Manufacture of thick film circuit board

Country Status (1)

Country Link
JP (1) JPH0529391A (en)

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