JPS63115223U - - Google Patents
Info
- Publication number
- JPS63115223U JPS63115223U JP716387U JP716387U JPS63115223U JP S63115223 U JPS63115223 U JP S63115223U JP 716387 U JP716387 U JP 716387U JP 716387 U JP716387 U JP 716387U JP S63115223 U JPS63115223 U JP S63115223U
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- conductor
- insulator
- power source
- adsorption device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Feeding Of Workpieces (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Jigs For Machine Tools (AREA)
- Automatic Assembly (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007163U JPH0528773Y2 (enrdf_load_stackoverflow) | 1987-01-20 | 1987-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007163U JPH0528773Y2 (enrdf_load_stackoverflow) | 1987-01-20 | 1987-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63115223U true JPS63115223U (enrdf_load_stackoverflow) | 1988-07-25 |
| JPH0528773Y2 JPH0528773Y2 (enrdf_load_stackoverflow) | 1993-07-23 |
Family
ID=30790362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987007163U Expired - Lifetime JPH0528773Y2 (enrdf_load_stackoverflow) | 1987-01-20 | 1987-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528773Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4786693B2 (ja) * | 2008-09-30 | 2011-10-05 | 三菱重工業株式会社 | ウェハ接合装置およびウェハ接合方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6244332A (ja) * | 1985-08-23 | 1987-02-26 | Canon Inc | 静電吸着装置 |
| JPS62153034A (ja) * | 1985-12-25 | 1987-07-08 | Taihei Kagaku Seihin Kk | 静電保持装置 |
-
1987
- 1987-01-20 JP JP1987007163U patent/JPH0528773Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6244332A (ja) * | 1985-08-23 | 1987-02-26 | Canon Inc | 静電吸着装置 |
| JPS62153034A (ja) * | 1985-12-25 | 1987-07-08 | Taihei Kagaku Seihin Kk | 静電保持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528773Y2 (enrdf_load_stackoverflow) | 1993-07-23 |