JPH0525683Y2 - - Google Patents
Info
- Publication number
- JPH0525683Y2 JPH0525683Y2 JP600888U JP600888U JPH0525683Y2 JP H0525683 Y2 JPH0525683 Y2 JP H0525683Y2 JP 600888 U JP600888 U JP 600888U JP 600888 U JP600888 U JP 600888U JP H0525683 Y2 JPH0525683 Y2 JP H0525683Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- air blowing
- filter plate
- filter
- blowing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007664 blowing Methods 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP600888U JPH0525683Y2 (show.php) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP600888U JPH0525683Y2 (show.php) | 1988-01-22 | 1988-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01110817U JPH01110817U (show.php) | 1989-07-26 |
| JPH0525683Y2 true JPH0525683Y2 (show.php) | 1993-06-29 |
Family
ID=31209876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP600888U Expired - Lifetime JPH0525683Y2 (show.php) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0525683Y2 (show.php) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6253236B2 (ja) * | 2013-02-15 | 2017-12-27 | 三菱電機株式会社 | 除塵装置及び空気調和装置 |
-
1988
- 1988-01-22 JP JP600888U patent/JPH0525683Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01110817U (show.php) | 1989-07-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE101059T1 (de) | Luftreiniger fuer innenraeume. | |
| JPH0525683Y2 (show.php) | ||
| JPH0322547B2 (show.php) | ||
| JPH06318631A (ja) | ウエハ搬送用ボックス | |
| JPH06323616A (ja) | クリーンルームの給気吹出ユニット | |
| JPH11218355A (ja) | フィルタ一体型気流吹き出しユニット | |
| CN209237549U (zh) | 一种布袋除尘器 | |
| JPH04247207A (ja) | エアフィルター | |
| JPH04118015A (ja) | 簡易型クリーンルーム | |
| JPH0713775Y2 (ja) | クリーンルームのフィルタ取付枠 | |
| JP3350890B2 (ja) | クリーンルーム内清浄度制御装置 | |
| JP2747024B2 (ja) | 清浄室 | |
| JPS5849451A (ja) | 電気集塵機 | |
| CN217961679U (zh) | 一种具有降温功能的安全型布袋除尘器 | |
| CN108098703A (zh) | 具有高空气洁净度的净化工作台 | |
| KR200185513Y1 (ko) | 청정실 송풍장치 | |
| JPH0354339Y2 (show.php) | ||
| JPH0416252A (ja) | 空気清浄器 | |
| JPS584573Y2 (ja) | 空気清浄機 | |
| JPH01281350A (ja) | クリーンルーム | |
| JPS62297650A (ja) | コンベンシヨナルフロ−形クリ−ンル−ム | |
| JPS6391116A (ja) | エアフイルタ | |
| US5102437A (en) | Mounting frame for a filter disposed at the front of the ceiling in a clean room | |
| CN107178829A (zh) | 一种单元整合式空气净化系统 | |
| JPS58149143U (ja) | 電気掃除機用吸込口体 |