JPH0528761B2 - - Google Patents
Info
- Publication number
- JPH0528761B2 JPH0528761B2 JP21333485A JP21333485A JPH0528761B2 JP H0528761 B2 JPH0528761 B2 JP H0528761B2 JP 21333485 A JP21333485 A JP 21333485A JP 21333485 A JP21333485 A JP 21333485A JP H0528761 B2 JPH0528761 B2 JP H0528761B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- position sensor
- measured
- light
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 42
- 238000005259 measurement Methods 0.000 claims description 38
- 230000035945 sensitivity Effects 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 15
- 230000004907 flux Effects 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 230000012447 hatching Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21333485A JPS6271811A (ja) | 1985-09-26 | 1985-09-26 | 変位変換器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21333485A JPS6271811A (ja) | 1985-09-26 | 1985-09-26 | 変位変換器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6271811A JPS6271811A (ja) | 1987-04-02 |
| JPH0528761B2 true JPH0528761B2 (US20100268047A1-20101021-C00003.png) | 1993-04-27 |
Family
ID=16637433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21333485A Granted JPS6271811A (ja) | 1985-09-26 | 1985-09-26 | 変位変換器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6271811A (US20100268047A1-20101021-C00003.png) |
-
1985
- 1985-09-26 JP JP21333485A patent/JPS6271811A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6271811A (ja) | 1987-04-02 |
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