JPH0528770Y2 - - Google Patents
Info
- Publication number
- JPH0528770Y2 JPH0528770Y2 JP18376086U JP18376086U JPH0528770Y2 JP H0528770 Y2 JPH0528770 Y2 JP H0528770Y2 JP 18376086 U JP18376086 U JP 18376086U JP 18376086 U JP18376086 U JP 18376086U JP H0528770 Y2 JPH0528770 Y2 JP H0528770Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- arm
- transport
- transported
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 27
- 238000012546 transfer Methods 0.000 claims description 19
- 230000007723 transport mechanism Effects 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 230000032258 transport Effects 0.000 description 17
- 239000000758 substrate Substances 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Load-Engaging Elements For Cranes (AREA)
- Special Conveying (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18376086U JPH0528770Y2 (enrdf_load_stackoverflow) | 1986-12-01 | 1986-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18376086U JPH0528770Y2 (enrdf_load_stackoverflow) | 1986-12-01 | 1986-12-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6389242U JPS6389242U (enrdf_load_stackoverflow) | 1988-06-10 |
| JPH0528770Y2 true JPH0528770Y2 (enrdf_load_stackoverflow) | 1993-07-23 |
Family
ID=31130797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18376086U Expired - Lifetime JPH0528770Y2 (enrdf_load_stackoverflow) | 1986-12-01 | 1986-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528770Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100946994B1 (ko) * | 2005-10-04 | 2010-03-10 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 반도체 장치의 제조 방법 |
-
1986
- 1986-12-01 JP JP18376086U patent/JPH0528770Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6389242U (enrdf_load_stackoverflow) | 1988-06-10 |
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