JPH0527972B2 - - Google Patents

Info

Publication number
JPH0527972B2
JPH0527972B2 JP59208089A JP20808984A JPH0527972B2 JP H0527972 B2 JPH0527972 B2 JP H0527972B2 JP 59208089 A JP59208089 A JP 59208089A JP 20808984 A JP20808984 A JP 20808984A JP H0527972 B2 JPH0527972 B2 JP H0527972B2
Authority
JP
Japan
Prior art keywords
etching
phosphoric acid
hydrogen peroxide
mixing ratio
inp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59208089A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6187339A (ja
Inventor
Takashi Udagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59208089A priority Critical patent/JPS6187339A/ja
Publication of JPS6187339A publication Critical patent/JPS6187339A/ja
Publication of JPH0527972B2 publication Critical patent/JPH0527972B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
JP59208089A 1984-10-05 1984-10-05 リン化インジウム結晶のエツチング方法 Granted JPS6187339A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59208089A JPS6187339A (ja) 1984-10-05 1984-10-05 リン化インジウム結晶のエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59208089A JPS6187339A (ja) 1984-10-05 1984-10-05 リン化インジウム結晶のエツチング方法

Publications (2)

Publication Number Publication Date
JPS6187339A JPS6187339A (ja) 1986-05-02
JPH0527972B2 true JPH0527972B2 (enExample) 1993-04-22

Family

ID=16550452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59208089A Granted JPS6187339A (ja) 1984-10-05 1984-10-05 リン化インジウム結晶のエツチング方法

Country Status (1)

Country Link
JP (1) JPS6187339A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5520045B2 (ja) * 2007-03-27 2014-06-11 Ｊｘ日鉱日石金属株式会社 エピタキシャル成長用基板及びエピタキシャル成長方法

Also Published As

Publication number Publication date
JPS6187339A (ja) 1986-05-02

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