JPH0522729Y2 - - Google Patents
Info
- Publication number
- JPH0522729Y2 JPH0522729Y2 JP601188U JP601188U JPH0522729Y2 JP H0522729 Y2 JPH0522729 Y2 JP H0522729Y2 JP 601188 U JP601188 U JP 601188U JP 601188 U JP601188 U JP 601188U JP H0522729 Y2 JPH0522729 Y2 JP H0522729Y2
- Authority
- JP
- Japan
- Prior art keywords
- rails
- curtain
- rail
- clean
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Curtains And Furnishings For Windows Or Doors (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP601188U JPH0522729Y2 (OSRAM) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP601188U JPH0522729Y2 (OSRAM) | 1988-01-22 | 1988-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01112350U JPH01112350U (OSRAM) | 1989-07-28 |
| JPH0522729Y2 true JPH0522729Y2 (OSRAM) | 1993-06-11 |
Family
ID=31209882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP601188U Expired - Lifetime JPH0522729Y2 (OSRAM) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0522729Y2 (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4693971B2 (ja) * | 2000-09-29 | 2011-06-01 | 日本無機株式会社 | 搬送用クリーンユニット |
-
1988
- 1988-01-22 JP JP601188U patent/JPH0522729Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01112350U (OSRAM) | 1989-07-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100197900B1 (ko) | 반도체 청정실용의 공기조화시스템 | |
| US4409889A (en) | Modular clean room | |
| US3570385A (en) | Modular panel system for clean room | |
| JPH0136009B2 (OSRAM) | ||
| WO1994017336A1 (en) | Environmental control system | |
| GB2176278A (en) | Clean room constructing system | |
| KR20050019576A (ko) | 공기 청정 장치 및 방법 | |
| JPH0522729Y2 (OSRAM) | ||
| JPH064125B2 (ja) | クリ−ンベンチ | |
| US5069113A (en) | Stacked and cross-connected recirculating fans in a semiconductor manufacturing cleanroom | |
| JPH05106888A (ja) | 連結式クリーン空間装置 | |
| JP3427921B2 (ja) | 半導体装置生産用クリーンルームおよび半導体装置の生産方法 | |
| JP2536188B2 (ja) | 空気清浄装置 | |
| JP2904011B2 (ja) | クリーンルーム | |
| JPH10311556A (ja) | 空調方法及び空調装置 | |
| JPH10141723A5 (OSRAM) | ||
| JPH08247512A (ja) | クリーンルーム | |
| JPH07310941A (ja) | クリーンルーム | |
| JPS62294831A (ja) | 空気清浄装置 | |
| JPH0544663Y2 (OSRAM) | ||
| JP2612198B2 (ja) | 空気調和装置 | |
| JP2543780Y2 (ja) | クリーンルームのファンフイルタユニット | |
| JPS62119336A (ja) | クリ−ンル−ムの空調コントロ−ルシステム | |
| JPS61168736A (ja) | クリ−ンル−ム | |
| JPH07318128A (ja) | クリーンルームで発生する汚染物質の除去方法 |