JPH0528759Y2 - - Google Patents
Info
- Publication number
- JPH0528759Y2 JPH0528759Y2 JP1985042227U JP4222785U JPH0528759Y2 JP H0528759 Y2 JPH0528759 Y2 JP H0528759Y2 JP 1985042227 U JP1985042227 U JP 1985042227U JP 4222785 U JP4222785 U JP 4222785U JP H0528759 Y2 JPH0528759 Y2 JP H0528759Y2
- Authority
- JP
- Japan
- Prior art keywords
- disc
- cleaning
- porous elastic
- cleaned
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985042227U JPH0528759Y2 (pm) | 1985-03-23 | 1985-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985042227U JPH0528759Y2 (pm) | 1985-03-23 | 1985-03-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61158948U JPS61158948U (pm) | 1986-10-02 |
| JPH0528759Y2 true JPH0528759Y2 (pm) | 1993-07-23 |
Family
ID=30552784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985042227U Expired - Lifetime JPH0528759Y2 (pm) | 1985-03-23 | 1985-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528759Y2 (pm) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998020987A1 (en) * | 1996-11-08 | 1998-05-22 | Kanebo Limited | Sponge roller for cleaning |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3200036B2 (ja) * | 1998-05-22 | 2001-08-20 | アイオン株式会社 | 洗浄用回転ブラシ |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6014206B2 (ja) * | 1979-10-17 | 1985-04-12 | 日本特殊研砥株式会社 | ポリビニルアセタ−ルスポンジロ−ルの製造方法 |
| JPS598352U (ja) * | 1982-07-09 | 1984-01-19 | 能美防災工業株式会社 | 石炭などの可燃物の貯蔵所の防火装置 |
| JPS59170852U (ja) * | 1983-04-28 | 1984-11-15 | シャープ株式会社 | フオトマスク洗浄装置 |
| JPS6096825U (ja) * | 1983-12-07 | 1985-07-02 | 株式会社東芝 | 洗浄用ブラシ |
| JPS618735A (ja) * | 1984-06-22 | 1986-01-16 | Mitsubishi Chem Ind Ltd | ワ−ク洗浄装置 |
-
1985
- 1985-03-23 JP JP1985042227U patent/JPH0528759Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998020987A1 (en) * | 1996-11-08 | 1998-05-22 | Kanebo Limited | Sponge roller for cleaning |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61158948U (pm) | 1986-10-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4566911A (en) | Method for cleaning article by scrubbing with cleaning roll | |
| US4239567A (en) | Removably holding planar articles for polishing operations | |
| CN101266803B (zh) | 圆盘状基板的制造方法、清洗装置 | |
| EP1080797A3 (en) | Method and apparatus for cleaning workpiece | |
| CN1583842A (zh) | 多孔聚氨基甲酸乙酯抛光片 | |
| JPH11625A (ja) | ウェーハの洗浄装置 | |
| US6802877B2 (en) | Polyvinyl acetal composition roller brush with abrasive outer surface | |
| JP2009117765A (ja) | 洗浄用スポンジローラ | |
| KR100487589B1 (ko) | 평면 피가공물의 폴리싱과 세정방법 및 장치 | |
| JPH0528759Y2 (pm) | ||
| US20020129834A1 (en) | Pad for use in a critical environment | |
| US20080276394A1 (en) | Scrubbing device and roll sponge assembly used therein | |
| US6568999B2 (en) | Method and apparatus for cleaning a surface of a microelectronic substrate | |
| JP3680185B2 (ja) | 洗浄用ローラ | |
| JP2004040011A (ja) | 基板の供給取出治具、供給取出装置および供給取出方法 | |
| JPS646953Y2 (pm) | ||
| US20020155273A1 (en) | Polyvinyl acetal composition skinless roller brush | |
| JPS61271157A (ja) | 洗車機用洗浄材 | |
| WO2010125663A1 (ja) | 洗浄用スポンジローラ | |
| JP5446208B2 (ja) | スクラブ部材浄化方法、スクラブ部材浄化装置、スクラブ洗浄装置、ディスク材、並びに磁気ディスク | |
| JPH0335429Y2 (pm) | ||
| JPH0718316Y2 (ja) | 皮剥きローラ | |
| JPS6218369Y2 (pm) | ||
| WO2022186227A1 (ja) | ブラシローラ | |
| JPS6393653A (ja) | 洗車用ロ−ラによる洗車法 |