JPH05232684A - 位相シフト・リソグラフィマスクの作製 - Google Patents
位相シフト・リソグラフィマスクの作製Info
- Publication number
- JPH05232684A JPH05232684A JP31068292A JP31068292A JPH05232684A JP H05232684 A JPH05232684 A JP H05232684A JP 31068292 A JP31068292 A JP 31068292A JP 31068292 A JP31068292 A JP 31068292A JP H05232684 A JPH05232684 A JP H05232684A
- Authority
- JP
- Japan
- Prior art keywords
- patterned
- resist layer
- layer
- actinic radiation
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/30—Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US79749591A | 1991-11-22 | 1991-11-22 | |
US797495 | 1991-11-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05232684A true JPH05232684A (ja) | 1993-09-10 |
Family
ID=25170988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP31068292A Pending JPH05232684A (ja) | 1991-11-22 | 1992-11-20 | 位相シフト・リソグラフィマスクの作製 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5338626A (fr) |
EP (1) | EP0543569B1 (fr) |
JP (1) | JPH05232684A (fr) |
DE (1) | DE69228585T2 (fr) |
SG (1) | SG50543A1 (fr) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5380609A (en) * | 1992-07-30 | 1995-01-10 | Dai Nippon Printing Co., Ltd. | Method for fabricating photomasks having a phase shift layer comprising the use of a positive to negative resist, substrate imaging and heating |
US5718829A (en) * | 1995-09-01 | 1998-02-17 | Micron Technology, Inc. | Phase shift structure and method of fabrication |
US5741624A (en) | 1996-02-13 | 1998-04-21 | Micron Technology, Inc. | Method for reducing photolithographic steps in a semiconductor interconnect process |
US6114082A (en) * | 1996-09-16 | 2000-09-05 | International Business Machines Corporation | Frequency doubling hybrid photoresist having negative and positive tone components and method of preparing the same |
US5780187A (en) * | 1997-02-26 | 1998-07-14 | Micron Technology, Inc. | Repair of reflective photomask used in semiconductor process |
US5935734A (en) * | 1997-03-03 | 1999-08-10 | Micron Technology, Inc. | Method for fabrication of and apparatus for use as a semiconductor photomask |
JP3474740B2 (ja) * | 1997-03-25 | 2003-12-08 | 株式会社東芝 | フォトマスクの設計方法 |
US5861330A (en) | 1997-05-07 | 1999-01-19 | International Business Machines Corporation | Method and structure to reduce latch-up using edge implants |
US6185473B1 (en) * | 1998-01-08 | 2001-02-06 | Micron Technology, Inc. | Optical pattern transfer tool |
US6110624A (en) * | 1999-01-04 | 2000-08-29 | International Business Machines Corporation | Multiple polarity mask exposure method |
EP1143300A1 (fr) * | 2000-04-03 | 2001-10-10 | Shipley Company LLC | Compositions pour photoréserves et leur utilisation |
ATE426828T1 (de) * | 2005-03-31 | 2009-04-15 | Pgt Photonics Spa | Verfahren zur herstellung eines umlenkspiegels in optischen wellenleiterbauelementen |
CN102096334B (zh) * | 2010-12-22 | 2012-08-08 | 中国科学院光电技术研究所 | 一种基于移相原理提高分辨率的超衍射成像器件及其制作方法 |
CN104485312A (zh) * | 2014-12-30 | 2015-04-01 | 华天科技(西安)有限公司 | 一种改善muf工艺基板外围溢料的基板及其制造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE290670C (fr) * | ||||
DE3712335A1 (de) * | 1987-04-11 | 1988-10-20 | Vdo Schindling | Verfahren zur herstellung einer struktur |
US4948706A (en) * | 1987-12-30 | 1990-08-14 | Hoya Corporation | Process for producing transparent substrate having thereon transparent conductive pattern elements separated by light-shielding insulating film, and process for producing surface-colored material |
JPH03228053A (ja) * | 1990-02-01 | 1991-10-09 | Fujitsu Ltd | 光露光レチクル |
-
1992
- 1992-11-12 EP EP92310341A patent/EP0543569B1/fr not_active Expired - Lifetime
- 1992-11-12 DE DE69228585T patent/DE69228585T2/de not_active Expired - Fee Related
- 1992-11-12 SG SG1996004583A patent/SG50543A1/en unknown
- 1992-11-20 JP JP31068292A patent/JPH05232684A/ja active Pending
- 1992-11-25 US US07/982,270 patent/US5338626A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5338626A (en) | 1994-08-16 |
SG50543A1 (en) | 1998-07-20 |
EP0543569A1 (fr) | 1993-05-26 |
EP0543569B1 (fr) | 1999-03-10 |
DE69228585T2 (de) | 1999-08-19 |
DE69228585D1 (de) | 1999-04-15 |
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