JPH0524481B2 - - Google Patents

Info

Publication number
JPH0524481B2
JPH0524481B2 JP57194150A JP19415082A JPH0524481B2 JP H0524481 B2 JPH0524481 B2 JP H0524481B2 JP 57194150 A JP57194150 A JP 57194150A JP 19415082 A JP19415082 A JP 19415082A JP H0524481 B2 JPH0524481 B2 JP H0524481B2
Authority
JP
Japan
Prior art keywords
photoresist
diffraction grating
substrate
optical
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57194150A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5983111A (ja
Inventor
Kenji Okamoto
Yoshikazu Nishiwaki
Haruji Matsuoka
Yozo Nishiura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP19415082A priority Critical patent/JPS5983111A/ja
Priority to US06/548,591 priority patent/US4517280A/en
Priority to EP83110986A priority patent/EP0110184B1/en
Priority to DE8383110986T priority patent/DE3370078D1/de
Publication of JPS5983111A publication Critical patent/JPS5983111A/ja
Publication of JPH0524481B2 publication Critical patent/JPH0524481B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP19415082A 1982-11-04 1982-11-04 光集積回路作製法 Granted JPS5983111A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP19415082A JPS5983111A (ja) 1982-11-04 1982-11-04 光集積回路作製法
US06/548,591 US4517280A (en) 1982-11-04 1983-11-03 Process for fabricating integrated optics
EP83110986A EP0110184B1 (en) 1982-11-04 1983-11-03 Process for fabricating integrated optics
DE8383110986T DE3370078D1 (en) 1982-11-04 1983-11-03 Process for fabricating integrated optics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19415082A JPS5983111A (ja) 1982-11-04 1982-11-04 光集積回路作製法

Publications (2)

Publication Number Publication Date
JPS5983111A JPS5983111A (ja) 1984-05-14
JPH0524481B2 true JPH0524481B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-08

Family

ID=16319744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19415082A Granted JPS5983111A (ja) 1982-11-04 1982-11-04 光集積回路作製法

Country Status (1)

Country Link
JP (1) JPS5983111A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7142282B2 (en) * 2003-10-17 2006-11-28 Intel Corporation Device including contacts
US20050085085A1 (en) * 2003-10-17 2005-04-21 Yan Borodovsky Composite patterning with trenches
DE102005006277B4 (de) * 2005-02-10 2007-09-20 Ovd Kinegram Ag Verfahren zur Herstellung eines Mehrschichtkörpers
KR100881140B1 (ko) * 2007-08-09 2009-02-02 삼성전기주식회사 나노패턴 형성장치 및 이를 이용한 나노패턴 형성방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53124457A (en) * 1977-04-06 1978-10-30 Toshiba Corp Light amprification circuit
JPS6029921B2 (ja) * 1977-08-23 1985-07-13 日本電信電話株式会社 回折格子作製方法

Also Published As

Publication number Publication date
JPS5983111A (ja) 1984-05-14

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