JPH0528773Y2 - - Google Patents

Info

Publication number
JPH0528773Y2
JPH0528773Y2 JP1987007163U JP716387U JPH0528773Y2 JP H0528773 Y2 JPH0528773 Y2 JP H0528773Y2 JP 1987007163 U JP1987007163 U JP 1987007163U JP 716387 U JP716387 U JP 716387U JP H0528773 Y2 JPH0528773 Y2 JP H0528773Y2
Authority
JP
Japan
Prior art keywords
voltage
wafer
insulator
sample
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987007163U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63115223U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987007163U priority Critical patent/JPH0528773Y2/ja
Publication of JPS63115223U publication Critical patent/JPS63115223U/ja
Application granted granted Critical
Publication of JPH0528773Y2 publication Critical patent/JPH0528773Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Automatic Assembly (AREA)
  • Feeding Of Workpieces (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1987007163U 1987-01-20 1987-01-20 Expired - Lifetime JPH0528773Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987007163U JPH0528773Y2 (enrdf_load_stackoverflow) 1987-01-20 1987-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987007163U JPH0528773Y2 (enrdf_load_stackoverflow) 1987-01-20 1987-01-20

Publications (2)

Publication Number Publication Date
JPS63115223U JPS63115223U (enrdf_load_stackoverflow) 1988-07-25
JPH0528773Y2 true JPH0528773Y2 (enrdf_load_stackoverflow) 1993-07-23

Family

ID=30790362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987007163U Expired - Lifetime JPH0528773Y2 (enrdf_load_stackoverflow) 1987-01-20 1987-01-20

Country Status (1)

Country Link
JP (1) JPH0528773Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010038487A1 (ja) * 2008-09-30 2010-04-08 三菱重工業株式会社 ウェハ接合装置およびウェハ接合方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244332A (ja) * 1985-08-23 1987-02-26 Canon Inc 静電吸着装置
JPH0671944B2 (ja) * 1985-12-25 1994-09-14 太平化学製品株式会社 静電保持装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010038487A1 (ja) * 2008-09-30 2010-04-08 三菱重工業株式会社 ウェハ接合装置およびウェハ接合方法
US9130000B2 (en) 2008-09-30 2015-09-08 Mitsubishi Heavy Industries Wafer bonding device and wafer bonding method

Also Published As

Publication number Publication date
JPS63115223U (enrdf_load_stackoverflow) 1988-07-25

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